CN106648272A - Ultrathin flexible capacitive touch sensor based on graphene and preparation method thereof - Google Patents

Ultrathin flexible capacitive touch sensor based on graphene and preparation method thereof Download PDF

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Publication number
CN106648272A
CN106648272A CN201611232633.0A CN201611232633A CN106648272A CN 106648272 A CN106648272 A CN 106648272A CN 201611232633 A CN201611232633 A CN 201611232633A CN 106648272 A CN106648272 A CN 106648272A
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graphene
faces
conductive layer
patterning
film
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CN106648272B (en
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王炜
谭化兵
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Changzhou sixth element Semiconductor Co.,Ltd.
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WUXI GEFEI ELECTRONIC FILM TECHNOLOGY CO LTD
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/361Removing material for deburring or mechanical trimming
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04Coating on selected surface areas, e.g. using masks
    • C23C16/042Coating on selected surface areas, e.g. using masks using masks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26Deposition of carbon only
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04106Multi-sensing digitiser, i.e. digitiser using at least two different sensing technologies simultaneously or alternatively, e.g. for detecting pen and finger, for saving power or for improving position detection

Abstract

The invention discloses an ultrathin flexible capacitive touch sensor based on graphene. The sensor comprises an ultrathin flexible membrane, the ultrathin flexible membrane includes a surface a and a surface b; the surface a and the surface b are each provided with a channel electrode; a first conductive layer is arranged on the surface a, the first conductive layer is connected with a capacitive induction chip of a capacitive touch sensor through the channel electrode arranged on the surface a, the first conductive layer is formed by patterning one layer or multiple layers of graphene membranes; a first optical rubber layer is arranged on the surface of the first conductive layer; a second conductive layer is arranged on the surface b, the second conductive layer is connected with the capacitive induction chip of the capacitive touch sensor through the channel electrode arranged on the surface b, the second conductive layer is formed by patterning one layer or multiple layers of graphene membranes; and a second optical rubber layer is arranged on the surface of the second conductive layer.

Description

A kind of ultrathin flexible capacitance touching control sensor based on Graphene and preparation method thereof
Technical field
The present invention relates to a kind of ultrathin flexible capacitance touching control sensor, belongs to graphene electronic device manufacture field.
Background technology
Conventional condenser touch sensing is because use traditional material ITO, it is impossible to realize preferably flexibility, equally, Due to ito thin film it is frangible, when touch sensing is made, very easily because bending causes ITO properties to undergo mutation, such as Electric conductivity is deteriorated, and the thickness for increasing ITO thickness and substrate can only be passed through when this, reduces the bending in manufacturing process, but The increase of integral thickness can so be caused, it is impossible to realize the ultra-thin of device architecture.But with flexible electronic and wearable industry Flourish, the demand of ultra-thin super soft capacitance touching control sensor is increasing, and existing scheme is generally based on ITO, lead to Cross two-sided plating ito film and processing graphic pattern or using one side bridging structure, minimum 5mm of bending radius of curvature or so can have been prepared Integral thickness be not less than 125 microns of capacitance touching control sensor, but its complex process, cost intensive, yield is relatively low, The demand in market cannot be met.
The content of the invention
Present invention aims to the deficiencies in the prior art, there is provided a kind of ultrathin flexible electric capacity based on Graphene Formula touch sensing;
It is a further object of the present invention to provide the preparation of the above-mentioned ultrathin flexible capacitance touching control sensor based on Graphene Method.
The purpose of the present invention is by the following technical programs implementing:
A kind of ultrathin flexible capacitance touching control sensor based on Graphene, including:
Ultra-thin flexible membrane, including a faces and b faces;
A faces and b faces are equipped with channel electrode;
It is arranged at first conductive layer in a faces, first conductive layer is by being arranged at the channel electrode and capacitive touch in a faces The capacitive sensing chip connection of control sensor, first conductive layer is formed by one or more layers graphene film patterning;
It is arranged at the first optical cement layer of the first conductive layer surface;
It is arranged at second conductive layer in b faces, second conductive layer is by being arranged at the channel electrode and capacitive touch in b faces The capacitive sensing chip connection of control sensor, second conductive layer is formed by one or more layers graphene film patterning;
It is arranged at the second optical cement layer of the second conductive layer surface.
Preferably, the ultrathin flexible film is transparent high molecular polymer film.The thickness of the ultrathin flexible film is 1 μm -1000 μm, more preferably 25 μm -50 μm.
