CN206109599U - A source bottle for diffusion process - Google Patents
A source bottle for diffusion process Download PDFInfo
- Publication number
- CN206109599U CN206109599U CN201621006289.9U CN201621006289U CN206109599U CN 206109599 U CN206109599 U CN 206109599U CN 201621006289 U CN201621006289 U CN 201621006289U CN 206109599 U CN206109599 U CN 206109599U
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- CN
- China
- Prior art keywords
- cavity
- bottle
- air inlet
- inlet pipe
- source
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- Expired - Fee Related
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Abstract
The utility model provides a source bottle for diffusion process, it can the interior phosphorous oxychloride of make full use of source bottle, sparingly manufacturing cost. It includes the bottle, the bottle inner chamber passes through the riser and separates into the independent cavity of a plurality of, and the top of adjacent cavity is linked together, be provided with intercommunication outside first intake pipe in top on the outside cavity of one side of bottle, the inside second intake pipe, every of being provided with respectively of remaining cavity the top of the second intake pipe of cavity communicates the top of the cavity of one side respectively, the lower extreme of first intake pipe, second intake pipe is located the bottom position of corresponding cavity respectively, the upper portion of the outside cavity of the opposite side of bottle is provided with the outlet duct.
Description
Technical field
This utility model is related to the technical field of crystal silicon solar energy battery, particularly for the source bottle of diffusing procedure.
Background technology
At present, in the diffusing procedure of P-type crystal silicon solaode manufacture, need with phosphorus oxychloride as diffusion source.Three
Chlorethoxyfos are liquid at normal temperatures, need to be stored in the bottle of source.During diffusion, source bottle is placed in 20 degree of thermostatic water tank, by carrying
Gas brings the phosphorus oxychloride gas of volatilization in diffusion furnace into.The structure of source bottle as shown in figure 1, including glass body, air inlet pipe and
Escape pipe, air inlet pipe are connected with peripheral gas, and escape pipe is passed through in diffusion furnace.Due to the number of amount of liquid in the bottle of source, have influence on
The content of phosphorus oxychloride in the carrier gas of output, so as to have influence on diffusion.When in the bottle of source, liquid level is less than 1cm, the load of output
In gas, phosphorus oxychloride amount is rare, at this time, it may be necessary to source bottle is returned producer, buys one bottle of new phosphorus source.And it is remaining in the bottle of source
Equivalent to slatterning, this undoubtedly increased production cost to 1cm high phosphorus oxychloride.
The content of the invention
For the problems referred to above, this utility model provides the source bottle for diffusing procedure, and which can be made full use of in the bottle of source
Phosphorus oxychloride, saves production cost.
For the source bottle of diffusing procedure, it is characterised in that：Which includes bottle, if the bottle intracavity is separated into by riser
Dry independent cavity, is connected at the top of adjacent cavity, is provided with top on the outermost cavity of the side of the bottle
The first air inlet pipe outside portion's connection, remaining inside cavity are respectively arranged with the second air inlet pipe, and the second of each cavity
The top of the cavity of side is respectively communicated with the top of air inlet pipe, first air inlet pipe, the lower end of the second air inlet pipe are located at respectively
The bottom position of respective chamber, the top of the outermost cavity of the opposite side of the bottle are provided with escape pipe.
Which is further characterized by：
First air inlet pipe, the second air inlet pipe, escape pipe are vertically arranged；
The top communicating position of the adjacent cavity is convex, forms ventilation cavity；
Preferably, bottle is divided into left side cavity, right side cavity, the left side cavity, right side cavity by one piece of riser
Adjacent tip position is connected, and the first air inlet pipe is provided with the left side cavity body, and the top of first air inlet pipe is convex
The second air inlet pipe is provided with the left side cavity, the right-side cavity body, the top connection of second air inlet pipe is described logical
Gas cavity, the top of the right side cavity are provided with escape pipe.
After using this utility model, as bottle intracavity is separated into several independent cavitys by riser, near air inlet
Phosphorus source in the cavity of pipe is gradually exhausted, and when the high phosphorus sources of last cavity residue 1cm in gas circuit, then changes source
Bottle, it is such that it is able to more fully utilize phosphorus source, cost-effective.
Description of the drawings
Fig. 1 is existing source bottle structure schematic diagram；
Fig. 2 is structural representation of the present utility model；
Reference name in figure corresponding to each sequence number is as follows：
Bottle 1, riser 2, the first air inlet pipe 3, the second air inlet pipe 4, escape pipe 5, ventilation cavity 6, left side cavity 7, right side
Cavity 8, phosphorus oxychloride solution 9.
Specific embodiment
For the source bottle of diffusing procedure, Fig. 2 is seen：Which includes bottle 1, and it is only that 1 inner chamber of bottle is separated into several by riser 2
Vertical cavity, is connected at the top of adjacent cavity, is provided with top connection outside on the outermost cavity of the side of bottle 2
The first air inlet pipe 3, remaining inside cavity is respectively arranged with the second air inlet pipe 4, the top of the second air inlet pipe 4 of each cavity
The top of the cavity of side is respectively communicated with, the first air inlet pipe 3, the lower end of the second air inlet pipe 4 are respectively positioned at the bottom of respective chamber
Position, the top of the outermost cavity of the opposite side of bottle are provided with escape pipe 5.
First air inlet pipe 3, the second air inlet pipe 4, escape pipe 5 are vertically arranged；
The top communicating position of adjacent cavity is convex, forms ventilation cavity 6；
Specific embodiment, see Fig. 2, bottle 1 is divided into left side cavity 7, right side cavity 8 by one piece of riser 2, left side cavity 7,
The adjacent tip position of right side cavity 8 is connected, forms ventilation cavity 6, is provided with the first air inlet pipe 3 in left side cavity 7, the
The top of one air inlet pipe 3 is convex to be provided with the second air inlet pipe 4, the top of the second air inlet pipe 4 in left side cavity 7, right side cavity 8
Connection ventilation cavity 6, the top of right side cavity 8 are provided with escape pipe 5, are phosphorus oxychloride solution 9 in figure in shadow surface domain.
Above specific embodiment of the utility model is described in detail, but content has been only what this utility model was created
Preferred embodiment, it is impossible to be considered as limiting the practical range that this utility model is created.All creation according to this utility model is applied
Impartial change that scope is made with improve etc., still all should belong within this patent covering scope.
Claims (4)
1. the source bottle of diffusing procedure is used for, it is characterised in that：Which includes bottle, and the bottle intracavity is separated into some by riser
Individual independent cavity, is connected at the top of adjacent cavity, and top is provided with the outermost cavity of the side of the bottle
The first air inlet pipe outside connection, remaining inside cavity are respectively arranged with the second air inlet pipe, and the second of each cavity enters
The top of the cavity of side is respectively communicated with the top of trachea, first air inlet pipe, the lower end of the second air inlet pipe are respectively positioned at right
The top of the bottom position of cavity, the outermost cavity of the opposite side of the bottle is answered to be provided with escape pipe.
2. the source bottle of diffusing procedure is used for as claimed in claim 1, it is characterised in that：First air inlet pipe, the second air inlet
Pipe, escape pipe are vertically arranged.
3. the source bottle of diffusing procedure is used for as claimed in claim 1, it is characterised in that：The top connection of the adjacent cavity
Position is convex, forms ventilation cavity.
4. the source bottle of diffusing procedure is used for as claimed in claim 3, it is characterised in that：Bottle is divided into left side by one piece of riser
Cavity, right side cavity, the left side cavity, the adjacent tip position of right side cavity are connected, and arrange in the left side cavity body
There is the first air inlet pipe, the top of first air inlet pipe is convex to be provided with second in the left side cavity, the right-side cavity body
Air inlet pipe, the top of second air inlet pipe connect the ventilation cavity, and the top of the right side cavity is provided with escape pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621006289.9U CN206109599U (en) | 2016-08-30 | 2016-08-30 | A source bottle for diffusion process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621006289.9U CN206109599U (en) | 2016-08-30 | 2016-08-30 | A source bottle for diffusion process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206109599U true CN206109599U (en) | 2017-04-19 |
Family
ID=58515188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621006289.9U Expired - Fee Related CN206109599U (en) | 2016-08-30 | 2016-08-30 | A source bottle for diffusion process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206109599U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109440082A (en) * | 2019-01-09 | 2019-03-08 | 合肥安德科铭半导体科技有限公司 | A kind of source bottle for preventing presoma drop from entering pipeline or cavity |
| CN109440082B (en) * | 2019-01-09 | 2024-05-28 | 合肥安德科铭半导体科技有限公司 | Source bottle capable of preventing precursor liquid from dripping into pipeline or cavity |
-
2016
- 2016-08-30 CN CN201621006289.9U patent/CN206109599U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109440082A (en) * | 2019-01-09 | 2019-03-08 | 合肥安德科铭半导体科技有限公司 | A kind of source bottle for preventing presoma drop from entering pipeline or cavity |
| CN109440082B (en) * | 2019-01-09 | 2024-05-28 | 合肥安德科铭半导体科技有限公司 | Source bottle capable of preventing precursor liquid from dripping into pipeline or cavity |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170419 Termination date: 20180830 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |