CN206045793U - Piezoelectric film filter device - Google Patents
Piezoelectric film filter device Download PDFInfo
- Publication number
- CN206045793U CN206045793U CN201620988782.9U CN201620988782U CN206045793U CN 206045793 U CN206045793 U CN 206045793U CN 201620988782 U CN201620988782 U CN 201620988782U CN 206045793 U CN206045793 U CN 206045793U
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- Prior art keywords
- piezoelectric membrane
- piezoelectric
- power supply
- piezoelectric film
- voltage
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- 239000012530 fluid Substances 0.000 claims abstract description 29
- 239000002245 particle Substances 0.000 claims abstract description 27
- 239000012528 membrane Substances 0.000 claims description 125
- 239000010409 thin film Substances 0.000 claims description 30
- 239000010408 film Substances 0.000 claims description 9
- 239000004020 conductor Substances 0.000 claims description 7
- 230000005611 electricity Effects 0.000 claims description 5
- 125000006850 spacer group Chemical group 0.000 claims description 3
- WFLOTYSKFUPZQB-UHFFFAOYSA-N 1,2-difluoroethene Chemical group FC=CF WFLOTYSKFUPZQB-UHFFFAOYSA-N 0.000 claims description 2
- 238000001914 filtration Methods 0.000 abstract description 16
- 230000010287 polarization Effects 0.000 abstract description 10
- 238000012423 maintenance Methods 0.000 abstract description 4
- 230000005540 biological transmission Effects 0.000 abstract description 2
- 230000008859 change Effects 0.000 description 16
- 239000007788 liquid Substances 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 239000002351 wastewater Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 239000012535 impurity Substances 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000000108 ultra-filtration Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000706 filtrate Substances 0.000 description 3
- 239000004531 microgranule Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000002033 PVDF binder Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 235000011389 fruit/vegetable juice Nutrition 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 239000010842 industrial wastewater Substances 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 108010003272 Hyaluronate lyase Proteins 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000001112 coagulating effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008720 membrane thickening Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000001846 repelling effect Effects 0.000 description 1
- 239000013535 sea water Substances 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The utility model discloses a piezoelectric film filter equipment, contain a casing, an at least piezoelectric film is installed in the casing, piezoelectric film filters the fluid that circulates in the casing, and a power supply ware electric connection to piezoelectric film's biplanar, power supply ware supplies with voltage to piezoelectric film's biplanar respectively, so that piezoelectric film produces deformation, when power supply ware stops to supply with voltage, piezoelectric film then can the reconversion, power supply ware then can be because of the repeated opening and close with transmission voltage, and make piezoelectric film produce the vibration, and make piezoelectric film and the same particle in order to arrange the particle in the fluid of the electrical property of particle in the fluid. The utility model discloses can increase the roughness on piezoelectric film surface, make surperficial fluid turbulence degree strengthen to cause the shear force to make concentration polarization district thickness reduce, efficiency and the cost of reduction maintenance when increasing the filtration.
Description
Technical field
This utility model system is powered with regard to a kind of defecator, particularly a kind of utilization piezoelectric membrane with filtered fluid
The thin film piezoelectric filter device of impurity.
Background technology
Water, though the area of the earth 71 about percent is covered, wherein the sea water that directly cannot be used account for about hundred
/ nine ten seven, therefore, it is few that the water resource that people directly can use can be said, especially for many island-shaped states
Family, because geographical relationship is difficult to keep the water resource that can be used here, performs the management of water resource, how water-saving and to reuse quilt
It is considered as considerable problem.
In Taiwan, formation and the semiconductor industry of high-tech industry have sizable relatedness, in science park
With several semiconductor factories, for example, the waste water for expending needed for daily every quasiconductor more than 700 steres more than, especially
It is chemical machine grinding (Chemical-Mechanical Polish, CMP) used lapping liquid in manufacture of semiconductor, acid etching
(Etching) high-purity clean water (DIW) required for mixed liquor and maintenance board in after cleaning chemical liquids etc., causes industry
Substantial amounts of waste water can be produced.
Therefore, many technologies and equipment for filtering industrial wastewater produce, for example, many semiconductor manufacturers are returned at present
The mode of CMP wastewater is received, after coagulating sedimentation, it is useless to process CMP to recycle ultra-filtration (Ultra-Filtration, UF) film
Various microgranules in water, are reclaimed with reaching secondary with the standard of water.But, because the float of CMP wastewater is extremely tiny, super
On the filtering process of filter membrane, Chang Yinwei is blocked and is carried out on-line cleaning, backwash or need to shut down to carry out replacing membrane tube, and
Reduce the recovering effect of water, and then the cost that increase is processed.
Therefore, this utility model is in view of above-mentioned puzzlement, it is proposed that a kind of thin film piezoelectric filter device, effectively can change
Treatment effeciency that is kind and improving waste water filtering, and reduce processing the cost for reclaiming.
Utility model content
Main purpose of the present utility model ties up to a kind of thin film piezoelectric filter device of offer, is filtered in piezoelectric membrane
When, while bestowing voltage to piezoelectric membrane, because inverse piezoelectric effect produces deformation, during off voltage, thin film is restored to the original state again, mat
The carrying out of this repetitiousness is so that piezoelectric membrane produces vibration.When piezoelectric membrane vibrates, the concentration polarization that piezoelectric membrane surface is formed
Area because the surface roughness of piezoelectric membrane increases, and can change the condition in flow field, at piezoelectric membrane surface, produce
One flow velocity drastic change and produce a shearing face, and make the lower thickness in concentration polarization area, at the same by upper end flow velocity it is very fast where, will
Originally the microgranule for being attached to concentration polarization area is taken away, and when increased thin film piezoelectric filter liquid juice circulation.Therefore, when
When fluid stream enters thin film piezoelectric filter device, can through the impurity in the thin film piezoelectric filter fluid as ultrafiltration membrane or
Purer liquid is mainly filtered away by larger particle, by the fast vibration of piezoelectric membrane with by mistake on piezoelectric membrane
Impurity or particle on the hole of filtrate body is swept out, and to avoid, the flux that liquid is filtered diminishes and the rate of filtration is slack-off.
Another object of the present utility model ties up to a kind of thin film piezoelectric filter device of offer, when voltage is bestowed, Ke Yiyi
According to the charge characteristic for needing particle in filtered fluid, the electrode on piezoelectric membrane surface is adjusted, piezoelectric membrane surface is made with electric charge, and
Make piezoelectric membrane surface with fluid particle it is electrically identical, using the factor of Coulomb force by the particle repulsion with identical charges
Away from piezoelectric membrane surface, the situation repelled each other is formed, and the microgranule that script is attached to concentration polarization area is taken away using above-mentioned
While, will be taken away by the particle of repulsion in the lump, reduced because spreading factor is flowed in filtrate, to increase the dense of filtrate
Degree.Therefore, the suspended particles in fluid are then difficult the surface for being deposited on piezoelectric membrane, form blocking to reduce particle deposition
Situation, the flux for improving piezoelectric membrane, reduce piezoelectric membrane and carry out the number of times of on-line cleaning and backwash and because flux is improved
Reduce the cost that unit produces water.
To achieve the above object, this utility model provides a kind of thin film piezoelectric filter device, comprising：One housing；Extremely
A few piezoelectric membrane, an at least piezoelectric membrane are installed in the housing, and the piezoelectric membrane system filters and circulates in the housing
Fluid；And a power supply unit, the power supply unit is electrically connected with two faces of an at least piezoelectric membrane, the power supply unit point
Indescribably power supply is depressed into two face of an at least piezoelectric membrane, so that an at least piezoelectric membrane produces deformation, when the power supply is supplied
Answer device stop provide the voltage when, an at least piezoelectric membrane can then restore to the original state, the power supply unit can repetitiousness unlatching and
Close to transmit the voltage and make an at least piezoelectric membrane produce vibration, and in making an at least piezoelectric membrane and the fluid
Particle it is electrically identical, to arrange the particle in the fluid.
In this utility model, two faces of piezoelectric membrane are designed with an electric conductor, when piezoelectric membrane receiving voltage, then mat
Make piezoelectric membrane produce deformation by electric conductor, and then make piezoelectric membrane produce vibration.
In this utility model, piezoelectric membrane produces the mode of deformation, and the length of past piezoelectric membrane or the direction of width are prolonged
Stretch, and make piezoelectric membrane thinning；Shrink toward length or the direction of width, and make piezoelectric membrane thickening；Even it is to make piezoelectricity thin
Film produces bending.And power supply unit also can be through the polarity for changing voltage, so that piezoelectric membrane is extended or shunk.
Coordinate appended schema elaborate by specific embodiment below, when the mesh for being easier to understand this utility model
, technology contents, feature and its it is reached the effect of.
Description of the drawings
Structural decomposition diagrams of the Fig. 1 for this utility model first embodiment.
Fig. 2 is the side view of the piezoelectric membrane that this utility model is used.
Fig. 3 a are the positive schematic diagram of piezoelectric membrane that this utility model is used.
Fig. 3 b are the schematic diagram of the piezoelectric membrane reverse side that this utility model is used.
Schematic perspective views of the Fig. 4 for this utility model second embodiment.
In figure：
10 thin film piezoelectric filter devices
12 housings
14 piezoelectric membranes
142 electric conductors
144 power supply contacts
16 power supply units
18 spacer elements
20 thin film piezoelectric filter devices
22 housings
24 piezoelectric membranes
26 power supply units.
Specific embodiment
This utility model system is by the use of poly- difluoroethylene (PVDF) piezoelectric membrane as the ultrafiltration membrane for filtering, and utilizes pressure
Conductive film has the effect of inverse piezoelectricity, in the energization of piezoelectric membrane two sides to cause the deformation of film, and then makes its vibration increase sweep stream
Speed, and simultaneously as be powered produce electric field, with fluid in need the particle for filtering because electrically repelling each other to produce the effect of repulsion, and
Can be temporarily non-cohesive on the hole of thin film piezoelectric filter liquid by the particle that need to be filtered, so that hole blocking, purer liquid
Body then can be filtered in advance, improve the speed and flux for filtering.
First, please also refer to shown in this utility model Fig. 1, a kind of thin film piezoelectric filter device 10 includes a housing 12,
In the present embodiment, housing 12 is the housing for cylinder, but this utility model is not intended to limit the shape or pattern of housing 12；Housing
An at least piezoelectric membrane 14 is equiped with 12, its be for PVDF piezoelectric membranes, the present embodiment system by taking two panels piezoelectric membrane 14 as an example,
Piezoelectric membrane 14 is that rollable ring is located in housing 12, and can plug interval unit between the adjacent piezoelectric membrane 14 of two panels again
Part 18；One power supply unit 16 is two faces for being electrically connected with two panels piezoelectric membrane 14, thin to two panels piezoelectricity to provide voltage respectively
Two faces of film 14, in the present embodiment, voltage system is unidirectional current.
Accept epimere, this section will be described in further detail the structure of piezoelectric membrane 14, and referring to this utility model Fig. 2,
Shown in Fig. 3 a and Fig. 3 b, an electric conductor 142 and power supply contact 144 on two faces of piezoelectric membrane 14, are all further provided with.Please join again simultaneously
According to Fig. 1, the power supply contact 144 on two faces of piezoelectric membrane 14 can be electrically connected with the positive pole of power supply unit 16 and bear
Pole, so that piezoelectric membrane 14 receives the provided voltage of power supply unit 16.
After having illustrated structure of the present utility model, occupation mode of the present utility model is then described in detail, referring to
Shown in this utility model Fig. 1.Thin film piezoelectric filter device of the present utility model 10 can be with filtered fluid, such as commonly industrial wastewater
In the waste water containing microgranule, the waste water of thin-film bioreactor or chemical machine grinding (Chemical-Mechanical
Polishing, CMP) waste water etc., the direction that fluid can be as shown in arrow in Fig. 1 is circulated from housing 12, when stream enters housing 12
When, piezoelectric membrane 14 can be passed through again, now piezoelectric membrane 14 can be made more than pressure with impurity or suspended particles in filtered fluid etc.
The big impurity of hole is filtered in conductive film 14 or suspended particles are isolated, and filter out more pure liquid, in the present embodiment
The aperture of the filtration hole of piezoelectric membrane 14 is not limited, can be adjusted according to the demand of user.Now, power supply unit 16
Voltage is provided to piezoelectric membrane 14, as piezoelectric membrane 14 has the effect of inverse piezoelectricity, when the surface of piezoelectric membrane 14 is applied in
During voltage, can be elongated and produce change because of electric dipole moment during electric field action.Therefore, when piezoelectric membrane 14 is by power supply unit
During 16 applied voltage, piezoelectric membrane 14 can produce deformation because of the electric conductor 142 on surface, such as toward the length of piezoelectric membrane 14
Degree or the direction of width extend and it is thinning, shrink toward the direction of the length or width of piezoelectric membrane 14 and thickening or make piezoelectricity
Thin film 14 produces bending；When power supply unit 16 stops providing voltage, piezoelectric membrane 14 can then restore to the original state.Therefore, make
User by power supply unit 16 is with the unlatching of repetitiousness and closes to transmit voltage, and can make piezoelectric membrane 14 produce vibration,
The action of switching voltage is frequently quick, and the vibration velocity of piezoelectric membrane 14 also and then can be accelerated, and user can be via
Power supply unit 16 changes the polarity of voltage so that piezoelectric membrane 14 is extended or shunk, for example, when transmission positive electricity is to pressing
The deformation that can be extended during the specific one side of conductive film 14, the switching voltage of repetitiousness can cause piezoelectric membrane 14 rapidly to carry out
Extend and restorable vibration, when the voltage of the specific one side for being transferred to piezoelectric membrane 14 being changed to negative electricity now, then can change
Become the variation pattern of 14 deformation of piezoelectric membrane, and become the deformation shunk.User can by change voltage confession it is defeated and
The polarity of voltage, changes the vibration change of piezoelectric membrane 14, and makes originally smooth piezoelectric membrane by this vibration change
14 produce irregular surface, the meeting turbulization when fluid is through irregular surface, to slow down 14 surface of piezoelectric membrane
The formation of concentration polarization, the concentration polarization area that 14 surface of piezoelectric membrane is formed can be because the roughness on 14 surface of piezoelectric membrane increase
Plus, and change the condition in flow field, face is sheared at 14 surface of piezoelectric membrane, producing a flow velocity drastic change and then producing one,
And make the lower thickness in concentration polarization area, while by upper end flow velocity it is very fast where, script is attached to into the micro- of concentration polarization area
Grain is taken away, and increased the circulation of liquid juice when piezoelectric membrane 14 is filtered.
In addition, flow through the fluid in housing 12 to produce because of the particle for being included specifically electrically, for example, flow
The particle in fluid in Jing housings 12 carries positive electricity, and user can then control the electrical of 14 surface of piezoelectric membrane, impose
The voltage of positive electricity, so that piezoelectric membrane 14 is electrically identical with the particle in fluid, to arrange the charged particle in fluid.This one
The benefit of the practice is exactly will not to be blocked in piezoelectric membrane with the particle of filtration hole similar size in piezoelectric membrane 14 when filtering
14 surface, and filtrable liquid then can down be precipitated and filter out from the surface of piezoelectric membrane 14, and same polarity band electrochondria
While son is displaced upward, turbulent flow when can also be vibrated is taken away, and this utility model will not be all accumulated as traditional filtering
Film surface more avoids traditional filter type as nearby to cause concentration polarization, and the fluid that need to be filtered is directly down
Precipitation, is easily used in filtration membrane clogging quickly.This utility model can increase Fluid Volume when can filter and increase
The filtrable time, and on-line cleaning, backwash can be reduced or need to shut down to carry out changing the maintenance cost of membrane tube.
Then refer to shown in this utility model Fig. 3 a and Fig. 3 b, to illustrate that piezoelectric membrane 14 is the original that how to produce deformation
Reason.Piezoelectric membrane 14 can extend toward the direction of length or width or shrink and thickness generation change, can be by following public affairs
Formula is represented：
Δ l=ld31V/t (1)
Δ w=wd32V/t (2)
Δ t=td33V/t (3)
Formula when above-mentioned formula (1) system is length change, formula when formula (2) system is change width, formula (3)
Be for thickness change when formula.Parameter, Δ l therein represents the variable quantity of 14 length of piezoelectric membrane, and parameter, Δ w represents piezoelectricity
The variable quantity of 14 width of thin film, parameter, Δ t represent the change of 14 thickness of piezoelectric membrane, and parameter l represents the original of piezoelectric membrane 14
Length, parameter w represent the original width of piezoelectric membrane 14, and parameter t represents the original thickness of piezoelectric membrane 14, parameter d31、d32、
d33Piezoelectric strain constant is represented, parameter V represents the voltage for putting on piezoelectric membrane 14.
This utility model in addition to the tubular filter that can be used for cylindrical housings, except piezoelectric membrane crimped loops are located at
Outside housing, can also be applied in flat filtration in addition.Refer to shown in this utility model Fig. 4, a kind of thin film piezoelectric filter
Device 20 includes a tabular housing 22, at least a piezoelectric membrane 24 and a power supply unit 26, and this embodiment is also by piezoelectricity
Among thin film 24 is installed in housing 22, two faces of piezoelectric membrane 24 are electrically connected to power supply unit 26 again, to receive power supply confession
The voltage for answering device 26 transmitted.Except the difference in structure, this embodiment make flowing mode and principle all with upper one embodiment
It is identical, therefore repeat no more.
When this utility model mainly ties up to impurity and suspended particles in thin film piezoelectric filter fluid, at the same receiving voltage with
Inverse piezoelectric effect is produced, and causes piezoelectric membrane vibration to be produced because of deformation, in addition to accelerating to sweep flow velocity degree, and can be because of voltage
Cause piezoelectric membrane and charged particle electrical identical in fluid and produce repulsion, to avoid particle from being blocked in the table of piezoelectric membrane
On face, with the efficiency improved during filtration and the cost for lowering clean and maintenance, piezoelectric membrane is except in the housing, also installing
May be provided in filter membrane block, while power voltage supply can also be utilized, so that piezoelectric membrane vibration filtering.Furthermore, this practicality is new
Type is not intended to limit the power supply unit of offer voltage and should be unidirectional current or alternating current, can adjust according to the demand of user,
Piezoelectric membrane can be made using unidirectional current interleaved switching to produce vibration, or the alternating current of different frequency is provided and is changed voltage
Value and make piezoelectric membrane produce vibration.When using in tubular filter, the piezoelectric membrane more than a piece of is more often used more than in shell
In body, the electrical phase on piezoelectric membrane that a spacer element can be plugged to avoid two panels adjacent in two panels adj acent piezoelectric thin film
Mutually disturb, therefore when the quantity system of piezoelectric membrane is N number of, when N >=2 item can be thin positioned at N number of piezoelectricity comprising N-1 distance member
In film, this utility model does not limit required piezoelectric membrane quantity to be mounted yet, and the quantity of piezoelectric membrane can be according to actually used
Situation and select adjustment.
The embodiment of the above is only the technological thought and feature to illustrate this utility model, and its purpose makes to be familiar with this
The personage of skill will appreciate that the content of this utility model and implements according to this, when can not with restriction this utility model patent
Scope, i.e., should cover in this utility model according to the made impartial change of the spirit disclosed in this utility model or modification generally
The scope of the claims.
Claims (6)
1. thin film piezoelectric filter device, it is characterised in that：Comprising：One housing；An at least piezoelectric membrane, an at least piezoelectric membrane
It is installed in the housing, the fluid circulated in the housing filters in the piezoelectric membrane system；And a power supply unit, the power supply supplies
Device is electrically connected with two faces of an at least piezoelectric membrane, and the power supply unit provides voltage respectively to an at least piezoelectric membrane
Two face, so that an at least piezoelectric membrane produces deformation, when the power supply unit stops providing the voltage, at least one pressure
Conductive film can then restore to the original state, the power supply unit can repetitiousness unlatching and close transmitting the voltage and make an at least piezoelectricity
Thin film produces vibration, and makes an at least piezoelectric membrane electrically identical with the particle in the fluid, to arrange in the fluid
The particle.
2. thin film piezoelectric filter device according to claim 1, it is characterised in that：The piezoelectric membrane is poly- difluoroethylene
Piezoelectric membrane.
3. thin film piezoelectric filter device according to claim 1, it is characterised in that：Two faces of the piezoelectric membrane are all provided with one
Electric conductor, when the piezoelectric membrane receives the voltage of the power supply unit, producing the piezoelectric membrane by the electric conductor should
Deformation.
4. thin film piezoelectric filter device according to claim 1, it is characterised in that：Power supply unit provides unidirectional current or friendship
Stream electricity.
5. thin film piezoelectric filter device according to claim 1, it is characterised in that：Housing for cylinder or be flat board, and
An at least piezoelectric membrane crimped loops are in the housing.
6. thin film piezoelectric filter device according to claim 5, it is characterised in that：When the quantity of piezoelectric membrane is N number of, N
>=2, comprising N-1 spacer element being inserted between adjacent two piezoelectric membrane.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW105209682 | 2016-06-28 | ||
| TW105209682U TWM532902U (en) | 2016-06-28 | 2016-06-28 | Piezoelectric film filtration device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206045793U true CN206045793U (en) | 2017-03-29 |
Family
ID=58225580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620988782.9U Active CN206045793U (en) | 2016-06-28 | 2016-08-30 | Piezoelectric film filter device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN206045793U (en) |
| TW (1) | TWM532902U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106422778A (en) * | 2016-06-28 | 2017-02-22 | 川源(中国)机械有限公司 | Piezoelectric film filter device |
| CN113975907A (en) * | 2021-09-30 | 2022-01-28 | 国网江苏省电力有限公司电力科学研究院 | Filtering module, measuring method thereof and gas sensor |
-
2016
- 2016-06-28 TW TW105209682U patent/TWM532902U/en not_active IP Right Cessation
- 2016-08-30 CN CN201620988782.9U patent/CN206045793U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106422778A (en) * | 2016-06-28 | 2017-02-22 | 川源(中国)机械有限公司 | Piezoelectric film filter device |
| CN113975907A (en) * | 2021-09-30 | 2022-01-28 | 国网江苏省电力有限公司电力科学研究院 | Filtering module, measuring method thereof and gas sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| TWM532902U (en) | 2016-12-01 |
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