CN110045158B - Micro device test cavity - Google Patents

Micro device test cavity Download PDF

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Publication number
CN110045158B
CN110045158B CN201910368208.1A CN201910368208A CN110045158B CN 110045158 B CN110045158 B CN 110045158B CN 201910368208 A CN201910368208 A CN 201910368208A CN 110045158 B CN110045158 B CN 110045158B
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China
Prior art keywords
light
probe tube
test
sample
test cavity
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CN201910368208.1A
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Chinese (zh)
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CN110045158A (en
Inventor
范超
袁硕
柳钢吒
田贺
王蒙军
郑宏兴
李尔平
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Hebei University of Technology
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Hebei University of Technology
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Priority to CN201910368208.1A priority Critical patent/CN110045158B/en
Publication of CN110045158A publication Critical patent/CN110045158A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0207Details of measuring devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes

Abstract

The invention is a micro device test chamber, comprising: the test cavity comprises a test cavity body, a light-transmitting glass fixing plate, light-transmitting glass, a sample inlet baffle plate and a probe tube, wherein the test cavity body, the light-transmitting glass and the sample inlet baffle plate enclose a closed space, and the light-transmitting glass is fixed on the test cavity body through the light-transmitting glass fixing plate; a sample to be tested is placed in the test cavity main body, a light inlet is formed in the test cavity main body above the sample to be tested, a plurality of probe tube windows are uniformly formed in the side wall of the test cavity main body and are obliquely arranged towards the direction of the test sample, a probe tube is hermetically connected in each probe window, a probe is arranged in each probe tube, and one end of each probe, which penetrates through the probe tube, is in contact with the sample to be tested; and the test cavity is also provided with a vent hole. The test chamber can realize in-situ measurement of photoelectric properties of the device without changing the position of the device, and can test the gas-sensitive properties of the device by changing the types, flow rate and other parameters of gas.