Preferably, the electrode is using metal paste or adopts metal forming.The metal paste or metal forming using silver, The alloy of one or more in copper, nickel, chromium or aluminium.
Preferably, first conductive layer and the second conductive layer are the graphene film of 1-5 layers, preferred single layer Graphene Film.
Preferably, the overlapping edges of one end of the channel electrode in a faces and the first conductive layer, the other end and capacitive sensing Chip connects;One end of the channel electrode in the b faces and the overlapping edges of the second conductive layer, the other end connects with capacitive sensing chip Connect.
Preferably, first optical cement layer, the second optical cement layer adopt water white double faced adhesive tape.
It is further preferred that the thickness of first optical cement layer and the second optical cement layer is 1-1000 μm, most preferably 10-150μm。
A kind of preparation method of the ultrathin flexible capacitance touching control sensor based on Graphene, comprises the steps:
1) formation of channel electrode
The two sides of ultra-thin flexible membrane is designated as into respectively a faces and b faces, and capacitance touching control biography is made respectively on two sides surface The channel electrode and positioning mark of sensor;
2) formation of a faces structure
On a faces of ultra-thin flexible membrane, graphene film is shifted, then patterned process is carried out to the graphene film in a faces, Ground floor transparent touch sensitive zones electrode pattern is formed it into, the first conductive layer makes and finishes;Afterwards again in the stone of patterning Black alkene film surface laminating optical cement layer;
3) formation of b faces structure
Using the metal substrate/graphene film obtained in vapour deposition process, in Graphene the b of ultra-thin flexible membrane is transferred to Patterned process is carried out to graphene film before face, the pattern and positioning for forming second layer transparent touch sensitive zones electrode is marked on a map Case, the second conductive layer makes and finishes;The b faces of ultra-thin flexible membrane are accurately transferred to by positioning mark again, afterwards again in b faces stone The surface laminating optical cement layer of black alkene film, you can.
The electrode of capacitance touching control sensor is generally disposed at the edge in a faces or b faces, by the way of metal routing, to the greatest extent Possible its area occupied of reduction, to increase the area of screen visible area.According to the demand of capacitance touching control sensor, can be with In a faces or b faces transfer multi-layer graphene film.If needing to arrange two-layer graphene film in a faces, then need two panels CVD growth The single-layer graphene for going out is transferred to successively a faces, forms the graphene film stacked by two single-layer graphenes.B faces are as the same.
Preferably, the step 2) in, the patterned process is using laser direct-writing or the method for plasma etching.
Above-mentioned steps 3) two kinds of different methods can be adopted, differ primarily in that the opportunity of patterned Graphene.It is a kind of It is that the direct Graphene to growing directly is patterned in the metal substrate of CVD growth.One kind is to utilize transfer membrane In transfer process, transfer membrane is fitted in after graphenic surface, is patterned through transfer membrane using laser direct writing method.It is a kind of It is in using transfer membrane transfer process, after Graphene is transferred to transfer membrane completely, to be carved using laser direct-writing or plasma Etching method is patterned to Graphene.The patterning method of laser direct-writing, you can to directly act on exposed Graphene table Face, it is also possible to patterning etching is carried out to Graphene through transparent transfer membrane.Plasma needs to directly act on Graphene Surface.Above-mentioned steps 3) specific method and step is as follows.
Method one, the step 3) concrete technology comprise the steps:
1. using the metal substrate/graphene film obtained in vapour deposition process, in the Graphene of metal substrate/graphene film Film surface laminating transfer membrane, forms the composite construction of metal substrate/graphene film/transfer membrane;
2. patterning etching is carried out in the face of graphenic surface with laser light transfer membrane;
3. metal substrate is etched away, the structure of the Graphene/transfer membrane of patterning is obtained;
The Graphene face of the Graphene/transfer membrane of the patterning for 4. again 3. obtaining step and the ultra-thin flexible membrane B faces carry out exactitude position according to registration pattern, remove transfer membrane, you can complete to shift Graphene;
5. b faces patterning graphene membrane surface laminating optical cement.
