CN205859191U - Pendulum valve time a kind of - Google Patents
Pendulum valve time a kind of Download PDFInfo
- Publication number
- CN205859191U CN205859191U CN201620450268.XU CN201620450268U CN205859191U CN 205859191 U CN205859191 U CN 205859191U CN 201620450268 U CN201620450268 U CN 201620450268U CN 205859191 U CN205859191 U CN 205859191U
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- pendulum
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Abstract
Pendulum valve time a kind of, there is valve bonnet, the first longitudinally disposed opening and the second opening, and between the first opening and the second opening, and the valve plate of movement it is pivoted by driver drives, wherein, the hub switch side groove of valve plate engages setting with the pilot pin being arranged in valve bonnet, and the area of the contact surface of engaging is more than the inner circumferential area with wide contour cuboid.This utility model makes described valve plate be parallel to the first wall of described valve bonnet and described second wall during pivot movement, the phenomenon of unbalance stress during the installation that elimination is brought with pilot pin abrasion due to the hub switch side groove of valve plate, and the defect that the valve plate thus caused is not good enough relative to valve bonnet flatness, avoid valve plate to scratch in open and close moving process and arrive locking ring, cause sealing ring fracture or the problem such as come off, be effectively reduced product quality risk and reduce unnecessary human and material resources cost.
Description
Technical field
This utility model relates to technical field of manufacturing semiconductors, particularly relates to pendulum valve during one.
Background technology
Chemical gaseous phase deposition is typically under hot environment in process cavity, by specific process gas wait from
Under the conditions of daughter strengthens, in the method that silicon-based substrate surface carries out thin film deposition.It is characterized in that film forming speed is fast, film equality
Good.Time pendulum valve be used for controlling process cavity pressure, reach manufacturing process requirement.Time pendulum valve O RunddichtringO need periodically
Change, to guarantee there is no internal hemorrhage due to trauma or leak outside.If occurring, internal hemorrhage due to trauma or the defect leaked outside certainly will affect manufacturing process, because of air pressure because of
Element causes batch defective products.It is apparent that have higher for the locking ring after dismounting and valve plate relative to the flatness of valve bonnet
Requirement.
But, due to time pendulum valve O RunddichtringO change relatively frequent, pilot pin and the groove of valve plate in valve bonnet have
Certain abrasion, when mounted because of discontinuity, causes valve plate not good enough relative to valve bonnet flatness, thus in the pivot fortune of valve plate
Will be scratched during Dong locking ring, so cause being arranged in described locking ring time pendulum valve O fracture or
Come off, affect process cavity pressure, it is impossible to reach the requirement of manufacturing process.Thus, the most then need to change
Pendulum valve module time overall, not only brings high risk, and causes the extra consumption of human and material resources product quality.
Therefore the problem existed for prior art, this case designer, by being engaged in the industry experience for many years, actively studies
Improvement, pendulum valve when then having had this utility model one.
Utility model content
This utility model is in prior art, and time traditional, the O RunddichtringO of pendulum valve is changed relatively more frequent, valve bonnet
Interior pilot pin and the groove of valve plate have certain abrasion, when mounted because of discontinuity, cause valve plate smooth relative to valve bonnet
Spend not good enough, thus the locking ring that will scratch in the pivot motion course of valve plate, and then cause being arranged in described locking ring
Time pendulum valve O fracture or come off, affect process cavity pressure, it is impossible to reach the requirement of manufacturing process, even need
Pendulum valve module during entirety to be changed, not only brings high risk, and causes the extra consumption of human and material resources product quality
Pendulum valve when providing a kind of etc. defect.
For realizing the purpose of this utility model, pendulum valve when this utility model provides a kind of, pendulum valve time described, there is valve
Cover, the first opening of being disposed longitudinally in described valve bonnet and the second opening, and be positioned at described first opening and described second and open
Between Kou, and be pivoted the valve plate of movement by driver drives, wherein, the hub switch side groove of described valve plate be arranged on institute
The pilot pin engaging stated in valve bonnet is arranged, and the area of the contact surface of engaging is more than the inner circumferential area with wide contour cuboid.
Alternatively, the contact surface that time described, the hub switch side groove of pendulum valve engages with described pilot pin is that halfpace shape is arranged.
Alternatively, time described, the hub switch side groove of pendulum valve and the contact surface of described pilot pin engaging are that profile of tooth engages shape and sets
Put.
Alternatively, the contact surface that time described, the hub switch side groove of pendulum valve engages with described pilot pin is polygon-shaped setting.
Alternatively, described valve bonnet include in towards and spaced first wall and the second wall, and at described first wall and
It is longitudinally formed the first opening and the second opening, described first opening and described second opening between described second wall to be formed further
The runner passed through for guiding gas.
Alternatively, time described, the horizontal area of the valve plate of pendulum valve is completely covered described first opening when full-shut position.
Alternatively, the side towards described first wall of described valve plate arranges locking ring, and described locking ring towards
The side of described valve plate arranges sealing ring.
Alternatively, described valve plate is parallel to the first wall and second wall of described valve bonnet during pivot movement.
In sum, the hub switch side groove of the valve plate of pendulum valve and the pilot pin being arranged in described valve bonnet during this utility model
Engaging is arranged, and the area of the contact surface of engaging is more than the inner circumferential area with wide contour cuboid so that described valve plate is at pivot
It is parallel to the first wall of described valve bonnet and described second wall during transfer is dynamic, eliminates the hub switch side groove due to valve plate and pilot pin
The phenomenon of unbalance stress during the installation that abrasion is brought, and lack not good enough relative to valve bonnet flatness of the valve plate thus caused
Fall into, it is to avoid valve plate scratches to locking ring in open and close moving process, the problem such as cause sealing ring to rupture or to come off, effectively subtract
Lack product quality risk and reduced unnecessary human and material resources cost.
Accompanying drawing explanation
The side view of pendulum valve when being the present invention described in Fig. 1；
First embodiment sectional view of the contact surface of pendulum valve when Fig. 2 show this utility model；
Second embodiment sectional view of the contact surface of pendulum valve when Fig. 3 show this utility model；
3rd embodiment sectional view of the contact surface of pendulum valve when being this utility model described in Fig. 4.
Detailed description of the invention
By describing the technology contents of the invention, structural feature in detail, being reached purpose and effect, below in conjunction with reality
Execute example and coordinate accompanying drawing to be described in detail.
Chemical gaseous phase deposition is typically under hot environment in process cavity, by specific process gas wait from
Under the conditions of daughter strengthens, in the method that silicon-based substrate surface carries out thin film deposition.It is characterized in that film forming speed is fast, film equality
Good.Time pendulum valve be used for controlling process cavity pressure, reach manufacturing process requirement.Time pendulum valve O RunddichtringO need periodically
Change, to guarantee there is no internal hemorrhage due to trauma or leak outside.If occurring, internal hemorrhage due to trauma or the defect leaked outside certainly will affect manufacturing process, because of air pressure because of
Element causes batch defective products.It is apparent that have higher for the locking ring after dismounting and valve plate relative to the flatness of valve bonnet
Requirement.
But, due to time pendulum valve O RunddichtringO change relatively frequent, pilot pin and the groove of valve plate in valve bonnet have
Certain abrasion, when mounted because of discontinuity, causes valve plate not good enough relative to valve bonnet flatness, thus in the pivot fortune of valve plate
Will be scratched during Dong locking ring, so cause being arranged in described locking ring time pendulum valve O fracture or
Come off, affect process cavity pressure, it is impossible to reach the requirement of manufacturing process.Thus, the most then need to change
Pendulum valve module time overall, not only brings high risk, and causes the extra consumption of human and material resources product quality.
Refer to the side view of pendulum valve when being the present invention described in Fig. 1, Fig. 1.Pendulum valve 1 time described, has valve bonnet 11, indulges
The first opening 12 and the second opening 13 in being arranged on described valve bonnet 11, and it is positioned at described first opening 12 and described second
Between opening 13, and driven the valve plate 15 being pivoted movement by driver 14.Wherein, the hub switch side groove of described valve plate 15
151 engage setting with the pilot pin 16 being arranged in described valve bonnet 11, and the area of the contact surface 152 of engaging more than with wide contour it
The inner circumferential area of cuboid.
In order to disclose the technical scheme of this utility model more intuitively, highlight the beneficial effect of this utility model, in conjunction with
As a example by detailed description of the invention, structure and the operation principle of pendulum valve during this utility model are illustrated.In detailed description of the invention
In, time described, the concrete size of each function element of pendulum valve, shape etc. are only enumerated, and are not construed as this utility model technology
The restriction of scheme.
As specifically embodiment, described valve bonnet 11 include in towards and spaced first wall 111 and the second wall
112, and between described first wall 111 and described second wall 112, it is longitudinally formed the first opening 12 and the second opening 13, described
One opening 12 and described second opening 13 form the runner 17 passed through for guiding gas further.Described valve plate 15 towards institute
The side stating the first wall 111 arranges locking ring 18, and arranges sealing in the side towards described valve plate 15 of described locking ring 18
Circle 19.
Refer to Fig. 2～Fig. 4, and combine the of the contact surface of pendulum valve when showing this utility model refering to Fig. 1, Fig. 2
One embodiment sectional view.Second embodiment sectional view of the contact surface of pendulum valve when Fig. 3 show this utility model.Fig. 4
Described for the 3rd embodiment sectional view of the contact surface of pendulum valve during this utility model.As those skilled in the art, it is not difficult
Understand ground, in order to ensure that the area of contact surface 152 that the hub switch side groove 151 of described valve plate 15 engages with described pilot pin 16 is more than
With the inner circumferential area of wide contour cuboid, without limitation, the hub switch side groove 151 of described pendulum valve 15 blocks with described pilot pin 16
The contact surface of conjunction is that halfpace shape is arranged, or the contact surface that the hub switch side groove 151 of described pendulum valve 15 engages with described pilot pin 16
Engage shape to arrange in profile of tooth, or the contact surface that the hub switch side groove 151 of described pendulum valve 15 engages with described pilot pin 16 is polygon
Shape is arranged.
It is apparent that during this utility model the hub switch side groove 151 of the valve plate 15 of pendulum valve 1 be arranged in described valve bonnet 11
Pilot pin 16 engaging arrange, and the area of the contact surface 152 of engaging is more than the inner circumferential area with the contour cuboid of width, the most to the greatest extent may be used
Can ground increase described contact surface 152 area so that described valve plate 15 be parallel to during pivot movement described valve bonnet 11 it
First wall 111 and described second wall 112.That is, during this utility model, pendulum valve 1 relies on the area of the contact surface 152 of engaging to increase,
The phenomenon of unbalance stress, Yi Jiyou during the installation that elimination is brought with pilot pin 16 abrasion due to the hub switch side groove 151 of valve plate 15
The defect that the valve plate 15 that this causes is not good enough relative to valve bonnet 11 flatness, it is to avoid valve plate 15 scratches in open and close moving process and arrives
Locking ring 18, the problem such as cause sealing ring 19 to rupture or to come off, be effectively reduced product quality risk and reduce unnecessary
Human and material resources cost.
On the other hand, in manufacturing process, process cavity carries out pressure regulation, time the most described by pendulum valve time described 1
Pendulum valve 1 is pivoted mobile under the driving of driver 14, when when described, pendulum valve 1 is in full-shut position, time the most described
The horizontal area of the valve plate 15 of pendulum valve 1 is completely covered described first opening 11.
In sum, the hub switch side groove of the valve plate of pendulum valve and the pilot pin being arranged in described valve bonnet during this utility model
Engaging is arranged, and the area of the contact surface of engaging is more than the inner circumferential area with wide contour cuboid so that described valve plate is at pivot
It is parallel to the first wall of described valve bonnet and described second wall during transfer is dynamic, eliminates the hub switch side groove due to valve plate and pilot pin
The phenomenon of unbalance stress during the installation that abrasion is brought, and lack not good enough relative to valve bonnet flatness of the valve plate thus caused
Fall into, it is to avoid valve plate scratches to locking ring in open and close moving process, the problem such as cause sealing ring to rupture or to come off, effectively subtract
Lack product quality risk and reduced unnecessary human and material resources cost.
Claims (8)
1. pendulum valve time, the first opening there is valve bonnet, being disposed longitudinally in described valve bonnet and the second opening, and be positioned at
Between described first opening and described second opening, and it is pivoted the valve plate of movement by driver drives, it is characterised in that
The hub switch side groove of described valve plate engages setting with the pilot pin being arranged in described valve bonnet, and the area of the contact surface of engaging is more than
Inner circumferential area with wide contour cuboid.
2. pendulum valve time as claimed in claim 1, it is characterised in that the hub switch side groove of pendulum valve and described pilot pin time described
The contact surface of engaging is that halfpace shape is arranged.
3. pendulum valve time as claimed in claim 1, it is characterised in that the hub switch side groove of pendulum valve and described pilot pin time described
The contact surface of engaging is that profile of tooth engagement shape is arranged.
4. pendulum valve time as claimed in claim 1, it is characterised in that the hub switch side groove of pendulum valve and described pilot pin time described
The contact surface of engaging is polygon-shaped setting.
5. the time pendulum valve as described in Claims 1 to 4 any claim, it is characterised in that described valve bonnet include in towards
And spaced first wall and the second wall, and between described first wall and described second wall, it is longitudinally formed the first opening and
Two openings, described first opening and described second opening form the runner passed through for guiding gas further.
6. pendulum valve time as claimed in claim 5, it is characterised in that time described, the horizontal area of the valve plate of pendulum valve is fully closed
Described first opening is completely covered during state.
7. pendulum valve time as claimed in claim 5, it is characterised in that the side towards described first wall of described valve plate is arranged
Locking ring, and sealing ring is set in the side towards described valve plate of described locking ring.
8. pendulum valve time as claimed in claim 5, it is characterised in that described valve plate is parallel to institute during pivot movement
State the first wall and second wall of valve bonnet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620450268.XU CN205859191U (en) | 2016-05-17 | 2016-05-17 | Pendulum valve time a kind of |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620450268.XU CN205859191U (en) | 2016-05-17 | 2016-05-17 | Pendulum valve time a kind of |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205859191U true CN205859191U (en) | 2017-01-04 |
Family
ID=57642750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620450268.XU Active CN205859191U (en) | 2016-05-17 | 2016-05-17 | Pendulum valve time a kind of |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205859191U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107954096A (en) * | 2017-11-01 | 2018-04-24 | 江门市振达机械制造有限公司 | A kind of dust suppression funnel |
-
2016
- 2016-05-17 CN CN201620450268.XU patent/CN205859191U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107954096A (en) * | 2017-11-01 | 2018-04-24 | 江门市振达机械制造有限公司 | A kind of dust suppression funnel |
| CN107954096B (en) * | 2017-11-01 | 2024-05-28 | 江门市振达机械制造有限公司 | Dust suppression funnel |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |