CN205953540U - Trichlorosilane synthetic furnace waste heat utilization equipment - Google Patents
Trichlorosilane synthetic furnace waste heat utilization equipment Download PDFInfo
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- CN205953540U CN205953540U CN201620941043.4U CN201620941043U CN205953540U CN 205953540 U CN205953540 U CN 205953540U CN 201620941043 U CN201620941043 U CN 201620941043U CN 205953540 U CN205953540 U CN 205953540U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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Abstract
The utility model provides a trichlorosilane synthetic furnace waste heat utilization equipment, the trichlorosilane synthetic furnace includes the furnace body, furnace body top -down divides the multistage into, wherein, waste heat utilization equipment includes that a plurality of covers that press from both sides in the external portion of multi -stage oven are established to the cover respectively, and upper portion entry of every clamp cover links to each other with the import pipeline in order to input the heat transferring medium, and every lower part export of pressing from both sides the cover links to each other in order to export the heat transferring medium after the heat transfer with the outlet line. The utility model discloses can be simply, shift out the excess heat who produces among the reaction sequence effectively.
Description
Technical field
This utility model is related to trichlorosilane production technical field and in particular to a kind of trichlorosilane synthetic furnace UTILIZATION OF VESIDUAL HEAT IN
Device.
Background technology
Trichlorosilane is a kind of key chemical raw material of photovoltaic industry chain leading portion, passes through trichlorine hydrogen using chemical deposition
Silicon can prepare high-purity polycrystalline silicon material, thus obtaining the disorderly arranged polysilicon of crystal face.
At present, the production of trichlorosilane mainly adopts chloridising.Described chloridising is specifically, industrial silica fume and hydrogen chloride exist
Fluid bed synthesis reaction in furnace produces trichlorosilane.This production process is strongly exothermic process, and 1 mole of silica flour reaction generates 1 mole
Trichlorosilane can release 104.39KJ heat.And adopt the suitable reaction temperature that chloridising generates trichlorosilane to be 300-380 DEG C,
Exceed this temperature range and have substantial amounts of silicon tetrachloride byproduct generation.
In order to improve the yield of trichlorosilane, need unnecessary heat removal in course of reaction, thus by trichlorosilane
The temperature control of synthetic furnace is in the range of technological requirement.At present, the method for industrial heat exchange mainly has two kinds, and one kind is only to make
Using hot water heat exchange, fluctuating greatly because hot water temperature is larger with the synthetic furnace temperature difference so that there is system temperature in hot water heat transfer process,
And hot water vaporization is the problems such as lead to equipment, pipe vibration serious；Another kind is only using conduction oil heat exchange, specifically, first
Using conduction oil and synthetic furnace heat exchange, unnecessary heat in synthetic furnace is removed, reuse cooling medium conduction oil is carried out cold
But, but the technics comparing using conduction oil heat exchange is complicated, equipment energy consumption is high, and operating cost is high.
Utility model content
Technical problem to be solved in the utility model be for prior art in the presence of drawbacks described above, one kind is provided
Can be simply and effectively by the trichlorosilane synthetic furnace residual heat using device of the waste heat producing in course of reaction removal.
Solve this utility model technical problem be employed technical scheme comprise that：
This utility model provides a kind of trichlorosilane synthetic furnace residual heat using device, and described trichlorosilane synthetic furnace includes stove
Body, described body of heater is divided into multistage from top to bottom, and wherein, described residual heat using device includes being respectively sleeved at multi-stage oven external body
Multiple chucks, the upper entrance of each chuck is connected with inlet line to input heat transferring medium, the lower part outlet of each chuck
It is connected with outlet line to export the heat transferring medium after heat exchange.
Alternatively, it is equipped with the path making the heat transferring medium of inside spin downwards motion in each chuck.
Alternatively, it is equipped with hydraulic barrier in each chuck, the inner side of described hydraulic barrier is fixed on the outer wall of body of heater,
Outside is contacted with the inwall of chuck, and twist extends downwardly.
Alternatively, at least part of chuck, the heat transferring medium of input is gas medium.
Alternatively, described gas medium is nitrogen or compressed air.
Alternatively, for the chuck of Input gas medium, its outlet line connects to silica powder drying device, so that after heat exchange
Gas medium is dried to industrial silica fume as dried medium.
Alternatively, temperature before the corresponding chuck of input for the described gas medium is 10～25 DEG C.
Alternatively, in remaining chuck, the heat transferring medium of input is liquid medium.
Alternatively, described liquid medium is water, and its temperature before the corresponding chuck of input is 90～100 DEG C.
Alternatively, described residual heat using device also includes multiple single-loop controllers corresponding with multistage body of heater respectively, often
It is equipped with preset temperature range corresponding with this section of body of heater inside individual single-loop controller, the inlet line of each chuck is all provided with
It is equipped with flow control valve, be provided with temperature measurement unit in each chuck corresponding primary reformer body, described single-loop controller
Measured value for the temperature measurement unit in corresponding primary reformer body is more than the corresponding preset temperature range of this section of body of heater
During the upper limit, the aperture of corresponding flow control valve is controlled to increase, and the temperature measurement unit in corresponding primary reformer body
When measured value is less than the lower limit of this section of body of heater corresponding preset temperature range, control the aperture of corresponding flow control valve to reduce or
Person closes.
Beneficial effect：
Body of heater is divided into multistage by trichlorosilane synthetic furnace residual heat using device described in the utility model from top to bottom, and
Outside every section of body of heater, a sheathed chuck, then makes heat transferring medium circulate in each chuck respectively, by reaction in each section of body of heater
During produce waste heat removal, thus realized sectional temperature-controlled using chuck, good effect of heat exchange, structure are simple, energy consumption is low,
Operating cost is low.
Brief description
The schematic diagram of the trichlorosilane synthetic furnace residual heat using device that Fig. 1 provides for this utility model embodiment 1；
The schematic diagram of the trichlorosilane synthetic furnace residual heat using device that Fig. 2 provides for this utility model embodiment 2.
In figure：1- nitrogen inlet main pipe line；1a, 1b, 1c- nitrogen inlet by-pass line；1d- hot water inlet pipeline；2a、
2b, 2c, 2d- flow control valve；3a, 3b, 3c, 3d- chuck；4a, 4b, 4c, 4d- hydraulic barrier；5a, 5b, 5c, 5d- temperature
Degree meter；6a, 6b, 6c- nitrogen outlet by-pass line；7- nitrogen outlet main pipe line；8- hot water outlet pipeline；A- cylinder；B- stove
Body.
Specific embodiment
For making those skilled in the art more fully understand the technical solution of the utility model, with reference to the accompanying drawings and examples
This utility model is described in further detail.
This utility model provides a kind of trichlorosilane synthetic furnace residual heat using device.Wherein, trichlorosilane synthetic furnace includes
The cylinder A setting gradually from top to bottom and body of heater B (referring to Fig. 1 and Fig. 2), and body of heater B is divided into multistage from top to bottom, and stove
There is chlorination reaction to generate trichlorosilane in body B.
Described residual heat using device includes the multiple chucks being respectively sleeved at multi-stage oven external body, and every section of body of heater is all corresponding
One chuck, the upper entrance of each chuck is connected to input heat transferring medium with inlet line, the lower part outlet of each chuck with
Outlet line is connected to export the heat transferring medium after heat exchange.Wherein, the division hop count (corresponding with the quantity of chuck) of body of heater B,
And the height of every section of body of heater can be set according to practical situation by those skilled in the art, certainly, the quantity of chuck is more,
Heat transfer effect is better, but cost is also higher；The quantity of chuck is fewer, and cost is lower, but heat transfer effect is also poorer.
It should be noted that should be reserved with gap between adjacent chuck, the width in this gap at least should meet adjacent chuck
Deformation quantity during expanded by heating, it is to avoid adjacent chuck is pressed against each other in expanded by heating and affects service life.On each chuck
In addition to upper inlet with lower part outlet, remaining position is all airtight, to prevent heat exchanging medium flow from going out, affects heat transfer effect.And
And, residual heat using device described in this utility model embodiment is particularly suited for the trichlorosilane synthesis that the height of body of heater B is more than 10m
Stove.
In each chuck, the path making its internal heat transferring medium spin downwards motion can be set, so that heat exchange
Medium, after the input of the top of this chuck, is spinned downwards along described path and is moved and constantly absorb heat, and after heat exchange (i.e.
After intensification) heat transferring medium from this chuck bottom export.
Specifically, it is equipped with hydraulic barrier in each chuck, the inner side of described hydraulic barrier is fixed on the outer wall of body of heater,
Outside is contacted with the inwall of chuck, and twist extends downwardly.In the presence of hydraulic barrier, heat transferring medium is along along chuck
The helical space that hydraulic barrier is formed is spinned downwards motion, to extend the time of contact of heat transferring medium and body of heater, makes heat exchange
More abundant.
When trichlorosilane synthetic furnace production capacity is less, and course of reaction heat release is less, make heat transferring medium in all chucks all
Heat exchange demand just can be met using gas medium；And work as trichlorosilane synthetic furnace production capacity greatly, when course of reaction thermal discharge is more, by
Thermal capacitance in gas medium is much smaller than liquid medium, now only carrys out heat exchange using gas medium and cannot meet changing of technique needs
Heat, now can make the heat transferring medium in partial jacket adopt gas medium, and the heat transferring medium in remaining chuck adopts liquid
Medium, to improve heat exchange amount.
Wherein, if heat transferring medium is gas medium, this gas medium can be nitrogen or compressed air.And, institute
Stating temperature before input chuck for the gas medium is 10～25 DEG C (i.e. normal temperature state), after chuck output (i.e. after heat exchange)
Temperature is more than 250 DEG C.
Inventor finds, due to containing a certain amount of free moisture content in industrial silica fume, therefore before producing trichlorosilane, needs
By this partly free moisture content remove, silica flour otherwise can be caused to lump, the fluidized reaction effect of impact trichlorosilane synthetic furnace and
Long period even running.At present, high temperature nitrogen is usually used in actual production industrial silica fume is dried, specifically, first
Using electric heater, nitrogen is heated to more than 200 DEG C, then so that the high temperature nitrogen after heating is contacted to remove silicon with silica flour
Moisture in powder, thus the moisture in silica flour is controlled in certain scope.But, above-mentioned carry out drying using high temperature nitrogen
Silica flour method has that energy consumption is higher, thus affecting the production cost of trichlorosilane.
And in this utility model embodiment, due to being used nitrogen or compressed air to carry out after heat exchange as gas medium, gas
Body medium understands the amount of heat of releasing during absorbing reaction, and temperature is improved significantly, then just can utilize heat exchange
Nitrogen afterwards or the heat of compressed air are low silica flour, process is simple, energy consumption are dried, thus solving existing silica flour method to be dried
The higher problem of energy consumption.
Specifically, for the chuck of Input gas medium, its outlet line connects to silica powder drying device, so that after heat exchange
Gas medium is dried to industrial silica fume as dried medium, realizes the recovery of heat during trichlorosilane produces, reduces trichlorine
The production cost of hydrogen silicon, improves trichlorosilane synthetic furnace traveling comfort simultaneously.It should be noted that adopting compressed air
During as heat transferring medium, then silica powder drying device after hours, needs to carry out charging and discharging type displacement using nitrogen to silica powder drying device
3-5 time, the oxygen content in silica powder drying device is controlled below 1%.
The gas additionally, bottom of silica powder drying device is provided with gas distributor, after the heat exchange of corresponding chuck output
Medium is introduced into gas distributor, contacts with the silica flour in silica powder drying device, it is to avoid silica powder drying after gas is evenly distributed again
During there is dead angle it is ensured that be dried adequacy.The top of silica powder drying device is connected with fiber bag precipitator so that silica flour is done
The silicon powder particle taken out of by air-flow during dry is reclaimed through fiber bag precipitator, it is to avoid silica flour wastes.
If heat transferring medium is liquid medium, this liquid medium can be water.And, described liquid medium is in input chuck
Temperature before is 90-100 DEG C, and after chuck output, close to 100 DEG C, in other words, liquid medium exists the temperature of (i.e. after heat exchange)
Temperature difference before and after heat exchange, at 10 DEG C about, to reduce its temperature fluctuation range as far as possible, mitigates and even avoids because of hot water vaporization
The problems such as equipment that leads to, pipe vibration are serious.
And, for the chuck of infusion fluid medium, its outlet line connects to flash tank, with the liquid after heat exchange
Medium produces low-pressure steam and uses for lower procedure, and the complete liquid medium temperature step-down of flash distillation can be returned by JI pipeline
It is back to corresponding chuck, continues to participate in heat exchange, thus realizing recycling.
In theory, the temperature in each section of body of heater should be identical, but in fact, due to there is a variety of causes, leads to stove
There is the temperature difference between the top and bottom of body, and more down temperature is higher.Therefore, if the heat transferring medium in partial jacket adopts gas
Body medium, and the heat transferring medium in remaining chuck adopts liquid medium, more preferably, makes the part (near bottom of furnace body
Or multiple) heat transferring medium in chuck adopts liquid medium, to improve heat exchange amount.
In order to need to adjust the flow of heat transferring medium according to the reaction in trichlorosilane synthetic furnace, thus by trichlorine hydrogen
The temperature control of silicon synthetic furnace in suitable scope, can to the temperature in each section of body of heater with input changing to corresponding chuck
The flow of thermal medium carries out unity loop control respectively.Specifically, described residual heat using device also include respectively with multistage body of heater pair
The multiple single-loop controllers (that is, every section of body of heater all corresponds to a single-loop controller) answered, inside each single-loop controller
It is equipped with preset temperature range corresponding with this section of body of heater, the difference of the corresponding preset temperature range of adjacent two-stage furnace body is 10 DEG C of left sides
The right side, the inlet line of each chuck is provided with flow control valve (that is, each chuck all corresponds to a flow control valve), often
It is provided with temperature measurement unit (thermometer) in the corresponding primary reformer body of individual chuck, and the measurement end of this temperature measurement unit can
Go deep into the near middle of this section of body of heater, more accurately to measure the temperature of this section of body of heater.Described single-loop controller is used for right
When the measured value of the temperature measurement unit in primary reformer body answered is more than the upper limit of this section of body of heater corresponding preset temperature range, control
The aperture making corresponding flow control valve increases, to improve the flow of heat transferring medium, thus improving heat exchange amount；And corresponding
When the measured value of the temperature measurement unit in primary reformer body is less than the lower limit of this section of body of heater corresponding preset temperature range, it is right to control
The aperture of the flow control valve answered is reduced or turned off, to reduce the flow of heat transferring medium, thus reducing heat exchange amount, stove the most at last
Internal temperature control is within the scope of technological requirement.
It can be seen that, residual heat using device described in this utility model embodiment has following remarkable result：
Advanced technology：It is used nitrogen or compressed air to carry out the nitrogen after heat exchange, after recyclable heat exchange as heat transferring medium
Or compressed air heat is used for the drying of industrial silica fume, simplifies the technological process of existing silica powder drying, reduce silica flour simultaneously
Cost in dry run；
Operating cost is low：Avoid using equipment such as heat exchanger, electric heaters, reduce energy consumption and the maintenance cost of equipment,
Reduce live staff labor intensity simultaneously；
Also have technique unique it is easy to operation, the features such as service life of equipment is long.
With reference to Fig. 1 and embodiment 1, and Fig. 2 and embodiment 2 describe trichlorosilane described in the utility model in detail and close
Become stove residual heat using device.
Embodiment 1：
As shown in figure 1, the present embodiment provides a kind of trichlorosilane synthetic furnace residual heat using device.For trichlorosilane synthesis
Stove production capacity is less, the less situation of chlorination reaction process heat release, and described residual heat using device includes being respectively sleeved at three sections of bodies of heater
Three outside chucks 3a, 3b and 3c, the upper entrance of chuck 3a is connected with nitrogen inlet by-pass line 1a, and nitrogen inlet arm
Flow control valve 2a is provided with line 1a, the upper entrance of chuck 3b is connected with nitrogen inlet by-pass line 1b, and nitrogen inlet is propped up
Flow control valve 2b is provided with pipeline 1b, the upper entrance of chuck 3c is connected with nitrogen inlet by-pass line 1c, and nitrogen inlet
Flow control valve 2c is provided with by-pass line 1c, and one end of nitrogen inlet main pipe line 1 and nitrogen inlet by-pass line 1a, 1b and 1c
It is connected, the other end is connected with nitrogen storage device (not shown), thus by (10～25 DEG C) of nitrogen at room by each nitrogen
Gas entrance branch line inputs to each chuck.
It is provided with the hydraulic barrier 4a twist extending downwardly in chuck 3a, in corresponding primary reformer body, be provided with thermometer
5a, is provided with the hydraulic barrier 4b twist extending downwardly in chuck 3b, be provided with thermometer 5b in corresponding primary reformer body, folder
It is provided with, in set 3c, the hydraulic barrier 4c twist extending downwardly, in corresponding primary reformer body, be provided with thermometer 5c.
The lower part outlet of chuck 3a is connected with nitrogen outlet by-pass line 6a, the lower part outlet of chuck 3b and nitrogen outlet arm
Line 6b is connected, and the lower part outlet of chuck 3c is connected with nitrogen outlet by-pass line 6c, and one end of nitrogen outlet main pipe line 7 and nitrogen
Outlet stool line 6a, 6b are connected with 6c, and the other end is connected with silica powder drying device.
After trichlorosilane synthetic furnace is started working, in chlorination reaction process, the heat of release makes setting in each section of body of heater
The measured value of thermometer 5a, 5b and 5c is gradually increasing, when the measured value of thermometer 5a, 5b or 5c exceedes that section of body of heater pair that it is located
During the upper limit of the preset temperature range answered, the nitrogen opening that section of body of heater corresponding chuck top connection that temperature exceedes the upper limit enters
Flow control valve on mouthful by-pass line, so that nitrogen at room enters from corresponding chuck top, and the work of internally hydraulic barrier
With under spin from top to bottom motion (as shown in the helix in Fig. 1) around furnace body outer wall, so that nitrogen is connect with furnace body outer wall
Touch is conducted heat, thus heated simultaneously in nitrogen, the body of heater of corresponding section is cooled, heat exchange finish after hot nitrogen from corresponding
The nitrogen outlet by-pass line that chuck bottom connects flows out, and collects and exports to silica powder drying device to nitrogen outlet main pipe line 7, is used for
Silica flour is dried.
It is respectively the temperature of the aperture of flow control valve 2a, 2b and 2c on nitrogen inlet by-pass line and setting in each section of body of heater
Degree meter 5a, 5b and 5c setting unity loop control, according to technological requirement for each section of body of heater arrange preset temperature range (include the upper limit with
Lower limit), when the measured value of thermometer 5a, 5b or 5c in certain section of body of heater is more than the upper of the corresponding preset temperature range of this section of body of heater
In limited time, the aperture controlling corresponding flow control valve 2a, 2b or 2c increases, to improve the flow of nitrogen, thus improving heat exchange amount；
When the measured value of thermometer 5a, 5b or 5c in certain section of body of heater is less than the lower limit of the corresponding preset temperature range of this section of body of heater,
The aperture controlling corresponding flow control valve 2a, 2b or 2c is reduced or turned off, to reduce the flow of nitrogen, thus reducing heat exchange
Amount, the temperature control in the most whole section of body of heater within the scope of technological requirement.
Embodiment 2：
As shown in Fig. 2 the present embodiment provides a kind of trichlorosilane synthetic furnace residual heat using device, for trichlorosilane synthesis
Stove production capacity is larger, the more situation of chlorination reaction process heat release, and described residual heat using device includes being respectively sleeved at three sections of bodies of heater
Three outside chucks 3a, 3b and 3d, the upper entrance of chuck 3a is connected with nitrogen inlet by-pass line 1a, and nitrogen inlet arm
Flow control valve 2a is provided with line 1a, the upper entrance of chuck 3b is connected with nitrogen inlet by-pass line 1b, and nitrogen inlet is propped up
Flow control valve 2b is provided with pipeline 1b, the upper entrance of chuck 3d is connected with hot water inlet pipeline 1d, thus by hot water
(90-100 DEG C) inputs to chuck 3d, and is provided with flow control valve 2d on hot water inlet pipeline 1d, and nitrogen inlet house steward
One end of line 1 is connected with nitrogen inlet by-pass line 1a and 1b, and the other end is connected with nitrogen storage device (not shown), thus
Nitrogen at room (10～25 DEG C) is inputted to each chuck by each nitrogen inlet by-pass line.
It is provided with the hydraulic barrier 4a twist extending downwardly in chuck 3a, in corresponding primary reformer body, be provided with thermometer
5a, is provided with the hydraulic barrier 4b twist extending downwardly in chuck 3b, be provided with thermometer 5b in corresponding primary reformer body, folder
It is provided with, in set 3d, the hydraulic barrier 4d twist extending downwardly, in corresponding primary reformer body, be provided with thermometer 5d.
The lower part outlet of chuck 3a is connected with nitrogen outlet by-pass line 6a, the lower part outlet of chuck 3b and nitrogen outlet arm
Line 6b is connected, and one end of nitrogen outlet main pipe line 7 is connected with nitrogen outlet by-pass line 6a and 6b, the other end and silica powder drying device
It is connected.The lower part outlet of chuck 3d is connected with one end of hot water outlet pipeline 8, the other end of hot water outlet pipeline 8 and flash tank
It is connected, the low-pressure steam that flash tank produces exports and uses to lower procedure, and the complete hot water temperature of flash distillation declines, then via hot water
Inlet line 1d is back to chuck 3d and continues to participate in heat exchange.
For the trichlorosilane synthetic furnace that production capacity is larger, there is substantial amounts of reaction heat release in course of reaction, because gas is situated between
The thermal capacitance of matter is much smaller than liquid medium, therefore all chucks all can not meet the heat exchange of technique needs using gas heat exchange medium
Amount, uses hot water heat exchange to chuck 3d therefore in the present embodiment, to improve heat exchange amount.
After trichlorosilane synthetic furnace is started working, in chlorination reaction process, the heat of release makes setting in each section of body of heater
The measured value of thermometer 5a, 5b and 5d is gradually increasing.
When the measured value of thermometer 5a or 5b exceedes the upper limit of the corresponding preset temperature range of that section of body of heater that it is located, beat
Open temperature exceed the upper limit that section of body of heater corresponding chuck top connect nitrogen inlet by-pass line on flow control valve 2a or
2b so that nitrogen at room enters from corresponding chuck top, and internally in the presence of hydraulic barrier around furnace body outer wall from upper and
Under spin motion (as shown in the helix in Fig. 2), make nitrogen and furnace body outer wall carry out contact heat transfer, thus in nitrogen quilt
While heating, the body of heater of corresponding section is cooled, and the nitrogen that connects from corresponding chuck bottom of hot nitrogen after heat exchange finishes goes out
Mouth by-pass line flows out, and collects and exports to silica powder drying device to nitrogen outlet main pipe line 7, is used for silica flour is dried.
When the measured value of thermometer 5d exceedes the upper limit of the corresponding preset temperature range of that section of body of heater that it is located, open folder
The flow control valve 2d on hot water inlet pipeline 1d that set 3d top connects, so that hot water enters from chuck 3d top, and including
Spin from top to bottom motion (as shown in the helix in Fig. 2) around furnace body outer wall in the presence of portion hydraulic barrier 4d, make hot water
Carry out contact heat transfer with furnace body outer wall, thus heated simultaneously in hot water, the body of heater of corresponding section is cooled, after heat exchange finishes
The hot water outlet pipeline 8 that connects from chuck 3d bottom of hot water export to flash tank to produce low-pressure steam, the complete hot water of flash distillation
It is back to chuck 3d via hot water inlet pipeline 1d again and continue to participate in heat exchange.
The aperture of flow control valve 2a and 2b respectively on nitrogen inlet by-pass line, the flow on hot water inlet pipeline 1d
The aperture of regulating valve 2d and thermometer 5a, 5b and 5d setting unity loop control of setting in each section of body of heater, according to technological requirement be
Each section of body of heater setting preset temperature range (including the upper limit and lower limit), when the measurement of thermometer 5a, 5b or 5d in certain section of body of heater
Value more than the corresponding preset temperature range of this section of body of heater the upper limit when, control the aperture of corresponding flow control valve 2a, 2b or 2d
Increase, to improve the flow of nitrogen/hot water, thus improving heat exchange amount；Measurement as thermometer 5a, 5b or 5d in certain section of body of heater
Value less than the corresponding preset temperature range of this section of body of heater lower limit when, control the aperture of corresponding flow control valve 2a, 2b or 2d
It is reduced or turned off, to reduce the flow of nitrogen/hot water, thus reducing heat exchange amount, the temperature control in the most whole section of body of heater
Within the scope of technological requirement.
In sum, trichlorosilane synthetic furnace residual heat using device described in the utility model can be empty using nitrogen, compression
, as heat transferring medium, when being used nitrogen or compressed air as heat transferring medium, the nitrogen after heat exchange or compression are empty for gas or hot water
Gas can be used for industrial silica fume is dried, and on the one hand reduces the cost during silica powder drying, on the other hand avoids using
The equipment such as heat exchanger, electric heater, reduce energy consumption and the maintenance cost of equipment；When being used hot water as heat transferring medium, can
Improve heat exchange amount, select suitable heat transferring medium simply and effectively many by produce in course of reaction according to practical situation
Waste heat amount removes, and makes full use of this waste heat.
It is understood that embodiment of above be merely to illustrate that principle of the present utility model and adopt exemplary
Embodiment, but this utility model is not limited thereto.For those skilled in the art, without departing from this
In the case of the spirit of utility model and essence, various modifications and improvement can be made, these modifications and improvement are also considered as this reality
With new protection domain.
Claims (10)
1. a kind of trichlorosilane synthetic furnace residual heat using device, described trichlorosilane synthetic furnace includes body of heater, and described body of heater is from upper
And under be divided into multistage it is characterised in that described residual heat using device includes being respectively sleeved at multiple folders of multi-stage oven external body
Set, the upper entrance of each chuck is connected with inlet line to input heat transferring medium, the lower part outlet of each chuck and outlet
Line is connected to export the heat transferring medium after heat exchange.
2. residual heat using device according to claim 1 is it is characterised in that be equipped with the heat exchange making inside in each chuck
Medium is spinned downwards the path of motion.
3. residual heat using device according to claim 2 is it is characterised in that be equipped with hydraulic barrier in each chuck, institute
The inner side stating hydraulic barrier is fixed on the outer wall of body of heater, outside is contacted with the inwall of chuck, and twist extends downwardly.
4. the residual heat using device according to any one of claim 1-3 is it is characterised in that input at least part of chuck
Heat transferring medium be gas medium.
5. residual heat using device according to claim 4 is it is characterised in that described gas medium is nitrogen or compression is empty
Gas.
6. it is characterised in that chuck for Input gas medium, it goes out residual heat using device according to claim 4
Mouth pipeline connects to silica powder drying device, so that the gas medium after heat exchange is dried to industrial silica fume as dried medium.
7. residual heat using device according to claim 4 it is characterised in that described gas medium the corresponding chuck of input it
Front temperature is 10～25 DEG C.
8. residual heat using device according to claim 4 is it is characterised in that the heat transferring medium inputting in remaining chuck is liquid
Body medium.
9., it is characterised in that described liquid medium is water, it is right in input for residual heat using device according to claim 8
The temperature before chuck is answered to be 90～100 DEG C.
10. the residual heat using device according to any one of claim 1-3 it is characterised in that also include respectively with multistage
The corresponding multiple single-loop controllers of body of heater, are equipped with preset temperature corresponding with this section of body of heater inside each single-loop controller
Scope, the inlet line of each chuck is provided with flow control valve, is provided with each chuck corresponding primary reformer body
Temperature measurement unit, the measured value of the temperature measurement unit that described single-loop controller is used in corresponding primary reformer body is more than
During the upper limit of the corresponding preset temperature range of this section of body of heater, control the aperture of corresponding flow control valve to increase, and corresponding to
Primary reformer body in temperature measurement unit measured value be less than the corresponding preset temperature range of this section of body of heater lower limit when, control
The aperture of corresponding flow control valve is reduced or turned off.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620941043.4U CN205953540U (en) | 2016-08-25 | 2016-08-25 | Trichlorosilane synthetic furnace waste heat utilization equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620941043.4U CN205953540U (en) | 2016-08-25 | 2016-08-25 | Trichlorosilane synthetic furnace waste heat utilization equipment |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110817884A (en) * | 2019-12-10 | 2020-02-21 | 唐山三孚硅业股份有限公司 | Silicon tetrachloride synthetic furnace of high conversion |
| US11612869B2 (en) * | 2017-11-20 | 2023-03-28 | Tokuyama Corporation | Production method for trichlorosilane, and pipe |
| US11878281B2 (en) | 2018-06-12 | 2024-01-23 | Ihi Corporation | Reactor with jig provided in pipe for temperature measurement |
-
2016
- 2016-08-25 CN CN201620941043.4U patent/CN205953540U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11612869B2 (en) * | 2017-11-20 | 2023-03-28 | Tokuyama Corporation | Production method for trichlorosilane, and pipe |
| US11878281B2 (en) | 2018-06-12 | 2024-01-23 | Ihi Corporation | Reactor with jig provided in pipe for temperature measurement |
| CN110817884A (en) * | 2019-12-10 | 2020-02-21 | 唐山三孚硅业股份有限公司 | Silicon tetrachloride synthetic furnace of high conversion |
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Assignee: Xinte silicon based new materials Co.,Ltd. Assignor: XINTE ENERGY Co.,Ltd. Contract record no.: X2023990000586 Denomination of utility model: A waste heat utilization device for Trichlorosilane synthesis furnace Granted publication date: 20170215 License type: Common License Record date: 20230605 |
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