CN205844243U - A kind of atmosphere controlled many devices chemistry resistor-type gas sensor sealing test device - Google Patents
A kind of atmosphere controlled many devices chemistry resistor-type gas sensor sealing test device Download PDFInfo
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- CN205844243U CN205844243U CN201620745616.6U CN201620745616U CN205844243U CN 205844243 U CN205844243 U CN 205844243U CN 201620745616 U CN201620745616 U CN 201620745616U CN 205844243 U CN205844243 U CN 205844243U
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Abstract
The utility model discloses a kind of atmosphere controlled many devices chemistry resistor-type gas sensor sealing test device, belong to physical measurement techniques field.This device, for the performance test of chemical-electrical resistance type gas sensor, is divided into two parts: control climate unit, by external air inlet and escape pipe with the use of；Test cell, including sample stage and electrode pulling device, sample stage is connected with electrode pulling device by welding, electrode pulling device is mainly passed through screw thread and seal with elastometic washer by sealing member a and sealing member b, sealing member b internals have the hole identical with digital sourcemeter connector number, draw and use epoxy sealing for electrode wires, the electrode wires of extraction by realizing the connection with digital sourcemeter with the electrode converting interface being fixed on sealing member b outer member, and sealing member b internals use with outer member and are mechanically connected.Whole device be becket around, it is achieved the electro-magnetic screen function of faraday cup, beneficially na and following fine current measure.
Description
Technical field
This utility model relates to a kind of atmosphere controlled many devices chemistry resistor-type gas sensor sealing test device, belongs to
Physical measurement techniques field.
Background technology
Chemical-electrical resistance type gas sensor belongs to the one of semiconductor gas sensor, residing for chemical-electrical resistance type sensor
Ambiance in be passed through detected gas, when its concentration reaches certain value, due to the gas absorption on surface, cause its electricity
The change of conductance, utilizes this signal of telecommunication, can hunt leak gas with various, Disaster prevention and alarm and measurement.Such as, N-shaped is partly led
When reducibility gas is surveyed in health check-up, after reaction, gas is oxidized, in electronics implant n-type quasiconductor so that it is resistance reduces, logical
Cross the change of resistance to monitor the concentration change of detected gas.
The sign of chemical-electrical resistance type gas sensor performance mainly has static method and dynamic method two kinds.Static method is mainly passed through
Injecting detected gas and spread rapidly the simulation realizing particular atmosphere, shortcoming is that humidity is affected by environment greatly, and detected gas is dense
Degree control accuracy is poor；Dynamic method is mainly precisely controlled flow patterns by mass flowmenter, least concentration can as little as 1ppb (±
10%, volumetric concentration 1ppb=1 × 10-9m3/m3), shortcoming is that sealing difficulty is big, and once can only test a sample.Therefore,
A kind of atmosphere controlled many devices chemistry resistor-type gas sensor sealing test device of development is the most necessary.
Utility model content
The purpose of this utility model is to provide a kind of atmosphere controlled many devices chemistry resistor-type gas sensor sealing test
Device.The purpose of this utility model is achieved through the following technical solutions.
A kind of atmosphere controlled many devices chemistry resistor-type gas sensor sealing test device, draws including sample stage, electrode
Going out device and atmosphere holding unit, whole test device is placed in required atmosphere by atmosphere holding unit, and electrode pulling device will
Sample constitutes path with external testing instrument.During test, sample is placed on sample stage, makes whole survey by atmosphere holding unit
Electricity testing device is in required atmosphere, and electrode pulling device makes sample and external testing instrument (such as digital sourcemeter Keithley
2601) path is constituted, it is achieved the performance test to gas sensor.
Further, described atmosphere holding unit includes hermetic container, air inlet pipeline and valve on hermetic container, gives vent to anger
Pipeline and valve, Pressure gauge and gas suction device.
Further, described atmosphere holding unit includes hermetic container, two air inlet pipe on hermetic container and valve, one
Individual escape pipe and valve, a vacuum meter and vacuum pump.
The electrode of sample stage is drawn and realizes constituting path with sample and external testing instrument, realize test device simultaneously
Seal, be the key of the present invention.To this end, sample load bearing unit and atmosphere holding unit have been done well-designed, with reality by inventor
Existing above-mentioned target.
The hermetic container of atmosphere holding unit includes quartz ampoule and the sealing of airtight quartz ampoule opening closed one end
Part, sealing member is divided into two parts: sealing member a and sealing member b, sealing member a and sealing member b pass through mouth of pipe screw thread and rubber ring at stone
The outer side compression of English pipe seals, and sealing member b is divided into internals and outer member two parts, internals and outer member to use stainless steel part to be mechanically connected,
Internals are connected with air inlet pipeline, outlet pipe and Pressure gauge and have electrode hole, and outer member has electrode converting interface；Sample stage leads to
Crossing welding to be connected with sealing member b, the sample electrode on sample stage is drawn by the electrode hole in sealing member b internals and is used after drawing
Epoxy sealing, the electrode wires of extraction is connected with digital sourcemeter by the electrode converting interface in sealing member b outer member.
Further, electrode converting interface number is n times of digital sourcemeter number of poles, and n is natural number, it is possible to achieve simultaneously
Measure n sample.
Further, quartz ampoule outer layer covers layer of metal net, form the becket of whole device around, it is achieved faraday cup
Electro-magnetic screen function, beneficially nA and following fine current are measured.
This utility model has the advantage that this device uses atmosphere controlled, and coordinating with humidity generation tank, Standard Gases can be real
The regulation of existing different atmosphere, coordinates with vacuum pump and can realize vacuum atmosphere, beneficially the performance table of chemical-electrical resistance type gas sensor
Levy.By changing number of poles, this device can realize organizing the test of chemical-electrical resistance type gas sensor more simultaneously.This device can be real
Existing Faraday cage shield electromagnetic interference, it is achieved na and following fine current are measured.This device uses welded seal and epoxy
Resin seal, can vacuum-resistant, pressure more than 1MPa.Used by this device, quartz ampoule material, rustless steel, rubber ring fill with epoxy resin
Seal with the use of, core sample platform is the highest realizes heatproof 1000 DEG C.
Accompanying drawing explanation
Fig. 1 is atmosphere of the present utility model controlled many devices chemistry resistor-type gas sensor sealing test device cross section
Figure.
Fig. 2 is sealing member b internals right view.
Fig. 3 is sealing member b outer member right view.
Reference: 1-quartz ampoule, 2-rubber ring, 3-sealing member a, 4-sealing member b, 5-electrode hole, 6-escape pipe, 7-sample
Sample platform, 8-sealing member b internals, 9-sealing member b outer member, 10-electrode converting interface, 11-escape pipe exports.
Detailed description of the invention
Below in conjunction with accompanying drawing, this utility model is described further.
A kind of atmosphere controlled many devices chemistry resistor-type gas sensor sealing test device, draws including sample stage 7, electrode
Going out device and atmosphere holding unit, atmosphere holding unit makes whole test device be in required atmosphere, and electrode pulling device makes
Sample constitutes path with external testing instrument.During test, sample is placed on sample stage 7, makes whole by atmosphere holding unit
Test device is in required atmosphere, and electrode pulling device makes sample and external testing instrument (such as digital sourcemeter Keithley
2601) path is constituted, it is achieved the performance test to gas sensor.
The hermetic container of atmosphere holding unit includes quartz ampoule 1 and the sealing of airtight quartz ampoule opening closed one end
Part, sealing member is divided into two parts: sealing member a3 and sealing member b4, sealing member a3 and sealing member b4 pass through mouth of pipe screw thread and rubber ring
2 seal in the outer side compression of quartz ampoule 1, and sealing member b4 is divided into internals and outer member two parts, internals and outer member to use stainless steel part machine
Tool connects, and internals are connected with air inlet pipeline 6, outlet pipe and Pressure gauge and have electrode hole 5, outer member has electrode converting interface
10；Sample stage 7 is connected with sealing member b4 by welding, and the sample electrode on sample stage 7 passes through in sealing member b4 internals after drawing
Electrode hole 5 draw and use epoxy sealing, the electrode wires of extraction by the electrode converting interface 10 in sealing member b4 outer member with
Digital sourcemeter connects.
Embodiment 1
The sapphire substrate of prefabricated Ag electrode is prepared the ZnO nanowire array thin film of different-diameter.By a diameter of 50-
70, the ZnO gas sensor of 100-150 and 200-250nm is fixed on horizontal sample platform, by drawing Au line and each self-electrode
Connect.Then sealing fixing by the sealing member containing sample stage and quartz ampoule, electrode contact is connected with digital sourcemeter, by quality stream
Synthesis of air, Standard Gases (benzene such as 1-1000ppm is scattered in synthesis of air) and the humidity generation ullage that gauge regulation is dried
Throughput realizes gas with various (benzene,toluene,xylene, acetone, formaldehyde etc.), variable concentrations (10ppb-1000ppm), DIFFERENT WET
The control of degree (0-100%RH), controls different temperatures (25-600 DEG C) by tube furnace, it is achieved multiple ZnO gas sensors
Can be with the test of gaseous species, gas concentration, humidity and variations in temperature.
Embodiment 2
The alumina substrate of prefabricated Au interdigital electrode is prepared the SnO of different-thickness2Nano-stick array thin film.By thickness
It is about the SnO of 1,2 and 5 microns2Gas sensor is fixed on horizontal sample platform, is connected with each self-electrode by drawing Au line.
Then sealing fixing by the sealing member containing sample stage and quartz ampoule, electrode contact is connected with digital sourcemeter, passes through mass flowmenter
Synthesis of air, Standard Gases (benzene such as 1-1000ppm is scattered in synthesis of air) and the humidity generation tank air stream that regulation is dried
Amount realizes gas with various (benzene,toluene,xylene, acetone, formaldehyde etc.), variable concentrations (10ppb-1000ppm), different humidity
(0-100%RH) control, controls different temperatures (25-600 DEG C) by tube furnace, it is achieved multiple SnO2Gas sensor performance
Test with gaseous species, gas concentration, humidity and variations in temperature.
Embodiment 3
The alumina substrate of prefabricated Ag-Pd interdigital electrode drips HKUST-1 prepare thin film (HKUST-1 is copper ion
It is coordinated gained metal-organic framework material) with trimesic acid.Particle size is about 50,100 and 500nm HKUST-1 wet
Dependent sensor is fixed on horizontal sample platform, is connected with each self-electrode by drawing Au line.Then by the sealing member containing sample stage
Sealing fixing with quartz ampoule, electrode contact is connected with digital sourcemeter, the synthesis of air dry by mass flowmenter regulation and wet
Degree generation tank air mass flow realizes the control of different humidity (0-100%RH), controls different temperatures (25-600 by tube furnace
DEG C), it is achieved multiple HKUST-1 moisture sensor performances are with humidity and the test of variations in temperature.
Embodiment 4
The alumina substrate of prefabricated Ag-Pd interdigital electrode drips M-CAT-1 prepare thin film (M-CAT-1 be metal from
Son is coordinated gained metal-organic framework material with hexahydroxy benzophenanthrene, and metal ion is copper, cobalt and nickel).Particle size is about
50, the M-CAT-1 moisture sensor of 100 and 500nm is fixed on horizontal sample platform, by drawing Au line with each self-electrode even
Connect.Then sealing fixing by the sealing member containing sample stage and quartz ampoule, electrode contact is connected with digital sourcemeter, passes through mass flow
Meter regulation be dried synthesis of air, Standard Gases and humidity generation tank air mass flow realize gas with various (benzene,toluene,xylene, third
Ketone, formaldehyde etc.), variable concentrations (10ppb-1000ppm), the control of different humidity (0-100%RH), controlled not by tube furnace
Synthermal (25-600 DEG C), it is achieved multiple M-CAT-1 moisture sensor performances are with humidity and the test of variations in temperature.
Embodiment 5
The ZnO ZIF-CoZn nuclear shell structure nano of the different sheath layer thickness of preparation on the sapphire substrate of prefabricated Ag electrode
(ZnO diameter 50-70nm, ZIF-CoZn are zinc ion, cobalt ion and the bimetallic of methylimidazole coordination gained to nanowire array film
Metal-organic framework material).By sheath layer thickness be 5,15 and the ZnO ZIF-CoZn gas sensor of 100nm is fixed on horizontal sample
In sample platform, it is connected with each self-electrode by drawing Au line.Then the sealing member containing sample stage and quartz ampoule are sealed fixing, electrode
Joint is connected with digital sourcemeter, synthesis of air, Standard Gases and the humidity generation tank air stream being dried by mass flowmenter regulation
Amount realizes gas with various (benzene,toluene,xylene, acetone, formaldehyde etc.), variable concentrations (10ppb-1000ppm), different humidity
(0-100%RH) control, controls different temperatures (25-300 DEG C) by tube furnace, it is achieved multiple ZnO@ZIF-CoZn air-sensitives pass
Sensor performance is with the test of gaseous species, gas concentration, humidity and variations in temperature.
Claims (6)
1. atmosphere controlled many devices chemistry resistor-type gas sensor sealing test device, it is characterised in that include sample
Platform, electrode pulling device and atmosphere holding unit, whole test device is placed in required atmosphere by atmosphere holding unit, and electrode draws
Go out device and sample is constituted path with external testing instrument.
Atmosphere the most according to claim 1 controlled many devices chemistry resistor-type gas sensor sealing test device, it is special
Levying and be, described atmosphere holding unit includes hermetic container, the air inlet pipeline on hermetic container and valve, outlet pipe and valve
Door, Pressure gauge and gas suction device.
Atmosphere the most according to claim 1 controlled many devices chemistry resistor-type gas sensor sealing test device, it is special
Levying and be, described atmosphere holding unit includes hermetic container, two air inlet pipe on hermetic container and valve, an escape pipe and
Valve, a vacuum meter and vacuum pump.
Atmosphere the most according to claim 2 controlled many devices chemistry resistor-type gas sensor sealing test device, it is special
Levying and be, the hermetic container of atmosphere holding unit includes quartz ampoule and the sealing of airtight quartz ampoule opening closed one end
Part, sealing member is divided into two parts: sealing member a and sealing member b, sealing member a and sealing member b pass through mouth of pipe screw thread and rubber ring at stone
The outer side compression of English pipe seals, and sealing member b is divided into internals and outer member two parts, internals and outer member to use stainless steel part to be mechanically connected,
Internals are connected with air inlet pipeline, outlet pipe and Pressure gauge and have electrode converting interface, and outer member has electrode converting interface；Sample
Platform is connected with sealing member b by welding, and the sample electrode on sample stage passes through the electrode converting interface in sealing member b internals after drawing
Drawing and use epoxy sealing, the electrode wires of extraction is connected with digital sourcemeter by the electrode converting interface in sealing member b outer member.
Atmosphere the most according to claim 4 controlled many devices chemistry resistor-type gas sensor sealing test device, it is special
Levying and be, electrode converting interface number is n times of digital sourcemeter number of poles, and n is natural number.
Atmosphere the most according to claim 4 controlled many devices chemistry resistor-type gas sensor sealing test device, it is special
Levy and be, quartz ampoule outer layer covers layer of metal net.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620745616.6U CN205844243U (en) | 2016-07-15 | 2016-07-15 | A kind of atmosphere controlled many devices chemistry resistor-type gas sensor sealing test device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620745616.6U CN205844243U (en) | 2016-07-15 | 2016-07-15 | A kind of atmosphere controlled many devices chemistry resistor-type gas sensor sealing test device |
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| CN205844243U true CN205844243U (en) | 2016-12-28 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105973967A (en) * | 2016-07-15 | 2016-09-28 | 中国科学院福建物质结构研究所 | Atmosphere controllable field effect transistor (FET) sealed testing device for plurality of devices |
| CN110045158A (en) * | 2019-05-05 | 2019-07-23 | 河北工业大学 | Microdevice test chamber |
-
2016
- 2016-07-15 CN CN201620745616.6U patent/CN205844243U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105973967A (en) * | 2016-07-15 | 2016-09-28 | 中国科学院福建物质结构研究所 | Atmosphere controllable field effect transistor (FET) sealed testing device for plurality of devices |
| CN105973967B (en) * | 2016-07-15 | 2018-06-15 | 中国科学院福建物质结构研究所 | A kind of controllable more device field-effect transistor sealing test devices of atmosphere |
| CN110045158A (en) * | 2019-05-05 | 2019-07-23 | 河北工业大学 | Microdevice test chamber |
| CN110045158B (en) * | 2019-05-05 | 2021-09-28 | 河北工业大学 | Micro device test cavity |
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