CN206037691U - Vacuum furnace - Google Patents
Vacuum furnace Download PDFInfo
- Publication number
- CN206037691U CN206037691U CN201620523344.5U CN201620523344U CN206037691U CN 206037691 U CN206037691 U CN 206037691U CN 201620523344 U CN201620523344 U CN 201620523344U CN 206037691 U CN206037691 U CN 206037691U
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- China
- Prior art keywords
- vacuum chamber
- cooling
- vacuum
- chamber
- drying oven
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
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Abstract
The utility model discloses a vacuum furnace, including fixing first vacuum chamber on the lateral wall of control box, fixing the second vacuum chamber on the lateral wall of control box, the chamber lid that the second vacuum chamber was established to the lid. Inside at the second vacuum chamber is provided with the objective table, place the work piece on the objective table, and the outer wall of second vacuum chamber covers has inclosed heating cavity the inside heating element that is provided with of heating cavity, heating element follows the outer wall of second vacuum chamber is arranged in proper order, and is right the second vacuum chamber heats, and this structure can be distinguished heating element with the work piece, and then avoids heating element to the pollution of work piece, the quality of improvement work piece.
Description
Technical field
The application is related to a kind of vacuum equipment, more particularly to a kind of vacuum drying oven.
Background technology
As the continuous development of science and technology, vacuum technique have also obtained development at full speed, the species of vacuum equipment is also got over
Come more, people have also enjoyed the various facilities that vacuum technique brings.
In current vacuum drying oven, a vacuum chamber is typically provided with, inside vacuum chamber, is placed with workpiece, it is existing
Technology is directly the workpiece inside vacuum chamber to be heated using heating component, and so heating component can pollute workpiece, drop
The quality of low workpiece.
Utility model content
The utility model provides a kind of vacuum drying oven, to solve existing vacuum drying oven in heating process, heats component
The technical problem of workpiece can be polluted.
To solve above-mentioned technical problem, the utility model provides a kind of vacuum drying oven, including：
First vacuum chamber, is fixed on the side wall of control box；
Second vacuum chamber, is placed in inside first vacuum chamber and is fixed on the side wall of the control box, make
Obtain between first vacuum chamber and second vacuum chamber is the first confined space；Arrange on the side wall of the control box
There is an opening so that communicate inside second vacuum chamber and the control box；The inside of second vacuum chamber is arranged
There is objective table, on the objective table, place workpiece；The outer wall of second vacuum chamber is coated with closed heating chamber, in institute
State heating chamber and be internally provided with heating component, the heating component is arranged in order along the outer wall of second vacuum chamber, right
Second vacuum chamber is heated；
Chamber lid, is arranged at the opening of the control box, and lid is located at second vacuum chamber, makes second vacuum chamber
Room becomes the second confined space.
Preferably, the wall construction of first vacuum chamber is sandwich, and the inside of the sandwich irrigates cooling
Liquid.
Preferably, first vacuum chamber includes inflation inlet and exhaust outlet；
The inflation inlet of first vacuum chamber is filled with mixed gas；
The exhaust outlet of first vacuum chamber discharges the mixed gas；
Under the synergy of the exhaust outlet of the inflation inlet and first vacuum chamber of first vacuum chamber, institute is made
The pressure for stating the pressure and second vacuum chamber of the first vacuum chamber balances each other.
Preferably, the vacuum drying oven also includes：Cooling device；
It is true that nitrogen after argon gas after cooling and/or cooling is passed through described second by the first pipeline by the cooling device
The inside of plenum chamber.
Preferably, first pipe shape of first pipeline inside second vacuum chamber corresponds to the workpiece
Multiple steam vents are offered in shape, and first pipeline, is discharged after the argon gas after cooling and/or cooling against the workpiece
Nitrogen, uniformly to cool down the workpiece.
Preferably, be additionally provided with the first control valve on first pipeline, to control the argon gas after the cooling and/
Or the flow of the nitrogen after cooling.
Preferably, the vacuum drying oven also includes：
Exhaust apparatus, connects the exhaust outlet of second vacuum chamber by second pipe, discharges second vacuum chamber
The nitrogen after the argon gas after cooling and/or cooling in room；
The second control valve is additionally provided with the second pipe.
Preferably, the range of flow of the argon gas after the cooling and/or the nitrogen after the cooling is：50sccm/min～
500sccm/min。
Preferably, the temperature control of second vacuum chamber needs to meet following condition：
The cooling scope of second vacuum chamber at 1000 DEG C～500 DEG C, the time≤30min, after the cooling
The flow of the nitrogen after argon gas and/or the cooling is 50sccm/min；
The cooling scope of second vacuum chamber at 500 DEG C～200 DEG C, the time≤30min, the argon gas after the cooling
And/or the flow of the nitrogen after the cooling is 300sccm/min；
The cooling scope of second vacuum chamber is at 200 DEG C～25 DEG C；Time≤30min, the argon gas after the cooling
And/or the flow of the nitrogen after the cooling is 500sccm/min.
Preferably, the heater assembly includes：Molybdenum, tungsten.
By one or more technical scheme of the present utility model, the utility model has the advantages that or excellent
Point：
The utility model discloses a kind of vacuum drying oven, including the first vacuum chamber being fixed on the side wall of control box, admittedly
The second vacuum chamber for being scheduled on the side wall of control box, lid set the chamber lid of the second vacuum chamber.Second vacuum chamber is placed in institute
State inside the first vacuum chamber；In the objective table that is internally provided with of the second vacuum chamber, on the objective table, workpiece is placed；And
The outer wall of second vacuum chamber is coated with closed heating chamber, is internally provided with heating component in the heating chamber,
The heating component is arranged in order along the outer wall of second vacuum chamber, and second vacuum chamber is heated, this knot
Heating component and workpiece can be distinguished by structure, and then avoid heating pollution of the component to workpiece, improve the quality of workpiece.
Further, the utility model is arranged in order component is heated along the outer wall of second vacuum chamber, can be to institute
State the second vacuum chamber uniformly to be heated.
Further, when cooling down to the second vacuum chamber, using the argon gas after cooled and/or cool down blocked up
Nitrogen is passed through inside the second vacuum chamber and is cooled down, and the condition of cooling is controlled, and then ensure that workpiece
Uniformly, it is quick to cool down, workpiece is cooled to into room temperature and only needs to 1～2 hour.
Further, the shape of the first pipeline inside the second vacuum chamber is designed to the utility model the shape of workpiece
Shape, and multiple exhaust outlets are provided with the first pipeline, uniformly can blow against workpiece and cool down.
Description of the drawings
Fig. 1 is the structural representation of vacuum drying oven in the utility model embodiment.
Description of reference numerals：First vacuum chamber 1, the second vacuum chamber 2, heating component 3, chamber lid 4, control box 5, loading
Platform 6, the first pipeline 7, the first control valve 8, the first control valve 9, the second control valve 10, the first vacuum chamber 1 take out true
Empty device 11, the vacuum extractor 12 of the second vacuum chamber 2, cooling device 13, flexible pipe 14, the control valve of second pipe 15, second
Door 16, exhaust apparatus 17, gas bottle 18.
Specific embodiment
In order that the application the technical staff in the technical field is more clearly understood that the application, below in conjunction with the accompanying drawings,
Technical scheme is described in detail by specific embodiment.
In the utility model embodiment, there is provided a kind of vacuum drying oven.The main purposes of vacuum drying oven of the present utility model is：
Under high vacuum state, quick heated partses carry out the operations such as vacuum degassing, vacuum annealing, and after the completion of process, fast cooling is arrived
Normal temperature, and dress takes workpiece in vacuum glove box.
Fig. 1 is refer to below, specifically introduces the structure of vacuum drying oven.
The version of vacuum drying oven is specifically included using double vacuum structures, vacuum drying oven：First vacuum chamber 1, the second vacuum
Chamber 2.
First vacuum chamber 1, is fixed on the side wall of control box 5.Control box 5 can be it is any need connect vacuum drying oven
Equipment box, in the utility model embodiment, control box 5 is by taking glove box as an example.
Second vacuum chamber 2, is placed in inside first vacuum chamber 1 and is fixed on the side wall of the control box 5,
So that being the first confined space between first vacuum chamber 1 and second vacuum chamber 2.In addition, the control box 5
An opening is provided with the wall of side so that communicate inside second vacuum chamber 2 and the control box 5.If control box 5 is hand
Casing, then in glove box, is provided with operation gloves on the relative side wall of the side wall with opening, and operative employee can then put
Operation gloves, are operated in the second vacuum chamber 2.
Chamber lid 4, is arranged at the opening of the control box 5, and lid is located at second vacuum chamber 2, makes described second true
Plenum chamber 2 becomes the second confined space.
Specifically, the first vacuum chamber 1 is fixed on the side wall of control box 5 by a fixed plate, and the second vacuum chamber
Room 2 is fixed on the side wall of control box 5 also by the fixed plate.Thus, fixed plate, the first vacuum chamber 1, the second vacuum chamber
Just a confined space is formed between 2 threes.First vacuum chamber 1 is carried out vacuumizing process, that is, is represented to the first confined space
Carry out vacuumizing process.
Lower mask body introduces two vacuum chambers in the utility model.
The first vacuum chamber 1 is introduced first.
The wall construction of first vacuum chamber 1 is hollow wall structure, and coolant (example is irrigated inside the hollow wall structure
Such as cold water etc.).In other words, the first vacuum chamber 1 can regard sandwich as, and coolant is irrigated in interlayer.
In addition, being provided with inflation inlet and exhaust outlet in the cavity wall of first vacuum chamber 1.First vacuum chamber 1 fills
Gas port is used for insufflation gas, the inflation inlet of the first vacuum chamber 1 and gas ducting connection, and control flow is provided with gas ducting
The first control valve 9.And the exhaust outlet of the first vacuum chamber 1 is used to discharge the gas, exhaust outlet and discharge duct connection,
It is also equipped with controlling the second control valve 10 of flow on discharge duct.In the inflation inlet and the first vacuum of the first vacuum chamber 1
Under the synergy of the exhaust outlet of chamber 1, the pressure of the pressure and second vacuum chamber 2 of first vacuum chamber 1 is made
Balance each other.And the gas that the first vacuum chamber 1 is filled with is argon gas and/or nitrogen.Further, since the impact of heating component 3, first
Vacuum chamber 1 also can be rapidly heated under low vacuum state, applying argon gas and/or nitrogen fast cooling.The work of the first vacuum chamber
2～25Pa of vacuum.
In addition, first vacuum chamber 1 is additionally provided with vacuum pumping opening, the vacuum pumping opening of the first vacuum chamber 1 and
The vacuum extractor 11 of the first vacuum chamber 1 connects, for vacuumizing process to first vacuum chamber 1.First vacuum chamber
The vacuum extractor 11 of room 1 belongs to low vacuum device, including：Unit contruction pump, lobe pump, vacuum gauge, pipeline etc..Answer actual
With in, the vacuum extractor 11 of the first vacuum chamber 1 can select suitable part according to actual conditions, in this utility model not
It is limited and repeats.
Due in existing vacuum drying oven, during heated partses, heating component 3 can be polluted to workpiece, therefore, this practicality
It is new in order to prevent heating furnace from polluting to heated partses, be provided with the second vacuum chamber 2.
Workpiece of the present utility model is placed in the second vacuum chamber 2, and mode of heating of the present utility model is the second vacuum
2 external heating mode of chamber, the type of cooling are the interior type of cooling.Workpiece is rapidly heated under high vacuum state, after being filled with cooling
Nitrogen fast cooling after argon gas and/or cooling.The final vacuum of the second vacuum chamber 2 is higher than 3x10-4Pa, working vacuum degree
1x10-3Pa。
Second vacuum chamber 2 can be any hollow shape, such as cylinder type, the interior chamber size of the second vacuum chamber 2(diameter 150, height is 370).Therefore, the diameter of workpiece can be within 100mm.
Second vacuum chamber 2 is internally provided with objective table 6, places workpiece on the objective table 6；Described second is true
The outer wall of plenum chamber 2 is coated with closed heating chamber, it is preferred that the 2～25Pa of working vacuum degree of closed heating chamber.
The heating chamber is internally provided with heating component 3, and the heating component 3 is arranged successively along the outer wall of second vacuum chamber 2
Row, for heating to second vacuum chamber 2.It is so designed that, i.e.,：Heating component 3 is intercepted in the second vacuum chamber 2
Outer wall, workpiece is placed in inside the second vacuum chamber 2, can intercept heating component 3 for the pollution of workpiece.
For the number of heating component 3, the utility model is not limited, as long as being sequentially arranged in the second vacuum chamber 2
Outer wall, it is ensured that uniform heating is carried out to the second vacuum chamber 2.And for the material of heating component 3, preferable molybdenum, tungsten etc.
Material.In addition, in order to ensure that the second vacuum chamber 2 can conduct heat as early as possible, the material of the cavity wall of the second vacuum chamber 2 is preferably stainless
Steel plate.In order to ensure the insulation of the second vacuum chamber 2, the cavity wall of the second vacuum chamber 2 may be designed to sandwich.
After heating component 3 is heated, heating-up temperature≤1000 DEG C of the second vacuum chamber 2.In addition, the second vacuum chamber
2 temperature homogeneity ± 10 DEG C, temperature-controlled precision ± 1 DEG C.
In addition, in order that the second vacuum chamber 2 is cooled down as early as possible, the vacuum drying oven also includes：Cooling device 13.
The cooling device 13 is used for cooling from the argon gas out of gas bottle 18 and/or nitrogen, and by the argon gas after cooling
And/or the nitrogen after cooling is passed through the inside of second vacuum chamber 2 by the first pipeline 7.Argon gas and/or nitrogen after cooling
The temperature range of gas is -120 DEG C～-140 DEG C.
In addition, the first pipeline 7 shape correspondence workpiece of first pipeline 7 inside second vacuum chamber 2
Shape.For example workpiece setting is circularized, then the shape of the first pipeline 7 is just set to corresponding annular.If workpiece setting into
Triangle, then the shape of the first pipeline 7 is just corresponding triangle.
In addition, multiple steam vents are offered on first pipeline 7, for the argon gas after cooling is blown out against the workpiece
And/or the nitrogen after cooling, uniformly to cool down the workpiece.
Cool down the workpiece when, due to workpiece cooling rate and cooling after argon gas and/or cooling after nitrogen stream
Amount is related.Therefore, the utility model controls the range of flow of the nitrogen after the argon gas after cooling and/or cooling in 50sccm/
Min～500sccm/min (scope of the present utility model all includes endpoint value).
In addition, quick, the uniform cooling in order to ensure workpiece, and prevent workpiece from when cooling down, bursting impact equipment, this practicality
It is new that also the cooling conditions of the temperature range of the second vacuum chamber 2 are controlled, referring specifically to following scope：
The cooling scope of second vacuum chamber 2 at 1000 DEG C～500 DEG C, the time≤30min, after the cooling
The flow of the nitrogen after argon gas and/or the cooling is 50sccm/min.
The cooling scope of second vacuum chamber 2 at 500 DEG C～200 DEG C, the time≤30min, the argon after the cooling
The flow of the nitrogen after gas and/or the cooling is 300sccm/min.
The cooling scope of second vacuum chamber 2 is at 200 DEG C～25 DEG C；Time≤30min, the argon gas after the cooling
And/or the flow of the nitrogen after the cooling is 500sccm/min.
In order to control flow, the first control valve 8 is additionally provided with first pipeline 7, to control after the cooling
Argon gas and/or cooling after the logical flow of nitrogen.Certainly, for the ease of adjusting, the first control valve 8 is arranged on the second vacuum
On the first pipeline 7 outside chamber 2.
Preferably, connect flexible pipe 14 between the cooling device 13 and first pipeline 7.
Preferably, the vacuum drying oven also includes：Exhaust apparatus 17, connects second vacuum chamber by second pipe 15
2 exhaust outlet, for the nitrogen after discharging the argon gas after the cooling in second vacuum chamber 2 and/or cooling.Second vacuum
The flow correspondence of the flow of the exhaust outlet of chamber 2 and the first pipeline 7.Certainly, second pipe is also equipped with controlling the second of flow
Control valve 16.
In addition, the vacuum extractor 12 of the second vacuum chamber 2 can also utilize the exhaust outlet of the second vacuum chamber 2 to be taken out
Application of vacuum, the vacuum extractor 12 of the second vacuum chamber 2 include：Dry pump, molecular pump, vacuum valve, height vacuum gauge, pipeline
Etc., the vacuum extractor 12 of the second vacuum chamber 2 can select suitable part, here according to actual conditions in actual applications
The utility model is not limited and repeats.
The valve that above is referred to can select pneumatic control valve.
By one or more embodiment of the present utility model, the utility model has the advantages that or excellent
Point：
The utility model discloses a kind of vacuum drying oven, including the first vacuum chamber being fixed on the side wall of control box, admittedly
The second vacuum chamber for being scheduled on the side wall of control box, lid set the chamber lid of the second vacuum chamber.Second vacuum chamber is placed in institute
State inside the first vacuum chamber；In the objective table that is internally provided with of the second vacuum chamber, on the objective table, workpiece is placed；And
The outer wall of second vacuum chamber is coated with closed heating chamber, is internally provided with heating component in the heating chamber,
The heating component is arranged in order along the outer wall of second vacuum chamber, and second vacuum chamber is heated, this knot
Heating component and workpiece can be distinguished by structure, and then avoid heating pollution of the component to workpiece, improve the quality of workpiece.
Further, the utility model is arranged in order component is heated along the outer wall of second vacuum chamber, can be to institute
State the second vacuum chamber uniformly to be heated.
Further, when cooling down to the second vacuum chamber, using the argon gas after cooled and/or cool down blocked up
Nitrogen is passed through inside the second vacuum chamber and is cooled down, and the condition of cooling is controlled, and then ensure that workpiece
Uniformly, it is quick to cool down, workpiece is cooled to into room temperature and only needs to 1～2 hour.
Further, the shape of the first pipeline inside the second vacuum chamber is designed to the utility model the shape of workpiece
Shape, and multiple exhaust outlets are provided with the first pipeline, uniformly can blow against workpiece and cool down.
Although having been described for the preferred embodiment of the application, one of ordinary skilled in the art once knows substantially
Creative concept, then can make other change and modification to these embodiments.So, claims are intended to be construed to bag
Include preferred embodiment and fall into the had altered of the application scope and change.
Obviously, those skilled in the art can carry out the essence of various changes and modification without deviating from the application to the application
God and scope.So, if these modifications of the application and modification belong to the scope of the application claim and its equivalent technologies
Within, then the application is also intended to comprising these changes and modification.
Claims (9)
1. a kind of vacuum drying oven, it is characterised in that include：
First vacuum chamber, is fixed on the side wall of control box；
Second vacuum chamber, is placed in inside first vacuum chamber and is fixed on the side wall of the control box；The behaviour
Make on the side wall of case, to be provided with an opening so that communicate inside second vacuum chamber and the control box；Described second is true
Plenum chamber is internally provided with objective table, places workpiece on the objective table；The outer wall of second vacuum chamber is coated with close
The heating chamber for closing, has gap, sets inside the heating chamber between the heating chamber and first vacuum chamber
Heating component is equipped with, the heating component is arranged in order along the outer wall of second vacuum chamber, for second vacuum
Chamber is heated；
Chamber lid, is arranged at the opening of the control box, and lid is located at second vacuum chamber.
2. vacuum drying oven as claimed in claim 1, it is characterised in that the wall construction of first vacuum chamber is sandwich,
The inside perfusion coolant of the sandwich.
3. vacuum drying oven as claimed in claim 1, it is characterised in that first vacuum chamber includes inflation inlet and exhaust outlet；
The inflation inlet of first vacuum chamber is filled with mixed gas；
The exhaust outlet of first vacuum chamber discharges the mixed gas；
Under the synergy of the exhaust outlet of the inflation inlet and first vacuum chamber of first vacuum chamber, described is made
The pressure of the pressure of one vacuum chamber and second vacuum chamber balances each other.
4. vacuum drying oven as claimed in claim 1, it is characterised in that the vacuum drying oven also includes：Cooling device；
Nitrogen after argon gas after cooling and/or cooling is passed through second vacuum chamber by the first pipeline by the cooling device
The inside of room.
5. vacuum drying oven as claimed in claim 4, it is characterised in that first pipeline is inside second vacuum chamber
The shape of the first pipe shape correspondence workpiece, and multiple steam vents are offered on first pipeline, against the workpiece
The argon gas after cooling and/or the nitrogen after cooling are discharged, uniformly to cool down the workpiece.
6. vacuum drying oven as claimed in claim 4, it is characterised in that be additionally provided with the first control valve on first pipeline,
The flow of the nitrogen after to control the argon gas after the cooling and/or cooling.
7. vacuum drying oven as claimed in claim 4, it is characterised in that the vacuum drying oven also includes：
Exhaust apparatus, connects the exhaust outlet of second vacuum chamber by second pipe, discharges in second vacuum chamber
Cooling after argon gas and/or cooling after nitrogen；
The second control valve is additionally provided with the second pipe.
8. vacuum drying oven as claimed in claim 4, it is characterised in that the nitrogen after argon gas and/or the cooling after the cooling
The range of flow of gas is：50sccm/min～500sccm/min.
9. vacuum drying oven as claimed in claim 8, it is characterised in that the temperature control of second vacuum chamber need to meet with
Lower condition：
The cooling scope of second vacuum chamber at 1000 DEG C～500 DEG C, the time≤30min, the argon gas after the cooling
And/or the flow of the nitrogen after the cooling is 50sccm/min；
The cooling scope of second vacuum chamber at 500 DEG C～200 DEG C, the time≤30min, the argon gas after the cooling and/
Or the flow of the nitrogen after the cooling is 300sccm/min；
The cooling scope of second vacuum chamber is at 200 DEG C～25 DEG C；Time≤30min, argon gas after the cooling and/or
The flow of the nitrogen after the cooling is 500sccm/min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620523344.5U CN206037691U (en) | 2016-05-31 | 2016-05-31 | Vacuum furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620523344.5U CN206037691U (en) | 2016-05-31 | 2016-05-31 | Vacuum furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206037691U true CN206037691U (en) | 2017-03-22 |
Family
ID=58312872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620523344.5U Withdrawn - After Issue CN206037691U (en) | 2016-05-31 | 2016-05-31 | Vacuum furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206037691U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105890345A (en) * | 2016-05-31 | 2016-08-24 | 成都西沃克真空科技有限公司 | Vacuum furnace |
| CN113579391A (en) * | 2021-07-15 | 2021-11-02 | 南京三乐集团有限公司 | Vacuum reflow soldering equipment for space traveling wave tube heat radiator |
-
2016
- 2016-05-31 CN CN201620523344.5U patent/CN206037691U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105890345A (en) * | 2016-05-31 | 2016-08-24 | 成都西沃克真空科技有限公司 | Vacuum furnace |
| CN105890345B (en) * | 2016-05-31 | 2018-04-10 | 成都西沃克真空科技有限公司 | A kind of vacuum drying oven |
| CN113579391A (en) * | 2021-07-15 | 2021-11-02 | 南京三乐集团有限公司 | Vacuum reflow soldering equipment for space traveling wave tube heat radiator |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170322 Effective date of abandoning: 20180410 |