CN203178203U

CN203178203U - Automatic solar silicon wafer color detection device based on machine vision

Info

Publication number: CN203178203U
Application number: CN 201320104833
Authority: CN
Inventors: 潘丰; 李春龙
Original assignee: Jiangnan University
Current assignee: Wuxi IMV Industrial Control Equipment Co., Ltd.
Priority date: 2013-03-06
Filing date: 2013-03-06
Publication date: 2013-09-04
Anticipated expiration: 2023-03-06

Abstract

The utility model belongs to product detection devices and in particular relates to a device for detecting surface color defects of a solar silicon wafer through a machine vision technology. The detected object is the surface color distribution information after the silicon wafer is subjected to a plasma enhanced chemical vapor deposition process. The detection device comprises a feeding station, a vision station and a silicon wafer classification station, wherein the vision station device comprises a light source, a high-speed camera and an industrial personal computer; the industrial personal computer comprises a central processing unit in which image processing software is arranged, and a display; the light source refers to four strip-shaped white fluorescent lamps which are uniformly distributed on the top of a light box; the lower part of the light box is covered by a diffuse reflection plate; the high-speed camera is an area array charge coupled device (CCD) camera and is fixed on the cross rod of the frame; the silicon wafer classification station device is a uniaxial robot. The detection device can be used for stably, accurately and efficiently detecting the surface color defects of the silicon wafer on line in real time.

Description

Solar energy silicon crystal chip color automatic detection device based on machine vision

Technical field

The utility model relates to a kind of solar energy silicon crystal chip color automatic detection device based on machine vision, being used for online automatic detection goes out at process plasma enhanced chemical vapor deposition (Plasma Enhanced Chemical Vapor Deposition, abbreviation PECVD) the operation rear surface produces the defective silicon wafer of colour deficient, belongs to the product detection range.

Background technology

Silicon wafer is the core material of solar cell, and therefore the good and bad Solar cell performance that directly determines of its quality must be rejected when detecting for the silicon wafer that has colour deficient.Characteristics such as the diversity that (comprises jaundice sheet, rubescent, the sheet that turns white, small particles, roller seal, fingerprint color spot, boat pollution color spot, chemical residual product color spot, metaphosphoric acid color spot, aluminium film and the jaundice of technology round dot etc.) because the silicon wafer surface colour deficient, complicacy cause that the research of its detection method is not had substantial progress always, present many manufacture of solar cells producer is mainly still based on the artificial visual detection, this detection method is owing to there being problems such as instability, high fragment rate and low rate, so can't reach the requirement of modern industry production operation.

The utility model content

Deficiency at above technology, the purpose of this utility model is to provide a kind of device of the silicon wafer surface color detection based on machine vision, can real-time online, the stable silicon wafer surface colour deficient that detects accurately and efficiently, automatically take out faulty goods, automatic statistical analysis silicon chip surface quality shows testing result in real time.

The technical scheme that its technical matters that solves the utility model adopts is:

Based on the silicon wafer surface color detection means of machine vision, comprise material loading station, vision station and silicon chip sortation station.Described vision station device comprises light source, high speed camera and industrial computer; Described industrial computer comprises central processing unit and the display of built-in image processing software; Described light source adopts four bar shaped white fluorescent lamps, and it is evenly distributed on the top of lamp box, and the following use diffuse reflector of lamp box hides; Described high speed camera adopts area array CCD camera, is fixed on the cross bar of frame, and by the interface on the camera and described industrial computer communication, adopts the 1394B communication mode; Described silicon chip sortation station device mainly is the single shaft robot.

The utility model also provides a kind of detection method of silicon wafer surface color detection means, may further comprise the steps:

(1) magazine that will fill silicon wafer places assigned address, starting outfit;

(2) put in place signal triggering ccd image harvester action of silicon chip, and the silicon wafer surface image of gathering is sent to graphics processing unit;

(3) after graphics processing unit adopts image filtering technology, color Image Segmentation, coloured image HSI spatial analysis technology etc. to handle the image of gathering in the step (2), and provide the result of processing;

(4) with the feature extraction of the process of the result in the step (3), be converted into digital signal;

(5) gained in the step (4) as a result behind the mode identification method training and testing of process, is divided into good silicon wafer and defect silicon wafer two classes with the silicon wafer surface quality.

(6) classification results is sent to action actuating mechanism, robot takes out the defective silicon chip by PLC control single shaft.

The beneficial effects of the utility model: utilize machine vision technique to gather the image information of silicon wafer surface fast, real-time online is stablized the defect recognition that precise and high efficiency carries out silicon wafer, realizes the robotization that the identification of silicon wafer colour deficient is handled.

Description of drawings

Fig. 1 is based on the solar energy silicon crystal chip color automatic detection device overall layout chart of machine vision.

Fig. 2 is based on the solar energy silicon crystal chip color automatic detection device overall construction drawing of machine vision.

The automatic identification process figure of Fig. 3 silicon wafer colour deficient.

Numbering 1 is air knife in the accompanying drawing 1, the 2nd, and sucker, the 3rd, cylinder, the 4th, the translation module, numbering 5 is high speed cameras, the 6th, fluorescent light, numbering 7 is that the single shaft robot is the sub-material module, the 8th, the buffering pipeline.

Embodiment

Be described further below in conjunction with the embodiment of accompanying drawing to the utility model pick-up unit.

Automatic testing process: the magazine that manually will fill silicon chip is positioned over assigned address; Press the device start button; Cylinder is pulled to material level with magazine; Jacking silicon chip servo action is moved on the silicon chip; The induction of correlation optoelectronic switch; Jacking puts in place; Horizontal mobile module action is to grasping the position; Sucker work; Blow the action of material air knife; Jacking silicon chip module descends; Cylinder moves down; Draw silicon chip; Move on the cylinder; Module moves to the blowing station; Cylinder moves down; Sucker stops suction; Silicon slice placed places on the driving belt line; Silicon chip moves to phase machine testing station; The camera detection of taking pictures; Detection finishes; Silicon chip moves to the check strap line; Silicon chip moves to sortation station; Classification die set, cylinder, sucker action are classified to silicon chip and specify in the charging tray; The equipment actuation cycle.Magazine completely sends induced signal; Equipment downtime; By ACK button; Pull out magazine and get material; Getting material finishes; Press reset button; Magazine is pushed into the branch material level; Induction of signal; The latch location; Close the door.

But the utility model novel detection device real-time online, stable, accurately, efficiently carry out the defect recognition of silicon wafer.

It more than is preferred embodiment of the present utility model, be not that the utility model is done any pro forma restriction, every foundation technical spirit of the present utility model all belongs in the scope of utility model technical scheme any simple modification, equivalent variations and modification that above embodiment does.

Claims

1. based on the solar energy silicon crystal chip color automatic detection device of machine vision, it is characterized in that: pick-up unit comprises material loading station, vision station device and silicon chip sortation station device; Described vision station device comprises industrial computer, light source and high speed camera; Described industrial computer comprises central processing unit and the display of built-in image processing software; Described light source is four bar shaped white fluorescent lamps, and it is evenly distributed on the top of lamp box, and the following use diffuse reflector of lamp box hides; Described high speed camera adopts area array CCD camera, is fixed on the cross bar of frame, and by the interface on the camera and described industrial computer communication, adopts the 1394B communication mode; Described silicon chip sortation station assembling device is the single shaft robot.