CN206083000U - Spin coating device - Google Patents
Spin coating device Download PDFInfo
- Publication number
- CN206083000U CN206083000U CN201621081195.8U CN201621081195U CN206083000U CN 206083000 U CN206083000 U CN 206083000U CN 201621081195 U CN201621081195 U CN 201621081195U CN 206083000 U CN206083000 U CN 206083000U
- Authority
- CN
- China
- Prior art keywords
- spin coating
- substrate
- coating device
- sparge pipe
- rotating disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Coating Apparatus (AREA)
Abstract
The utility model discloses a spin coating device. This spin coating device includes spin coating groove, rotary part and spray component. Rotary part establishes the spin coating inslot, rotary part is used for connecting in waiting to coat the base plate and can drive the base plate rotates. Spray component has liquid feeding device and sparge pipe, the one end of sparge pipe is located the spin coating inslot and should hold the mouth of pipe by rotary part center orientation rotary part's edge, liquid feeding device communicate in the sparge pipe with be used for through the sparge pipe hydrojet is clear away deposited film on the base plate. This spin coating device processing ease, it is efficient, difficult to film production secondary pollution.
Description
Technical field
The utility model is related to spin coating field, more particularly to a kind of spin coating device.
Background technology
The method of organic luminescent device (OLED) and quantum dot light emitting device (QLED) is currently to be made using solution processing
Make.Device light-emitting zone is typically designed to the square area of length of side 2-10mm, and matching used substrate is usually length of side 30-
The square substrate of 100mm, and the mode using spin coating (Spin coating) carries out solution coating film forming.And spin coating proceeding is only
Whole face coating can be carried out to substrate, patterned coated can not be carried out, this will result in device electrode pin and draws problem and envelope
Dress problem, finally affects experiment effect.The method for processing the problems referred to above at present is with cotton swab, nothing after spin coating is complete per layer film
Dirt cloth etc. dips suitable solvent and manually wipes out the film in the region to be packaged on substrate and electrode lead-out area, Ran Houjin
Row next step is operated.Above-mentioned processing method operating difficulties, uncontrollable, longevity of service, efficiency is low, and also is readily incorporated
Grain, solvent etc. carry out secondary pollution and destruction to film.
Utility model content
Based on this, it is necessary to provide a kind of processing ease, efficiency high is difficult the spin coating dress that secondary pollution is produced to film
Put.
A kind of spin coating device, including：
Spin coating groove；
Rotary part, the rotary part is located in the spin coating groove, and the rotary part is used to be connected to base to be coated
Plate and the substrate rotating can be driven；And
Sprinkler part, one end that the sprinkler part has fluid Supplying apparatus and sparge pipe, the sparge pipe is located at
In the spin coating groove and the end pipe mouth by the centrally directed rotary part of the rotary part edge, the liquid supply dress
Put and be communicated in the sparge pipe for removing the film having been coated with the substrate by the sparge pipe hydrojet.
Wherein in one embodiment, the sparge pipe is in 10-70 ° of angle with the surfaces of revolution of the rotary part.
Wherein in one embodiment, a diameter of 0.02-5mm of the sparge pipe.
Wherein in one embodiment, the rotary part includes rotating disk and rotary driving part, the rotation driving
Part is located in the spin coating groove, and the rotating disk is fixed in the rotating shaft of the rotary driving part, and the rotating disk is used to supply institute
State substrate and connection is installed.
Wherein in one embodiment, the rotary driving part is located at the bottom land of the spin coating groove, the rotating disk and institute
The groove bottom for stating spin coating groove is parallel, when the rotary driving part drives the rotating disk to rotate, the surfaces of revolution of the rotating disk with
The groove bottom of the spin coating groove is parallel.
Wherein in one embodiment, the rotary part also includes fixed mechanism, and the fixed mechanism is located at described turning
On disk, the fixed mechanism is used to fix the substrate.
Wherein in one embodiment, the fixed mechanism includes gripper shoe, connecting plate and limited post, the gripper shoe
It is connected on the rotating disk and parallel with the gripper shoe；
The quantity of the connecting plate is multiple, and one end of multiple connecting plates is connected to the gripper shoe, multiple described
The other end of connecting plate extends outwardly, and on each connecting plate one end outwardly two limited posts are respectively connected with, each
There is interval, the interval is used for the card of the corner for the substrate and sets between two limited posts on the connecting plate.
Wherein in one embodiment, the fixed mechanism also includes multiple support blocks, connects on each described connecting plate
It is connected to the support block；Relatively described connecting plate, the limited post support block is projected.
Wherein in one embodiment, the fixed mechanism also include multiple resilient sleeves, multiple resilient sleeves with it is multiple
The support block is corresponded, and the resilient sleeve is set in the support block；Relatively described connecting plate, the limited post is compared with institute
The farthest end face for stating resilient sleeve is projected.
Wherein in one embodiment, the fixed mechanism includes adsorption plate and air draught element, and the adsorption plate is located at
It is on the rotating disk and parallel with the gripper shoe；
On the adsorption plate have multiple suction holes, on the adsorption plate also have multiple air channels, the air channel with
The wind inlet connection, the air draught element is communicated in multiple suction holes；When the substrate is located on the airdraft plate,
The air draught element can be fixed on the substrate adsorption by the air draught of the wind inlet and the air channel described
On adsorption plate.
The above-mentioned spin coating device being related to, is provided with spin coating groove, and rotary part is provided with spin coating groove, and rotary part is used for
It is connected to substrate to be coated and substrate rotating can be driven, when rotary part drives substrate rotating, can be to the whole of substrate
Surface is coated；Sprinkler part is yet further provided with, sprinkler part has fluid Supplying apparatus and sparge pipe, hydrojet
One end of pipe be located in spin coating groove and the end pipe mouth by the centrally directed rotary part of rotary part edge, namely by substrate
Towards the edge of substrate, fluid Supplying apparatus are communicated in sparge pipe for by sparge pipe hydrojet in portion, the liquid that sparge pipe gushes out
Body can wipe out the film cleaning having been coated with substrate edges, coordinate the rotation of rotary part so that be formed on substrate
Circular coated film.The sprinkler part of the above-mentioned spin coating device being related to instead of the hand in prior art after spin-coating film
The dynamic operation for wiping film, solves the problems, such as to operate difficult, uncontrollable, longevity of service, efficiency low, and by sprinkler part to thin
The erasing of film is difficult to form secondary pollution to the film of a coating.
Description of the drawings
Fig. 1 is that an embodiment spin coating device coordinates substrate schematic diagram；
Fig. 2 is an embodiment spin coating device schematic top plan view；
Fig. 3 is another embodiment spin coating device schematic top plan view.
Description of reference numerals
10th, spin coating groove, 11, sparge pipe, 12, rotating shaft, 21, connecting plate, 22, gripper shoe, 23, support block, 24, limited post,
31st, 32, air channel, 33, adsorption plate, 30, substrate.
Specific embodiment
For the ease of understanding the utility model, the utility model is more fully retouched below with reference to relevant drawings
State.Preferred embodiment of the present utility model is given in accompanying drawing.But, the utility model can come in many different forms real
It is existing, however it is not limited to embodiment described herein.On the contrary, the purpose for providing these embodiments is made to public affairs of the present utility model
The understanding for opening content is more thorough comprehensive.
It should be noted that when element is referred to as " being fixed on " another element, it can directly on another element
Or can also there is element placed in the middle.When an element is considered as " connection " another element, it can be directly connected to
To another element or may be simultaneously present centering elements.
Unless otherwise defined, all of technology used herein and scientific terminology are led with technology of the present utility model is belonged to
The implication that the technical staff in domain is generally understood that is identical.It is simply in term used in the description of the present utility model herein
The purpose of description specific embodiment, it is not intended that in limiting the utility model.Term as used herein "and/or" includes
The arbitrary and all of combination of one or more related Listed Items.
