CN201324601Y - Thickness-reduction scribing wastewater purifying and recycling device - Google Patents
Thickness-reduction scribing wastewater purifying and recycling device Download PDFInfo
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- CN201324601Y CN201324601Y CNU2008203025848U CN200820302584U CN201324601Y CN 201324601 Y CN201324601 Y CN 201324601Y CN U2008203025848 U CNU2008203025848 U CN U2008203025848U CN 200820302584 U CN200820302584 U CN 200820302584U CN 201324601 Y CN201324601 Y CN 201324601Y
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A20/00—Water conservation; Efficient water supply; Efficient water use
- Y02A20/124—Water desalination
- Y02A20/131—Reverse-osmosis
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Abstract
The utility model relates to industrial wastewater recycling, in particular to a thickness-reduction scribing wastewater purifying and recycling device. The wastewater purifying and recycling device comprises a wastewater collecting pool, an ultra-filtration water tank and a pure water tank. A precision filter is connected behind the wastewater collecting pool, an ultra-filtration device is connected with the precision filer, a clean water opening of the ultra-filtration device is connected with an anti-penetration device, the anti-penetrate device is connected with a deep desalting device, the clean water opening of the deep desalting device is connected with the pure water tank, and a dense water opening of the deep desalting device is connected with a wastewater treating pool. The provided thickness-reduction scribing wastewater purifying and recycling device mainly has the characteristics that: the quality of water produced by the device is good, the recycled water can be directly used in a thickness-reduction scribing production system, the recycling rate of thickness-reduction scribing rinse water is high, coarse silicon particles can be conveniently recycled, investments in equipment are saved, and the running cost is reduced; the wastewater purifying and recycling device solves the technical problems in the prior art that the water quality cannot reach the industrial requirements, the recycling rate is low, and the comprehensive recycling cost is high.
Description
Technical field
The utility model relates to industrial wastewater and reclaims, and relates in particular to a kind of reduction scribing waste water and purifies and reclamation set.
Background technology
Need a large amount of high water quality pure water in the semi-conductor industry manufacture process, generally require the high purity water of resistivity more than 10M Ω cm, and produce a large amount of waste water, the waste water that is produced roughly can be divided into etching waste water, photoetching waste water, chimney filter cleaning waste water, counter-infiltration waste water, ion exchange resin waste water and cmp (CMP) waste water or the like.Electronic Packaging is an indispensable procedure after IC Chip Production is finished, and is the bridge of device to system.Wherein in the CMP process reduction scribing waste water because of containing a large amount of nano_scale particles, complicated on handling, be the difficult problem of normal experience of present semiconductor industry wastewater treatment.The approach that this type of waste water mainly produces; be the wafer reduction scribing stage in the Electronic Packaging technology; need to adopt a large amount of ultra-pure waters clean on the crystal column surface pollutants such as residual microactuator suspension particle or metal ion, its pure water consumption can reach about the 15-20% of total operation water consumption, water consumption is big.Except that the superfine micro/nano level monocrystalline silicon body colloid that contains a large amount of not free settlings and a small amount of thick silicon, there is not other impurity in the waste discharge of workshop, salt content is extremely low, electricity is led＜100 μ s/cm, about 250 μ s/cm are low than the electrical conductivity of underground water or running water, water quality is better, and major pollutants are solid suspension (SS).When current domestic enterprise generally was diluted in the waste great lot of water resources to reduction scribing waste water through a large amount of rinse water, the sila confrontation environment in the waste water also caused certain pollution.Introduced the method and the device of processing chemomechanical copper grinding (CMP) waste water as CN02132007.1, mixed with coagulant, flocculation aid, the aggegation sedimentation, produced mud, made the turbidity of treated water reach below the 10mg/L in addition reuse, the reuse degree is not high.Traditional waste water recycling design is generally:
Regulating reservoir → sedimentation basin → clear water reserviors → sand filter → reuse.
