CN205950441U - High -efficient silicon wafer beveler with biconial emery wheel - Google Patents
High -efficient silicon wafer beveler with biconial emery wheel Download PDFInfo
- Publication number
- CN205950441U CN205950441U CN201620669537.1U CN201620669537U CN205950441U CN 205950441 U CN205950441 U CN 205950441U CN 201620669537 U CN201620669537 U CN 201620669537U CN 205950441 U CN205950441 U CN 205950441U
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- CN
- China
- Prior art keywords
- emery wheel
- biconial
- motor
- beveler
- passes
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Abstract
The utility model relates to a high -efficient silicon wafer beveler with biconial emery wheel. At present, the beveler that the enterprise adopted when carrying out the chamfer to the silicon chip can not carry out the chamfer to the both sides of silicon chip simultaneously, consequently need go on alone, and the efficiency of this kind of mode is lower, and the productivity of unit interval is lower, exists not enoughly. The utility model relates to a high -efficient silicon wafer beveler with biconial emery wheel, wherein: the snail worm and wheel is connected through the meshing, and the worm wheel passes through first transmission shaft and fixed block fixed connection, second motor and driving pulley coaxial coupling, and driving pulley passes through the drive belt and is connected with from the driven pulleys, and from the driven pulleys passes through secondary drive axle and emery wheel fixed connection. This device adopts the emery wheel of biconial structure, can be disposable carry out chamfer processing to the both sides of silicon chip simultaneously, has improved the one time with efficiency, brings bigger economic benefits for the enterprise.
Description
Technical field
The utility model is related to wafer chamfering equipment technical field, especially a kind of efficient silicon chip with biconial emery wheel
Beveler.
Background technology
Currently, the beveler of enterprise's employing when carrying out chamfering to silicon chip can not carry out chamfering to the both sides of silicon chip simultaneously,
It is thus desirable to individually carrying out, this mode less efficient, the production capacity of unit interval is relatively low, Shortcomings.
Content of the invention
The purpose of this utility model is to provide a kind of efficient wafer chamfering machine with biconial emery wheel, above-mentioned for overcoming
The both sides of silicon chip, using the emery wheel of biconial structure, disposably can be carried out chamfer machining simultaneously, efficiency is improve one by deficiency
Times, it is that enterprise brings bigger economic benefit.
The technical solution of the utility model：
A kind of efficient wafer chamfering machine with biconial emery wheel, including body, the first motor, worm screw, worm gear, the first biography
Moving axis, fixed block, the second motor, driving pulley, transmission belt, driven pulley, second driving shaft, emery wheel；Wherein：Body and first
Motor is fixedly connected, and the first motor is coaxially connected with worm screw, and worm and wheel is connected by engagement, and worm gear passes through the first power transmission shaft
It is fixedly connected with fixed block, the second motor is coaxially connected with driving pulley, and driving pulley is connected with driven pulley by transmission belt,
Driven pulley is fixedly connected with emery wheel by second driving shaft.
A kind of efficient wafer chamfering machine with biconial emery wheel, wherein：It is provided with dregs guiding groove in emery wheel.
The utility model has the advantage of：This device adopts the emery wheel of biconial structure, can be disposably simultaneously to silicon chip
Both sides carry out chamfer machining, and efficiency is doubled, and are that enterprise brings bigger economic benefit.
Brief description
Fig. 1 is structure schematic diagram of the present utility model.
Reference：Body 1, the first motor 2, worm screw 3, worm gear 4, the first power transmission shaft 5, fixed block 6, the second motor 7, master
Movable belt pulley 8, transmission belt 9, driven pulley 10, second driving shaft 11, emery wheel 12, dregs guiding groove 13.
Specific embodiment
Embodiment 1, a kind of efficient wafer chamfering machine with biconial emery wheel, including body 1, the first motor 2, worm screw 3,
Worm gear 4, the first power transmission shaft 5, fixed block 6, the second motor 7, driving pulley 8, transmission belt 9, driven pulley 10, second driving shaft
11st, emery wheel 12；Wherein：Body 1 is fixedly connected with the first motor 2, and the first motor 2 is coaxially connected with worm screw 3, worm screw 3 and worm gear 4
Connected by engagement, worm gear 4 is fixedly connected with fixed block 6 by the first power transmission shaft 5, and the second motor 7 is coaxial with driving pulley 8
Connect, driving pulley 8 is connected with driven pulley 10 by transmission belt 9, driven pulley 10 passes through second driving shaft 11 and emery wheel 12
It is fixedly connected.
Embodiment 2, a kind of efficient wafer chamfering machine with biconial emery wheel, wherein：It is provided with dregs guiding groove 13 in emery wheel 12,
Be conducive to the derivation of scrap silicon, improve efficiency.Remaining is with embodiment 1.
Operation principle：
Start the first motor 2, the first motor 2 drives worm screw 3 to rotate, worm screw 3 drives worm gear 4 to rotate, and worm gear 4 passes through first
Power transmission shaft 5 drives fixed block 6 to rotate, and fixed block 6 clamps silicon chip low speed rotation, realizes feeding, meanwhile, the second motor 7 drives
Driving pulley 8 rotates, and driving pulley 8 drives driven pulley 10 to rotate by transmission belt 9, and driven pulley 10 passes through second driving shaft
11 drive emery wheels 12 rotate, and then silicon chip is carried out with chamfer machining, and the processed rear waste material producing is derived by dregs guiding groove 13, bipyramid
The emery wheel of shape can carry out chamfering simultaneously to silicon chip two sides, improves chamfering efficiency, release.
Claims (2)
1. a kind of efficient wafer chamfering machine with biconial emery wheel, including body (1), the first motor (2), worm screw (3), worm gear
(4), the first power transmission shaft (5), fixed block (6), the second motor (7), driving pulley (8), transmission belt (9), driven pulley (10),
Two power transmission shafts (11), emery wheel (12)；It is characterized in that：Body (1) is fixedly connected with the first motor (2), the first motor (2) and snail
Bar (3) is coaxially connected, and worm screw (3) is connected by engagement with worm gear (4), and worm gear (4) passes through the first power transmission shaft (5) and fixed block
(6) it is fixedly connected, the second motor (7) is coaxially connected with driving pulley (8), driving pulley (8) passes through transmission belt (9) and driven belt
Wheel (10) connects, and driven pulley (10) is fixedly connected with emery wheel (12) by second driving shaft (11).
2. a kind of efficient wafer chamfering machine with biconial emery wheel according to claim 1 it is characterised in that：Emery wheel
(12) it is provided with dregs guiding groove (13) in.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620669537.1U CN205950441U (en) | 2016-06-30 | 2016-06-30 | High -efficient silicon wafer beveler with biconial emery wheel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620669537.1U CN205950441U (en) | 2016-06-30 | 2016-06-30 | High -efficient silicon wafer beveler with biconial emery wheel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205950441U true CN205950441U (en) | 2017-02-15 |
Family
ID=57969075
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620669537.1U Expired - Fee Related CN205950441U (en) | 2016-06-30 | 2016-06-30 | High -efficient silicon wafer beveler with biconial emery wheel |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205950441U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110281101A (en) * | 2019-07-23 | 2019-09-27 | 西安奕斯伟硅片技术有限公司 | A kind of edge grinding device and method |
| CN113798965A (en) * | 2021-09-08 | 2021-12-17 | 亚洲硅业(青海)股份有限公司 | Silicon core preparation equipment |
-
2016
- 2016-06-30 CN CN201620669537.1U patent/CN205950441U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110281101A (en) * | 2019-07-23 | 2019-09-27 | 西安奕斯伟硅片技术有限公司 | A kind of edge grinding device and method |
| CN113798965A (en) * | 2021-09-08 | 2021-12-17 | 亚洲硅业(青海)股份有限公司 | Silicon core preparation equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170215 Termination date: 20180630 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |