CN105182556A - Multi-focus array light spot generation device and method - Google Patents
Multi-focus array light spot generation device and method Download PDFInfo
- Publication number
- CN105182556A CN105182556A CN201510553665.XA CN201510553665A CN105182556A CN 105182556 A CN105182556 A CN 105182556A CN 201510553665 A CN201510553665 A CN 201510553665A CN 105182556 A CN105182556 A CN 105182556A
- Authority
- CN
- China
- Prior art keywords
- focus
- phase
- polarization
- laser beam
- modulation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/48—Laser speckle optics
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
Abstract
The invention relates to a multi-focus array light spot generation device and method. The method comprises the following steps: S1) sending an arbitrarily-polarized laser beam; S2) converting the arbitrarily-polarized laser beam into a linearly-polarized laser beam; S3) carrying out collimation and beam expanding on the linearly-polarized laser beam; S4) carrying out phase modulation on the linearly-polarized laser beam obtained after collimation and beam expanding; S5) converting the linearly-polarized laser beam obtained after phase modulation into an azimuthally-polarized laser beam; and S6) focusing the azimuthally-polarized laser beam, and generating multi-focus array light spots in a focusing area, polarization direction and spatial position of each focus being arbitrarily adjustable. Compared with the prior art, the device and method can realize simultaneous adjustment of polarization direction and spatial position of each focus.
Description
Technical field
The present invention relates to a kind of generating means and method of multifocal array hot spot.
Background technology
Due to the fast development of nanocomposite optical in recent years, a new research direction is become to the tight manipulation focusing on the polarization direction of focal beam spot in light field.Extremely important to the Polarization Control of focused light in a lot of optical phenomenas.Such as, the light in different polarization direction can optionally interact with nonlinear material, utilizes this selectivity characteristic can carry out the optical imagery of ultrahigh resolution with the gold particle rod of nanoscale.Secondly, launching efficiency when dipole molecule interacts with light is relevant with polarisation of light direction, and the light in different polarization direction, by producing different excitation intensities, therefore utilizes this effect to may be used for high-resolution fluorescent molecules imaging.In addition, in high-NA objective focusing system, the control of focusing polarization direction additionally provides a kind of brand-new polarization micro-imaging technique, and this polarization micro-imaging technique can be widely used in multidimensional data storage, polarization information safety encipher, nonlinear imaging and the photonic device etc. based on surface plasma primitive.
At present, the polarization direction control technology of focusing mainly concentrates in a focus of high-NA objective focal zone, does not also have a kind of technology can control arbitrarily the polarization direction of each focus in multifocal array and locus simultaneously.Mainly based on the reason of two aspects: on the one hand, for the generation of multifocal array hot spot, mainly based on LCD space light modulator, the optical field distribution on the back focal plane of object lens is carried out to the method for phase-modulation.But most phase modulation mainly draws based on iteration optimization algorithms, this phase place drawn based on optimized algorithm lacks dirigibility, is difficult to realize modulating the polarization direction of each focus in multifocal array and controlling.On the other hand, although can by the interference superposition of two orthogonal light field compositions, realize the polarization direction regulation and control [Sci.Rep.3 of the focus on multiple order of diffraction is secondary, 2281 (2013)], but this method has complicated structure, and only has regulating and controlling effect to the polarization of low NA objective focus.Recently, the polarization direction that can be realized multiple focus by the focusing of angle light beam controls [Opt.Lett.39,6771 (2014)], but this technology lacks dirigibility, its spot array focused on is only limited in four focuses, and the locus of each focus is also non-adjustable.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of generating means and the method that can realize the adjustable multifocal array hot spot adjustable with locus in polarization direction of each focus simultaneously.
The technical scheme that the present invention solves the problems of the technologies described above is as follows: a kind of method for generation of multifocal array hot spot, comprises the following steps:
Step S1. sends the laser beam of random polarization;
The laser beam of random polarization is converted to the laser beam of linear polarization by step S2.;
The laser beam of linear polarization is carried out collimator and extender by step S3.;
Linearly polarized laser light beam after collimator and extender is carried out phase-modulation by step S4.;
Linearly polarized light after phase-modulation is converted to the laser beam of angle polarization by step S5.;
Step S6. focuses on angle polarized laser beam, will produce the array hot spot of multiple focus, and the polarization direction of each focus and locus is adjustable arbitrarily at focal zone.
Further, the laser beam phase-modulation correspondence of described step S4 produces the phase-only modulation on focal zone back focal plane.
Further, the laser beam phase-modulation correspondence of described step S4 produces the method for generation of multiple focus phase-only modulation on focal zone, comprises the following steps:
Entrance pupil corresponding for the back focal plane of focal zone is equally divided into identical fan-shaped of N number of area by step S41.: A
1, A
2a
n-1, A
n, wherein the summit of each sector region is the center of entrance pupil, and fan-shaped radius is entrance pupil radius R, and each fan-shaped central angle is
wherein N is even number;
Step S42. determines the number M of array hot spot, more each sector region is further divided into the sub-sector region of M area equation: S
1, S
2s
m-1, S
m, wherein every summit of sub-sector region or the center of entrance pupil, the radius of every sub-sector region is entrance pupil radius R, and the central angle that often a sub-sector region is corresponding is
N × M son is fan-shapedly corresponding in turn to the PHASE DISTRIBUTION inserting corresponding focal position by step S43.
wherein, m=1,2 ... M, obtains the PHASE DISTRIBUTION ψ that the locus of modulation generation M focus is adjustable
1;
Step S44. determines the linear polarization of each focus, if the angle of the linear polarization of focus and x-axis is β, then M focus has M polarization direction, if the angle of itself and x-axis is respectively β
m=β
1, β
2β
m; Be that the circular entrance pupil of R is diametrically divided into two symmetrical semi-circular portions by radius, the phase place in one of them semicircle is 0, and the phase place in another semicircle is π; The direction of Rotational Symmetry diameter, makes itself and x-axis angular separation be respectively β
m, will M PHASE DISTRIBUTION of modulating along (0, the π) of different symmetry direction be obtained;
The PHASE DISTRIBUTION correspondence that (0, the π) of M different symmetry direction modulates is filled in N × M sub-sector region by step S45., obtains for modulating the adjustable PHASE DISTRIBUTION ψ in the polarization direction that produces each focus
2;
Step S46. is by two kinds of PHASE DISTRIBUTION ψ
1and ψ
2superposition, obtains phase-only modulation ψ=ψ
1+ ψ
2, this phase-only modulation, at the back focal plane of focal zone, will obtain M multifocal array hot spot, and the polarization direction of each focus and locus is adjustable arbitrarily.
Further, the phase value in described step S43
determined by following formula;
Wherein, m: represent m focal beam spot;
λ: be represent the optical maser wavelength from laser emitting;
NA: be the numerical aperture representing object lens;
R: the radius being the entrance pupil representing object lens;
N
t: the refractive index representing material;
Δ x
m: the displacement representing m focal beam spot off center position in the x direction;
Δ y
m: the displacement representing m focal beam spot off center position in y-direction.
Further, in described step S44, the polarization direction of focus and the angle β span of x-axis are [02 π].
Further, in described step 6, the quantity of the array hot spot of multiple focus is adjustable.
Further, in described step 6, the polarization direction of each focus can be adjusted to linear polarization, and the linear polarization of each focus on focal zone is adjustable arbitrarily.
The invention has the beneficial effects as follows: by after the laser beam focusing of the angle polarization of phase-modulation, will the array hot spot of multiple focus be produced at focal zone, and the polarization direction of each focus and locus are adjustable arbitrarily; The adjustable multifocal array hot spot in this polarization direction and locus, the micro-nano processing of parallel laser, the manipulation of parallel laser particulate can be widely used in and catch, multi-dimensional optical data store and the field such as super-resolution polarization optics micro-imaging.
Another technical scheme that the present invention solves the problems of the technologies described above is as follows: a kind of generating means of multifocal array hot spot, comprise light source emitter, polaroid, expand and corrugated reshaper, spatial light modulator, polarization converter and object lens, described light source emitter, polaroid, expand and corrugated reshaper, spatial light modulator, polarization converter and object lens coaxial cable is arranged side by side successively;
Described light source emitter, for sending the laser beam of random polarization;
Described polaroid, for being converted to the laser beam of linear polarization by the laser beam of random polarization;
Describedly to expand and corrugated reshaper, for the laser beam of linear polarization is carried out collimator and extender;
Described spatial light modulator, for carrying out phase-modulation by the linearly polarized laser light beam after collimator and extender;
Described polarization converter, for being converted to the laser beam of angle polarization by the linearly polarized laser light beam after phase-modulation;
Described object lens, for focusing on angle polarized laser beam, will produce the array hot spot of multiple focus, and the polarization direction of each focus and locus are adjustable arbitrarily at focal zone.
Preferably, the focal zone back focal plane that described spatial light modulator makes described object lens corresponding to laser beam phase-modulation produces phase-only modulation.
Preferably, in described object lens, the polarization direction of each focus can be adjusted to linear polarization, and the linear polarization of each focus on focal zone is adjustable arbitrarily.
The invention has the beneficial effects as follows: by light source emitter, polaroid, expand and the coordinate operation of corrugated reshaper, spatial light modulator, polarization converter and object lens, the multifocal phase place of superposition modulated space displacement change and the phase place in modulating polarization direction, finally obtain the pure PHASE DISTRIBUTION in conjunction with two kinds of modulation, and then after the optical field distribution of the back focal plane of modulation object lens, obtain multiple focus array at tight focal zone, and the locus of each focus and polarization direction can regulate arbitrarily.
Accompanying drawing explanation
Fig. 1 is the method flow diagram of a kind of polarization direction of the present invention and locus adjustable multifocal array hot spot method for generation;
Fig. 2 is the generating means module frame chart of a kind of multifocal array of the present invention hot spot;
Fig. 3 be in fan-shaped phase place subregion of the present invention modulation generating step first time subregion schematic diagram;
Fig. 4 is second time subregion schematic diagram in fan-shaped phase place subregion modulation generating step of the present invention;
When Fig. 5 is M=5 of the present invention array hot spot, insert the PHASE DISTRIBUTION figure of location parameter;
When Fig. 6 is M=5 of the present invention array hot spot, insert the PHASE DISTRIBUTION figure of polarization parameter;
Fig. 7 is the distribution plan after M=5 of the present invention array hot spot two kinds of Phase Stackings;
Fig. 8 is the intensity distribution of M=5 of the present invention array hot spot;
Fig. 9 is the polarisation distribution figure of M=5 of the present invention array hot spot;
Figure 10 is the distribution plan after two kinds of Phase Stackings of M=7 of the present invention array hot spot;
Figure 11 is the intensity distribution of M=7 of the present invention array hot spot;
Figure 12 is the polarisation distribution figure of M=7 of the present invention array hot spot.
In accompanying drawing, the list of parts representated by each label is as follows:
1, light source emitter, 2, polaroid, 3, expand and corrugated reshaper, 4, spatial light modulator, 5, polarization converter, 6, object lens.
Embodiment
Be described principle of the present invention and feature below in conjunction with accompanying drawing, example, only for explaining the present invention, is not intended to limit scope of the present invention.
As shown in Figure 1, a kind of method for generation of multifocal array hot spot, comprises the following steps:
Step S1. sends the laser beam of random polarization;
The laser beam of random polarization is converted to the laser beam of linear polarization by step S2.;
The laser beam of linear polarization is carried out collimator and extender by step S3.;
Linearly polarized laser light beam after collimator and extender is carried out phase-modulation by step S4.;
Linearly polarized light after phase-modulation is converted to the laser beam of angle polarization by step S5.;
Step S6. focuses on angle polarized laser beam, will produce the array hot spot of multiple focus, and the polarization direction of each focus and locus is adjustable arbitrarily at focal zone.
Preferably, the laser beam phase-modulation correspondence of described step S4 produces the phase-only modulation on focal zone back focal plane.
Preferably, the laser beam phase-modulation correspondence of described step S4 produces the method for generation of multiple focus phase-only modulation on focal zone, comprises the following steps:
Entrance pupil corresponding for the back focal plane of focal zone is equally divided into identical fan-shaped of N number of area by step S41.: A
1, A
2a
n-1, A
n, wherein the summit of each sector region is the center of entrance pupil, and fan-shaped radius is entrance pupil radius R, and each fan-shaped central angle is
wherein N is even number;
Step S42. determines the number M of array hot spot, more each sector region is further divided into the sub-sector region of M area equation: S
1, S
2s
m-1, S
m, wherein every summit of sub-sector region or the center of entrance pupil, the radius of every sub-sector region is entrance pupil radius R, and the central angle that often a sub-sector region is corresponding is
N × M son is fan-shapedly corresponding in turn to the PHASE DISTRIBUTION inserting corresponding focal position by step S43.
wherein, m=1,2 ... M, obtains the PHASE DISTRIBUTION ψ that the locus of modulation generation M focus is adjustable
1;
Step S44. determines the linear polarization of each focus, if the angle of the linear polarization of focus and x-axis is β, then M focus has M polarization direction, if the angle of itself and x-axis is respectively β
m=β
1, β
2β
m; Be that the circular entrance pupil of R is diametrically divided into two symmetrical semi-circular portions by radius, the phase place in one of them semicircle is 0, and the phase place in another semicircle is π; The direction of Rotational Symmetry diameter, makes itself and x-axis angular separation be respectively β
m, will M PHASE DISTRIBUTION of modulating along (0, the π) of different symmetry direction be obtained;
The PHASE DISTRIBUTION correspondence that (0, the π) of M different symmetry direction modulates is filled in N × M sub-sector region by step S45., obtains for modulating the adjustable PHASE DISTRIBUTION ψ in the polarization direction that produces each focus
2;
Step S46. is by two kinds of PHASE DISTRIBUTION ψ
1and ψ
2superposition, obtains phase-only modulation ψ=ψ
1+ ψ
2, this phase-only modulation, at the back focal plane of focal zone, will obtain M multifocal array hot spot, and the polarization direction of each focus and locus is adjustable arbitrarily.
Preferably, the phase value in described step S43
determined by following formula;
Wherein, m: represent m focal beam spot;
λ: be represent the optical maser wavelength from laser emitting;
NA: be the numerical aperture representing object lens;
R: the radius being the entrance pupil representing object lens;
N
t: the refractive index representing material;
Δ x
m: the displacement representing m focal beam spot off center position in the x direction;
Δ y
m: the displacement representing m focal beam spot off center position in y-direction.
Preferably, in described step S44, the polarization direction of focus and the angle β span of x-axis are [02 π].
Preferably, in described step 6, the quantity of the array hot spot of multiple focus is adjustable.
Preferably, in described step 6, the polarization direction of each focus can be adjusted to linear polarization, and the linear polarization of each focus on focal zone is adjustable arbitrarily.
As shown in Figure 2, a kind of generating means of multifocal array hot spot, comprise light source emitter 1, polaroid 2, expand and corrugated reshaper 3, spatial light modulator 4, polarization converter 5 and object lens 6, described light source emitter 1, polaroid 2, expand and corrugated reshaper 3, spatial light modulator 4, polarization converter 5 and object lens 6 coaxial cable is arranged side by side successively;
Described light source emitter 1, for sending the laser beam of random polarization;
Described polaroid 2, for being converted to the laser beam of linear polarization by the laser beam of random polarization;
Describedly to expand and corrugated reshaper 3, for the laser beam of linear polarization is carried out collimator and extender;
Described spatial light modulator 4, for carrying out phase-modulation by the linearly polarized laser light beam after collimator and extender;
Described polarization converter 5, for being converted to the laser beam of angle polarization by the linearly polarized laser light beam after phase-modulation;
Described object lens 6, for focusing on angle polarized laser beam, will produce the array hot spot of multiple focus, and the polarization direction of each focus and locus are adjustable arbitrarily at focal zone.
Preferably, described spatial light modulator 4 pairs of laser beam phase-modulations make the focal zone back focal plane of described object lens 6 correspondence produces phase-only modulation.
Preferably, in described object lens 6, the polarization direction of each focus can be adjusted to linear polarization, and the linear polarization of each focus on focal zone is adjustable arbitrarily.
Based on Richard-Wolf vector diffraction formula [Proc.R.Soc.LondonSer.A253,349 (1959); Proc.R.Soc.LondonSer.A253,358 (1959)], can calculate the optical field distribution at any position place in the tight focousing field of high-NA objective, its formula is as follows:
formula (1)
Wherein, C is the constant relevant with the wavelength of incident light with the focal length of object lens, and k is wave number, and α is the maximum aperture angle of object lens, and θ is the deflection angle of object lens, and the relating to parameters of itself and object lens, its expression is
θ=arcsin (rNA/Rn
t) formula (2)
Wherein, R is the radius of entrance pupil, and NA is the numerical aperture of object lens, n
tfor the refractive index of material, P (θ) is for cutting toe function, r and φ is the plane polar coordinates component on object lens back focal plane, x, y and z is cartesian component.
By further analysis, the optical field distribution of tight focal zone can be expressed as the form of Fourier transform [Opt.Express14,11277 (2006)], namely
formula (3)
Wherein, F{} represents Fourier transform operator, and ξ and η is spatial frequency, and G (ξ, η) for object lens transmittance function, its expression formula is
G (ξ, η)=P (θ) E
t(θ, φ)/cos θ × exp (ik
zz) formula (4)
As can be seen from formula (4), the tight optical field distribution focused on is the Fourier transform of optical field distribution on object lens back focal plane.Therefore, the phase shift theorem based on Fourier transform can draw, the phase-modulation additional by interpolation one on object lens back focal plane can produce a space displacement in focousing field region, namely
formula (5)
Draw based on formula (2) and formula (5), the PHASE DISTRIBUTION expression formula of the spatial position change that the focus being used for modulating high-NA objective makes it on focal plane is
Wherein, Δ x and Δ y is the spatial position change of focus on focal plane.Therefore, the PHASE DISTRIBUTION produced by formula (6) can be used for modulating the back focal plane of object lens, and the position of the focus making it produce on focal plane is adjustable.
Entrance pupil region corresponding for object lens back focal plane is divided into multiple sector region, the PHASE DISTRIBUTION distribution with different spatial is filled in corresponding sector region, the adjustable multifocal array in locus can be obtained with this PHASE DISTRIBUTION modulation object lens.
Modulation for focus polarization direction each in multifocal array hot spot is based on π rank phase filtering technology [Opt.Lett.39,6771 (2014)].By with entrance pupil diameter direction for symmetrical (0, the π) phase modulation technique in separatrix, break the symmetry of angle polarized light focal beam spot, obtain the focal beam spot of linear polarization, and the direction of linear polarization be along marginal direction.
The multifocal phase place changed by superposition modulated space displacement and the phase place in modulating polarization direction, finally obtain the pure PHASE DISTRIBUTION in conjunction with two kinds of modulation, and then after the optical field distribution of the back focal plane of modulation object lens, obtain multiple focus array at tight focal zone, and the locus of each focus and polarization direction can regulate arbitrarily.
Embodiment 2:
Below with incident light wave length λ=532nm, numerical aperture of objective NA=1.32, the refractive index n of oil immersion material
t=1.518, entrance pupil radius R=3mm is example, the specific embodiments of design polarization direction and locus adjustable multifocal array hot spot.
First, the phase-only modulation on design object lens back focal plane, its concrete production method mainly comprises the following steps:
Step 41: as shown in Figure 3, is equally divided into identical fan-shaped of N number of area: A by entrance pupil corresponding for the back focal plane of object lens
1, A
2a
n-1, A
n, wherein the summit of each sector region is the center of entrance pupil, and fan-shaped radius is entrance pupil radius R, and each fan-shaped central angle is
wherein N is even number, selects N=72 in the present embodiment;
Step 42: as shown in Figure 4, determines the number M of array hot spot, then by each sector region (A
1, A
2a
n-1, A
n) be further divided into the sub-sector region of M area equation: S
1, S
2s
m-1, S
m, wherein every summit of sub-sector region or the center of entrance pupil, the radius of every sub-sector region is entrance pupil radius R, and the central angle that often a sub-sector region is corresponding is
the number of focousing field focus can be manipulated by the numerical value of control M, select M=5 in the present embodiment;
Step 43: N × M=360 son is fan-shapedly corresponding in turn to the PHASE DISTRIBUTION inserting corresponding focal position
wherein, phase value
determined by following formula;
formula (1)
Wherein, m: represent m focal beam spot;
λ: be represent the optical maser wavelength from laser emitting;
NA: be the numerical aperture representing object lens;
R: the radius being the entrance pupil representing object lens;
N
t: the refractive index representing material;
Δ x
m: the displacement representing m focal beam spot off center position in the x direction;
Δ y
m: the displacement representing m focal beam spot off center position in y-direction.
Therefore, by formula (1), the PHASE DISTRIBUTION of any locus focus can be obtained, and then manipulate the locus of each focus.Location parameter in the present embodiment: (Δ x
1, Δ y
1)=[0,0]; (Δ x
2, Δ y
2)=[1 μm, 1 μm]; (Δ x
3, Δ y
3)=[1 μm ,-1 μm]; (Δ x
4, Δ y
4)=[-1 μm, 1 μm]; (Δ x
5, Δ y
5)=[-1 μm ,-1 μm].The phase place ψ of the present invention when the phase place that above location parameter through type (1) calculates being inserted respective regions shown in Fig. 5
1distribution patterns.
Step 44: the polarization direction determining each focus, if the angle of the polarization direction of focus and x-axis is β, then M focus produces M polarization direction, and in the present embodiment, the polarization direction of M=5 focus and the angle of x-axis are respectively: β
1=0, β
2=π/4, β
3=3 π/4, β
4=-π/4, β
5=pi/2; Be that the circular entrance pupil of R is diametrically divided into two symmetrical semi-circular portions by radius, the phase place in one of them semicircle is 0, and the phase place in another semicircle is π; The direction of rotating diameter, makes itself and x-axis angular separation be respectively β
m, by the PHASE DISTRIBUTION that (0, the π) that obtain M different symmetry direction modulates;
Step 45: the PHASE DISTRIBUTION correspondence that (0, the π) of M different symmetry direction modulates is filled in N × M sub-sector region, obtains the PHASE DISTRIBUTION ψ that the polarization direction of each focus of modulation generation is adjustable
2; The phase place ψ of the present invention when polarization phase being inserted respective regions shown in Fig. 6
2distribution patterns.
Step 46: by ψ
1and ψ
2superposition obtains phase-only modulation.That the present invention is by above two kinds of PHASE DISTRIBUTION ψ shown in Fig. 7
1and ψ
2phase-only modulation is obtained after superposition.
Then, by the laser beam of angle polarization after the phase-modulation of above design, incide on a high-NA objective.Finally, the array hot spot of multiple focus will be produced at the focal zone of object lens, and the polarization direction of each focus and locus are adjustable arbitrarily.
Be of the present invention by after the back focal plane of particular design phase-only modulation object lens shown in Fig. 8, obtain the intensity of multifocal array hot spot to distribution plan, as can be seen from the figure focal zone creates 5 focuses.
Be of the present invention by after the back focal plane of particular design phase-only modulation object lens shown in Fig. 9, obtain the polarization direction distribution plan of 5 focus array hot spots, as can be seen from the figure the polarization direction of each focus is corresponding with design parameter.
The PHASE DISTRIBUTION figure behind change location parameter of the present invention and polarization direction shown in Figure 10.In this example, focus number M=7; The location parameter of each focus: (Δ x
1, Δ y
11.5cos)=[(π/3) μm, 1.5sin (π/3) μm], (Δ x
2, Δ y
21.5cos)=[(2 π/3) μm, 1.5sin (2 π/3) μm], (Δ x
3, Δ y
31.5cos)=[(π) μm, 1.5sin (π) μm], (Δ x
4, Δ y
41.5cos)=[(4 π/3) μm, 1.5sin (4 π/3) μm], (Δ x
5, Δ y
51.5cos)=[(5 π/3) μm, 1.5sin (5 π/3) μm], (Δ x
6, Δ y
61.5cos)=[(2 π) μm, 1.5sin (2 π) μm], (Δ x
7, Δ y
7)=[0,0]; The polarization parameter of focus: β
1=0, β
2=π/3, β
3=2 π/3, β
4=π, β
5=-π/3, β
6=-2 π/3, β
7=pi/2.
Be of the present invention by after the back focal plane of the particular design phase-only modulation object lens shown in Fig. 9 shown in Figure 11, the intensity of the focus array hot spot of acquisition is to distribution plan, and as can be seen from the figure focal zone creates 7 focuses.
Be the polarization direction distribution plan of 7 focus array hot spots of the present invention shown in Figure 12, as can be seen from the figure the polarization direction of each focus is corresponding with design parameter.
Visible, the present invention can produce multifocal array hot spot.By changing the number of the sub-sector region in segmented phase, the number of hot spot can be regulated; The locus of each focus can be regulated by the location parameter changing each focus; The polarization direction of each hot spot can be regulated by the marginal direction changing (0, π) phase place corresponding to each focus; This number of spots is adjustable, the polarization direction of each focus the is adjustable multifocal array hot spot adjustable with the locus of each focus, overcome the problem and shortage existing for prior art, therefore in the micro-nano processing of parallel laser, the manipulation of parallel laser particulate and can catch, multi-dimensional optical data store and be used widely in the field such as super-resolution polarization optics micro-imaging.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. a method for generation for multifocal array hot spot, is characterized in that: comprise the following steps:
Step S1. sends the laser beam of random polarization;
The laser beam of random polarization is converted to the laser beam of linear polarization by step S2.;
The laser beam of linear polarization is carried out collimator and extender by step S3.;
Linearly polarized laser light beam after collimator and extender is carried out phase-modulation by step S4.;
Linearly polarized light after phase-modulation is converted to the laser beam of angle polarization by step S5.;
Step S6. focuses on angle polarized laser beam, will produce the array hot spot of multiple focus, and the polarization direction of each focus and locus is adjustable arbitrarily at focal zone.
2. the method for generation of a kind of multifocal array hot spot according to claim 1, is characterized in that: the laser beam phase-modulation correspondence of described step S4 produces the phase-only modulation on focal zone back focal plane.
3. the method for generation of a kind of multifocal array hot spot according to claim 2, is characterized in that: the laser beam phase-modulation correspondence of described step S4 produces the method for generation of multiple focus phase-only modulation on focal zone, comprises the following steps:
Entrance pupil corresponding for the back focal plane of focal zone is equally divided into identical fan-shaped of N number of area by step S41.: A
1, A
2... A
n-1, A
n, wherein the summit of each sector region is the center of entrance pupil, and fan-shaped radius is entrance pupil radius R, and each fan-shaped central angle is
wherein N is even number;
Step S42. determines the number M of array hot spot, more each sector region is further divided into the sub-sector region of M area equation: S
1, S
2... S
m-1, S
m, wherein every summit of sub-sector region or the center of entrance pupil, the radius of every sub-sector region is entrance pupil radius R, and the central angle that often a sub-sector region is corresponding is
N × M son is fan-shapedly corresponding in turn to the PHASE DISTRIBUTION inserting corresponding focal position by step S43.
wherein, m=1,2 ... M, obtains the PHASE DISTRIBUTION ψ that the locus of modulation generation M focus is adjustable
1;
Step S44. determines the linear polarization of each focus, if the angle of the linear polarization of focus and x-axis is β, then M focus has M polarization direction, if the angle of itself and x-axis is respectively β
m=β
1, β
2... β
m; Be that the circular entrance pupil of R is diametrically divided into two symmetrical semi-circular portions by radius, the phase place in one of them semicircle is 0, and the phase place in another semicircle is π; The direction of Rotational Symmetry diameter, makes itself and x-axis angular separation be respectively β
m, will M PHASE DISTRIBUTION of modulating along (0, the π) of different symmetry direction be obtained;
The PHASE DISTRIBUTION correspondence that (0, the π) of M different symmetry direction modulates is filled in N × M sub-sector region by step S45., obtains for modulating the adjustable PHASE DISTRIBUTION ψ in the polarization direction that produces each focus
2;
Step S46. is by two kinds of PHASE DISTRIBUTION ψ
1and ψ
2superposition, obtains phase-only modulation ψ=ψ
1+ ψ
2, this phase-only modulation, at the back focal plane of focal zone, will obtain M multifocal array hot spot, and the polarization direction of each focus and locus is adjustable arbitrarily.
4. the method for generation of a kind of multifocal array hot spot according to claim 3, is characterized in that: the phase value in described step S43
determined by following formula;
Wherein, m: represent m focal beam spot;
λ: be represent the optical maser wavelength from laser emitting;
NA: be the numerical aperture representing object lens;
R: the radius being the entrance pupil representing object lens;
N
t: the refractive index representing material;
Δ x
m: the displacement representing m focal beam spot off center position in the x direction;
Δ y
m: the displacement representing m focal beam spot off center position in y-direction.
5. the method for generation of a kind of multifocal array hot spot according to claim 3, is characterized in that: in described step S44, the polarization direction of focus and the angle β span of x-axis are [02 π].
6. the method for generation of a kind of multifocal array hot spot according to claim 1, is characterized in that: in described step 6, the quantity of the array hot spot of multiple focus is adjustable.
7. a kind of method for generation of multifocal array hot spot according to any one of claim 1 to 6, it is characterized in that: in described step 6, the polarization direction of each focus can be adjusted to linear polarization, and the linear polarization of each focus on focal zone is adjustable arbitrarily.
8. the generating means of a multifocal array hot spot, it is characterized in that: comprise light source emitter (1), polaroid (2), expand and corrugated reshaper (3), spatial light modulator (4), polarization converter (5) and object lens (6), described light source emitter (1), polaroid (2), expand and corrugated reshaper (3), spatial light modulator (4), polarization converter (5) and object lens (6) coaxial cable is arranged side by side successively;
Described light source emitter (1), for sending the laser beam of random polarization;
Described polaroid (2), for being converted to the laser beam of linear polarization by the laser beam of random polarization;
Describedly to expand and corrugated reshaper (3), for the laser beam of linear polarization is carried out collimator and extender;
Described spatial light modulator (4), for carrying out phase-modulation by the linearly polarized laser light beam after collimator and extender;
Described polarization converter (5), for being converted to the laser beam of angle polarization by the linearly polarized laser light beam after phase-modulation;
Described object lens (6), for focusing on angle polarized laser beam, will produce the array hot spot of multiple focus, and the polarization direction of each focus and locus are adjustable arbitrarily at focal zone.
9. the generating means of a kind of multifocal array hot spot according to claim 8, is characterized in that: described spatial light modulator (4) makes focal zone back focal plane corresponding to described object lens (6) produces phase-only modulation to laser beam phase-modulation.
10. the generating means of a kind of multifocal array hot spot according to claim 8 or claim 9, it is characterized in that: in described object lens (6), the polarization direction of each focus can be adjusted to linear polarization, and the linear polarization of each focus on focal zone is adjustable arbitrarily.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510553665.XA CN105182556B (en) | 2015-09-02 | 2015-09-02 | The generating means and method of a kind of multifocal lattice array hot spot |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510553665.XA CN105182556B (en) | 2015-09-02 | 2015-09-02 | The generating means and method of a kind of multifocal lattice array hot spot |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105182556A true CN105182556A (en) | 2015-12-23 |
| CN105182556B CN105182556B (en) | 2017-09-05 |
Family
ID=54904735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510553665.XA Active CN105182556B (en) | 2015-09-02 | 2015-09-02 | The generating means and method of a kind of multifocal lattice array hot spot |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105182556B (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105784646A (en) * | 2016-03-28 | 2016-07-20 | 大连理工大学 | Anti-background-interference simultaneous extraction method of enhanced image of multi-target precious metal nano particle pair |
| CN106932914A (en) * | 2017-04-17 | 2017-07-07 | 鲁东大学 | A kind of production method and device of cubical array hollow light spot |
| CN107390382A (en) * | 2017-09-20 | 2017-11-24 | 鲁东大学 | Nanoscale radial polarisation annular light source generation device and method |
| CN107422468A (en) * | 2017-07-17 | 2017-12-01 | 鲁东大学 | A kind of annular optical tweezer and implementation method of migratory cell any in objective angular field |
| CN107728236A (en) * | 2017-10-26 | 2018-02-23 | 鲁东大学 | Produce super the structure surface element and production method of nanoscale longitudinal direction hot spot chain |
| CN108845408A (en) * | 2018-07-03 | 2018-11-20 | 上海理工大学 | Based on polyhedral prism and light beam frequency modulation high-resolution high speed imaging method and apparatus |
| CN108919499A (en) * | 2018-07-05 | 2018-11-30 | 鲁东大学 | A method of generating position and the individually controllable multiple focal beam spots of intensity |
| CN110977188A (en) * | 2019-11-03 | 2020-04-10 | 武汉光谷航天三江激光产业技术研究有限公司 | Multi-focus wafer internal cutting device based on spatial light modulator |
| CN111913313A (en) * | 2020-07-20 | 2020-11-10 | 南昌大学 | Parameter-adjustable axial cosine structure light generation device and method |
| CN113126290A (en) * | 2021-04-27 | 2021-07-16 | 西北大学 | Phase modulation method for generating controllable multi-focus array |
| CN113252536A (en) * | 2021-05-13 | 2021-08-13 | 长春长光辰英生物科学仪器有限公司 | Ejection sorting device and ejection sorting method |
| CN113433803A (en) * | 2021-07-07 | 2021-09-24 | 鲁东大学 | Dynamic laser parallel processing method based on multi-focus controllable |
| CN115657321A (en) * | 2022-10-11 | 2023-01-31 | 上海镭望光学科技有限公司 | Multi-light spot generating device and light beam shaping system |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111014947A (en) * | 2019-11-19 | 2020-04-17 | 中国科学技术大学 | High-speed laser processing device and method based on spatial light modulator and scanning galvanometer |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101246257A (en) * | 2008-03-21 | 2008-08-20 | 中国计量学院 | Radial cosine phase type axial multi-focus regulation system |
| CN102566055A (en) * | 2012-02-10 | 2012-07-11 | 上海理工大学 | Phase plate multi-focus generation apparatus and generation method thereof |
| CN203887387U (en) * | 2014-01-22 | 2014-10-22 | 深圳市韵腾激光科技有限公司 | Multi focus-focused laser machining device |
-
2015
- 2015-09-02 CN CN201510553665.XA patent/CN105182556B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101246257A (en) * | 2008-03-21 | 2008-08-20 | 中国计量学院 | Radial cosine phase type axial multi-focus regulation system |
| CN102566055A (en) * | 2012-02-10 | 2012-07-11 | 上海理工大学 | Phase plate multi-focus generation apparatus and generation method thereof |
| CN203887387U (en) * | 2014-01-22 | 2014-10-22 | 深圳市韵腾激光科技有限公司 | Multi focus-focused laser machining device |
Non-Patent Citations (1)
| Title |
|---|
| HAORAN REN, XIANGPING LI, AND MIN GU: "Haoran Ren, Xiangping Li, and Min Gu", 《OPTICS LETTERS》 * |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105784646B (en) * | 2016-03-28 | 2018-06-08 | 大连理工大学 | It is a kind of not by extracting method while the enhancing image of the multiple target noble metal nano particles pair of background interference |
