CN206022316U - A kind of solar energy silicon crystal chip defect automatic checkout equipment - Google Patents
A kind of solar energy silicon crystal chip defect automatic checkout equipment Download PDFInfo
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- CN206022316U CN206022316U CN201621051119.2U CN201621051119U CN206022316U CN 206022316 U CN206022316 U CN 206022316U CN 201621051119 U CN201621051119 U CN 201621051119U CN 206022316 U CN206022316 U CN 206022316U
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 58
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 58
- 239000010703 silicon Substances 0.000 title claims abstract description 58
- 230000007547 defect Effects 0.000 title claims abstract description 39
- 239000013078 crystal Substances 0.000 title claims abstract description 18
- 238000012545 processing Methods 0.000 claims abstract description 13
- 230000000007 visual effect Effects 0.000 claims abstract description 11
- 239000000463 material Substances 0.000 claims description 23
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 abstract description 18
- 238000000034 method Methods 0.000 abstract description 6
- 230000007812 deficiency Effects 0.000 abstract description 4
- 238000007689 inspection Methods 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 abstract description 3
- 230000002950 deficient Effects 0.000 abstract description 2
- 238000013480 data collection Methods 0.000 abstract 1
- 230000002045 lasting effect Effects 0.000 abstract 1
- 238000000605 extraction Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000007781 pre-processing Methods 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 206010027146 Melanoderma Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000013083 solar photovoltaic technology Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides a kind of solar energy silicon crystal chip defect automatic checkout equipment, including：Visual pattern acquisition system, image processing system and sorting system；The visual pattern acquisition system is used for the image of automatic data collection silicon wafer on silicon wafer automatic assembly line, the silicon wafer picture that described image processing system is collected for analysis, and automatic identification is carried out to silicon wafer picture, and send the signal of identification to sorting system, sorting system is used for the signal for executing image processing system, defective silicon wafer is sorted out, and the silicon wafer of identical defect is sorted in identical sorting case, realize the accurate sorting of silicon wafer.This solar energy silicon crystal chip defect automatic checkout equipment carries out dimensional measurement and defects detection using the method that machine vision obtains image, overcome traditional manual detection precision low, subjectivity is strong, repeatable poor, the deficiencies such as lasting consistency detection result, missing inspection false drop rate height cannot be provided.
Description
Technical field
The utility model belongs to manufacture of solar cells technical field, and in particular to a kind of solar energy silicon crystal chip defect is automatic
Testing equipment.
Background technology
Solar photovoltaic technology is played an important role in terms of outlying areas without electricity and energy saving is solved, photovoltaic
The key equipment of generating equipment is solar panel, and the key component of solar panel is silicon wafer, the quality of silicon wafer
There is great impact to generating efficiency, silicon wafer often has off-dimension and chipping, blackspot in process of production, hidden splits
Etc. open defect.
Traditional Man accuracy of detection to silicon wafer is low, and subjectivity is strong, repeatable poor, it is impossible to provides and continues uniformity inspection
Result is surveyed, missing inspection false drop rate is high；The method of machine vision to be used carries out image detection to silicon wafer, it is necessary to design a kind of silicon
Wafer defect detection system and method.
The Chinese patent of Application No. CN200910183220.1 discloses a kind of " defects of battery plate of solar energy photovoltaic subassembly
Detection method and detector ", the detector include darkroom, in the upper drawer and lower drawer that stack of being internally provided with darkroom, on
Ultra-clear glasses platform is each provided with drawer and lower drawer, 45° angle optical grade high reflection mirror and figure are installed in the bottom in darkroom
As collecting device, 45° angle optical grade high reflection mirror is located at the lower section of lower drawer, ultra-clear glasses stage+module with image capture device
There is keeper electrode.Defect on cell piece is detected by the principle of optical reflection, the defect kind of the detector detection is limited, essence
Degree is poor, and the detector only detects function, does not sort function, needs manual sorting, and sort efficiency is low.
Utility model content
For solving the deficiencies in the prior art, the utility model is examined automatically there is provided a kind of solar energy silicon crystal chip defect
Measurement equipment, can rapidly transmit silicon wafer and carry out defect quick detection to silicon wafer picture, meet high in production line
The high-precision detection of speed is required.
For realizing that above-mentioned technical proposal, the utility model provide a kind of solar energy silicon crystal chip defect automatic checkout equipment,
Including：Visual pattern acquisition system, image processing system and sorting system；The visual pattern acquisition system includes feeding machinery
Arm, material trough, material table, industrial camera, lighting source and feed belt, the material trough are fixed on material table table top, on
Material mechanical arm is arranged on material trough side, and in front of feeding mechanical arm, industrial camera is arranged on feed belt to feed belt
The surface at middle part, lighting source is installed in the underface of industrial camera；Described image processing system includes industry control PC, described
The signal input part of industry control PC is connected with the signal output part of industrial camera, and being provided with the industry control PC can be to silicon wafer
The industry PC processor processed by picture；The sorting system includes sorting mechanical arm and sorting case, the sorting machinery
Arm sorts the side that case is placed on sorting mechanical arm, the signal input of the sorting mechanical arm installed in the end of feed belt
End is connected with the signal output part of industry control PC.
Preferably, the industrial camera in the visual pattern acquisition system is carried out to the silicon wafer being placed on feed belt
Take pictures, and the industry PC processor during photo is transmitted to image processing system will be shot, the industry PC processor is to shooting photograph
Piece carries out picture pretreatment, picture segmentation and feature extraction identification successively, then by the information transmission of identification into sorting system
Sorting mechanical arm, control sorting mechanical arm the silicon wafer of different characteristic is sorted to different sorting casees.
Preferably, image pick-up card, image processing software and I O board card, the industry PC are installed on the industry control PC
Machine is connected with the signal input part of sorting system by the signal output part of I O board card, and the industry control PC passes through image pick-up card
Signal input part be connected with the signal output part of industrial camera.The effect of image pick-up card is to store and transmit high-quality silicon
Chip photo, can be instant need to photo to be processed transmit and processed to industry control PC, the effect of IO clamps is instant
Receive the high definition photo of image pick-up card transmission, and be input to image processing software, image processing software can be to shooting
High definition photo carry out pre-processing, split and feature extraction identification, then above- mentioned information is input into sorting system.
Preferably, PLC is installed on sorted mechanical arm, the PLC is connected with industry control PC by I O board card.PLC's
Effect is to receive the sorting information that provides of image processing software, and controls to sort mechanical arm and be sorted to the silicon wafer of different characteristic
Different sorting casees.
Preferably, the lighting source adopts coaxial annular light source, due to the lighting system using annular coaxial, axis light
A bright-field can be created, without perspective distortion, it is adaptable to the situation of flat, glossy surface positioning defect or flaw, Ke Yiti
The accuracy of high industry collected by camera picture.
A kind of beneficial effect of solar energy silicon crystal chip defect automatic checkout equipment that the utility model is provided is：
(1) this solar energy silicon crystal chip defect automatic checkout equipment carries out size survey using the method that machine vision obtains image
Amount and defects detection, it is low to overcome traditional manual detection precision, and subjectivity is strong, repeatable poor, it is impossible to provide and continue unanimously
The deficiencies such as property testing result, missing inspection false drop rate height；
(2) this solar energy silicon crystal chip defect automatic checkout equipment devises coaxial annular for this product of silicon wafer
Illumination optical mode, can be by common deficiency significant difference in background image, so as to bring greatly just for defects detection
Profit；
(3) this solar energy silicon crystal chip defect automatic checkout equipment can ensure that silicon wafer is swimmingly sent to image detection work
Position, moreover it is possible to silicon wafer sizes measurement and defects detection are rapidly carried out based on image processing method and defect is classified, energy
Meet the requirement of real-time on high speed detection line.
Description of the drawings
Fig. 1 is vision detection system structural representation.
Fig. 2 is vision detection system general flow chart.
Fig. 3 is silicon wafer defect and defect classification schematic diagram I.
Fig. 4 is silicon wafer defect and defect classification schematic diagram II.
In figure：1st, feeding mechanical arm；2nd, material trough；3rd, material table；4th, industrial camera；5th, silicon wafer, 6, sorting mechanical arm；
7th, case is sorted；8th, lighting source；9th, feed belt；10th, industry control PC.
Specific embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clear, complete description, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole
Embodiment.The every other embodiment obtained under the premise of creative work is not made by this area ordinary person, belongs to
Protection domain of the present utility model.
Embodiment：A kind of solar energy silicon crystal chip defect automatic checkout equipment.
Shown in seeing figures.1.and.2, a kind of solar energy silicon crystal chip defect automatic checkout equipment, including：Visual pattern collection system
System, image processing system and sorting system；The visual pattern acquisition system is used for being adopted on silicon wafer automatic assembly line automatically
The image of collection silicon wafer, described image processing system is for analyzing the silicon wafer picture for collecting, and silicon wafer picture is carried out
Automatic identification, and the signal of identification is sent to sorting system, sorting system is used for the signal for executing image processing system, sorting
Go out defective silicon wafer, and the silicon wafer of identical defect is sorted in identical sorting case, realize precisely dividing for silicon wafer
Pick.
Shown in seeing figures.1.and.2, the visual pattern acquisition system include feeding mechanical arm 1, material trough 2, material table 3,
Industrial camera 4, lighting source 8 and feed belt 9, the material trough 2 are fixed on 3 table top of material table, and feeding mechanical arm 1 is installed
In 2 side of material trough, in front of feeding mechanical arm 1, industrial camera 4 is just arranged in the middle part of feed belt 9 feed belt 9
Top, lighting source 8 include industry control PC 10, industry control PC installed in the underface of industrial camera 4, described image processing system
Image pick-up card, image processing software and I O board card, signal output of the industry control PC 10 by I O board card are installed in 10
End is connected with the signal input part of PLC, and the feeding mechanical arm 1 in the visual pattern acquisition system will be placed on material trough first
Silicon wafer 5 in 2 takes out and is placed on feed belt 9,9 action of feed belt by silicon wafer 5 transmit to industrial camera 4 just under
Side, industrial camera 4 takes pictures to silicon wafer 5, and will shoot during photo transmitted to image processing system by image pick-up card
Industry control PC 10, and by the image processing software in industry control PC 10 to gather image carry out Image semantic classification, figure successively
As segmentation and feature extraction are recognized；The sorting system includes sorting mechanical arm 6, sorting case 7 and PLC, the sorting mechanical arm 6
Installed in the end of feed belt 9, the side that case 7 is placed on sorting mechanical arm 6 is sorted, PLC is installed in the built-in electricity of material table 3
In control cabinet, the signal input part of the sorting mechanical arm 6 is connected with the signal output part of PLC, and PLC is by I O board card and industry PC
Machine connects, and described image processes software and the picture for gathering is carried out pre-processing, split and feature extraction identifying processing, then will know
The silicon wafer 5 of different characteristic is sorted to difference by the PLC in other information transmission to sorting system, PLC control sorting mechanical arm 6
Sorting case 7.
In the present embodiment, the lighting source 8 adopts coaxial annular light source, due to the lighting system using annular coaxial,
Coaxial luminous energy creates a bright-field, without perspective distortion, it is adaptable to the situation of flat, glossy surface positioning defect or flaw,
The accuracy that industrial camera gathers picture can be improved.
With reference to shown in Fig. 3 and Fig. 4, the silicon wafer defect bag that this solar energy silicon crystal chip defect automatic checkout equipment can be detected
Include light pollution, grid line disappearance, water wave, chipping, unfilled corner, hidden split, black chip, disconnected grid, fragmentation, fault in material, sintering and technique dirty
The various silicon wafer defects such as dye.
The above be preferred embodiment of the present utility model, but the utility model should not be limited to the embodiment and
Accompanying drawing disclosure of that, thus every without departing from the equivalent or modification completed under spirit disclosed in the utility model, all fall
Enter the scope of the utility model protection.
Claims (4)
1. a kind of solar energy silicon crystal chip defect automatic checkout equipment, it is characterised in that include：At visual pattern acquisition system, image
Reason system and sorting system；
The visual pattern acquisition system includes feeding mechanical arm, material trough, material table, industrial camera, lighting source and transmission
Belt, the material trough are fixed on material table table top, and feeding mechanical arm is arranged on material trough side, and feed belt is installed in upper
In front of material mechanical arm, surface of the industrial camera in the middle part of the feed belt, lighting source installed in industrial camera just under
Side；
Described image processing system includes industry control PC, the signal input part of the industry control PC and the signal output of industrial camera
End connection, is provided with the industry PC processor that silicon wafer picture can be processed in the industry control PC；
The sorting system includes sorting mechanical arm and sorting case, and the sorting mechanical arm divides installed in the end of feed belt
The side that case is placed on sorting mechanical arm is picked, the signal input part of the sorting mechanical arm is connected with the signal output part of industry control PC
Connect.
2. solar energy silicon crystal chip defect automatic checkout equipment as claimed in claim 1, it is characterised in that：On the industry control PC
Image pick-up card, image processing software and I O board card are installed, the industry control PC passes through the signal output part of I O board card and divides
Pick the signal input part connection of system, signal of the industry control PC by the signal input part and industrial camera of image pick-up card
Output end connects.
3. solar energy silicon crystal chip defect automatic checkout equipment as claimed in claim 1 or 2, it is characterised in that：The material table
Lower section is provided with electrical control cubicles, is provided with PLC, the signal input part of the sorting mechanical arm and the signal of PLC in the electrical control cubicles
Output end connects, and PLC is connected with industry control PC by I O board card.
4. solar energy silicon crystal chip defect automatic checkout equipment as claimed in claim 1, it is characterised in that：The lighting source is adopted
Use coaxial annular light source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621051119.2U CN206022316U (en) | 2016-09-12 | 2016-09-12 | A kind of solar energy silicon crystal chip defect automatic checkout equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621051119.2U CN206022316U (en) | 2016-09-12 | 2016-09-12 | A kind of solar energy silicon crystal chip defect automatic checkout equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206022316U true CN206022316U (en) | 2017-03-15 |
Family
ID=58258299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621051119.2U Active CN206022316U (en) | 2016-09-12 | 2016-09-12 | A kind of solar energy silicon crystal chip defect automatic checkout equipment |
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| Country | Link |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107966836A (en) * | 2017-11-29 | 2018-04-27 | 南昌工程学院 | TFT-L CD defect optical automatic detection system |
| CN109507199A (en) * | 2018-12-24 | 2019-03-22 | 欣辰卓锐（苏州）智能装备有限公司 | A kind of multi-directional vision detection system simultaneously |
| CN109540904A (en) * | 2018-12-12 | 2019-03-29 | 华侨大学 | A kind of detection of substrate surface gross imperfection and categorizing system |
| CN110270518A (en) * | 2019-07-23 | 2019-09-24 | 格力电器（武汉）有限公司 | Automatic detection equipment for materials |
| CN111141754A (en) * | 2019-12-30 | 2020-05-12 | 上海感图网络科技有限公司 | Device and method for wafer detection based on AI vision |
| CN111855672A (en) * | 2020-07-29 | 2020-10-30 | 佛山市南海区广工大数控装备协同创新研究院 | Method for detecting COF flexible board defects |
-
2016
- 2016-09-12 CN CN201621051119.2U patent/CN206022316U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107966836A (en) * | 2017-11-29 | 2018-04-27 | 南昌工程学院 | TFT-L CD defect optical automatic detection system |
| CN109540904A (en) * | 2018-12-12 | 2019-03-29 | 华侨大学 | A kind of detection of substrate surface gross imperfection and categorizing system |
| CN109507199A (en) * | 2018-12-24 | 2019-03-22 | 欣辰卓锐（苏州）智能装备有限公司 | A kind of multi-directional vision detection system simultaneously |
| CN110270518A (en) * | 2019-07-23 | 2019-09-24 | 格力电器（武汉）有限公司 | Automatic detection equipment for materials |
| CN111141754A (en) * | 2019-12-30 | 2020-05-12 | 上海感图网络科技有限公司 | Device and method for wafer detection based on AI vision |
| CN111855672A (en) * | 2020-07-29 | 2020-10-30 | 佛山市南海区广工大数控装备协同创新研究院 | Method for detecting COF flexible board defects |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191216 Address after: Room A107, research building a, high tech think tank center, Nanhai software technology park, Shishan town, Nanhai District, Foshan City, Guangdong Province (application for residence) Patentee after: Guangdong fozhixin microelectronics technology research Co.,Ltd. Address before: 528200 industry think tank City, Foshan hi tech Zone, Guangdong Patentee before: FOSHAN NANHAI GUANGDONG TECHNOLOGY University CNC EQUIPMENT COOPERATIVE INNOVATION INSTITUTE |
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| TR01 | Transfer of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: An automatic defect detection device for solar silicon wafer Effective date of registration: 20201224 Granted publication date: 20170315 Pledgee: Guangdong Nanhai Rural Commercial Bank branch branch of Limited by Share Ltd. Pledgor: Guangdong fozhixin microelectronics technology research Co.,Ltd. Registration number: Y2020980009995 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Granted publication date: 20170315 Pledgee: Guangdong Nanhai Rural Commercial Bank branch branch of Limited by Share Ltd. Pledgor: Guangdong Xinhua Microelectronics Technology Co.,Ltd.|Guangdong fozhixin microelectronics technology research Co.,Ltd. Registration number: Y2020980009995 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right |