CN205904843U - Meticulous burnishing machine of integral type silicon chip - Google Patents
Meticulous burnishing machine of integral type silicon chip Download PDFInfo
- Publication number
- CN205904843U CN205904843U CN201620669400.6U CN201620669400U CN205904843U CN 205904843 U CN205904843 U CN 205904843U CN 201620669400 U CN201620669400 U CN 201620669400U CN 205904843 U CN205904843 U CN 205904843U
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- China
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- silicon chip
- crank
- wheel
- integral type
- motor
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- Expired - Fee Related
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The utility model relates to a meticulous burnishing machine of integral type silicon chip. At present, thick throwing and finely polishing twice process need be passed through by the enterprise when carrying out the luster -finish to the silicon chip, and the twice process is gone on at two equipment respectively, and this has not only reduced machining efficiency, and simultaneously, the assembly error of different equipment is different, and this machining error that can lead to the silicon chip is big, influences the size of silicon chip, exist not enoughly. The utility model relates to a meticulous burnishing machine of integral type silicon chip, wherein: the one -level band pulley passes through the second grade drive belt to be connected with the second grade band pulley, second grade band pulley and finely polishing emery wheel coaxial coupling, the one -level band pulley with slightly throw the emery wheel coaxial coupling, first motor and driving gear coaxial coupling, driven gear and first crank fixed connection, first crank and grooved pulley connected are connected with driven gear to the driving gear through meshing. This device adopts the integral type structure, accomplishes the twice process in an equipment, has not only improved machining efficiency, reduces machining error simultaneously, improves the size precision of silicon chip.
Description
Technical field
This utility model is related to silicon wafer polishing equipment technical field, the fine buffing machine of especially a kind of integral type silicon chip.
Background technology
Currently, enterprise is being polished to silicon chip adding man-hour requirement through rough polishing and essence throwing two procedures, and two procedures are divided
Do not carry out in two equipment, this not only lowers working (machining) efficiency, meanwhile, the rigging error of distinct device is different, and this can lead to silicon
The mismachining tolerance of piece is big, the size of impact silicon chip, Shortcomings.
Content of the invention
The purpose of this utility model is to provide a kind of fine buffing machine of integral type silicon chip, above-mentioned for overcoming the shortcomings of, adopts
Integral structure, completes two procedures in an equipment, not only increases working (machining) efficiency, reduces mismachining tolerance simultaneously, improves
The dimensional accuracy of silicon chip.
The technical solution of the utility model:
A kind of fine buffing machine of integral type silicon chip, including body, the first motor, driving gear, driven gear, first bent
Handle, sheave, polishing liquid case, the second crank, spring shield, spring, fixed block, the first liquid pipe, the first shower nozzle, smart ramming wheel, two grades
Belt wheel, secondary transmission band, one-level belt wheel, primary transmission band, driving pulley, the second motor, rough polishing emery wheel, the second shower nozzle, second
Liquid pipe；Wherein: body is fixedly connected with the second motor, the second motor is fixedly connected with driving pulley, and driving pulley passes through one-level
Transmission belt is connected with one-level belt wheel, and one-level belt wheel is connected with two grades of belt wheels by secondary transmission band, two grades of belt wheels and smart ramming wheel
Coaxially connected, one-level belt wheel is coaxially connected with rough polishing emery wheel, and the first motor is coaxially connected with driving gear, driving gear with driven
Gear is connected by engagement, and driven gear is fixedly connected with the first crank, and the first crank is connected with sheave, sheave and the second crank
It is fixedly connected, the second crank is fixedly connected with spring shield, inside spring shield, is provided with spring, spring is connected with fixed block, polishing fluid
Case is connected with the first shower nozzle by the first liquid pipe, and polishing liquid case is connected with the second shower nozzle by the second liquid pipe.
A kind of fine buffing machine of integral type silicon chip, wherein: the ratio of the radius of one-level belt wheel and two grades of belt wheels is 3:1.
The utility model has the advantage of: this device adopts integral structure, completes two procedures, no in an equipment
Improve only working (machining) efficiency, reduce mismachining tolerance simultaneously, improve the dimensional accuracy of silicon chip.
Brief description
Fig. 1 is structure schematic diagram of the present utility model.
Reference: body 1, the first motor 2, driving gear 3, driven gear 4, the first crank 5, sheave 6, polishing liquid case
7th, the second crank 8, spring shield 9, spring 10, fixed block 11, the first liquid pipe 12, the first shower nozzle 13, smart 14, two grades of belt wheels of ramming wheel
15th, secondary transmission band 16, one-level belt wheel 17, primary transmission band 18, driving pulley 19, the second motor 20, rough polishing emery wheel 21, second
Shower nozzle 22, the second liquid pipe 23.
Specific embodiment
Embodiment 1, a kind of fine buffing machine of integral type silicon chip, including body 1, the first motor 2, driving gear 3, driven tooth
Wheel the 4, first crank 5, sheave 6, polishing liquid case 7, the second crank 8, spring shield 9, spring 10, fixed block 11, the first liquid pipe 12, the
One shower nozzle 13, smart ramming wheel 14, two grades of belt wheels 15, secondary transmission band 16, one-level belt wheel 17, primary transmission band 18, driving pulleys
19th, the second motor 20, rough polishing emery wheel 21, the second shower nozzle 22, the second liquid pipe 23；Wherein: body 1 and the second motor 20 are fixing even
Connect, the second motor 20 is fixedly connected with driving pulley 19, driving pulley 19 is connected with one-level belt wheel 17 by primary transmission band 18,
One-level belt wheel 17 is connected with two grades of belt wheels 15 by secondary transmission band 16, and two grades of belt wheels 15 are coaxially connected with smart ramming wheel 14, and one
Level belt wheel 17 is coaxially connected with rough polishing emery wheel 21, and the first motor 2 is coaxially connected with driving gear 3, driving gear 3 and driven gear
4 are connected by engagement, and driven gear 4 is fixedly connected with the first crank 5, and the first crank 5 is connected with sheave 6, and sheave 6 and second is bent
Handle 8 is fixedly connected, and the second crank 8 is fixedly connected with spring shield 9, is provided with spring 10, spring 10 and fixed block 11 inside spring shield 9
Connect, polishing liquid case 7 is connected with the first shower nozzle 13 by the first liquid pipe 12, polishing liquid case 7 passes through the second liquid pipe 23 and the second spray
22 connections.
Embodiment 2, a kind of fine buffing machine of integral type silicon chip, wherein: the radius of one-level belt wheel 17 and two grades of belt wheels 15 it
Ratio for 3:1, can complete two procedures in an equipment, not only increase working (machining) efficiency, reduce mismachining tolerance simultaneously, improve silicon
The dimensional accuracy of piece.Remaining is with embodiment 1.
Operation principle:
Start the first motor 2, the first motor 2 drives driving gear 3 to rotate, driving gear 3 drives driven gear 4 to rotate,
Driven gear 4 drives the first crank 5 to rotate, and the first crank 5 drives sheave 6 to rotate, and sheave 6 drives the second crank 8 to rotate, and second
Crank 8 drives spring shield 9 to rotate, and spring shield 9 drives fixed block 11 to rotate, and fixed block 11 is ejected by spring 10, and then by silicon chip
Push up to rough polishing emery wheel 21, start the second motor 20, the second motor 20 drives driving pulley 19 to rotate, and driving pulley 19 passes through one-level
Transmission belt 18 drives one-level belt wheel 17 to rotate, and one-level belt wheel 17 drives rough polishing emery wheel 21 to rotate, and meanwhile, polishing fluid is by polishing liquid case
7 outflows, flow to rough polishing emery wheel 21 through the second liquid pipe 23 and the second shower nozzle 22, and then carry out rough polishing processing to silicon chip, rough polishing adds
After the completion of work, fixed block 11 drives silicon chip to turn at smart ramming wheel 14, and meanwhile, one-level belt wheel 17 is carried by secondary transmission band 16
Dynamic two grades of belt wheels 15 rotate, and two grades of belt wheels 15 drive smart ramming wheel 14 to rotate, and polishing fluid is flowed out by polishing liquid case 7, through first
Liquid pipe 12 and the first shower nozzle 13 flow to rough polishing emery wheel 21, so to rough polishing after silicon chip carry out essence throwing, reach rough polishing and throw with essence
Integral type is processed, and not only shortens the process-cycle, improves working (machining) efficiency, and page improves the precision of silicon chip, release simultaneously.
Claims (2)
1. the fine buffing machine of a kind of integral type silicon chip, including body (1), the first motor (2), driving gear (3), driven gear
(4), the first crank (5), sheave (6), polishing liquid case (7), the second crank (8), spring shield (9), spring (10), fixed block
(11), the first liquid pipe (12), the first shower nozzle (13), smart ramming wheel (14), two grades of belt wheels (15), secondary transmission band (16), one-levels
Belt wheel (17), primary transmission band (18), driving pulley (19), the second motor (20), rough polishing emery wheel (21), the second shower nozzle (22),
Second liquid pipe (23)；It is characterized in that: body (1) is fixedly connected with the second motor (20), the second motor (20) and driving pulley
(19) it is fixedly connected, driving pulley (19) is connected with one-level belt wheel (17) by primary transmission band (18), one-level belt wheel (17) leads to
Cross secondary transmission band (16) to be connected with two grades of belt wheels (15), two grades of belt wheels (15) are coaxially connected with smart ramming wheel (14), one-level band
Wheel (17) coaxially connected with rough polishing emery wheel (21), the first motor (2) is coaxially connected with driving gear (3), driving gear (3) and from
Moving gear (4) is connected by engagement, and driven gear (4) is fixedly connected with the first crank (5), and the first crank (5) is with sheave (6) even
Connect, sheave (6) is fixedly connected with the second crank (8), the second crank (8) is fixedly connected with spring shield (9), spring shield (9) is internal
It is provided with spring (10), spring (10) is connected with fixed block (11), the first liquid pipe (12) and the first shower nozzle are passed through in polishing liquid case (7)
(13) connect, polishing liquid case (7) is connected with the second shower nozzle (22) by the second liquid pipe (23).
2. a kind of fine buffing machine of integral type silicon chip according to claim 1 it is characterised in that: one-level belt wheel (17) and two
The ratio of the radius of level belt wheel (15) is 3:1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620669400.6U CN205904843U (en) | 2016-06-30 | 2016-06-30 | Meticulous burnishing machine of integral type silicon chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620669400.6U CN205904843U (en) | 2016-06-30 | 2016-06-30 | Meticulous burnishing machine of integral type silicon chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205904843U true CN205904843U (en) | 2017-01-25 |
Family
ID=57813068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620669400.6U Expired - Fee Related CN205904843U (en) | 2016-06-30 | 2016-06-30 | Meticulous burnishing machine of integral type silicon chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205904843U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107378730A (en) * | 2017-08-31 | 2017-11-24 | 江苏精电气科技有限公司 | A kind of booth case backboard rough polishing essence throws integrated apparatus |
| CN107649995A (en) * | 2017-09-29 | 2018-02-02 | 南通聚星铸锻有限公司 | Double speed emery wheel is used in a kind of high-strength alloy polishing |
| CN109571200A (en) * | 2019-01-23 | 2019-04-05 | 枣阳神虎摩擦材料有限责任公司 | It is a kind of intelligence brake block processing use outer arc grinding machine |
-
2016
- 2016-06-30 CN CN201620669400.6U patent/CN205904843U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107378730A (en) * | 2017-08-31 | 2017-11-24 | 江苏精电气科技有限公司 | A kind of booth case backboard rough polishing essence throws integrated apparatus |
| CN107649995A (en) * | 2017-09-29 | 2018-02-02 | 南通聚星铸锻有限公司 | Double speed emery wheel is used in a kind of high-strength alloy polishing |
| CN109571200A (en) * | 2019-01-23 | 2019-04-05 | 枣阳神虎摩擦材料有限责任公司 | It is a kind of intelligence brake block processing use outer arc grinding machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170125 Termination date: 20170630 |