Shown in Figure 1, the present embodiment relate to a kind of spin coating device.The spin coating device includes spin coating groove 10, rotation
Part and sprinkler part.
Shown in Figure 1, the radial section that spin coating groove 10 is is rounded, namely another end seal of the one end open of spin coating groove 10
Close, its side wall is in a ring.It can be appreciated that spin coating groove 10 can also be other shapes, the such as radial section of spin coating groove 10 is square
Shape, triangle, ellipse etc., as long as can realize accommodating the shower of rotary part and sprinkler part.
The rotary part is located in the spin coating groove 10, the rotary part be used for be connected to substrate to be coated 30 and
The substrate 30 can be driven to rotate.
Shown in Figure 1, in the present embodiment, the rotary part includes rotating disk, fixed mechanism and rotation driving
Part.The rotary driving part is located in the spin coating groove 10, and the rotary driving part is located at the spin coating groove 10
Bottom land.It can be appreciated that rotary driving part can also be arranged on the madial wall of spin coating groove 10, as long as can guarantee that rotary driving part
The surfaces of revolution of the driving rotating disk of part is parallel with the groove bottom of spin coating groove 10, arranges the surfaces of revolution of rotating disk and the groove of spin coating groove 10
The parallel facility for the ease of spin coating instrument in coating in bottom surface, has been also the hydrojet direction for coordinating sparge pipe 11.
The rotating disk is fixed in the rotating shaft 12 of the rotary driving part.The fixed mechanism is located on the rotating disk,
The fixed mechanism is used to fix substrate 30.Rotary driving part can be electric rotating machine.Rotate in the accompanying drawing of the present embodiment
Driver part is not shown.
The rotating disk is parallel with the groove bottom of the spin coating groove 10.When substrate 30 is connected on fixed mechanism, substrate 30
It is parallel with the groove bottom of rotating disk and the spin coating groove 10 when the rotary driving part drives the rotating disk to rotate, it is described
The surfaces of revolution of rotating disk is parallel with the groove bottom of the spin coating groove 10.
Shown in Figure 2, in the present embodiment, fixed mechanism can arrange as follows.
The fixed mechanism includes gripper shoe 22, connecting plate 21, limited post 24, support block 23 and resilient sleeve.Described
Fagging 22 is connected on the rotating disk and parallel with the gripper shoe 22.Gripper shoe 22 can be circular, square or triangle
Shape etc., in the present embodiment, gripper shoe 22 is circle.
Shown in Figure 2, the quantity of the connecting plate 21 is multiple.One end of multiple connecting plates 21 is connected to institute
Gripper shoe 22 is stated, the other end of multiple connecting plates 21 extends outwardly.The quantity of connecting plate 21 can have two, three, five
It is individual etc., can also be other quantity.The quantity of connecting plate 21 can be arranged according to the shape of concrete substrate 30, if substrate 30 is
Square, then can arrange four connecting plates 21, and three connecting plates 21 can be arranged if substrate 30 is triangle.In this reality
In applying example, the quantity of connecting plate 21 is four, and four connecting plates 21 are evenly distributed on the edge of gripper shoe 22.
Four connecting plates 21 are respectively connected with two limited posts 24 on one end outwardly.Four connecting plates 21
On two limited posts 24 between there is interval, the interval is used to be set for the card of corner of the substrate 30.
It is shown in Figure 2, it is respectively connected with the support block 23 on four connecting plates 21.Support block 23 close to
Fagging 22.Relatively described connecting plate 21, the support block 23 of the limited post 24 is projected.
Shown in Figure 2, four resilient sleeves are corresponded with four support blocks 23, and the resilient sleeve is arranged
In the support block 23.Relatively described connecting plate 21, the farthest end face of the resilient sleeve of the limited post 24 is projected.Bullet
Property set can be by the long-life and chemically stable plastic material is made, such as peek, PFA, PTFE etc..
In the present embodiment, the figure of four connecting plates, 21, four support blocks 23 and eight compositions of limited post 24 is in axle
It is symmetrical.
It is shown in Figure 3, or, the fixed mechanism can also arrange as follows.
Fixed mechanism includes adsorption plate 33 and air draught element.The adsorption plate 33 be located on the rotating disk and with described
Fagging 22 is parallel.Air draught element is not shown in the accompanying drawing of the present embodiment.
It is shown in Figure 3, there are multiple suction holes on the adsorption plate 33, also have on the adsorption plate 33 multiple logical
Air drain 31,32, the air channel 31,32 is connected with the wind inlet, and the air draught element is communicated in multiple suction holes；When
When the substrate 30 is located on the airdraft plate, the air draught element can by the wind inlet and the air channel 31,
32 air draught is absorbed and fixed at the substrate 30 on the adsorption plate 33.
In the present embodiment, air draught element can be negative pressure generating device.Air draught element can apply to air channel 31,32
A range of negative pressure, the substrate 30 being placed on adsorption plate 33 will be adsorbed fixing.Air draught element can be pulsating pump, inhale
Dirt device, negative pressure generator, vavuum pump, vacuum extractor or negative-pressure air fan etc., the negative pressure model that air draught element is produced by air draught
Enclose for：0.05kPa-50kPa.Negative pressure generating device is not shown in the accompanying drawing of the present embodiment.
The sprinkler part has fluid Supplying apparatus and sparge pipe 11.The fluid Supplying apparatus are communicated in the spray
Liquid pipe 11 is for by the hydrojet of the sparge pipe 11.A diameter of 0.02-5mm of the sparge pipe 11.The material of sparge pipe 11
Depending on the required liquid for using, it is necessary to assure it is anti-that sparge pipe 11 will not occur any physical chemistry with the liquid of circulation in pipe
Should.The fluid Supplying apparatus can be force (forcing) pump, suction pumps, quantitative replenishment pump, centrifugal pump, single-stage pump, multistage pump or its
It can be with the pump of trandfer fluid.Fluid Supplying apparatus are not shown in the accompanying drawing of the present embodiment.
One end of the sparge pipe 11 be located in the spin coating groove 10 and the sparge pipe 11 the end pipe mouth by the rotation
The edge of the centrally directed rotary part of rotation member.Along perpendicular to the groove bottom direction of spin coating groove 10, the pipe of sparge pipe 11
Mouth does not protrude from the edge of substrate 30, namely the mouth of pipe of sparge pipe 11 is in substrate 30, to ensure that fluid Supplying apparatus pass through institute
Stating the liquid of the ejection of sparge pipe 11 can remove the film having been coated with the edge of substrate 30.
The sparge pipe 11 is in 10-70 ° of angle with the surfaces of revolution of the rotary part.When substrate 30 is connected to fixed mechanism
When upper, the sparge pipe 11 is in 10-70 ° of angle with the plane of the substrate 30.
The above-mentioned spin coating device being related to, when in use, comprises the steps：
Rotary driving part driving rotating disk is rotated, and the rotation of rotating disk drives the base connected on fixed mechanism and fixed mechanism
The rotation of plate 30.
Film is carried out to the substrate 30 for rotating by spin coating instrument.
After spin coating instrument terminates to the film of substrate 30, rotary driving part is continued driving rotating disk and is rotated with a low velocity,
Such as rotating speed is 50-1000rpm.
By fluid Supplying apparatus and sparge pipe 11 with a fixed-direction and flow rate of liquid to the hydrojet of substrate 30, in this reality
In applying example, sparge pipe 11 is 10-70 ° with the angle of substrate 30 and points to the outside of substrate 30, and flow rate of liquid could be arranged to 10mL/
min-1000mL/min。
When the liquid for spraying touches the film having been coated with the edge of substrate 30, the liquid of ejection can be thin by what is had been coated with
Get rid of away in the presence of the centrifugal force that film dissolves and produces when substrate 30 is rotated, and can't affect what the middle part of substrate 30 had been coated with
Film.Film with circular pattern on substrate 30 just can semi-automatedly be obtained by said method, without film
With manual method carry out wiping film again afterwards.
The above-mentioned spin coating device being related to, is provided with spin coating groove 10, and in spin coating groove 10 rotary part, rotary part are provided with
For being connected to substrate to be coated 30 and substrate 30 can be driven to rotate, when rotary part drives substrate 30 to rotate, can be right
The whole surface of substrate 30 is coated；Yet further be provided with sprinkler part, sprinkler part there are fluid Supplying apparatus with
And sparge pipe 11, one end of sparge pipe 11 is located in spin coating groove 10 and the end pipe mouth is by the centrally directed rotary part of rotary part
Edge, namely by substrate 30 middle part towards substrate 30 edge, fluid Supplying apparatus be communicated in sparge pipe 11 for by spray
The hydrojet of liquid pipe 11, the liquid that sparge pipe 11 gushes out can wipe out the film cleaning having been coated with the edge of substrate 30, match somebody with somebody
Close the rotation of rotary part so that the conglobate coated film of shape on substrate 30.
The sprinkler part of the above-mentioned spin coating device being related to instead of the manual wiping film in prior art after spin-coating film
Operation, solve the problems, such as to operate difficult, uncontrollable, longevity of service, efficiency low, and the wiping by sprinkler part to film
Except the film formation secondary pollution for being difficult to be coated to.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
Apply all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, the scope of this specification record is all considered to be.
Embodiment described above only expresses several embodiments of the present utility model, and its description is more concrete and detailed,
But therefore can not be interpreted as the restriction to the utility model the scope of the claims.It should be pointed out that common for this area
For technical staff, without departing from the concept of the premise utility, some deformations and improvement can also be made, these all belong to
In protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be defined by claims.
Claims (10)
1. a kind of spin coating device, it is characterised in that include：
Spin coating groove；
Rotary part, the rotary part is located in the spin coating groove, and the rotary part is used to be connected to substrate to be coated
And the substrate rotating can be driven；And
Sprinkler part, the sprinkler part has fluid Supplying apparatus and sparge pipe, and one end of the sparge pipe is positioned at described
In spin coating groove and the end pipe mouth by the centrally directed rotary part of the rotary part edge, the fluid Supplying apparatus connect
The sparge pipe is passed through for removing the film having been coated with the substrate by the sparge pipe hydrojet.
2. spin coating device according to claim 1, it is characterised in that the surfaces of revolution of the sparge pipe and the rotary part
In 10-70 ° of angle.
3. spin coating device according to claim 1, it is characterised in that a diameter of 0.02-5mm of the sparge pipe.
4. the spin coating device according to claim 1-3 any one, it is characterised in that the rotary part include rotating disk with
And rotary driving part, the rotary driving part is located in the spin coating groove, and the rotating disk is fixed on the rotary driving part
In the rotating shaft of part, the rotating disk is used to install connection for the substrate.
5. spin coating device according to claim 4, it is characterised in that the rotary driving part is located at the spin coating groove
Bottom land, the rotating disk is parallel with the groove bottom of the spin coating groove, when the rotary driving part drives the rotating disk to rotate, institute
The surfaces of revolution for stating rotating disk is parallel with the groove bottom of the spin coating groove.
6. spin coating device according to claim 5, it is characterised in that the rotary part also includes fixed mechanism, described
Fixed mechanism is located on the rotating disk, and the fixed mechanism is used to fix the substrate.
7. spin coating device according to claim 6, it is characterised in that the fixed mechanism include gripper shoe, connecting plate with
And limited post, the gripper shoe is connected on the rotating disk and parallel with the gripper shoe；
The quantity of the connecting plate is multiple, and one end of multiple connecting plates is connected to the gripper shoe, multiple connections
The other end of plate extends outwardly, and on each connecting plate one end outwardly two limited posts are respectively connected with, described in each
There is interval, the interval is used for the card of the corner for the substrate and sets between two limited posts on connecting plate.
8. spin coating device according to claim 7, it is characterised in that the fixed mechanism also includes multiple support blocks, respectively
The support block is respectively connected with the individual connecting plate；Relatively described connecting plate, the limited post support block is projected.
9. spin coating device according to claim 8, it is characterised in that the fixed mechanism also includes multiple resilient sleeves, many
The individual resilient sleeve is corresponded with multiple support blocks, and the resilient sleeve is set in the support block；Relatively described company
Fishplate bar, the farthest end face of the limited post resilient sleeve is projected.
10. spin coating device according to claim 6, it is characterised in that the fixed mechanism includes adsorption plate and air draught
Element, the adsorption plate is located on the rotating disk and parallel with the gripper shoe；
On the adsorption plate have multiple suction holes, on the adsorption plate also have multiple air channels, the air channel with it is described
Wind inlet is connected, and the air draught element is communicated in multiple suction holes；It is described when the substrate is located on the airdraft plate
The substrate adsorption can be fixed on the absorption by air draught element by the air draught of the wind inlet and the air channel
On plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621081195.8U CN206083000U (en) | 2016-09-26 | 2016-09-26 | Spin coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621081195.8U CN206083000U (en) | 2016-09-26 | 2016-09-26 | Spin coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206083000U true CN206083000U (en) | 2017-04-12 |
Family
ID=58480700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621081195.8U Active CN206083000U (en) | 2016-09-26 | 2016-09-26 | Spin coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206083000U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110854356A (en) * | 2019-11-27 | 2020-02-28 | 安徽江淮汽车集团股份有限公司 | Method for coating conductive powder on metal foil |
-
2016
- 2016-09-26 CN CN201621081195.8U patent/CN206083000U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110854356A (en) * | 2019-11-27 | 2020-02-28 | 安徽江淮汽车集团股份有限公司 | Method for coating conductive powder on metal foil |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201896027U (en) | Vacuum sucking disc | |
| CN108767092B (en) | Method and device for transferring MicroLED chips in batches | |
| CN105529409B (en) | One kind printing AM-QDLED devices and preparation method thereof | |
| CN102646616A (en) | Substrate cleaning apparatus, substrate cleaning method, display manufacturing apparatus and display manufacturing method | |
| CN208400880U (en) | It is a kind of for shifting the device of MicroLED chip in batches | |
| CN206083000U (en) | Spin coating device | |
| JP5712955B2 (en) | Powder coating equipment | |
| CN209232754U (en) | The transfer device and equipment of micro- luminescent device | |
| CN103779186B (en) | Gas-liquid two-phase atomization flow controlled cleaning device and cleaning method | |
| CN209045505U (en) | Wet processing apparatus | |
| CN106179802A (en) | Centrifugal energy nozzle | |
| CN204583618U (en) | A kind of automatic pasting equipment | |
| CN107658238A (en) | Substrate board treatment | |
| CN207546811U (en) | A kind of high-pressure airless spraying device of machinery digital control processing | |
| CN106707690A (en) | Photoresist coating method and apparatus | |
| CN203426823U (en) | Plate grinding processing device | |
| CN100487855C (en) | Workpiece processing system | |
| CN219483095U (en) | Wafer protection glue coating mechanism and wafer processing device | |
| CN205887485U (en) | Glass substrate production is with uninstallation machine people sucking disc cleaning device | |
| CN205082677U (en) | Nebulizer and electronic cigarette with same | |
| CN101066543A (en) | Inline process type coating apparatus | |
| CN213612183U (en) | Laser radar outer surface hardening treatment device with top cover | |
| CN205701298U (en) | A kind of glue spreading apparatus | |
| CN206082904U (en) | Centrifuging spray head | |
| CN211359436U (en) | Novel spin coating equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |