CN205942088U - Become modulation of micro -nano light field of parameter and photolithography system in real time - Google Patents
Become modulation of micro -nano light field of parameter and photolithography system in real time Download PDFInfo
- Publication number
- CN205942088U CN205942088U CN201620007579.9U CN201620007579U CN205942088U CN 205942088 U CN205942088 U CN 205942088U CN 201620007579 U CN201620007579 U CN 201620007579U CN 205942088 U CN205942088 U CN 205942088U
- Authority
- CN
- China
- Prior art keywords
- light
- modulation
- micro
- optical
- subcomponent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000206 photolithography Methods 0.000 title abstract 2
- 230000003287 optical effect Effects 0.000 claims abstract description 100
- 230000011218 segmentation Effects 0.000 claims abstract description 9
- 230000008859 change Effects 0.000 claims description 19
- 239000002086 nanomaterial Substances 0.000 claims description 14
- 238000000025 interference lithography Methods 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 230000010287 polarization Effects 0.000 claims description 2
- 239000004744 fabric Substances 0.000 claims 1
- 230000033228 biological regulation Effects 0.000 abstract description 2
- 238000001259 photo etching Methods 0.000 abstract description 2
- 239000000571 coke Substances 0.000 abstract 1
- 238000001514 detection method Methods 0.000 abstract 1
- 238000000926 separation method Methods 0.000 abstract 1
- 230000005540 biological transmission Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000002360 preparation method Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- 230000002452 interceptive effect Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000010363 phase shift Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000005441 aurora Substances 0.000 description 2
- 230000001427 coherent effect Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000003390 bioluminescence detection Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Landscapes
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
The application discloses become modulation of micro -nano light field of parameter and photolithography system in real time, this light field modulating system includes the light source, 4F optical system and light wave modulation optical component group, 4F optical system includes a optical components and the 2nd optical components who follows the light path and set gradually, light wave modulation optical component group sets up between a optical components and the 2nd optical components, this light wave modulation optical component group is through the segmentation modulation of antithetical phrase wave face, back coke side in the system produces pattern and the distribution of structural parameters adjustable light field. The utility model discloses a separation on antithetical phrase wave face, real -time regulation and control are realized to the sub -element, and through changing the real time output that sub - element combination mode can realize different micro -nano patterns, but relative position changes the modulation of continuous wave of implementation structure parameter between position through the sub -element or sub -element. This system can integrate in various photoetching or microscope system in a flexible way, realizes becoming writing into in real time and can modulating little nanostructured optical detection of the little nanostructured of parameter.
Description
Technical field
The utility model is related to a kind of modulation of real time-varying parameter micro-nano light field with etching system and in particular to how sub one kind is
Corrugated is real-time, discrete, the change parameter light field modulating system of continuous modulation, be applied to micro nano structure processing, confocal laser micro-
Imaging, bioluminescence detection and micro-nano Shape measure.
Background technology
Interference lithography or holographic lithography are a kind of technology efficiently preparing large format micro nano structure, interference lithography preparation
Micro nano structure, its cycle is jointly determined that (cycle size is directly proportional to interference wave length, and dry by the wavelength of interfering beam to angle
The sine value relating to beam angle is inversely proportional to)；Its orientation is determined by the wave vector of interfering beam；Its striped phase mehtod is by interfering beam
Relative phasic difference determine.Interference lithography can be micro nano structure in photon with the other technologies such as independent assortments such as evaporation, etching
The application in the fields such as crystal, biomedicine, microelectronics provides basis.
Interference lithography system be divided into a point amplitude (Amplitude-splitting configurations) interference system and
Wave-front division (Wavefront-splitting configurations) interference system, two kinds of systems all will be entered by light-splitting device
Penetrate light be divided into two bundles or two bundle above coherent lights interfered, generally select semi-transparent semi-reflecting lens, prism, grating, diffractive masks with
And Lloyd ' s mirror etc. is as light-splitting device.No matter which kind of light-splitting device multiple-beam interference is realized using, the micro-nano knot of its preparation
The structural parameters of structure are fixed value, can not real-time change.Even if adopting universal mirror (gimbal mirror), also can only be limited
In the range of change cycle of micro nano structure, and be based on gimbal mirror performance period and two kinds of parameters of orientation become in real time
The interference system changed, its optical setup is sufficiently complex.
For realize micro nano structure null tone modulation, patent U.S.patent 5,132,812 and its improve patent
U.S.patent 5,262,879, U.S.patent 5,822,092 and U.S.patent 5,132,812 pass through three groups of differences
The beam interference of angle defines the grating pixel of three kinds of different null tone it is achieved that the discrete modulation of space frequency.Chinese patent
CN01134127.0,200510095775.2,200510095776.7, CN201010238377.2 and
CN201010503788.X disclose a kind of using binary raster as beam splitter, by the spectro-grating of the different null tone of switching Lai
Realize the discrete modulation of null tone.
And it is currently based on the new material of micro nano structure, such as new color shows, RGB 3D shows and super clever surface
Material (metasurface), proposes the need of the parameters such as cycle, orientation, dutycycle or even pattern preparation in real time to etching system
Ask.
Utility model content
The purpose of this utility model is to provide a kind of modulation of real time-varying parameter micro-nano light field and etching system, can be flexible
It is integrated in various etching systems, realize the real-time preparation of micro nano structure, also can be integrated in various microscopic systems, providing can
Modulated structure optical illumination.
For achieving the above object, the utility model provides following technical scheme：
The embodiment of the present application discloses a kind of micro-nano light field modulating system of real time-varying parameter, including light source, 4F optical system
System and Light Modulation optical component group, described 4F optical system includes the first optical module and second setting gradually along light path
Optical module, described Light Modulation optical component group is arranged between described first optical module and the second optical module, should
Light Modulation optical component group passes through the segmentation modulation of antithetical phrase corrugated, produces pattern in the back focal plane of system and its structural parameters can
The optical field distribution adjusted.
In this technical scheme, the first optical module and the second optical module can for independent lens or
The combination that multiple lens are constituted.
Preferably, in above-mentioned real time-varying parameter micro-nano light field modulating system, described structural parameters include the cycle, take
To, phase place and dutycycle.
Preferably, in above-mentioned real time-varying parameter micro-nano light field modulating system, described optical field distribution is interference figure.
Preferably, in above-mentioned real time-varying parameter micro-nano light field modulating system, described first optical module and second
Optical module is lens, lens group, super clever surface device or micro nano structure.
Preferably, in above-mentioned real time-varying parameter micro-nano light field modulating system, described Light Modulation optical component
Group includes multiple subcomponents, by realizing the different light fields to each wavelet face from different subcomponents or different combinations
Modulation, and the back focal plane in system produces the optical field distribution realizing different pattern；Described subcomponent passes through change in displacement or rotation
Realize the light field modulation to each wavelet face, and the back focal plane in system produces the adjustable optical field distribution of structural parameters.
In this technical scheme, subcomponent in real time, independently can be modulated for different wavelet faces, subcomponent motion mode, by
Computer and precise control system complete jointly.
In this technical scheme, subcomponent can be any period structure or aperiodic structure.
Preferably, in above-mentioned real time-varying parameter micro-nano light field modulating system, described Light Modulation optical component
Group includes multistage sub- device group along optical path direction, and every grade of sub- device group includes at least one described subcomponent, is wherein located at rear one
The sub- device group of level is in order to the wavelet face modulated in real time on corrugated after previous stage is modulated.
In this technical scheme, the modulation at this refers to that antithetical phrase corrugated light is realized in movement by subcomponent and/or rotation
The change of bundle route.
Preferably, in above-mentioned real time-varying parameter micro-nano light field modulating system, described optical component group also can be wrapped
Containing the combination of one or more of adjustable diaphragm, grayscale mask, polarization conversion device.
Preferably, in above-mentioned real time-varying parameter micro-nano light field modulating system, described light source includes laser.Further
Ground, light source is provided by laser instrument or other coherent sources.The incident light that it produces is directional light.
The embodiment of the present application also discloses a kind of interference lithography system of micro nano structure, including described real time-varying parameter
Micro-nano light field modulating system.
In this technical scheme, the different wavelet faces after modulation form multichannel light beam in the back focal plane of 4F system, different
Light beam can interfere in overlapping region, can be overlapped mutually, and can interfere simultaneously and be superimposed.
The micro-nano light field modulating system of real time-varying parameter also can flexibly be integrated in various microscopic systems.
Compared with prior art, the utility model has the advantage of：
(1), by the combination of different discrete subcomponents, realize the preparation of different pattern.With space filtering equipment and precision
Control platform combines, and realizes pixelated pattern preparation.
(2), pass through to modulate subcomponent respectively, realize the Independent adjustable of multi-dimensional pattern structural parameters under different dimensions.
(3), pass through translation and the rotation of subcomponent, realize the continuous modulation of pattern structural parameters under single dimension.
In a word, the utility model utilizes different subcomponents to form optical modulating device group, and incident photon corrugated is realized
Real-time segmentation is modulated, and to the combined modulation method such as wavelet face segmentation modulation after modulation, realizes the reality of various complexity micro nano structures
When preparation, and realize real-time, the continuously adjustabe of its structural parameters.
Brief description
In order to be illustrated more clearly that the embodiment of the present application or technical scheme of the prior art, below will be to embodiment or existing
Have technology description in required use accompanying drawing be briefly described it should be apparent that, drawings in the following description be only this
Some embodiments described in application, for those of ordinary skill in the art, on the premise of not paying creative work,
Other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 show the real-time change parameteric light in the utility model specific embodiment 1 based on the discrete modulation in two cross-talk corrugateds
Field modulating system；
Fig. 2 show 4F system back focal plane two-beam interference schematic diagram in the utility model specific embodiment 1；
Fig. 3 show and adds the real-time of bit phase delay device segmentation wavelet face modulation in the utility model specific embodiment 2
Become parameter light field modulating system；
Fig. 4 show 4F system back focal plane two-beam interference phase shift principle schematic diagram in the utility model specific embodiment 2；
Fig. 5 show the real-time change parameteric light in the utility model specific embodiment 3 based on the discrete modulation in three cross-talk corrugateds
Field modulating system；
Fig. 6 show 4F system back focal plane Three-beam Interfere schematic diagram in the utility model specific embodiment 3；
Fig. 7 show the real-time change parameteric light in the utility model specific embodiment 4 based on wavelet face re-modulation after modulation
Field modulating system；
After Fig. 8 show 4F system back focal plane two-stage O_3-BAC in the utility model specific embodiment 4, five beam interferences are illustrated
Figure；
Fig. 9 show the real-time change ginseng in the utility model specific embodiment 5 based on re-segmenting modulation in wavelet face after modulation
Amount light field modulating system；
Figure 10 show in the utility model specific embodiment 6 based on after segmentation modulation the modulation of wavelet face re-segmenting real-time
Become parameter light field modulating system；
After Figure 11 show 4F system back focal plane two-stage O_3-BAC in the utility model specific embodiment 6, four beam interferences are illustrated
Figure.
After Figure 12 show 4F system back focal plane two-stage O_3-BAC in the utility model specific embodiment 6, seven beam interferences are illustrated
Figure.
Specific embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Detailed description is it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole enforcement
Example.Based on the embodiment in the utility model, those of ordinary skill in the art institute on the premise of not making creative work
The every other embodiment obtaining, broadly falls into the scope of the utility model protection.
Embodiment one:Real-time change parameter light field modulating system based on the discrete modulation in two cross-talk corrugateds
Real time-varying parameter micro-nano light field modulating system described in the present embodiment as shown in figure 1, in 4F light path system, son
Element 13 and subcomponent 14 composition Light Modulation optical component group, in subcomponent 13 and subcomponent 14, at least one is binary optical
Learn element, one kind of optical grating element, holographic element or super clever surface element；Subcomponent 13 and subcomponent 14 can periodically be tied
Structure, can also be aperiodic structure；Subcomponent 13 and subcomponent 14 can identical it is also possible to different.
In the present embodiment, if subcomponent 13 is the binary optical elements of 0 grade of light of disappearing, subcomponent 14 is the complete of 0 grade of light that disappear
Breath element, subcomponent 13 and subcomponent 14 have positive and negative first-order diffraction light, then the converging light after the first lens (group) 1 is through subcomponent
13 and subcomponent 14 after, its positive and negative first-order diffraction light respectively 4F light path system the first lens (group) back focal plane formed two right
The focused light spot claiming, forms four focused light spot in the first lens (group) back focal plane.When there is no other auxiliary optical components,
If the bore of the second lens (group) 2 is not sufficiently large, the only positive first-order diffraction light of subcomponent 13 and the negative one of subcomponent 14
Order diffraction light enters the second lens (group), and the back focal plane in the second lens (group) forms two-beam interference,
As shown in Fig. 2 the optical axis 9 of where the dotted line signifies that 4F light path system.Two-beam in Fig. 2 corresponds respectively to directional light
Under the conditions of vertical incidence, the positive one-level Transmission field of element 13 and the negative one level Transmission field of element 14.Therefore, from different
Subcomponent can form different interference figures in the back focal plane of the second lens (group).
In the present embodiment, if translation member 13 or element 14, the angle of its corresponding output beam and optical axis in fig. 2
Change, thus changing the cycle of output pattern；If around the central rotation of element itself, its corresponding output light in fig. 2
Shu Ze rotates around optical axis, thus changing the orientation of output pattern.
Embodiment two：Add the real-time change parameter light field modulating system of bit phase delay device segmentation wavelet face modulation
Real time-varying parameter micro-nano light field modulating system described in the present embodiment as shown in figure 3, in 4F light path system, son
Element 23 and subcomponent 24 composition Light Modulation optical component group, subcomponent 27 is adjustable bit phase delay device.If son unit
Part 23 and subcomponent 24 are the binary optical elements only existing positive and negative first-order diffraction light, then in the back focal plane of the second lens (group)
Form two-beam interference, as shown in figure 4, and producing difference in the presence of subcomponent 27 corresponding to the light beam of subcomponent 24
Bit phase delay.In the present embodiment, transmission diffraction light under directional light normal incidence for the subcomponent 23,24 be parallel
Light, then in Fig. 4, two-beam is directional light, and interference figure is one-dimensional striped；With under the regulation of subcomponent 27, two-beam
Phasic difference changes, then the one-dimensional striped producing occurs phase shift therewith.
Embodiment three：Real-time change parameter light field modulating system based on the discrete modulation in three cross-talk corrugateds
Real time-varying parameter micro-nano light field modulating system described in the present embodiment as shown in figure 5, in 4F light path system, son
Element 33,34 and 38 forms Light Modulation optical component group, by the converging light wavelength-division after the first lens (group) in 4F light path
Three cross-talk wavelength-divisions are become not modulate, in subcomponent 33,34 and 38, at least one is binary optical elements, optical grating element, holographic element
Or one kind of super clever surface element；Subcomponent 33,34 and 38 can be periodic structure, can also be aperiodic structure；Son
Element 33,34 with 38 can identical it is also possible to different.
In the present embodiment, if subcomponent 33 is optical grating element, subcomponent 34 is holographic element, and subcomponent 38 is super clever table
Bin part, after its neutron element 33,34, surface is close to mask and is disappeared 0 aurora, and subcomponent 38 only exists 0 order diffraction light.Then exist shortly
Second lens (group) back focal plane forms three-beam, as shown in fig. 6, wherein light beam 3 corresponds to the modulation after super clever surface element
Spectrum, no matter how subcomponent 38 translates, and light beam 3 is parallel with optical axis all the time；If subcomponent 38 rotates around its center, light beam
3 rotate around optical axis.Distribution is changed the angle of light beam 1 and light beam 2 and optical axis by the translation of subcomponent 33,34；Subcomponent 33,34 around
Its center rotates, and its corresponding light beam 1 and light beam 2 will rotate corresponding angle rotating around optical axis；Subcomponent 33,34 is simultaneously around light
Axle rotates, then correspond to light beam 1 and light beam 2 will rotate around optical axis simultaneously.
If subcomponent 33 is one-dimensional grating, its positive one-level transmission diffraction under directional light normal incidence is parallel
Light；If negative one level transmission diffraction light under directional light normal incidence for the subcomponent 34 is in tree leaf-shaped light distribution；If son unit
0 grade of transmitted light under directional light normal incidence for the part 38 is spirality optical field distribution；Then it is respectively light field in Fig. 6 homogeneous
Directional light, light field are in interfering between the directional light of tree leaf-shaped distribution and the directional light of light field spirality distribution.
Example IV：Real-time change parameter light field modulating system based on wavelet face re-modulation after modulation
Real time-varying parameter micro-nano light field modulating system described in the present embodiment as shown in fig. 7, in 4F light path system, son
Element 43 and subcomponent 48 composition two groups of optical component groups of Light Modulation, subcomponent 43 is to the first lens (group) post-concentration light beam
Modulation, subcomponent 48 is directed to the wavelet face modulation on corrugated after subcomponent 43 modulation.In subcomponent 43 and subcomponent 48 at least one
It is binary optical elements, one kind of optical grating element, holographic element or super clever surface element.
In the present embodiment, if subcomponent 43 is to have the one-dimensional grating of multistage transmission, subcomponent 48 is multistage for having
The super clever surface device penetrated, then after subcomponent 43, diffraction goes out 0 grade to the first lens (group) post-concentration ripple and positive and negative one-level is spread out
Penetrate light, wherein positive and negative first-order diffraction light converges at the first lens (group) back focal plane, 0 grade of light forms three beams after subcomponent 48 and assembles
Light, five groups of light form five bundle light as shown in Figure 8 through the second lens (group) and interfere, and wherein light beam 3 corresponds to subcomponent
48 0 order diffraction light under directional light normal incidence, light beam 1,2 corresponds to subcomponent 43 in directional light normal incidence
Under positive and negative first-order diffraction light, light beam 4,5 correspond to positive and negative first-order diffraction under directional light normal incidence for the subcomponent 48
Light.In the present embodiment, translate subcomponent 48, light beam 3 is parallel with the optical axis of 4F light path system all the time, light beam 4,5 and optical axis
Angle synchronous change；Translation subcomponent 43, the angle synchronous change of light beam 1,2 and optical axis.Rotation subcomponent 48, then light beam 3,4,
5 rotate respective angles around optical axis；Rotate subcomponent 43, then light beam 1,2 rotates around optical axis simultaneously.
Therefore, in the present embodiment, subcomponent 43 and subcomponent 48 form two groups of optical modulating device groups.Subcomponent 43 pin
Incident light wave is modulated, subcomponent 48 is directed to the wavelet modulation of light wave after modulation.
Embodiment five：Real-time change parameter light field modulating system based on re-segmenting modulation in wavelet face after modulation
Real time-varying parameter micro-nano light field modulating system described in the present embodiment as shown in figure 9, in 4F light path system, son
Element 53, subcomponent 55 and 56 composition two groups of optical component groups of Light Modulation, subcomponent 53 is to the first lens (group) post-concentration
Beam modulation, its senior transmitted light is stopped by space filtering subcomponent 57, and subcomponent 55 and 56 is directed to subcomponent 53 and modulates postwave
The wavelet face modulation in face.In subcomponent 53,55 and subcomponent 56, at least one is binary optical elements, optical grating element, holographic node
Part or one kind of super clever surface element.
If subcomponent 53 is holographic element, subcomponent 55 and 56 is the 0 aurora binary optical elements that disappear, if the height of subcomponent 53
Order diffraction light is stopped by subcomponent 57, then the first lens (group) post-concentration light wave converges at the first lens (group) through subcomponent 53
Focus afterwards, then diverging incident is to subcomponent 55 and subcomponent 56, the reverse extending line meeting of subcomponent 55 and subcomponent 56 diffraction light
Gather in the first lens (group) back focal plane.When not having other auxiliary optical components, it is insufficient to greatly in the bore of the second lens (group)
In the case of, the positive first-order diffraction light of only the negative one order diffraction light of subcomponent 55 and subcomponent 56 can reach through the second lens group
The back focal plane of 4F light path system, forms two beam interferometer light as shown in Figure 2.Light beam, light beam 2 correspond respectively in the present embodiment
0 order diffraction light under directional light normal incidence for the subcomponent 53.Rotation subcomponent 53, light beam 1,2 is around the optical axis of 4F system
Rotation；Subcomponent 55,56 rotates rotating around its center, then light beam 1,2 rotates respective angles rotating around optical axis；Subcomponent 55,
56 rotate around optical axis simultaneously, then light beam 1,2 rotates respective angles around optical axis simultaneously.
Embodiment six：Real-time change parameter light field modulating system based on wavelet face re-segmenting modulation after segmentation modulation
Described in the present embodiment, real time-varying parameter micro-nano light field modulating system is as shown in Figure 10, in 4F light path system,
Subcomponent 63 and subcomponent 64, subcomponent 65 and 66 separately constitute two groups of optical component groups, and subcomponent 63 and 64 is saturating to first
Mirror (group) post-concentration beam modulation, subcomponent 65 and 66 is directed to wavelet face corrugated modulation after previous optical element group modulation.Son
In element 63,64,65 and 66, at least one is the one of binary optical elements, optical grating element, holographic element or super clever surface element
Kind.
If subcomponent 63,64,65 and 66 is the 0 grade of light Binary Phase element that disappears, converging light after subcomponent 63,64
First lens (group) back focal plane forms 4 focused light spot, and the positive first-order diffraction light of subcomponent 63 and the negative one level of subcomponent 64 are spread out
Penetrate light and be directly transmitted to the second lens (group)；The negative one order diffraction light of subcomponent 63, is incident to second after subcomponent 66 modulation
Lens (group)；The positive first-order diffraction light of subcomponent 64 is incident to the second lens (group) after subcomponent 65 modulation.In 4F light path system
System back focal plane, forms four road interfering beams as shown in figure 11, in the present embodiment, it is equally distributed that four road light beams are light field
Collimated light beam.Translate subcomponent 63,64,65,66 respectively, its corresponding light beam is changed with the angle of optical axis；Rotating around son unit
Part 63,64,65,66 its center rotates, and its corresponding light beam rotates around optical axis；Simultaneously by subcomponent 63,64,65,66 around optical axis
Rotate, four bundles light rotates on optical axis simultaneously.
Four bundles light can be in same interference plane internal interference it is also possible on two mutually perpendicular planes as shown in Figure 11
Inside interfere two-by-two, interference light light field geometric superposition.
0 grade of light if subcomponent 63 and 64 does not disappear, and its 0 grade of light modulates through subcomponent 68, as shown in Figure 12, subcomponent 68
There is 0 grade and senior transmission, then at least there are 7 sub- corrugateds after subcomponent 68, wherein after subcomponent 63 and 64 modulation
Part corrugated again through subcomponent 65 and 66 modulate, below optical axis wavelet face again through modulating through subcomponent 67, finally in 4F light
Road system back focal plane forms at least seven road interfering beams, if subcomponent 67 is bit phase delay device, different in subcomponent 67
Under bit phase delay, interference figure produces phase shift.
In above example, the incident light of 4F light path system is parallel with optical axis, when incident light has angle with optical axis, its warp
Light wave propagation direction after previous group optical modulating device still converges at the back focal plane of the first lens (group), only focused light spot position
Put along incident light direction translation.
The embodiment of the micro-nano light field modulating system of described real time-varying parameter is not limited in above-described embodiment；Described group
The modulation subcomponent becoming optics group is not limited in above-mentioned optical element；Described subcomponent can be the one or more dimensions cycle
Property or aperiodic structure；The incident light of described 4F system is directional light, but is not limited only to directional light.
In sum, the utility model system laser is as light source, by 4F light path system and discrete optical modulation
Device, the structural parameters such as generation cycle, orientation, dutycycle are real-time, continuously adjustable interference figure, are integrated in various photoetching systems
System, prepares the micro-nano pattern of Different structural parameters in real time, is the new work(based on micro nano structure on positive and negative photoresist surface
Basis can be provided by material.
It should be noted that herein, such as first and second or the like relational terms are used merely to a reality
Body or operation are made a distinction with another entity or operation, and not necessarily require or imply these entities or deposit between operating
In any this actual relation or order.And, term " inclusion ", "comprising" or its any other variant are intended to
Comprising of nonexcludability, wants so that including a series of process of key elements, method, article or equipment and not only including those
Element, but also include other key elements being not expressly set out, or also include for this process, method, article or equipment
Intrinsic key element.In the absence of more restrictions, the key element that limited by sentence "including a ..." it is not excluded that
Also there is other identical element including in the process of described key element, method, article or equipment.
The above is only the specific embodiment of the application it is noted that ordinary skill people for the art
For member, on the premise of without departing from the application principle, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as the protection domain of the application.
Claims (9)
1. a kind of micro-nano light field modulating system of real time-varying parameter is adjusted it is characterised in that including light source, 4F optical system and light wave
Optical component group processed, described 4F optical system includes the first optical module and the second optical module setting gradually along light path,
Described Light Modulation optical component group is arranged between described first optical module and the second optical module, this Light Modulation light
Learn components and parts group and pass through the segmentation modulation of antithetical phrase corrugated, produce pattern in the back focal plane of system and its adjustable light field of structural parameters is divided
Cloth.
2. the micro-nano light field modulating system of real time-varying parameter according to claim 1 it is characterised in that：Described structural parameters
Including cycle, orientation, phase place and dutycycle.
3. the micro-nano light field modulating system of real time-varying parameter according to claim 1 it is characterised in that：Described optical field distribution
For interference figure.
4. the micro-nano light field modulating system of real time-varying parameter according to claim 1 it is characterised in that：Described first optics
Assembly and the second optical module are lens, lens group, super clever surface device or micro nano structure.
5. according to the arbitrary described real time-varying parameter micro-nano light field modulating system of Claims 1-4 it is characterised in that：Described
Light Modulation optical component group includes multiple subcomponents, right by being realized from different subcomponents or different combinations
The light field modulation in each wavelet face, and the back focal plane in system produces the optical field distribution realizing different pattern；Described subcomponent is passed through
The light field modulation to each wavelet face is realized in change in displacement or rotation, and the back focal plane in system produces the adjustable light of structural parameters
Field distribution.
6. the micro-nano light field modulating system of real time-varying parameter according to claim 5 it is characterised in that：Described Light Modulation
Optical component group includes multistage sub- device group along optical path direction, and every grade of sub- device group includes at least one described subcomponent, its
In be located at rear stage sub- device group in order to corrugated after previous stage is modulated wavelet face modulated in real time.
7. the micro-nano light field modulating system of real time-varying parameter according to claim 5 it is characterised in that：Described optics unit device
Part group also can comprise the combination of one or more of adjustable diaphragm, grayscale mask, polarization conversion device.
8. the micro-nano light field modulating system of real time-varying parameter according to claim 1 it is characterised in that：Described light source includes
Laser.
9. a kind of interference lithography system of micro nano structure is it is characterised in that to include claim 1 to 7 arbitrary described real-time
Become parameter micro-nano light field modulating system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620007579.9U CN205942088U (en) | 2016-01-06 | 2016-01-06 | Become modulation of micro -nano light field of parameter and photolithography system in real time |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620007579.9U CN205942088U (en) | 2016-01-06 | 2016-01-06 | Become modulation of micro -nano light field of parameter and photolithography system in real time |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205942088U true CN205942088U (en) | 2017-02-08 |
Family
ID=57933689
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620007579.9U Expired - Fee Related CN205942088U (en) | 2016-01-06 | 2016-01-06 | Become modulation of micro -nano light field of parameter and photolithography system in real time |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205942088U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105511074A (en) * | 2016-01-06 | 2016-04-20 | 苏州大学 | Real time variable parameter micro-nano optical field modulation system and interference lithography system |
| WO2019015194A1 (en) * | 2017-07-18 | 2019-01-24 | 苏州大学 | Real-time construction and modulation system and method for micro-nano light field |
-
2016
- 2016-01-06 CN CN201620007579.9U patent/CN205942088U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105511074A (en) * | 2016-01-06 | 2016-04-20 | 苏州大学 | Real time variable parameter micro-nano optical field modulation system and interference lithography system |
| CN105511074B (en) * | 2016-01-06 | 2018-01-09 | 苏州大学 | The micro-nano light field modulating system of real time-varying parameter and interference lithography system |
| WO2019015194A1 (en) * | 2017-07-18 | 2019-01-24 | 苏州大学 | Real-time construction and modulation system and method for micro-nano light field |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10054859B2 (en) | Real-time variable parameter micro-nano optical field modulation system and interference lithography system | |
| DE69622406T2 (en) | PHASE CONTRAST IMAGING | |
| DE60123468T2 (en) | METHOD AND DEVICE FOR PRODUCING A PHASE MODULATED WAVE FRONT OF ELECTROMAGNETIC RADIATION | |
| DE602005002548T2 (en) | GENERATION OF A DESIRED THREE-DIMENSIONAL ELECTROMAGNETIC FIELD | |
| CN101542355B (en) | Optical beam generating device | |
| CN103706947B (en) | A kind of cycle pattern tunable micro-and nano-structural surface large area preparation method and system of processing | |
| CN103765329A (en) | Method and device for the layered production of thin volume grid stacks, and beam combiner for a holographic display | |
| CN105182556A (en) | Multi-focus array light spot generation device and method | |
| DE112009001652T5 (en) | Multichannel recording | |
| CN102148067A (en) | Device for generating rotary combined vortex light beam | |
| WO2004113993A1 (en) | Generation of a desired wavefront with a plurality of phase contrast filters | |
| CN109870890B (en) | Integer order vortex light beam phase mask plate with fractional order vortex contour and light path system | |
| US20070268545A1 (en) | Generation of a Desired Three-Dimensional Electromagnetic Field | |
| CN106842606B (en) | A kind of optical diffraction device and preparation method thereof and three-dimensional display apparatus | |
| CN105511074B (en) | The micro-nano light field modulating system of real time-varying parameter and interference lithography system | |
| CN107505695B (en) | Structured Illumination device and its method for generating fringe structure light | |
| CN205942088U (en) | Become modulation of micro -nano light field of parameter and photolithography system in real time | |
| WO2019228919A1 (en) | Method for illuminating samples in microscopic imaging methods | |
| CN107229126A (en) | A kind of micro-nano light field builds modulating system and method in real time | |
| CN102169320B (en) | Device for generating propeller type rotary light beam | |
| CN206905904U (en) | High-flux high-stability coherent dispersion spectral imaging device | |
| DE1940361A1 (en) | Method and device for producing a diffraction pattern and for producing a grid from the same images | |
| CN207301512U (en) | A kind of micro-nano light field builds modulating system in real time | |
| Tang et al. | Wide range retina-like scanning based on liquid crystal optical phased array | |
| CN103676398B (en) | Two dimensional affine based on diffractive optical element array converts full light implementation method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170208 |