Because nano_scale particle often presents stable dispersity in waste water; must make it to take off steady by suitable coagulated agent; and in suitable pH value scope, use; just can reach the effect of expection coagulation; in operation and be not easy control, and expend medicament, the contaminated wastewater composition is increased; strengthen recovery difficult, therefore too high the and phenomenon that exceeds standard of suspended particulates in the discharge water or turbidity often takes place.In recent years with film separate relevant wastewater processing technology as: micro porous filtration, ultrafiltration, counter-infiltration, nanofiltration and ceramic membrane filter etc. significantly have been applied to industrial effluent reusing.CN200510041374.9 has also reported a kind of fiber pre-filtering and super-filtering method and equipment of handling cutting and grinding waste water, and the organic efficiency of water is up to more than 95%.But the water quality that this kind treatment process is reclaimed does not still reach the water quality requirement of semi-conductor industry water.
The utility model content
It is good that the utility model mainly provides a kind of product water water quality, water after the recovery can be directly used in the reduction scribing production system, the reuse ratio height of reduction scribing washings can conveniently reclaim thick silicon grain, and the reduction scribing waste water of saving equipment investment and operating cost purifies and reclamation set; Solved existing in prior technology and produced the water quality requirement that water water quality does not reach water for industrial use, and reclamation rate is low, the technical problem that the reuse integrated cost is high.
Above-mentioned technical problem of the present utility model is mainly solved by following technical proposals: a kind of reduction scribing waste water purifies and reclamation set, comprise wastewater collection pond, ultrafiltration water tank and pure water case, behind the wastewater collection pond, be connected with accurate filter, accurate filter is connected with ultrafiltration apparatus, the clean water outlet of ultrafiltration apparatus connects reverse osmosis unit, reverse osmosis unit is connected with the advanced desalination device, the clean water outlet of advanced desalination device is connecting the pure water case, and the concentrated water spout of advanced desalination device is connecting purification tank for liquid waste.By wastewater sample analysis and research are found, it is extremely low that reduction scribing cleans the waste water salt content, and major impurity is the thick silicon and the nanoscale monocrystalline silicon silica flour of free settling not in the water, is colloidal state.In order to reclaim thick silicon and to prevent that the dirt of Hollow Fiber Ultrafiltration assembly is stifled, between the Hollow Fiber Ultrafiltration assembly, accurate filter is set, thick silicon is concentrated on the back reuse of accurate filter bottom by pre-filtering.Waste water enters accurate filter and tentatively filters, and pumps into ultrafiltration module then, and with remaining monocrystalline silicon colloid in the concentrated waste water, and filtration obtains pure water.Repetition test proves that its assembly is withstand voltage, antipollution, long service life, and can guarantee to produce water water quality for a long time, and colloid, suspended nano grade particles are had the good separating power of holding back.And then enter the advanced desalination device, and improve the reclamation rate of water, make that producing water can directly use.
Juche idea of the present utility model is to make full use of the existing reverse osmosis water purifier of electronic chip encapsulation factory's Purified Water Station, ion-exchange advanced desalination system, adopt the Hollow Fiber Ultrafiltration technology that reduction scribing waste water is handled, by counter-infiltration with mix a bed deep desalting, to make high purity water, satisfy the requirement of electronics industry recycling industries and clean production, improve the reuse ratio of reduction scribing washings greatly, and reclaim thick silicon grain simultaneously, it is little to have floor space, save equipment investment and operating cost, the advantage that the reuse integrated cost is low.
As preferably, the concentrated water spout of described reverse osmosis unit is connecting described wastewater collection pond.Dense water repetitive cycling through reverse osmosis unit is reclaimed, improve the recovery of Waste Water rate.
As preferably, the concentrated water spout of described ultrafiltration apparatus is connected to second level ultrafiltration apparatus by pipeline, the clean water outlet of second level ultrafiltration apparatus is connected with the water inlet of described reverse osmosis unit by pipeline and high-pressure pump, and ultrafiltration concentrated water spout in the second level is connected with purification tank for liquid waste.Waste water makes that through the two-stage ultrafiltration apparatus water quality of producing water is better, meets the water quality requirement that electronics industry is produced required pure water.Reciprocal recovery to carrying out through the waste water after the one-level ultrafiltration has improved recovery utilization rate simultaneously.
The advanced desalination process can adopt the known apparatus and method of prior art, comprises electric demineralizer (EDI), electrodialysis plant (ED), and ion exchange bed (DI).As preferably, described advanced desalination device adopts two mixed beds of filling anion-cation exchange resins, and mixing a bed liner is rubber, and outer wall is a steel construction.As more preferably, the product water resistance rate of described mixed bed is 15M Ω cm.The advanced desalination that has passed through mixed has improved the water quality of producing water, makes that producing resistivity of water guarantees more than 10M Ω cm, thereby can directly be applied in the semi-conductor industry manufacturing so that produce water.
As preferably, described accurate filter aperture is 50 μ m-100 μ m.Can easily thick silicon be filtered, thick silicon be reclaimed, when having improved water quality, silicon can be reclaimed again again and utilize in the bottom of accurate filter.The effect that reach energy-conservation, reduce discharging, reduces production costs.
As preferably, the ultrafiltration apparatus and second ultrafiltration apparatus all adopt hollow fiber ultrafiltration membrane, it is 20000 ~ 100000 that described hollow fiber ultrafiltration membrane adopts the polysulfones of permanent hydrophilic or the molecular cut off of the described hollow fiber ultrafiltration membrane of polyether sulfone materials, and average pore size is 0.005 μ m～0.01 μ m.Hollow fiber ultrafiltration membrane adopts a kind of in hydrophilically modified polysulfones or the polyether sulfone materials, and its surface active layer densification is smooth; Supporting layer is spongy network structure, and withstand voltage, antipollution, long service life can guarantee to produce water water quality for a long time, and colloid, suspended particulate and polymer substance are had good separating power.
As preferably, hollow-fiber module in the described ultrafiltration apparatus adopts the full-automatic continuously-running duty of cross-flow filtration, frequent backwash, the method of operation that hollow-fiber module in the ultrafiltration apparatus of the second level adopts infinite reflux to filter, and reach discharging regularly behind certain cocnentration factor.
Therefore, a kind of reduction scribing waste water of the present utility model purifies and reclamation set has following advantage: 1. utilize accurate filter to filter out thick silicon and other useful components in the waste water, reached purpose energy-conservation, that reduce discharging and reduce production costs; 2. the waste water after the one-level ultrafiltration enters the recovery that circulates of two-stage ultrafiltering device, has improved the rate of recovery, makes the rate of recovery reach 99%; 3. adopt the deep desalting device to make high purity water, make that producing water can directly be applied in the semi-conductive production technology, has improved product water water quality; 4. the milipore filter of ultrafiltration apparatus adopts polysulfones or polyether sulfone materials, and withstand voltage, antipollution, long service life have good separating power to colloidal suspension particle and polymer substance.
Description of drawings:
Fig. 1 is that a kind of reduction scribing waste water of the present utility model purifies and the reclamation set structural representation;
Fig. 2 is that another kind of reduction scribing waste water of the present utility model purifies and the reclamation set structural representation.
The specific embodiment:
Below by embodiment, and in conjunction with the accompanying drawings, the technical solution of the utility model is described in further detail.
Embodiment 1:
As shown in Figure 1, a kind of reduction scribing waste water purifies and reclamation set, comprise wastewater collection pond 1, wastewater collection pond 1 is connected with booster pump 2 by pipeline 12, booster pump 2 is connecting accurate filter 3, the aperture of accurate filter 3 is 50 μ m, and accurate filter 3 is connected with ultrafiltration apparatus 4 by pipeline 14, and ultrafiltration apparatus 4 adopts hydrophilically modified polysulfone material to make
Hollow fiber film assembly, hollow-fiber module adopt the full-automatic continuously-running duty of cross-flow filtration, frequent backwash.The molecular cut off of hollow fiber ultrafiltration membrane is 50000, and average pore size is 0.01 μ m.The clear water of ultrafiltration apparatus 4 flows into reverse osmosis units 7 by pipeline 17 then by pipeline 16 inflow ultrafiltration water tanks 5 after high-pressure pump 6 pressurizations, reverse osmosis unit 7 adopts the coiled reverse osmosis membrane element of Dow Chemical's production and supporting putamina.The clean water outlet of reverse osmosis unit 7 is connected to pure water case 8 by pipeline 19, pure water case 8 is connected to through booster pump 9 and mixes bed deep desalting device 10, deep desalting device 10 adopts two mixed beds of filling anion-cation exchange resin, mixing the bed liner is rubber, outer wall is a steel construction, the resin of filling is the board resin that wins honour for, and model is 001x7MB (positive resin) and 201x7MB (negative resin).Clear water after deep desalting device 10 is handled through desalination is transported to high-purity water tank 11 by pipeline 20.
Above-mentioned reduction scribing waste water ultrafiltration purification and reclamation set reclaim thick silicon at accurate filter 3 by pipeline 13 bottoms; The concentrated water spout of ultrafiltration apparatus 4 is connected with waste water processing station by pipeline 15; The concentrated water spout of reverse osmosis unit 7 is back to wastewater collection pond 1 by pipeline 18 and recycles.High purity water is connected to the process water system by pipeline 21.Dense water through the deep desalting device is discharged in the purification tank for liquid waste by pipeline 22.Siliceous discharging of waste liquid amount is reduced to 20% of former waste liquid total amount, and promptly water utilization rate reaches more than 80%.And can reclaim thick silicon.Go out water conductivity less than 2 μ s/cm after the counter-infiltration, the counter-infiltration water outlet directly advances to mix a production resistivity greater than 15M Ω cm, is directly used in the production technology.
Embodiment 2:
As shown in Figure 2, a kind of reduction scribing waste water purifies and reclamation set, comprise wastewater collection pond 1, wastewater collection pond 1 is connected with booster pump 2 by pipeline 12, booster pump 2 is connecting accurate filter 3, and the aperture of accurate filter 3 is 50 Jing, and accurate filter 3 is connected with ultrafiltration apparatus 4 by pipeline 14, the hollow fiber film assembly that ultrafiltration apparatus 4 adopts the polyether sulfone materials of permanent hydrophilic to make, hollow-fiber module adopt the full-automatic continuously-running duty of cross-flow filtration, frequent backwash.The molecular cut off of hollow fiber ultrafiltration membrane is 20000, and average pore size is 0.01 μ m.The clear water of ultrafiltration apparatus 4 flows into ultrafiltration water tank 5 by pipeline, flows into reverse osmosis unit 7 by pipeline 17 then after high-pressure pump 6 pressurizations, coiled reverse osmosis membrane element that reverse osmosis unit 7 employing Dow Chemicals produce and supporting putamina.The clean water outlet of reverse osmosis unit 7 is connected to pure water case 8 by pipeline 19, and pure water case 8 is connected to through booster pump 9 and mixes bed deep desalting device 10, and the clear water after deep desalting device 10 is handled through desalination is transported to high-purity water tank 11 by pipeline 20.The concentrated water spout of ultrafiltration apparatus 4 connects concentrated water tank 24 by pipeline 23, be connected to second level ultrafiltration apparatus 26 through booster pump 25 again, second level ultrafiltration apparatus 26 adopts the Hollow Fiber Ultrafiltration assembly, hollow-fibre membrane adopts polysulfone material to make, the method of operation that adopts infinite reflux to filter, its molecular cut off is 20000, average pore size 0.01 μ m.The clean water outlet of second level ultrafiltration apparatus 26 is connected to ultrafiltration water tank 5 by pipeline 27, the concentrated water spout of second level ultrafiltration apparatus 26 is connected to by pipeline 28 and concentrates water tank 24, it is concentrated to circulate, and the concentrated water spout that concentrates water tank 24 is connecting purification tank for liquid waste by pipeline 29.Remainder is identical with embodiment 1.Therefore, adopt the utility model to carry out the technique waste water recycling, water utilization rate reaches more than 99%, to reach the purpose of energy-saving and emission-reduction, satisfy the requirement of electronics industry recycling industries and clean production, China's used in electronic industry high purity water manufacturing cost is significant for reducing, and is worthy to be popularized.
Claims (8)
1. a reduction scribing waste water purifies and reclamation set, comprise wastewater collection pond, ultrafiltration water tank and high-purity water tank, it is characterized in that: behind the wastewater collection pond, be connected with accurate filter, accurate filter is connected with ultrafiltration apparatus, the clean water outlet of ultrafiltration apparatus connects reverse osmosis unit, reverse osmosis unit is connected with the advanced desalination device, and the clean water outlet of advanced desalination device is connecting high-purity water tank, and the concentrated water spout of advanced desalination device is connecting purification tank for liquid waste.
2. a kind of reduction scribing waste water according to claim 1 purifies and reclamation set, and it is characterized in that: the concentrated water spout of described reverse osmosis unit is connecting described wastewater collection pond.
3. a kind of reduction scribing waste water according to claim 1 and 2 purifies and reclamation set, it is characterized in that: the concentrated water spout of described ultrafiltration apparatus is connected to second level ultrafiltration apparatus by pipeline, the clean water outlet of second level ultrafiltration apparatus is connected with the water inlet of described reverse osmosis unit by pipeline and high-pressure pump, and ultrafiltration concentrated water spout in the second level is connected with purification tank for liquid waste.
4. a kind of reduction scribing waste water according to claim 1 and 2 purifies and reclamation set, it is characterized in that: described advanced desalination device adopts two mixed beds of filling anion-cation exchange resin, and mixing the bed liner is rubber, and outer wall is a steel construction.
5. a kind of reduction scribing waste water according to claim 3 purifies and reclamation set, it is characterized in that: described advanced desalination device adopts two mixed beds of filling anion-cation exchange resin, and mixing the bed liner is rubber, and outer wall is a steel construction.
6. a kind of reduction scribing waste water according to claim 1 and 2 purifies and reclamation set, and it is characterized in that: described accurate filter aperture is 50 μ m-100 μ m.
7. a kind of reduction scribing waste water according to claim 1 and 2 purifies and reclamation set, it is characterized in that: the ultrafiltration apparatus and second ultrafiltration apparatus all adopt hollow fiber ultrafiltration membrane, the molecular cut off of described hollow fiber ultrafiltration membrane is 20000 ~ 100000, and average pore size is 0.005 μ m～0.01 μ m.
8. a kind of reduction scribing waste water according to claim 7 purifies and reclamation set, it is characterized in that: described hollow fiber ultrafiltration membrane adopts hydrophilically modified polysulfones or polyether sulfone materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008203025848U CN201324601Y (en) | 2008-10-30 | 2008-10-30 | Thickness-reduction scribing wastewater purifying and recycling device |
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| CNU2008203025848U CN201324601Y (en) | 2008-10-30 | 2008-10-30 | Thickness-reduction scribing wastewater purifying and recycling device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110002655A (en) * | 2019-05-13 | 2019-07-12 | 山东金汇膜科技股份有限公司 | A kind of silica gel Wastewater zero-discharge treatment system |
| CN110510767A (en) * | 2019-09-27 | 2019-11-29 | 华电水务工程有限公司 | A kind of multi-section circulation formula rolled film super-pressure counter-infiltration system and control method |
| CN112624428A (en) * | 2020-12-29 | 2021-04-09 | 上海丰信环保科技有限公司 | Three-stage filtration reuse water process for grinding wastewater in integrated circuit industry |
-
2008
- 2008-10-30 CN CNU2008203025848U patent/CN201324601Y/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110002655A (en) * | 2019-05-13 | 2019-07-12 | 山东金汇膜科技股份有限公司 | A kind of silica gel Wastewater zero-discharge treatment system |
| CN110002655B (en) * | 2019-05-13 | 2024-04-26 | 山东金汇膜科技股份有限公司 | Zero release processing system of silica gel waste water |
| CN110510767A (en) * | 2019-09-27 | 2019-11-29 | 华电水务工程有限公司 | A kind of multi-section circulation formula rolled film super-pressure counter-infiltration system and control method |
| CN112624428A (en) * | 2020-12-29 | 2021-04-09 | 上海丰信环保科技有限公司 | Three-stage filtration reuse water process for grinding wastewater in integrated circuit industry |
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