Method two, the step 3) concrete technology comprise the steps:
1. using the metal substrate/graphene film obtained in vapour deposition process, in the Graphene of metal substrate/graphene film Film surface laminating transfer membrane, etches away metal substrate, obtains the composite construction of Graphene/transfer membrane;
2. patterning etching is carried out in the face of graphenic surface with laser light transfer membrane, or it is straight with laser or plasma Connect carries out patterning etching to Graphene;
The Graphene face of the Graphene/transfer membrane of the patterning for 3. again 2. obtaining step and the ultra-thin flexible membrane B faces carry out exactitude position according to registration pattern, remove transfer membrane, you can complete to shift Graphene;
4. b faces patterning graphene membrane surface laminating optical cement
Method three, the step 3) concrete technology comprise the steps:
1. using the metal substrate/graphene film obtained in vapour deposition process, directly graphene film is carried out at patterning Reason, the patterned process is preferably using laser direct-writing or the method for plasma etching;
The graphene membrane surface laminating transfer membrane of the graphene film of the metal substrate/patterning for 2. 1. obtaining in step, Metal substrate is etched away, the composite construction of the graphene film/transfer membrane of patterning is obtained;
The Graphene face of the Graphene/transfer membrane of the patterning for 3. again 2. obtaining step and the ultra-thin flexible membrane B faces carry out exactitude position according to registration pattern, remove transfer membrane, you can complete to shift Graphene;
4. b faces patterning graphene membrane surface laminating optical cement.
The transfer membrane is using heat release glue, hot visbreaking glue, electrostatic film, silica gel electrostatic prevention film, PU electrostatic prevention films or sub- gram Power electrostatic prevention film etc., is a kind of transparent glued membrane with certain viscosity, is played in Graphene transfer process as Graphene The effect of film transfer medium.
CVD graphene growths substrate in the present invention is the metals and its alloy etc. such as Pt, Ni, Cu, Co, Ir, Ru, Au, Ag Conductor or Si, SiO2、Al2O3Deng semiconductor or both composites.
The etching metal substrate, using chemical method corrosion growth substrates, electrochemical process corrosion metal substrate, Bubbling method, Mechanical stripping method, or the compound use of above-mentioned four kinds of methods.
Beneficial effect of the present invention:
By the present invention in that being passed through as the transparency conductive electrode of touch sensing transparent touch sensitive zones with Graphene The design of special structure design and processing technology, on the one hand overcomes the shortcoming of traditional ITO materials, on the other hand also according to stone The ins and outs of black alkene, are innovated on the basis of common Graphene capacitance touching control sensor, are realized ultra-thin super soft Property and low cost, the transparent capacitance type touch sensor of process is simple.
The present invention is to make graphene layer respectively on thin film two sides, and graphene layer is patterned respectively, is made Capacitance touching control sensor integral thickness realizes ultra-thin, to be capable of achieving in 100 μm thickness.
Two sides Graphene adopts different processing technologys in the present invention, can mutually be concerned with when overcoming two-layer graphene pattern The difficult problem disturbed, double patterning is completed on different substrates.
Capacitance touching control sensor in the present invention is the capacitance plate of bilayer film substrate sensor structure, and sensitivity is high, Support that multi-point touch effect is good, and using Graphene as transparency conductive electrode, accomplish sensor very good Change without worrying transparency conductive electrode in flexibility, and process, the difficulty of technique can be substantially reduced, improve good Rate.
The production technology of the compatible existing ITO capacitance touching controls sensor of the present invention, it is easy to industrialization.But, in the present invention Do not use tin indium oxide, it is to avoid the pollution to environment, it is very friendly to environment.
Description of the drawings
Fig. 1 is ultrathin flexible capacitance touching control sensor construction schematic diagram of the present invention based on Graphene;
Wherein, 1- ultra-thin flexible membrane, a faces of a- ultra-thin flexible membrane, the b faces of b- ultra-thin flexible membrane, 2- electrodes, The graphene films of 31- first, the graphene films of 32- second, the optical cement layers of 41- first, the optical cement layers of 42- second.
Specific embodiment
The preferred embodiments of the present invention are illustrated below in conjunction with accompanying drawing, it will be appreciated that preferred reality described herein Apply example and be merely to illustrate and explain the present invention, be not intended to limit the present invention.
Embodiment 1:
A kind of ultrathin flexible capacitance touching control sensor based on Graphene, in the form of sheets, gross thickness is 100 μm.Including:
Ultra-thin flexible membrane 1, including a faces and b faces;
A faces and b faces are equipped with channel electrode 2;
It is arranged at first conductive layer 31 in a faces, channel electrode 2 and electric capacity that first conductive layer 31 passes through a faces The capacitive sensing chip connection of formula touch sensing, the one end of channel electrode 2 in a faces is overlapped on one with the first conductive layer 31 Rise, the other end extends to capacitive sensing chip;
It is arranged at first optical cement layer 41 on the surface of the first conductive layer 31;
It is arranged at second conductive layer 32 in b faces, channel electrode 2 and electric capacity that second conductive layer 32 passes through the b faces The capacitive sensing chip connection of formula touch sensing, the one end of channel electrode 2 in the b faces is overlapped on one with the first conductive layer 32 Rise, the other end extends to capacitive sensing chip;
It is arranged at second optical cement layer 42 on the surface of the second conductive layer 32.
The ultrathin flexible film is transparent high molecular polymer film.The thickness of the ultrathin flexible film is 25 μm.Institute State electrode and adopt metallic copper.The conductive layer 32 of first conductive layer 31 and second is single-layer graphene film.First light Learn glue-line, the second optical cement layer and adopt water white double faced adhesive tape.The first optical cement layer thickness is 50 μm, the second optics The thickness of glue-line is 25 μm.
Its preparation method is:
1) formation of electrode
It is 25 μm of optical grade water white transparency PET two sides in thickness, by magnetron sputtering technique, 100 μm of thickness is plated respectively Metallic copper, subsequent two sides carries out respectively gluing, exposure, development, wet-etching technology, prepares capacitance touching control sensor Electrode and positioning sign.
2) formation of a faces structure
Graphene film of the sheet resistance for 150 ± 20 Ω/sq is shifted to a faces, and uses laser etch process, in graphenic surface Touch-control layer pattern is prepared, the OCA glue-lines of 50 μ m-thicks of subsequently fitting in a faces.
3) formation of b faces structure
Graphene is grown in 50 μm of copper foil surfaces by CVD, subsequently by laser ablation, is entered in Copper Foil graphenic surface Row patterning etching, while the good positioning sign of etching.The face Graphene is posted into heat release adhesive tape.By heat release adhesive tape+stone Black alkene+Copper Foil is put into together iron chloride etching liquid, and Copper Foil is eroded completely, takes out and cleans and dries heat release adhesive tape+graphite Alkene.Heat release adhesive tape+Graphene is aligned according to positioning sign to PET film b face electrode position, and heat baking of fitting, make Already patterned Graphene is transferred to b faces electrode position, most the OCA glue-lines of 25 μ m-thicks of backward b faces laminating.
4) cut into slices
Subsequently PET is cut into into single capacitance type sensor figure according to positioning sign, and carry out deaeration process.Now, Multi-disc thickness is about 100 μm of ultrathin flexible capacitance touching control sensor preparation to be completed.
Embodiment 2:
A kind of ultrathin flexible capacitance touching control sensor based on Graphene, in the form of sheets, gross thickness is 100 μm.Including:
Ultra-thin flexible membrane 1, including a faces and b faces;
A faces and b faces are equipped with channel electrode 2;
It is arranged at first conductive layer 31 in a faces, channel electrode 2 and electric capacity that first conductive layer 31 passes through a faces The capacitive sensing chip connection of formula touch sensing, the one end of channel electrode 2 in a faces is overlapped on one with the first conductive layer 31 Rise, the other end extends to capacitive sensing chip;
It is arranged at first optical cement layer 41 on the surface of the first conductive layer 31;
It is arranged at second conductive layer 32 in b faces, channel electrode 2 and electric capacity that second conductive layer 32 passes through the b faces The capacitive sensing chip connection of formula touch sensing, the one end of channel electrode 2 in the b faces is overlapped on one with the first conductive layer 32 Rise, the other end extends to capacitive sensing chip;
It is arranged at second optical cement layer 42 on the surface of the second conductive layer 32.
The ultrathin flexible film is transparent high molecular polymer film.The thickness of the ultrathin flexible film is 25 μm.Institute State electrode and adopt copper.First graphene film and the second graphene film are single-layer graphene film.First optical cement Layer, the second optical cement layer adopt water white double faced adhesive tape.The thickness of first optical cement layer is 50 μm, the second optical cement The thickness of layer is 25 μm.
Its preparation method is:
1) formation of electrode
On the optical grade water white transparency PET two sides that thickness is 25 μm, by magnetron sputtering technique, the μ of thickness 100 is plated respectively The metallic copper of m, subsequent two sides carries out respectively gluing, exposure, development, wet-etching technology, prepares capacitance touching control sensor Electrode and positioning sign;
2) formation of a faces structure
Graphene film of the sheet resistance for 150 ± 20 Ω/sq is shifted to a faces, and uses laser etch process, in graphenic surface Prepare touch-control layer pattern;Subsequently in the OCA glue-lines of 50 μ m-thicks of a faces laminating;
3) formation of b faces structure
Graphene is grown in 20 μm of copper foil surfaces by CVD, the face Graphene is posted into heat release adhesive tape, it is subsequently logical Laser ablation is crossed, patterning etching is carried out to the Graphene of copper foil surface through heat release adhesive tape, while the good positioning sign of etching. The heat release adhesive tape+Graphene+Copper Foil of etching good pattern is put into into together ferric nitrate etching liquid, Copper Foil is eroded completely, taken Go out and clean to dry heat release adhesive tape+Graphene.By heat release adhesive tape+Graphene according to positioning sign to PET film b face electrode Position aligns, and heat baking of fitting, and makes already patterned Graphene be transferred to b faces electrode position, most backward b faces laminating 25 The OCA glue-lines of μ m-thick.
4) cut into slices
Subsequently PET is cut into into single capacitance type sensor figure according to positioning sign, and carry out deaeration process.Now, Multi-disc thickness is about 100 μm of ultrathin flexible capacitance touching control sensor preparation to be completed.
Embodiment 3:
A kind of ultrathin flexible capacitance touching control sensor based on Graphene, in the form of sheets, gross thickness is 70 μm.Including:
Ultra-thin flexible membrane 1, including a faces and b faces;
A faces and b faces are equipped with channel electrode 2;
It is arranged at first conductive layer 31 in a faces, channel electrode 2 and electric capacity that first conductive layer 31 passes through a faces The capacitive sensing chip connection of formula touch sensing, the one end of channel electrode 2 in a faces is overlapped on one with the first conductive layer 31 Rise, the other end extends to capacitive sensing chip;
It is arranged at first optical cement layer 41 on the surface of the first conductive layer 31;
It is arranged at second conductive layer 32 in b faces, channel electrode 2 and electric capacity that second conductive layer 32 passes through the b faces The capacitive sensing chip connection of formula touch sensing, the one end of channel electrode 2 in the b faces is overlapped on one with the first conductive layer 32 Rise, the other end extends to capacitive sensing chip;
It is arranged at second optical cement layer 42 on the surface of the second conductive layer 32.
The ultrathin flexible film is transparent high molecular polymer film.The thickness of the ultrathin flexible film is 50 μm.Institute State electrode and adopt ag paste electrode.First graphene film be 2 layer graphene films, the graphite of 3 layers of second graphene film Alkene film.First optical cement layer, the second optical cement layer adopt water white double faced adhesive tape.First optical cement layer Thickness is 10 μm, and the thickness of the second optical cement layer is 10 μm.
Its preparation method is:
1) formation of electrode
On the optical grade water white transparency PET two sides that thickness is 50 μm, the conductive silver paste of 10 μm of print thickness respectively, subsequent two Face carries out respectively gluing, exposure, development, wet-etching technology, prepares the electrode and positioning mark of capacitance touching control sensor Show.
2) formation of a faces structure
Graphene film of the sheet resistance for 150 ± 20 Ω/sq is shifted to a faces, two panels graphene film is shifted, and is lost with laser Carving technology, on the two panels graphene film surface of superposition touch-control layer pattern is prepared, the OCA glue of 10 μ m-thicks of subsequently fitting in a faces Layer.
3) formation of b faces structure
Graphene is grown in 20 μm of copper foil surfaces by CVD, the face Graphene is posted into heat release adhesive tape, heat release Adhesive tape+Graphene+Copper Foil is put into together ferric nitrate etching liquid, and Copper Foil is eroded completely, takes out and cleans and dries, and obtains heat and releases Put the composite construction of adhesive tape+Graphene;The method of using plasma etching carries out pattern to the Graphene on heat release adhesive tape Change etching, while the good positioning sign of etching.By heat release adhesive tape+Graphene according to positioning sign to PET film b face electrode position Align, and heat baking of fitting, make already patterned Graphene be transferred to b faces electrode position.The above-mentioned behaviour for repeating this step Make 3 times, totally 3 layers of graphene film being transferred on b faces.The most OCA glue-lines of 10 μ m-thicks of backward b faces laminating.
4) cut into slices
Subsequently PET is cut into into single capacitance type sensor figure according to positioning sign, and carry out deaeration process.It is now total Thickness is about 70 μm of multi-disc ultrathin flexible capacitance touching control sensor preparation to be completed.
Embodiment 4:
A kind of ultrathin flexible capacitance touching control sensor based on Graphene, in the form of sheets, gross thickness is 52 μm.Including:
Ultra-thin flexible membrane 1, including a faces and b faces;
A faces and b faces are equipped with channel electrode 2;
It is arranged at first conductive layer 31 in a faces, channel electrode 2 and electric capacity that first conductive layer 31 passes through a faces The capacitive sensing chip connection of formula touch sensing, the one end of channel electrode 2 in a faces is overlapped on one with the first conductive layer 31 Rise, the other end extends to capacitive sensing chip;
It is arranged at first optical cement layer 41 on the surface of the first conductive layer 31;
It is arranged at second conductive layer 32 in b faces, channel electrode 2 and electric capacity that second conductive layer 32 passes through the b faces The capacitive sensing chip connection of formula touch sensing, the one end of channel electrode 2 in the b faces is overlapped on one with the first conductive layer 32 Rise, the other end extends to capacitive sensing chip;
It is arranged at second optical cement layer 42 on the surface of the second conductive layer 32.
The ultrathin flexible film is transparent high molecular polymer film.The thickness of the ultrathin flexible film is 1 μm.It is described Electrode adopts metallic nickel.First graphene film be 5 layer graphene films, the graphene film of the second graphene film individual layer. First optical cement layer, the second optical cement layer adopt water white double faced adhesive tape.The thickness of first optical cement layer is 50 μm, the thickness of the second optical cement layer is 1 μm.
Its preparation method is:
1) formation of electrode
On the optical grade water white transparency PET two sides that thickness is 1 μm, by magnetron sputtering technique, 20 μm of thickness is plated respectively Metallic copper, subsequent two sides carries out respectively gluing, exposure, development, wet-etching technology, prepares capacitance touching control sensor Electrode and positioning sign.
2) formation of a faces structure
Graphene film of the sheet resistance for 150 ± 20 Ω/sq is shifted to a faces, to a faces transferase 45 layer graphene, and is lost with laser Carving technology, in the graphene membrane surface being made up of 5 layer graphenes touch-control layer pattern is prepared, subsequently in 50 μ m-thicks of a faces laminating OCA glue-lines.
3) formation of b faces structural membrane
Graphene is grown in 20 μm of copper foil surfaces by CVD, the face Graphene is posted into heat release adhesive tape, it is subsequently logical Laser ablation is crossed, patterning etching is carried out to the Graphene of copper foil surface through heat release adhesive tape, while the good positioning sign of etching. The heat release adhesive tape+Graphene+Copper Foil of etching good pattern is put into into together ferric nitrate etching liquid, Copper Foil is eroded completely, taken Go out and clean to dry heat release adhesive tape+Graphene.By heat release adhesive tape+Graphene according to positioning sign to PET film b face electrode Position aligns, and heat baking of fitting, and makes already patterned Graphene be transferred to b faces electrode position, and fit 1 μ in most backward b faces M thick OCA glue-lines.
4) cut into slices
Subsequently PET is cut into into single capacitance type sensor figure according to positioning sign, and carry out deaeration process.It is now total Thickness is about 52 μm of multi-disc ultrathin flexible capacitance touching control sensor preparation to be completed.
Embodiment 5:
A kind of ultrathin flexible capacitance touching control sensor based on Graphene, in the form of sheets, gross thickness is 3 μm.Including:
Ultra-thin flexible membrane 1, including a faces and b faces;
A faces and b faces are equipped with channel electrode 2;
It is arranged at first conductive layer 31 in a faces, channel electrode 2 and electric capacity that first conductive layer 31 passes through a faces The capacitive sensing chip connection of formula touch sensing, the one end of channel electrode 2 in a faces is overlapped on one with the first conductive layer 31 Rise, the other end extends to capacitive sensing chip;
It is arranged at first optical cement layer 41 on the surface of the first conductive layer 31;
It is arranged at second conductive layer 32 in b faces, channel electrode 2 and electric capacity that second conductive layer 32 passes through the b faces The capacitive sensing chip connection of formula touch sensing, the one end of channel electrode 2 in the b faces is overlapped on one with the first conductive layer 32 Rise, the other end extends to capacitive sensing chip;
It is arranged at second optical cement layer 42 on the surface of the second conductive layer 32.
The ultrathin flexible film is transparent high molecular polymer film.The thickness of the ultrathin flexible film is 1 μm.It is described Electrode adopts metallic copper.First graphene film and the second graphene film are single-layer graphene film.First optics Glue-line, the second optical cement layer adopt water white double faced adhesive tape.The first optical cement layer thickness is 1 μm, the second optical cement The thickness of layer is 1 μm.
Its preparation method is:
1) formation of electrode
It is 1 μm of optical grade water white transparency PET two sides in thickness, by magnetron sputtering technique, 100 μm of thickness is plated respectively Metallic copper, subsequent two sides carries out respectively gluing, exposure, development, wet-etching technology, prepares the electricity of capacitance touching control sensor Pole and positioning sign.
2) formation of a faces graphene film
Graphene film of the sheet resistance for 150 ± 20 Ω/sq is shifted to a faces, and uses laser etch process, in graphenic surface Touch-control layer pattern is prepared, the OCA glue-lines of 1 μ m-thick of subsequently fitting in a faces.
3) formation of b faces graphene film
Graphene is grown in 1 μm of copper foil surface by CVD, subsequently by laser ablation, is entered in Copper Foil graphenic surface Row patterning etching, while the good positioning sign of etching.The face Graphene is posted into heat release adhesive tape.By heat release adhesive tape+stone Black alkene+Copper Foil is put into together iron chloride etching liquid, and Copper Foil is eroded completely, takes out and cleans and dries heat release adhesive tape+graphite Alkene.Heat release adhesive tape+Graphene is aligned according to positioning sign to PET film b face electrode position, and heat baking of fitting, make Already patterned Graphene is transferred to b faces electrode position, most the OCA glue-lines of 1 μ m-thick of backward b faces laminating.
4) cut into slices
Subsequently PET is cut into into single capacitance type sensor figure according to positioning sign, and carry out deaeration process.Now, Multi-disc thickness is about 3 μm of ultrathin flexible capacitance touching control sensor preparation to be completed.
The preferred embodiments of the present invention are the foregoing is only, the present invention is not limited to, although with reference to aforementioned reality Apply example to be described in detail the present invention, for a person skilled in the art, it still can be to aforementioned each enforcement Technical scheme described in example is modified, or carries out equivalent to which part technical characteristic.All essences in the present invention Within god and principle, any modification, equivalent substitution and improvements made etc. should be included within the scope of the present invention.

Claims (10)

1. a kind of ultrathin flexible capacitance touching control sensor based on Graphene, it is characterised in that:Including:
Ultra-thin flexible membrane, including a faces and b faces;
A faces and b faces are respectively equipped with channel electrode;
First conductive layer in a faces is arranged at, first conductive layer is passed by being arranged at the channel electrode in a faces with capacitance touching control The capacitive sensing chip connection of sensor, first conductive layer is formed by one or more layers graphene film patterning;
It is arranged at the first optical cement layer of the first conductive layer surface;
Second conductive layer in b faces is arranged at, second conductive layer is passed by being arranged at the channel electrode in b faces with capacitance touching control The capacitive sensing chip connection of sensor, second conductive layer is formed by one or more layers graphene film patterning;
It is arranged at the second optical cement layer of the second conductive layer surface.
2. the ultrathin flexible capacitance touching control sensor based on Graphene according to claim 1, it is characterised in that:It is described Ultrathin flexible film is transparent high molecular polymer film, it is preferable that its thickness is 1 μm -1000 μm, more preferably 25 μ m-50μm。
3. the ultrathin flexible capacitance touching control sensor based on Graphene according to claim 1, it is characterised in that:It is described Channel electrode is using metal paste or adopts metal forming, it is preferred that the metal paste or metal forming are using silver, copper, nickel, chromium Or the alloy of one or more in aluminium.
4. the ultrathin flexible capacitance touching control sensor based on Graphene according to claim 1, it is characterised in that:It is described First conductive layer and the second conductive layer are the graphene film of 1-5 layers, preferred single layer graphene film;
Preferably, the overlapping edges of one end of the channel electrode in a faces and the first conductive layer, the other end and capacitive sensing chip Connection;One end of the channel electrode in the b faces and the overlapping edges of the second conductive layer, the other end is connected with capacitive sensing chip.
5. the ultrathin flexible capacitance touching control sensor based on Graphene according to claim 1, it is characterised in that:It is described First optical cement layer, the second optical cement layer adopt water white double faced adhesive tape,
Preferably, 1-1000 μm, preferred 10-150 μm of the first optical cement layer thickness;
Preferably, the thickness of second optical cement layer is 1-1000 μm, preferred 10-150 μm.
6. a kind of preparation method of the ultrathin flexible capacitance touching control sensor based on Graphene, it is characterised in that:Including as follows Step:
1) formation of channel electrode
The two sides of ultra-thin flexible membrane is designated as into respectively a faces and b faces, and capacitance touching control sensor is made respectively on two sides surface Channel electrode and positioning mark;
2) formation of a faces structure
On a faces of ultra-thin flexible membrane, graphene film is shifted, then patterned process is carried out to the graphene film in a faces so as to The pattern of ground floor transparent touch sensitive zones electrode is formed, the first conductive layer makes and finishes;Afterwards again in the graphite of patterning Alkene film surface laminating optical cement layer;
3) formation of b faces structure
Using the metal substrate/graphene film obtained in vapour deposition process, Graphene be transferred to ultra-thin flexible membrane b faces it It is front that patterned process is carried out to graphene film, form the pattern of second layer transparent touch sensitive zones electrode and position case of marking on a map, Second conductive layer makes and finishes;The b faces of ultra-thin flexible membrane are accurately transferred to by positioning mark again, afterwards again in b faces graphite The surface laminating optical cement layer of alkene film, you can.
7. the preparation method of the ultrathin flexible capacitance touching control sensor based on Graphene according to claim 6, it is special Levy and be:The step 2) in, the patterned process is using laser direct-writing or the method for plasma etching.
8. the preparation method of the ultrathin flexible capacitance touching control sensor based on Graphene according to claim 6, it is special Levy and be:The step 3) concrete technology comprise the steps:
1. using metal substrate/graphene film for obtaining in vapour deposition process, in the graphene film of metal substrate/graphene film Surface laminating transfer membrane, forms the composite construction of metal substrate/graphene film/transfer membrane;
2. patterning etching is carried out to graphenic surface with laser light transfer membrane;
3. metal substrate is etched away, the structure of the Graphene/transfer membrane of patterning is obtained;
The b faces of the Graphene face of the Graphene/transfer membrane of the patterning for 4. again 3. obtaining step and the ultra-thin flexible membrane Exactitude position is carried out according to registration pattern, transfer membrane is removed, you can complete to shift Graphene;
5. b faces patterning graphene membrane surface laminating optical cement.
9. the preparation method of the ultrathin flexible capacitance touching control sensor based on Graphene according to claim 6, it is special Levy and be:The step 3) concrete technology comprise the steps:
1. using the metal substrate/graphene film obtained in vapour deposition process, in the graphene film table of metal substrate/graphene film Face laminating transfer membrane, etches away metal substrate, obtains the composite construction of Graphene/transfer membrane;
2. patterning etching is carried out in the face of graphenic surface with laser light transfer membrane, or it is directly right with laser or plasma Graphene carries out patterning etching;
The b faces of the Graphene face of the Graphene/transfer membrane of the patterning for 3. again 2. obtaining step and the ultra-thin flexible membrane Exactitude position is carried out according to registration pattern, transfer membrane is removed, you can complete to shift Graphene;
4. b faces patterning graphene membrane surface laminating optical cement.
10. the preparation method of the ultrathin flexible capacitance touching control sensor based on Graphene according to claim 6, it is special Levy and be:The step 3) concrete technology comprise the steps:
1. using the metal substrate/graphene film obtained in vapour deposition process, patterned process, institute are directly carried out to graphene film Patterned process is stated preferably using laser direct-writing or the method for plasma etching;
The graphene membrane surface laminating transfer membrane of the graphene film of the metal substrate/patterning for 2. 1. obtaining in step, in etching Fall metal substrate, obtain the composite construction of the graphene film/transfer membrane of patterning;
The b faces of the Graphene face of the Graphene/transfer membrane of the patterning for 3. again 2. obtaining step and the ultra-thin flexible membrane Exactitude position is carried out according to registration pattern, transfer membrane is removed, you can complete to shift Graphene;
4. b faces patterning graphene membrane surface laminating optical cement.
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CN115041836B (en) * 2022-06-30 2023-08-22 华南理工大学 Magnetic drive unit laser-induced transfer printing method of magnetic drive paper folding soft robot

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