CN206004987U - The controlled plasma jet of a kind of working gas and ambient outside air occurs and parameter diagnosis system - Google Patents

The controlled plasma jet of a kind of working gas and ambient outside air occurs and parameter diagnosis system Download PDF

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Publication number
CN206004987U
CN206004987U CN201621047208.XU CN201621047208U CN206004987U CN 206004987 U CN206004987 U CN 206004987U CN 201621047208 U CN201621047208 U CN 201621047208U CN 206004987 U CN206004987 U CN 206004987U
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China
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gas
diagnosis
plasma jet
casing
working gas
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CN201621047208.XU
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Chinese (zh)
Inventor
李陈莹
陈杰
刘洋
张若兵
周志成
李爽
韩倩婷
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State Grid Corp of China SGCC
Shenzhen Graduate School Tsinghua University
Electric Power Research Institute of State Grid Jiangsu Electric Power Co Ltd
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State Grid Corp of China SGCC
Shenzhen Graduate School Tsinghua University
Electric Power Research Institute of State Grid Jiangsu Electric Power Co Ltd
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Abstract

The utility model discloses the controlled plasma jet of a kind of working gas and ambient outside air occurs and parameter diagnosis system, including plasma jet generating means, diagnosis casing and gas control system, jet flow generating apparatus are placed in diagnosis box house, are connected with source of the gas and power supply with circuit interface respectively by diagnosing the gas pipeline interface on wall box;Diagnosis casing has good sealing property, carries out gas regulation by air inlet and gas outlet;Measuring system interface is designed with the wall of side, is diagnosed for the characteristic of plasma.Gas of the gas control system based on flowmeter, in control input to jet flow generating apparatus and diagnosis casing.The utility model can produce plasma jet with different operating gas as needed, and control ambient gas composition, in conjunction with corresponding instrument can the length of plasma jet, temperature, electric current, power and spectral characteristic diagnosed, preferably to study its characteristic.

Description

The controlled plasma jet of a kind of working gas and ambient outside air occurs and ginseng Number diagnostic system
Technical field
The utility model belongs to low-temperature cold plasma technical field, is related to a kind of working gas and ambient outside air can The plasma jet of control occurs and parameter diagnosis system, for different operating gas and the plasma jet under environmental gas Generation and parameter diagnosis.
Background technology
Plasma is particularly low temperature plasma and has a wide range of applications, such as environmental protection, biomedicine, microelectronics, The fields such as material modification, have become as one of focus of current research.Traditional low temperature plasma be mostly at low pressure Produce, need to obtain and vacuum condition is maintained, its production cost is not only increased, also significantly limit answering for plasma With.The appearance of atmosphere pressure plasma jet flow device greatly improves this present situation.Atmos low-temperature plasma jet device Gas temperature can be produced in open space close to the plasma jet of room temperature, compared with conventional plasma body technique, Little with application cost, the low characteristic of jet temperature, it has also become one of research emphasis in plasma direction in recent years.
Although as long as atmosphere pressure plasma jet flow goes out to there is now many decades, people are still not yet ground to its mechanism and characteristic Study carefully thorough.And the working gas of plasma jet and environmental gas have large effect to its characteristic, particularly equity from The application of daughter jet produces the species of the active particle of most important effect and is particularly subject to impact.So the different work of research Under gas and environmental gas, the characteristic of plasma jet has larger help for its application.
Content of the invention
For the problems referred to above, the utility model proposes the controlled plasma of a kind of working gas and ambient outside air is penetrated Stream occurs and parameter diagnosis system, can produce plasma jet with different operating gas as needed, and control environmental gas Composition, in conjunction with corresponding instrument can the length of plasma jet, temperature, electric current, power and spectral characteristic diagnosed, so as to Its characteristic is preferably studied.
Above-mentioned technical purpose is realized, above-mentioned technique effect is reached, the utility model is achieved through the following technical solutions:
The controlled plasma jet of a kind of working gas and ambient outside air occurs and parameter diagnosis system, including examining Disconnected casing, is located at diagnosis box house, outside plasma jet device and gas control system respectively;The plasma Jet flow generating apparatus include ducted body, and the inwall of ducted body is provided with metal derby of the outer surface nothing corner angle, metal derby and ducted body The first side for contacting is connected with the first metal bar through hollow body wall, used as power supply high-field electrode;Metal derby with One side second side in the same direction is provided through the second metal bar of ducted body antetheca, used as the high-field electrode of electric discharge;Ducted body The first glass tube of the second metal bar of parcel is externally provided with, the length of the first glass tube stretches out the portion of ducted body more than the second metal bar Point;First glass pipe outer wall winds sheet metal, and sheet metal is located at glass tube front end, used as earthing pole;Also set on the ducted body There is a working gas input channel, diagnosis casing corresponding position is provided with the first pneumatic joint, working gas input channel is by the One pneumatic joint is connected with gas control system;Described diagnosis casing be respectively arranged on the left side and the right side the second pneumatic joint and the 3rd Pneumatic joint, for coordinating gas control system to realize the input of environmental gas and the discharge of gas;On the diagnosis casing also The through high tension terminal being provided with for being connected with power supply and ground electrode binding post, high tension terminal and ground electrode binding post Also it is connected with the power supply high-field electrode in plasma jet device and earthing pole respectively.
The controlled plasma jet of a kind of described working gas and ambient outside air occurs and parameter diagnosis system, Also at least include one layer of plate with holes for being horizontally arranged at diagnosis box house, the plasma jet device is fixedly mounted on On plate with holes.
On the plate, layout has a series of screwed holes, for fixing and adjusting fluidic device, temperature sensor and spectrum Instrument probe position.
The controlled plasma jet of a kind of described working gas and ambient outside air occurs and parameter diagnosis system, Also include slide block, the slide block is provided with through countersunk head groove and several screwed holes, slide block is using countersunk head groove installed in slotting On plate, each screwed hole is used for being connected with the screwed hole on device to be fixed, for adjusting the position of device to be fixed.
The controlled plasma jet of a kind of described working gas and ambient outside air occurs and parameter diagnosis system, Also include at least one pad, on each pad, screwed hole is equipped with, for pad below device to be fixed, device to be fixed It is fixed on slide block through its screwed hole, for height-fine adjustment.
The cube casing that the diagnosis casing is made for insulating materials, before and after casing, two sides at least one side is detachable.
The gas control system is gas flowmeter array, and flow count number is set according to actual needs, by work gas The source of the gas of body and environmental gas is respectively connecting to the air inlet of corresponding flowmeter, and it is right that the gas outlet of each flowmeter is connected respectively to The working gas that answers merges joint or environmental gas merge joint, and working gas merges joint and environmental gas merge joint and divide It is not connected with the first pneumatic joint and the second pneumatic joint.
The controlled plasma jet of a kind of described working gas and ambient outside air occurs and parameter diagnosis system, Also include power module, the power module is any one in radio-frequency power supply, AC high frequency power source or the pulse power;Power supply mould The high-field electrode of block is connected to diagnosis casing high tension terminal, and is connected with the first metal bar of jet flow generating apparatus;Power module Ground wire be connected to diagnosis casing ground electrode binding post, and with the first glass tube of jet flow generating apparatus outside wind sheet metal phase Even.
The diagnosis casing is provided with for accessing diagnosis box house for fibre optic temperature sensor and spectrum instrument probe Interface;Observation window is additionally provided with diagnosis casing;The noninductive resistance of fixed resistance value and fixing capacitance is additionally provided with the diagnosis casing Iron sheet electric capacity, noninductive resistance and iron sheet electric capacity are connected on the ground electrode binding post of diagnosis casing respectively by single-pole double-throw switch (SPDT) And the ground wire of power module between, being respectively intended to cooperate with oscillograph carries out the measurement of electric current and the measurement of power.
The beneficial effects of the utility model:
The utility model proposes the controlled plasma jet of a kind of working gas and ambient outside air occurs and parameter Diagnostic system, can produce plasma jet with different operating gas as needed, and control ambient gas composition, in conjunction with corresponding Instrument can the length of plasma jet, temperature, electric current, power and spectral characteristic diagnosed, preferably to study which Characteristic.
Description of the drawings
Fig. 1 is a kind of side view of the plasma jet generating means of embodiment of the utility model.
Fig. 2 is a kind of overall structure diagram of embodiment of the utility model.
Fig. 3 is a kind of structural representation of the plate of embodiment of the utility model.
Fig. 4 is a kind of top view of the slide block of embodiment of the utility model.
Fig. 5 is the sectional view of slide block in Fig. 4.
In figure:1 casing air inlet;2 high tension terminals;3 access connecing for diagnosis box house for fibre optic temperature sensor Mouthful;4 interfaces for accessing diagnosis box house for spectrum instrument probe;The air inlet of 5 working gas input channels;6 resistances are fixed Noninductive resistance;7 observation windows;8 slide blocks;9 countersunk head grooves;10 screwed holes;The 11 iron sheet electric capacity that fixes for capacitance;12 ground electricity Pole binding post.
Specific embodiment
In order that the purpose of this utility model, technical scheme and advantage become more apparent, with reference to embodiments, to this Utility model is further elaborated.It should be appreciated that specific embodiment described herein is only in order to explain this practicality New, it is not used to limit the utility model.
Below in conjunction with the accompanying drawings application principle of the present utility model is explained in detail.
As shown in figure 1, the controlled plasma jet of a kind of working gas and ambient outside air occurs and parameter diagnosis System, including diagnosing casing, is located at diagnosis box house, outside plasma jet device and gas control system respectively; The plasma jet generating means includes ducted body, and the rear inwall of ducted body is provided with metal derby of the outer surface nothing corner angle, gold Category block coating insulated paint, for ensureing point discharge inside device, the first side that metal derby is contacted with ducted body Face is connected with the first metal bar through hollow body wall(Preferably, it is clamping), as power supply high-field electrode;Metal derby with One side second side in the same direction is provided through the second metal bar of ducted body antetheca(That is the opposite side of the second metal bar passes through position Just cube is stretched out to the through circular hole of metal derby side in ducted body), as the high-field electrode of electric discharge;Ducted body is externally provided with The first glass tube of the second metal bar is wrapped up, the length of the first glass tube stretches out the part of ducted body more than the second metal bar, make For fluid jet nozzle, it is preferable that the two length difference is 0.5-2cm, is determined according to the disruptive field intensity of working gas and environmental gas, field Qiang Yue little, length difference are bigger, to avoid shielding;First glass pipe outer wall winds sheet metal, used as earthing pole;The ducted body On be additionally provided with working gas input channel, working gas input channel is included the circular hole on ducted body and is connected with circular hole Second glass tube, diagnosis casing corresponding position are provided with the first pneumatic joint, and working gas input channel pneumatic is connect by first Head is connected with gas control system;Described diagnosis casing be respectively arranged on the left side and the right side the second pneumatic joint and the 3rd pneumatic joint (Preferably, it is through double-end pneumatic joint), for coordinating gas control system to realize the input of environmental gas and gas Discharge;The through high tension terminal 2 being additionally provided with the diagnosis casing for being connected with power supply and ground electrode binding post 12, High tension terminal 2 and ground electrode binding post 12 also respectively with plasma jet device in power supply high-field electrode and earthing pole phase Even.Air inlet 5 except working gas input channel and the first glass tube as fluid jet nozzle on plasma jet device Outward, remainder is sealing.
In preferred embodiment of the present utility model, the ducted body is hollow cube;Second metal bar is straight The copper rod of footpath 2mm, the sheet metal are Copper Foil;First glass tube is quartz glass tube;The metal derby is approximate hemisphere Shape metal derby.
As shown in figure 3, the controlled plasma jet of a kind of described working gas and ambient outside air occurs and ginseng Number diagnostic system, also at least includes one layer of plate with holes for being horizontally arranged at diagnosis box house, the plasma jet dress Put and be fixedly mounted on plate with holes.Preferably, when plate only one of which, slot has two, and height is different, can be according to ring Border gas density selects which slot plate is inserted in.
On the plate, layout has a series of screwed holes, for fixing and adjusting fluidic device, temperature sensor and spectrum Instrument probe position.
The controlled plasma jet of a kind of working gas and ambient outside air as described in Figure 4 and 5 occurs and parameter Diagnostic system, also includes slide block 8, and the slide block is provided with through countersunk head groove 9 and several screwed holes 10, and slide block 8 is utilized On plate, each screwed hole 10 is used for being connected with the screwed hole on device to be fixed countersunk head groove 9, to be fixed for adjusting The position of device.
The controlled plasma jet of a kind of described working gas and ambient outside air occurs and parameter diagnosis system, Also include at least one pad, on each pad, screwed hole is equipped with, for pad below device to be fixed, device to be fixed It is fixed on slide block through its screwed hole, for height-fine adjustment.
The diagnosis casing is provided with for accessing diagnosis box house for fibre optic temperature sensor and spectrum instrument probe Interface(3 and 4);Observation window 7 is additionally provided with diagnosis casing(Preferably vitreous observation window), for observe inner case and Photologging;The noninductive resistance 6 of fixed resistance value is additionally provided with the diagnosis casing(Ensure measurement accuracy)With fixing capacitance Iron sheet electric capacity 11(Ensure measurement accuracy), noninductive resistance 6 and iron sheet electric capacity 11 are connected on by single-pole double-throw switch (SPDT) respectively and examine Between the ground electrode binding post of disconnected casing and the ground wire of power module, being respectively intended to cooperate with oscillograph carries out measurement and the work(of electric current The measurement of rate.
The cube casing that the diagnosis casing is made for insulating materials, before and after casing, two sides at least one side is detachable.
The gas control system is gas flowmeter array, and flow count number is set according to actual needs, by work gas The source of the gas of body and environmental gas is respectively connecting to the air inlet of corresponding flowmeter, and it is right that the gas outlet of each flowmeter is connected respectively to The working gas that answers merges joint or environmental gas merge joint, and working gas is merged joint and is connected with the first pneumatic joint, Environmental gas are merged joint and are connected with the second pneumatic joint or the 3rd pneumatic joint.Specifically, can be according to gaseous species demand Increase and decrease flow count number.One section of connection source of the gas of flowmeter, the other end are connected to diagnosis casing air inlet through merging joint.
The controlled plasma jet of a kind of described working gas and ambient outside air occurs and parameter diagnosis system, Also include power module, the power module is any one in radio-frequency power supply, AC high frequency power source or the pulse power;Power supply mould The high-field electrode of block is connected to diagnosis casing high tension terminal 2, and high tension terminal 2 is connected with the first metal bar of jet flow generating apparatus (It is connected with the high-field electrode of jet flow generating apparatus);The ground wire of power module is connected to the ground electrode binding post 12 of diagnosis casing, Ground electrode binding post 12 is connected with the sheet metal wound outside the first glass tube of jet flow generating apparatus(I.e. with jet flow generating apparatus Ground electrode is connected).
In preferred embodiment of the present utility model, the lower left position difference of the top-left position of casing left surface and right flank One Pneumatic quick connector is installed, one of them is used for Input gas, another is used for discharging gas.Have two on the left of casing The individual through binding post with setting spacing, for accessing power supply.Casing is installed above has through double-end pneumatic to connect for diagnosis Head, for the input of working gas.Diagnosis casing front has to be accessed in casing for fibre optic temperature sensor and spectrum instrument probe The interface in portion.Glass window is installed after diagnosis casing, for observing inner case and photologging.Diagnosis casing top The iron sheet electric capacity 11 that the noninductive resistance 6 of resistance fixation and capacitance are fixed is installed, being respectively intended to cooperate with oscillograph carries out electric current Measurement and the measurement of power.
The gas control system includes working gas control system and environmental gas control system, by the gas of gas with various Source is respectively connecting to correspond to the air inlet of flowmeter, and adjusts flowmeter flow as needed, and flowmeter gas outlet is through merging Joint will be respectively fed to after gas mixing in plasma jet device and diagnosis casing, wherein, working gas control system Be connected solely to fluidic device, environmental gas control system is connected solely to casing, can not mixed connection, described gas mixing refers to two The mixing of the internal gas with various component of individual gas control system.Giving vent to anger for working gas control system terminates to diagnosis casing top The first pneumatic joint, and diagnosis box house be connected with the air inlet of jet flow generating apparatus.Environmental gas control system connects To diagnosis casing left surface or the pneumatic joint of right flank, due to needing constantly to be passed through working gas when jet is produced, it is guarantor Card case vivo environment is as far as possible constant, needs constantly to be passed through environmental gas, and discharges gas from another interface of another body side, Need the joint for selecting above or below according to the relative density of environmental gas and working gas and air, select joint and The attracted numbers need to be selected according to environmental gas and working gas relative density and the density contrast with air, and principle is for ensureing sky Gas and working gas can smoothly discharge casing, keep the purity of box house environmental gas.
Jet flow generating apparatus are placed in box box house is diagnosed, and be screwed on plate with holes, jet occurs The air inlet of device, power supply high-field electrode are connected with box house correspondence position respectively with ground electrode.Source of the gas and power supply is opened, and Regulation parameter produces required plasma jet(Work and environmental gas flow, gas component, by adjusting gas control System is realized, and frequency amplitude of power supply etc. is realized by regulation power supply).
Plasma jet carries out parameter diagnosis need to be in conjunction with corresponding instrument, and the utility model only provides one and is easy to measure it Platform, can not substitute measurement apparatus completely.Diagnosis casing can be in conjunction with the temperature of corresponding instrument measurement plasma jet, electricity Stream, power and spectral characteristic.Temperature and spectral characteristic are designed with casing respectively with fibre optic temperature sensor and spectrometer measurement Instrument probe can be accessed box house, and keep the sealing of casing by probe interface.Probe is fixed on plate using fixed mount On, the relative coordinate of probe and jet flow generating apparatus can be adjusted using the screw thread hole array on plate, pad and slide block, flexibly Select measurement position and distance.Electric current and power are then surveyed with reference to oscillograph by the noninductive resistance 6 that installs and electric capacity on casing Amount.Concatenated in incident flow generating apparatus circuit, can just be measured using oscillograph and obtain electric current and power characteristic.
The utility model proposes the controlled plasma jet of a kind of working gas and ambient outside air occurs and parameter Diagnostic system, working gas that can be in plasma jet generating process and environmental gas are controlled, and carry out spy to which Property diagnosis.The system includes plasma jet generating means, box diagnosis casing and gas control system.Jet flow generating apparatus Be placed in diagnosis box house, by diagnose wall box on gas pipeline interface and circuit interface respectively with source of the gas and power supply phase Even.Diagnosis casing has good sealing property, carries out gas regulation by air inlet and gas outlet;Measuring system is designed with the wall of side Interface, is diagnosed for the characteristic of plasma.Gas control system based on flowmeter, send out to jet by control input Gas in generating apparatus and box diagnosis casing.
General principle of the present utility model and principal character and advantage of the present utility model has been shown and described above.One's own profession The technical staff of industry it should be appreciated that the utility model is not restricted to the described embodiments, described in above-described embodiment and specification Simply principle of the present utility model is described, on the premise of without departing from the utility model spirit and scope, the utility model is also Various changes and modifications are had, these changes and improvements are both fallen within the range of claimed the utility model.The utility model Claimed scope is by appending claims and its equivalent thereof.

Claims (9)

1. the controlled plasma jet of a kind of working gas and ambient outside air occurs and parameter diagnosis system, and its feature exists In:Including casing is diagnosed, diagnosis box house, outside plasma jet device and gas control system is located at respectively;Institute Stating plasma jet generating means includes ducted body, and the inwall of ducted body is provided with metal derby of the outer surface nothing corner angle, metal The first side that block is contacted with ducted body is connected with the first metal bar through hollow body wall, used as power supply high-field electrode;Gold The second side with first side in the same direction of category block is provided through the second metal bar of ducted body antetheca, used as the high-tension electricity of electric discharge Pole;Ducted body is externally provided with the first glass tube of the second metal bar of parcel, and the length of the first glass tube is stretched out more than the second metal bar The part of ducted body;First glass pipe outer wall winds sheet metal, and sheet metal is located at glass tube front end, used as earthing pole;In described Working gas input channel is additionally provided with empty body, and diagnosis casing corresponding position is provided with the first pneumatic joint, and working gas is input into Passage is connected with gas control system by the first pneumatic joint;The diagnosis casing to be respectively arranged on the left side and the right side second pneumatic Joint and the 3rd pneumatic joint, for coordinating gas control system to realize the input of environmental gas and the discharge of gas;Described examine The through high tension terminal being additionally provided with disconnected casing for being connected with power supply and ground electrode binding post, high tension terminal and ground Electrode terminal is also connected with the power supply high-field electrode in plasma jet device and earthing pole respectively.
2. the controlled plasma jet of a kind of working gas according to claim 1 and ambient outside air occurs and ginseng Number diagnostic system, it is characterised in that:Also at least include one layer be horizontally arranged at diagnosis box house plate with holes, the grade from Daughter fluidic device is fixedly mounted on plate with holes.
3. the controlled plasma jet of a kind of working gas according to claim 2 and ambient outside air occurs and ginseng Number diagnostic system, it is characterised in that:On the plate, layout has a series of screwed holes, for fixing and adjusting fluidic device, temperature Degree sensor and spectrometer probe positions.
4. the controlled plasma jet of a kind of working gas according to claim 3 and ambient outside air occurs and ginseng Number diagnostic system, it is characterised in that:Also include slide block, the slide block is provided with through countersunk head groove and several screwed holes, Using countersunk head groove on plate, each screwed hole is used for being connected with the screwed hole on device to be fixed slide block, for adjusting The position of device to be fixed.
5. the controlled plasma jet of a kind of working gas according to claim 4 and ambient outside air occurs and ginseng Number diagnostic system, it is characterised in that:Also include at least one pad, on each pad, screwed hole is equipped with, for pad to be fixed Device below, device to be fixed is fixed on slide block through its screwed hole, for height-fine adjustment.
6. the controlled plasma jet of a kind of working gas according to claim 1 and ambient outside air occurs and ginseng Number diagnostic system, it is characterised in that:The diagnosis cube casing made for insulating materials of casing, before and after casing, two sides is at least There is one side detachable.
7. the controlled plasma jet of a kind of working gas according to claim 1 and ambient outside air occurs and ginseng Number diagnostic system, it is characterised in that:The gas control system is gas flowmeter array, and flow count number is according to actual needs Set, the source of the gas of working gas and environmental gas is respectively connecting to the air inlet of corresponding flowmeter, the giving vent to anger of each flowmeter Mouth is connected respectively to corresponding working gas and merges joint or environmental gas merging joint, and working gas merges joint and environment Gas is merged joint and is connected with the first pneumatic joint and the second pneumatic joint respectively.
8. the controlled plasma jet of a kind of working gas according to claim 1 and ambient outside air occurs and ginseng Number diagnostic system, it is characterised in that:Also include power module, the power module is radio-frequency power supply, AC high frequency power source or arteries and veins Rush any one in power supply;The high-field electrode of power module be connected to diagnosis casing high tension terminal, and with jet flow generating apparatus First metal bar is connected;The ground wire of power module is connected to the ground electrode binding post of diagnosis casing, and the with jet flow generating apparatus The sheet metal wound outside one glass tube is connected.
9. the controlled plasma jet of a kind of working gas according to claim 8 and ambient outside air occurs and ginseng Number diagnostic system, it is characterised in that:The diagnosis casing is provided with for accessing for fibre optic temperature sensor and spectrum instrument probe The interface of diagnosis box house;Observation window is additionally provided with diagnosis casing;The noninductive of fixed resistance value is additionally provided with the diagnosis casing Resistance and the iron sheet electric capacity of fixing capacitance, noninductive resistance and iron sheet electric capacity are connected on diagnosis casing respectively by single-pole double-throw switch (SPDT) Ground electrode binding post and the ground wire of power module between, being respectively intended to cooperate with oscillograph carries out the measurement of electric current and the survey of power Amount.
CN201621047208.XU 2016-09-09 2016-09-09 The controlled plasma jet of a kind of working gas and ambient outside air occurs and parameter diagnosis system Active CN206004987U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106231770A (en) * 2016-09-09 2016-12-14 国网江苏省电力公司电力科学研究院 A kind of working gas and the controlled plasma jet of ambient outside air occur and parameter diagnosis system
CN109600900A (en) * 2019-01-23 2019-04-09 电子科技大学 A kind of plasma jet array inhomogeneous plasma generation device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106231770A (en) * 2016-09-09 2016-12-14 国网江苏省电力公司电力科学研究院 A kind of working gas and the controlled plasma jet of ambient outside air occur and parameter diagnosis system
CN109600900A (en) * 2019-01-23 2019-04-09 电子科技大学 A kind of plasma jet array inhomogeneous plasma generation device

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