| CN105784646A (en) * | 2016-03-28 | 2016-07-20 | 大连理工大学 | Anti-background-interference simultaneous extraction method of enhanced image of multi-target precious metal nano particle pair |
| CN106932914A (en) * | 2017-04-17 | 2017-07-07 | 鲁东大学 | A kind of production method and device of cubical array hollow light spot |
| CN107422468A (en) * | 2017-07-17 | 2017-12-01 | 鲁东大学 | A kind of annular optical tweezer and implementation method of migratory cell any in objective angular field |
| CN107390382A (en) * | 2017-09-20 | 2017-11-24 | 鲁东大学 | Nanoscale radial polarisation annular light source generation device and method |
| CN107728236A (en) * | 2017-10-26 | 2018-02-23 | 鲁东大学 | Produce super the structure surface element and production method of nanoscale longitudinal direction hot spot chain |
| CN108845408A (en) * | 2018-07-03 | 2018-11-20 | 上海理工大学 | Based on polyhedral prism and light beam frequency modulation high-resolution high speed imaging method and apparatus |
| CN108919499B (en) * | 2018-07-05 | 2020-07-10 | 鲁东大学 | Method for generating multiple focusing light spots with independently controllable positions and intensities |
| CN108919499A (en) * | 2018-07-05 | 2018-11-30 | 鲁东大学 | A method of generating position and the individually controllable multiple focal beam spots of intensity |
| CN110977188A (en) * | 2019-11-03 | 2020-04-10 | 武汉光谷航天三江激光产业技术研究有限公司 | Multi-focus wafer internal cutting device based on spatial light modulator |
| CN111913313A (en) * | 2020-07-20 | 2020-11-10 | 南昌大学 | Parameter-adjustable axial cosine structure light generation device and method |
| CN113126290A (en) * | 2021-04-27 | 2021-07-16 | 西北大学 | Phase modulation method for generating controllable multi-focus array |
| CN113252536A (en) * | 2021-05-13 | 2021-08-13 | 长春长光辰英生物科学仪器有限公司 | Ejection sorting device and ejection sorting method |
| CN113252536B (en) * | 2021-05-13 | 2024-04-16 | 长春长光辰英生物科学仪器有限公司 | Ejection sorting device and ejection sorting method |
| CN113433803A (en) * | 2021-07-07 | 2021-09-24 | 鲁东大学 | Dynamic laser parallel processing method based on multi-focus controllable |
| CN115657321A (en) * | 2022-10-11 | 2023-01-31 | 上海镭望光学科技有限公司 | Multi-light spot generating device and light beam shaping system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105182556B (en) | 2017-09-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105182556A (en) | Multi-focus array light spot generation device and method | |
| Chen et al. | Generation and characterization of a perfect vortex beam with a large topological charge through a digital micromirror device | |
| CN105425401B (en) | A kind of horizontal multifocal generation device and method | |
| Pachava et al. | Generation and decomposition of scalar and vector modes carrying orbital angular momentum: a review | |
| CN109870890B (en) | Integer order vortex light beam phase mask plate with fractional order vortex contour and light path system | |
| Nie et al. | Generation of super-resolution longitudinally polarized beam with ultra-long depth of focus using radially polarized hollow Gaussian beam | |
| Waller et al. | Multi foci with diffraction limited resolution | |
| CN104635344A (en) | Bessel light beam generating device with adjustable parameters and production method of bessel beam generating device | |
| CN107621701A (en) | Produce the method and system of double index Bessel-Gaussian beams | |
| CN105589203A (en) | Method and device for generating radial polarized array beam | |
| CN104781724A (en) | Phase modulation method and phase modulating device | |
| Dai et al. | Holographic super-resolution metalens for achromatic sub-wavelength focusing | |
| Pozzi et al. | Design of electrostatic phase elements for sorting the orbital angular momentum of electrons | |
| Benton | Multiple beam steering using dynamic zone plates on a micromirror array | |
| CN114019690B (en) | Optical system for generating optical vortex array of arbitrary order and optical lattice with defect limitation | |
| Deng et al. | Multifocal array with controllable orbital angular momentum modes by tight focusing | |
| Zhou et al. | Femtosecond multi-beam interference lithography based on dynamic wavefront engineering | |
| Cai et al. | Subwavelength multiple focal spots produced by tight focusing the patterned vector optical fields | |
| CN109188673B (en) | Adjustable optical tweezers device | |
| Baránek et al. | Optimizing the rotating point spread function by SLM aided spiral phase modulation | |
| Zannotti | Caustic Light in Nonlinear Photonic Media | |
| CN108919499A (en) | A method of generating position and the individually controllable multiple focal beam spots of intensity | |
| US8859950B2 (en) | Complete optical encapsulation of particulates | |
| Bañas et al. | Matched filtering Generalized Phase Contrast using binary phase for dynamic spot-and line patterns in biophotonics and structured lighting | |
| Gao et al. | Tunable gradient force of hyperbolic-cosine–Gaussian beam with vortices |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |