CN205852505U - A kind of silicon chip automatic grinding device - Google Patents
A kind of silicon chip automatic grinding device Download PDFInfo
- Publication number
- CN205852505U CN205852505U CN201620425458.6U CN201620425458U CN205852505U CN 205852505 U CN205852505 U CN 205852505U CN 201620425458 U CN201620425458 U CN 201620425458U CN 205852505 U CN205852505 U CN 205852505U
- Authority
- CN
- China
- Prior art keywords
- axis
- silicon chip
- grinding device
- automatic grinding
- air motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of silicon chip automatic grinding device, including support, it is characterized in that: the X-axis transverse-moving mechanism being provided with bilateral reciprocation on described support, the Y-axis feed mechanism being provided with front-rear reciprocation movement, the air motor rotating mechanism that is connected with described Y-axis feed mechanism, described air motor rotating mechanism is provided with the bistrique for grinding silicon chip.By using said structure, X-axis transverse-moving mechanism is utilized to replace artificial reciprocal back and forth hand-held, utilize Y-axis feed mechanism to realize the operation replacing manually changing silicon chip grinding face, utilize air motor rotating mechanism band rotary bistrique quick rotation, it is achieved the grinding of high-quality silicon chip.
Description
Technical field
This utility model relates to a kind of silicon chip automatic grinding device, particularly relates to a kind of production efficiency high, easy to process
Silicon chip automatic grinding device.
Background technology
Silicon chip there may be certain deviation due to yardstick in process of production, is therefore accomplished by the most hand-held mode and exists
The correction back and forth of emery wheel, but owing to using hand-held mode, therefore this operation can bring about following shortcoming: 1, and waste is ground specially
1 labour force of mill；2, due to during hand-held it is possible that weak vibrations, cause the flatness ground artificially to be difficult to handle
Holding, scrappage is relatively large；Manual operation, efficiency is the highest.
Summary of the invention
Technical problem to be solved in the utility model is to provide a kind of silicon chip automatic grinding device, has production efficiency
Feature high, easy to process.
For solving above-mentioned technical problem, the technical solution of the utility model is: a kind of silicon chip automatic grinding device, including propping up
Frame, its innovative point is: is provided with the X-axis transverse-moving mechanism of bilateral reciprocation on described support, is provided with front-rear reciprocation movement
Y-axis feed mechanism, the air motor rotating mechanism that is connected with described Y-axis feed mechanism, on described air motor rotating mechanism
It is provided with the bistrique for grinding silicon chip.
Preferably, described X-axis transverse-moving mechanism includes X-axis workbench, is arranged on described X-axis workbench symmetrically arranged two
Individual guide rail, the X-axis being arranged between two described guide rails drive motor and the X-axis driving the motor shaft of motor to be connected with this X-axis
The X-axis traverser coordinated with described X-axis screw mandrel with screw mandrel, described X-axis traverser coordinates on two described guide rails.
Preferably, described Y-axis feed mechanism includes Y-axis work platforms, is arranged on described Y-axis work platforms and is symmetrical arranged
Two Y-axis guide rails, the Y-axis that is arranged between two described Y-axis guide rails drive motor and with this Y-axis driving motor
The Y-axis screw mandrel that motor shaft is connected.
Preferably, described air motor rotating mechanism includes pedestal and the air motor being arranged on described pedestal.
Preferably, described support is provided with the cyclic water tank for water cooling.
Preferably, described support is hollow out support.
Preferably, described support is provided with man machine interface operation module.
Preferably, described support being provided with distribution board module, described distribution board module includes with air motor signal even
The servomechanism module connect and the motor resistance adjusting module being connected with described air motor.
The utility model has the advantage of: by using said structure, utilize X-axis transverse-moving mechanism to replace artificial the most past
Multiple hand-held, utilizes Y-axis feed mechanism to realize the operation replacing manually changing silicon chip grinding face, utilizes air motor rotating mechanism
Band rotary bistrique quick rotation, it is achieved the grinding of high-quality silicon chip.
Accompanying drawing explanation
With detailed description of the invention, this utility model is described in further detail below in conjunction with the accompanying drawings.
Fig. 1 is the front view of this utility model a kind of silicon chip automatic grinding device.
Fig. 2 is the left view of this utility model a kind of silicon chip automatic grinding device.
Fig. 3 is the top view of this utility model a kind of silicon chip automatic grinding device.
In figure: 1-support, 2-X axle workbench, 3-guide rail, 4-X axis drive motor, 5-X axle screw mandrel, 6-X axle activity are put down
Platform, 7-Y axle work platforms, 8-Y axle guide rail, 9-Y axis drive motor, 10-Y axial filament bar, 11-pedestal, 12-air motor, 13-
Cyclic water tank, 14-man machine interface operation module, 15-distribution board module, 151-servomechanism module, 152-motor resistance adjust mould
Block.
Detailed description of the invention
This utility model silicon chip automatic grinding device includes support 1, and the X-axis that support 1 is provided with bilateral reciprocation is horizontal
Moving mechanism, the Y-axis feed mechanism being provided with front-rear reciprocation movement, air motor 12 rotating mechanism that is connected with Y-axis feed mechanism,
It is provided with the bistrique for grinding silicon chip on air motor 12 rotating mechanism.By using said structure, utilize X-axis transverse-moving mechanism
Replace artificial reciprocal back and forth hand-held, utilize Y-axis feed mechanism to realize the operation replacing manually changing silicon chip grinding face, utilize
Air motor 12 rotating mechanism band rotary bistrique quick rotation, it is achieved the grinding of high-quality silicon chip.
Above-mentioned X-axis transverse-moving mechanism includes X-axis workbench 2, is arranged on symmetrically arranged two guide rails on X-axis workbench 2
3, the X-axis being arranged between two guide rails 3 drives motor 4 and the X-axis screw mandrel driving the motor shaft of motor 4 to be connected with this X-axis
The 5 X-axis traversers 6 coordinated with X-axis screw mandrel 5, X-axis traverser 6 coordinates on two guide rails 3.Y-axis feed mechanism bag
Include Y-axis work platforms 7, be arranged on symmetrically arranged two Y-axis guide rails 8 on Y-axis work platforms 7, be arranged on two Y-axis with leading
Y-axis between rail 8 drives motor 9 and the Y-axis screw mandrel 10 driving the motor shaft of motor to be connected with this Y-axis.
Above-mentioned air motor 12 rotating mechanism includes pedestal 11 and arranges air motor 12 on the base 11；On support
It is provided with the cyclic water tank 13 for water cooling；In order to save material, support is hollow out support；For the ease of realize man-machine mutually
Dynamic, support is provided with man machine interface operation module 14.In order to control air motor 12 in real time, support is provided with distribution board mould
Block 15, distribution board module 15 includes the servomechanism module 151 being connected with air motor 12 signal and is connected with air motor 12
Motor resistance adjusting module 152.
It is last it should be noted that above example is only in order to illustrate technical scheme and non-limiting technical side
Case, it will be understood by those within the art that, technical scheme is modified or equivalent by those, and
Without departing from objective and the scope of the technical program, all should contain in the middle of scope of the presently claimed invention.
Claims (8)
1. a silicon chip automatic grinding device, including support, it is characterised in that: it is provided with bilateral reciprocation on described support
X-axis transverse-moving mechanism, the Y-axis feed mechanism being provided with front-rear reciprocation movement, be connected with described Y-axis feed mechanism air motor rotation
Rotation mechanism, described air motor rotating mechanism is provided with the bistrique for grinding silicon chip.
2. a kind of silicon chip automatic grinding device as claimed in claim 1, it is characterised in that: described X-axis transverse-moving mechanism includes X-axis
Workbench, be arranged on symmetrically arranged two guide rails on described X-axis workbench, the X-axis that is arranged between two described guide rails is driven
The X-axis activity that galvanic electricity machine and the X-axis screw mandrel driving the motor shaft of motor to be connected with this X-axis coordinate with described X-axis screw mandrel is put down
Platform, described X-axis traverser coordinates on two described guide rails.
3. a kind of silicon chip automatic grinding device as claimed in claim 1, it is characterised in that: described Y-axis feed mechanism includes Y-axis
Work platforms, it is arranged on symmetrically arranged two Y-axis guide rails on described Y-axis work platforms, is arranged on two described Y-axis with leading
Y-axis between rail drives motor and the Y-axis screw mandrel driving the motor shaft of motor to be connected with this Y-axis.
4. a kind of silicon chip automatic grinding device as claimed in claim 1, it is characterised in that: described air motor rotating mechanism bag
Include pedestal and the air motor being arranged on described pedestal.
5. a kind of silicon chip automatic grinding device as claimed in claim 1, it is characterised in that: it is provided with for water on described support
The cyclic water tank of cooling.
6. a kind of silicon chip automatic grinding device as claimed in claim 5, it is characterised in that: described support is hollow out support.
7. a kind of silicon chip automatic grinding device as claimed in claim 5, it is characterised in that: it is provided with man-machine boundary on described support
Face operation module.
8. a kind of silicon chip automatic grinding device as claimed in claim 5, it is characterised in that: it is provided with distribution board on described support
Module, described distribution board module includes the servomechanism module being connected with air motor signal and the horse being connected with described air motor
Reach resistance adjusting module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620425458.6U CN205852505U (en) | 2016-05-12 | 2016-05-12 | A kind of silicon chip automatic grinding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620425458.6U CN205852505U (en) | 2016-05-12 | 2016-05-12 | A kind of silicon chip automatic grinding device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205852505U true CN205852505U (en) | 2017-01-04 |
Family
ID=57642748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620425458.6U Expired - Fee Related CN205852505U (en) | 2016-05-12 | 2016-05-12 | A kind of silicon chip automatic grinding device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205852505U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105834889A (en) * | 2016-05-12 | 2016-08-10 | 苏州市展进机电设备有限公司 | Automatic grinding device for silicon wafer |
-
2016
- 2016-05-12 CN CN201620425458.6U patent/CN205852505U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105834889A (en) * | 2016-05-12 | 2016-08-10 | 苏州市展进机电设备有限公司 | Automatic grinding device for silicon wafer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170104 Termination date: 20180512 |