CN101549913B - Process and system for recovering reduction scribing waste water - Google Patents
Process and system for recovering reduction scribing waste water Download PDFInfo
- Publication number
- CN101549913B CN101549913B CN2008103053024A CN200810305302A CN101549913B CN 101549913 B CN101549913 B CN 101549913B CN 2008103053024 A CN2008103053024 A CN 2008103053024A CN 200810305302 A CN200810305302 A CN 200810305302A CN 101549913 B CN101549913 B CN 101549913B
- Authority
- CN
- China
- Prior art keywords
- water
- filtration equipment
- ultra
- waste water
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The invention utilizes membrane separation technique for processing silicon chip reduction scribing waste water and concentrating and recovering the single crystal silicon in the waste water, wherein the membrane permeating liquid is reused as mixed-bed inflow water to be reused in the production process. The silicon chip reduction scribing waste water processing method comprises the following steps of: adopting an ultrafilter for processing the silicon chip reduction scribing waste water at first, and then adopting a hollow fiber ultrafiltration device for processing, obtaining an ultrafiltration permeating liquid and a concentrated liquid, and finally conducting the advanced desalting on the ultrafiltration permeating liquid. By the invention, the reduction scribing waste water is reusedand processed, thus leading the water resource to be fully utilized and recovered and saving large amount of industrial water.
Description
Technical field
The present invention relates to a kind of treatment process and system of waste water, relate in particular to a kind of reuse technology and system of the reduction scribing waste water that in semi-conductor industry is made, produces.
Background technology
Need a large amount of high water quality pure water in the semi-conductor industry manufacturing processed, resistivity of water generally needs greater than 10M Ω cm, the waste water that is produced roughly can be divided into etching waste water, photoetching waste water, chimney filter Cleaning Wastewater, reverse osmosis waste water, ion exchange resin waste water and cmp (Chemical MechanicalPolishing, CMP) waste water or the like.Electronic Packaging is an indispensable procedure after IC Chip Production is finished, and is the bridge of device to system.Wherein in the CMP process reduction scribing waste water because of containing a large amount of nano_scale particles, complicated on handling, be the difficult problem of normal experience of present semiconductor industry wastewater treatment.The approach that this type of waste water mainly produces; be the wafer reduction scribing stage in the Electronic Packaging technology; need to adopt a large amount of ultrapure waters clean on the crystal column surface residual microactuator suspension particle or contaminant metal ions; the pure water consumption is as reaching about the 15-20% of total operation water consumption as rinse water, and water consumption is big.Contain a large amount of settled superfine micro/nano level monocrystalline silicon body colloids that is difficult in the waste discharge of workshop and do not have other impurity outward with a small amount of thick silicon, COD＜5mg/L, saltiness are extremely low, electricity is led＜100 μ s/cm, about 250 μ s/cm are low than the conductance of underground water or tap water, water quality is better, and principal pollutant are suspended solids (SS).Existing domestic enterprise directly enters city planting ductwork after generally reduction scribing waste water being diluted through a large amount of rinse water, and in the waste great lot of water resources, the sila confrontation environment in the waste water also causes certain pollution.
Chinese patent CN200710037681.9 discloses the Waste Water Treatment of the scribing of milling in a kind of semiconductor packaging process, comprising: mill in the collection semiconductor packaging process and/or the receiving tank of the waste water of scribing; With the physical filtering device that the suspended substance in the described waste water is separated by physical filtering, this physical filtering device is connected with described receiving tank fluidity; Receive the receiving trap of described physical filtering device processed waste water, this receiving trap is connected with described physical filtering device fluidity.Though this treatment system can reclaim a part of waste water, because basic employing is mechanical filter or micro-filtration, treatment effect is not fine, has limited the use range of reuse water.
Chinese patent CN200510041374.9 discloses a kind of fiber super-filtering method and equipment, relate to fiber super-filtering method and the equipment of handling cutting and grinding waste water, cutting and grinding waste water obtains recyclable pure water through fiber pre-filtration step and ultrafiltration steps, after operation for some time, utilize recyclable pure water that ultrafilter membrane and fibrous filter layer are carried out backwash step.But the water quality that this kind treatment process is reclaimed does not still reach the water quality requirement of semi-conductor industry water.
Summary of the invention
The present invention mainly provides a kind of thick silicon and silica flour that can reclaim in the waste water, and the product water of Hui Shouing can be used as the semiconductor technology water of productive use simultaneously, energy-conserving and environment-protective, the reuse technology and the system that save the reduction scribing waste water of facility investment and working cost; Solve existing in prior technology and produce the water quality requirement that water water quality does not reach process water, and reclamation rate is low, the technical problem that the reuse comprehensive cost is high.
Above-mentioned technical problem of the present invention is mainly solved by following technical proposals: a kind of reuse technology of reduction scribing waste water, at first, hold back the thick silicon in the waste water with reduction scribing waste water process strainer; Water after will filtering then produces water and carries out supplying water of productive use after the desalination as the advanced desalination device through first step ultra-filtration equipment, and dense water enters the concentrated solution water tank, has passed through the waste water behind the advanced desalination and has been discharged in the wastewater disposal basin.By strainer waste water filtration earlier not only can be removed big magazine, filter thick silicon simultaneously and can easily thick silicon have been reclaimed, save energy and cost are for enterprise brings fairly obvious economic benefit and environmental benefit.Carry out advanced desalination after other fine impurities such as the water process ultra-filtration equipment elimination silica flour after the filtration, put forward high yield water water quality, make that producing water can satisfy the requirement that semiconductor technology is produced, can produce water directly as the explained hereafter water.Processing step of the present invention is simple, but can reach thick silicon and silica flour in effective reuse waste water, improves the utilization ratio of waste water, carries out the advanced desalination processing simultaneously and puies forward high yield water water quality and organic efficiency.The present invention utilizes the ultra-filtration membrane isolation technique that reduction scribing waste water is recycled, and siliceous discharging of waste liquid amount is reduced to 0.2～1% of former waste liquid total amount, and promptly water utilization rate reaches 99%, and the conserve water resource is saved industrial water consumption and reduced production costs.
As preferably, through the water inlet of the dense water after the processing of first step ultra-filtration equipment as second stage ultra-filtration equipment, the product water that has passed through second stage ultra-filtration equipment mixes the water inlet as the advanced desalination device with the product water of first step ultra-filtration equipment, dense water through second stage ultra-filtration equipment then is back to silica flour concentrated solution water tank, and circulation concentrates.Two-stage filtration can be put forward the water quality of high yield water, and the waste water that the while produces for two-stage ultrafiltering circulates concentrated, can improve the reuse efficient of waste water, farthest reclaims waste water.
As preferably, include the silica flour concentrated solution of content in the concentrated solution through first step ultra-filtration equipment and second stage ultra-filtration equipment greater than 3g/L, described silica flour concentrated solution can reclaim silica flour through oven dry.
As preferably, first step ultra-filtration equipment and second stage ultra-filtration equipment all adopt hollow-fibre membrane to constitute; The hollow fiber film assembly of the ultra-filtration equipment of the first step adopts the full-automatic continuously-running duty of cross flow filter, frequent backwash; Hollow-fiber module in the ultra-filtration equipment of the second stage adopts the filtering operation scheme of total reflux.
As preferably, the material of hollow fiber ultrafiltration membrane is polysulfones, polyethersulfone, polyvinylidene difluoride (PVDF) and polypropylene cyanogen, and the average molecular weight cut-off of hollow fiber ultrafiltration membrane is 6000 dalton-100000 dalton.Its surface active layer densification of hollow fiber ultrafiltration membrane, smooth; Supporting layer is spongy network structure, and withstand voltage, antipollution, long service life can guarantee to produce water water quality for a long time, and colloid, suspended particle and polymer substance are had good separating power.
The advanced desalination process can adopt the known apparatus and method of prior art, comprises electric desalination plant (EDI), electrodialysis unit (ED), and ion exchange bed.As preferably, described advanced desalination adopts hybrid ionic exchange bed to handle, and the resistivity of water of processing is greater than 10M Ω cm.Make that producing water water quality satisfies the requirement that semiconductor technology is produced.
As preferably, it is the accurate filter of 50 μ m-100 μ m that described strainer adopts filtering accuracy, when the accurate filter inlet outlet pressure differential reaches 0.1MPa, cleans filter element with restorability, and the thick silicon of accurate filter bottom is reclaimed.Thick silicon can be filtered by accurate filter, thick silicon concentrates on filter bottom, and the recycling of convenient thick silicon reaches effect energy-conservation, that reduce discharging, reduce production costs simultaneously.
A kind of reclaiming system of reduction scribing waste water, wastewater collection pond, ultrafiltration water tank and high-purity water tank, behind the wastewater collection pond, be connected with accurate filter, accurate filter is connected with first step ultra-filtration equipment, the clean water outlet of first step ultra-filtration equipment is connected with the advanced desalination device, the clean water outlet of advanced desalination device is connecting high-purity water tank, and the concentrated water spout of advanced desalination device is connecting purification tank for liquid waste.Simple in structure, ultra-filtration equipment connects the advanced desalination device, with the thick silicon and the silica flour efficient recovery of waste water, puies forward high yield water water quality simultaneously, and the whole floor space of system is little, saves facility investment and working cost, and the reuse comprehensive cost is low.
As preferably, the concentrated water spout of described first step ultra-filtration equipment arrives second stage ultra-filtration equipment by pipe connection, the clean water outlet of second stage ultra-filtration equipment is connected with the water-in of described deep desalting device by pipeline and high-pressure pump, and ultrafiltration concentrated water spout in the second stage is connected with purification tank for liquid waste.Make things convenient for the dense water of ultra-filtration equipment to reclaim repeatedly, improve water reuse rate and water production rate.
As preferably, described advanced desalination device adopts two mixed beds of filling anion-cation exchange resins, and mixing a bed liner is rubber, and outer wall is a steel construction.
Therefore, the reuse technology of a kind of reduction scribing waste water of the present invention and system thereof have following advantage: 1. utilize the pretreatment process of accurate filter to filter out thick silicon and other useful components in the waste water, reached purpose energy-conservation, that reduce discharging and reduce production costs; 2. by two-stage ultrafiltration operation, not only improve the waste water reclamation rate, put forward the high yield water water yield simultaneously, the waste water after the one-level ultrafiltration enters the recovery that circulates of two-stage ultrafiltering device, has improved the rate of recovery, makes the rate of recovery reach 99%; 3. adopt the deep desalting device to make high purity water, make that producing water can directly be applied in the semi-conductive production technique, has improved product water water quality; 4. the ultra-filtration membrane of ultra-filtration equipment adopts polysulfones or polyether sulfone materials, and withstand voltage, antipollution, long service life have good separating power to colloidal suspension particle and polymer substance.
Description of drawings:
Fig. 1 is the structural representation of a kind of reduction scribing waste water purification of the present invention and reclaiming system;
Fig. 2 is the structural representation of another kind of reduction scribing waste water purification of the present invention and reclaiming system.
Embodiment:
Below by embodiment, and in conjunction with the accompanying drawings, technical scheme of the present invention is described in further detail.
Embodiment:
As shown in Figure 1, certain large-scale Electronics Factory that waste water is taken from the Gansu city produces reduction scribing processing wastewater in the diode chip for backlight unit, wherein contains a large amount of thick silicon and silica flour colloid, and other impurity are few, specific conductivity is smaller or equal to 4 μ s/cm, silica flour colloidal content 50-100mg/L.At first reduction scribing waste water is placed in the wastewater collection pond 1, the wastewater collection pond is connected with topping-up pump 2, topping-up pump 2 is connecting accurate filter 3, the aperture of accurate filter 3 is 50 Jing, process accurate filter 3 is held back the thick silicon in the waste water, when the strainer inlet outlet pressure differential reaches 0.1MPa, cleans filter element with restorability, thick silicon concentrates on filter bottom, can conveniently reclaim.Water after will filtering then is through first step ultra-filtration equipment, accurate filter 3 is connected with ultra-filtration equipment 4 by pipeline 10, the hollow fiber film assembly that ultra-filtration equipment 4 adopts hydrophilically modified polysulfone material to make, hollow-fiber module adopt the full-automatic continuously-running duty of cross flow filter, frequent backwash.The molecular weight cut-off of hollow fiber ultrafiltration membrane is 50000, and mean pore size is 0.01 Jing.The product water of ultra-filtration equipment 4 flows into ultrafiltration water tank 5 by pipeline 12, ultrafiltration water tank 5 is connected to through topping-up pump 6 and mixes bed deep desalting device 7, deep desalting device 7 adopts two mixed beds of filling anion-cation exchange resin, mixing the bed liner is rubber, outer wall is a steel construction, the resin of filling is the board resin that wins honour for, and model is 001x7MB (positive resin) and 201x7MB (negative resin).The product water conductivity of ultra-filtration equipment 4 is smaller or equal to the water inlet of 4 μ s/cm as the advanced desalination device, the resistivity of water that the process advanced desalination is handled is greater than the lonely cm of 10M, to produce water is input in high-purity water tank 8 by pipeline 13, product water in high-purity water tank reclaims by pipeline 14, and the product water of recovery can be directly as the semiconductor technology water of productive use; Having passed through the waste water behind the advanced desalination is discharged in the wastewater disposal basin by pipeline 21.The 10-20% of the about raw wastewater total amount of the dense water of ultrafiltration directly is discharged to sewage plant and handles the back discharging.
Ultra-filtration equipment water inlet, water outlet, dense water, backwash mouth are respectively established a motorized valve, and the device operation is controlled by PLC: move 30 minutes, back flushing 30 ~ 60 seconds.The waterside town of back flushing ultra-filtration membrane is that backwashing sewage water enters the concentrated water tank of silica flour, will carry out primary chemical cleaning in 2-3 month, and matting sewage enters sewage plant and handles the back discharging.
Embodiment 2:
As shown in Figure 2, certain large-scale Electronics Factory that waste water is taken from the Gansu city produces reduction scribing processing wastewater in the diode chip for backlight unit, wherein contains a large amount of thick silicon and silica flour colloid, and other impurity are few, specific conductivity is smaller or equal to 4 μ s/cm, silica flour colloidal content 50-100mg/L.At first with reduction scribing waste water process accurate filter, hold back the thick silicon in the waste water, when the strainer inlet outlet pressure differential reaches 0.1MPa, clean filter element with restorability, thick silicon concentrates on filter bottom, can conveniently reclaim.Water after will filtering then is as the water inlet of first step ultra-filtration equipment 4, concentrated water spout connects concentrated water tank 17 by pipeline 11, dense water tank 17 is connected to second stage ultra-filtration equipment 15 through topping-up pump 18 again, through the water inlet of the dense water after 4 processing of first step ultra-filtration equipment as second stage ultra-filtration equipment 15, second stage ultra-filtration equipment 15 adopts the Hollow Fiber Ultrafiltration assembly, hollow-fibre membrane adopts polysulfone material to make, adopt the filtering operation scheme of total reflux, its molecular weight cut-off is 20000, mean pore size 0.01 μ m.The clean water outlet of second stage ultra-filtration equipment 15 is connected to ultrafiltration water tank 5 by pipeline 19, make the product water that has passed through second stage ultra-filtration equipment mix water inlet with the product water of first step ultra-filtration equipment as advanced desalination device 7, dense water through second stage ultra-filtration equipment then is back to silica flour concentrated solution water tank, the concentrated water spout of second stage ultra-filtration equipment 15 is connected to by pipeline 20 and concentrates water tank 17, and it is concentrated to circulate; Product water through advanced desalination reclaims by pipeline 14, can pass through the waste water behind the advanced desalination and be discharged in the wastewater disposal basin by pipeline 21 directly as the production technique water.The concentrated water spout that concentrates water tank 17 is connecting purification tank for liquid waste by pipeline 16.
Claims (5)
1. the reuse technology of a reduction scribing waste water, it is characterized in that: be the accurate filter of 50 μ m-100 μ m through filtering accuracy at first reduction scribing waste water, hold back the thick silicon in the waste water, when the accurate filter inlet outlet pressure differential reaches 0.1MPa, clean filter element with restorability, and the thick silicon of accurate filter bottom is reclaimed; Water after will filtering then produces water as the water inlet of advanced desalination device through first step ultra-filtration equipment, and for water of productive use, dense water enters the concentrated solution water tank after the desalination; Through the water inlet of the dense water after the processing of first step ultra-filtration equipment as second stage ultra-filtration equipment, the product water that has passed through second stage ultra-filtration equipment mixes the water inlet as the advanced desalination device with the product water of first step ultra-filtration equipment, dense water through second stage ultra-filtration equipment then is back to silica flour concentrated solution water tank, and circulation concentrates; Having passed through the waste water behind the advanced desalination is discharged in the wastewater disposal basin.
2. the reuse technology of a kind of reduction scribing waste water according to claim 1 is characterized in that: first step ultra-filtration equipment and second stage ultra-filtration equipment all adopt hollow-fibre membrane to constitute; The hollow fiber film assembly of the ultra-filtration equipment of the first step adopts the full-automatic continuously-running duty of cross flow filter, frequent backwash; Hollow-fiber module in the ultra-filtration equipment of the second stage adopts the filtering operation scheme of total reflux.
3. the reuse technology of a kind of reduction scribing waste water according to claim 1 and 2 is characterized in that: described advanced desalination adopts hybrid ionic exchange bed to handle, and the resistivity of water of processing is greater than 10M Ω cm.
4. the reclaiming system of a reduction scribing waste water, comprise wastewater collection pond, ultrafiltration water tank and high-purity water tank, it is characterized in that: behind the wastewater collection pond, be connected with accurate filter, accurate filter is connected with first step ultra-filtration equipment, the clean water outlet of first step ultra-filtration equipment is connected with the advanced desalination device, the clean water outlet of advanced desalination device is connecting high-purity water tank, and the concentrated water spout of advanced desalination device is connecting purification tank for liquid waste; The concentrated water spout of described first step ultra-filtration equipment arrives second stage ultra-filtration equipment by pipe connection, the clean water outlet of second stage ultra-filtration equipment is connected with the water-in of described deep desalting device by pipeline and high-pressure pump, and ultrafiltration concentrated water spout in the second stage is connected with purification tank for liquid waste.
5. the reclaiming system of a kind of reduction scribing waste water according to claim 4 is characterized in that: described advanced desalination device adopts two mixed beds of filling anion-cation exchange resins, and mixing a bed liner is rubber, and outer wall is a steel construction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008103053024A CN101549913B (en) | 2008-10-30 | 2008-10-30 | Process and system for recovering reduction scribing waste water |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008103053024A CN101549913B (en) | 2008-10-30 | 2008-10-30 | Process and system for recovering reduction scribing waste water |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101549913A CN101549913A (en) | 2009-10-07 |
| CN101549913B true CN101549913B (en) | 2011-08-17 |
Family
ID=41154445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008103053024A Active CN101549913B (en) | 2008-10-30 | 2008-10-30 | Process and system for recovering reduction scribing waste water |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101549913B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101947523B (en) * | 2010-10-21 | 2012-05-30 | 高佳太阳能股份有限公司 | Device for recycling silicon wafer cleaning wastewater |
| CN103028329A (en) * | 2012-12-07 | 2013-04-10 | 无锡凝洋环保科技有限公司 | Grinding wastewater reuse and silica powder recovery device with tubular micro-filtration membrane assembly |
| CN106565044A (en) * | 2015-10-08 | 2017-04-19 | 新世膜科技股份有限公司 | Recovery treatment system for concentrated leather-making wastewater |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101234801A (en) * | 2007-10-19 | 2008-08-06 | 无锡凝洋环保科技有限公司 | Method of processing semi-conductor industrial waste water |
| CN101244847A (en) * | 2007-02-13 | 2008-08-20 | 中芯国际集成电路制造(上海)有限公司 | Wastewater treatment system and method |
-
2008
- 2008-10-30 CN CN2008103053024A patent/CN101549913B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101244847A (en) * | 2007-02-13 | 2008-08-20 | 中芯国际集成电路制造(上海)有限公司 | Wastewater treatment system and method |
| CN101234801A (en) * | 2007-10-19 | 2008-08-06 | 无锡凝洋环保科技有限公司 | Method of processing semi-conductor industrial waste water |
Non-Patent Citations (3)
| Title |
|---|
| JP特开2003-218072A 2003.07.31 |
| JP特开2005-334992A 2005.12.08 |
| JP特开平11-138162A 1999.05.25 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101549913A (en) | 2009-10-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101148275B (en) | PVC centrifugal mother liquor treatment reclaiming technique and device | |
| CN102126806A (en) | Method for completely recycling wastewater containing fluorine and ammonia nitrogen in electronic industry | |
| CN108793642A (en) | A kind of dyeing waste water advanced treatment system and processing method | |
| CN101549913B (en) | Process and system for recovering reduction scribing waste water | |
| CN100577578C (en) | Method of processing semi-conductor industrial waste water | |
| CN203360192U (en) | Treatment device for difficultly degradable industrial wastewater | |
| CN112225385A (en) | Treatment and recycling system and treatment and recycling method for cleaning wastewater of finished products and/or raw materials of automobile parts | |
| CN201324601Y (en) | Thickness-reduction scribing wastewater purifying and recycling device | |
| CN110526513B (en) | Recycling treatment process for waste water from production of silicon materials in mixed crystal mode | |
| CN210313765U (en) | Fluorine-containing high-salinity wastewater recycling system | |
| CN209759259U (en) | Photovoltaic cell production wastewater treatment process system | |
| CN109110967B (en) | Bauxite beneficiation wastewater recycling system and method based on membrane chemical reactor | |
| CN208762364U (en) | Dyeing waste water advanced treatment system | |
| CN203498181U (en) | System for recycling waste acid and waste alkali | |
| CN103539278A (en) | Crystal grinding wastewater treatment method and crystal grinding wastewater treatment device | |
| CN201071332Y (en) | Equipment for processing and recycling PVC anticentripetal mother solution | |
| CN206705854U (en) | A kind of Treated sewage reusing automates advanced treatment system | |
| CN215559437U (en) | Wastewater treatment system | |
| CN110002654A (en) | A kind of high-salt wastewater discharge treating system | |
| CN203033838U (en) | Waste water treatment device | |
| CN201380045Y (en) | Pretreatment device and reverse osmosis desalination apparatus for desalination of mine water | |
| CN205892904U (en) | A integration equipment for automaticallying process sewage | |
| CN211004887U (en) | Waste incineration power plant waste water processing system | |
| US20050211632A1 (en) | Base dosing water purification system and method | |
| CN211546262U (en) | Pretreatment cleaning wastewater treatment system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210713 Address after: Room 606, 6th floor, building B, free port, headquarters, Wuxing District, Huzhou City, Zhejiang Province, 313000 Patentee after: Zhejiang Toyo Environmental Technology Co.,Ltd. Address before: 313017 Huan Shan Road, Huzhou City, Zhejiang Province Patentee before: ZHEJIANG DONGYANG ENVIRONMENTAL ENGINEERING Co.,Ltd. |
|
| TR01 | Transfer of patent right |