Description

Micro device test cavity
Technical Field
The invention relates to the field of testing of micron-sized devices, in particular to a testing cavity of a micro device.
Background
With the rapid development of scientific technology, electronic devices become more and more miniaturized, and accordingly higher requirements are put on measurement means and methods of the devices. The traditional test micron-scale electronic devices are in-situ measurements directly on a probe station, which inevitably contact air, and the micron-scale electronic devices are greatly influenced by the environment, particularly the gas environment. One of the methods to solve this problem is to perform a wire-bonding operation on the device, and place the device in a specific closed test chamber for measurement, which increases the difficulty of the test accordingly, and may cause irreparable damage to the device during the wire-bonding process.
How can one measure the device performance directly in situ without disturbing the environment, especially the gas environment, and without increasing the test complexity during the test?
Large test platforms with high integration can solve these problems, for example: the low-temperature vacuum probe station of Lake shore corporation in the United states and the flexible electronic device comprehensive test platform AES-4SD of high-tech science and technology Limited in China can measure devices in situ and avoid air interference. However, such a large test platform is expensive, high in later-stage use and maintenance cost, and complicated in operation process, and the purchase of the equipment for the units and companies which do not use the equipment frequently appears to be the chicken ribs. The handling of the components to a special inspection centre is time and labor consuming and the components risk being worn during this process.
Disclosure of Invention
In order to solve the technical problem, the invention provides a micro device testing cavity.
The invention provides a micro device test chamber, which is characterized by comprising: the test cavity comprises a test cavity body, a light-transmitting glass fixing plate, light-transmitting glass, a sample inlet baffle plate and a probe tube, wherein the test cavity body, the light-transmitting glass and the sample inlet baffle plate enclose a closed space, and the light-transmitting glass is fixed on the test cavity body through the light-transmitting glass fixing plate; a sample to be tested is placed in the test cavity main body, a light inlet is formed in the test cavity main body above the test sample, a plurality of probe tube windows are uniformly formed in the side wall of the test cavity main body and are obliquely arranged towards the direction of the test sample, a probe tube is hermetically connected in each probe window, a probe is arranged in each probe tube, and one end of each probe, which penetrates through the probe tube, is in contact with the sample to be tested; and the test cavity is also provided with a vent hole.
According to the micro device testing cavity, the sample inlet baffle is provided with the bulge matched with the sample inlet of the testing cavity main body in shape, the sample inlet baffle and the testing cavity main body are fixed in a sealing mode, and the sample inlet is used for placing a device sample. Preferably, the sample inlet of the test cavity main body is trapezoidal, and a plurality of probe tube windows can be used for connecting probes with different functions, so that multifunctional measurement is realized.
Preferably, the light-transmitting glass fixing plate is provided with a limiting plate matched with the light inlet, and the light-transmitting glass fixing plate is further provided with bolt holes with the same position and size as those of the bolt holes around the light inlet, and the light-transmitting glass fixing plate is fixed on the test chamber main body by using bolts.
Preferably, the probe tube is arranged on the inner side in the main cavity of the test cavity and sealed by elastic rubber so as to ensure the airtight environment of the test cavity and the free movement of the probe, and further ensure that the probe does not leak gas when testing a sample, the contact edge of the probe tube and the window of the probe tube is sealed by high vacuum sealing grease, and the probe tube part needs to be matched with the probe for use and is compatible with most probes on the market.
Preferably, a groove is arranged at the light inlet of the test cavity main body, and a rubber sealing ring is placed in the groove.
Preferably, the trapezoidal sample inlet baffle is provided with a limiting plate matched with the sample inlet, and the trapezoidal sample inlet baffle is also provided with bolt holes matched with the positions and the sizes of the bolt holes around the sample inlet, and the trapezoidal sample inlet baffle is fixed on the test cavity main body by using bolts.
The invention is used for testing the electrical performance of the micron-sized electronic device, and the integral structure of the invention can realize the in-situ measurement of the micron-sized device and effectively avoid the interference of air and other gases in the test process of the micron-sized device in the measurement process. And photoelectric properties and gas-sensitive properties of the device under different environments can be tested by changing parameters such as gas types, flow rates and the like.
Compared with the prior art, the micro device testing cavity provided by the invention has the advantages that the probe is directly contacted with the device to be tested in a sealed state, the influence of air is reduced, the risk of damaging a sample is reduced, the photoelectric property of the device can be measured in situ without changing the position of the device, the gas source is connected through the vent hole, and the gas-sensitive property of the device can be tested by changing the parameters such as the type, the flow rate and the like of gas. Compared with a highly integrated comprehensive test platform which can realize in-situ measurement and environmental control, the micro device test chamber provided by the invention has the advantages of economy and convenience in operation.
The test cavity irradiates different light sources through the light-transmitting glass, and different gases are externally connected through the vent holes, so that a multi-parameter experiment can be realized. Compare present sample platform, this application test cavity is with low costs, economy, easy operation to can compatible most probe station at present, need not purchase special expensive test platform in addition.
Drawings
FIG. 1 is a schematic side view of a micro device testing chamber of the present invention without a sample inlet baffle attached to the testing chamber body.
FIG. 2 is a schematic top view of a test chamber body of the microdevice test chamber of the present invention.
FIG. 3 is a schematic perspective view of a trapezoidal sample inlet baffle of a microdevice testing chamber according to the present invention.
FIG. 4 is a schematic diagram of a probe tube of the microdevice testing chamber according to the present invention.
FIG. 5 is a schematic perspective view of a transparent glass fixing plate of the chamber for testing the micro device of the present invention.
FIG. 6 is a schematic perspective view of a chamber for testing micro devices according to the present invention;
shown in the figure: 1-a test chamber body; 2-trapezoidal sample inlet baffle; 3-a probe tube; 4-a light-transmitting glass fixing plate; 5-a light inlet; 6-probe window; 7-air vent.
Detailed Description
The features and advantages of embodiments of the present invention will become more apparent by describing the embodiments in the drawings. It is to be noted, however, that the drawings are designed in a simplified form and are not to scale, this being done for the purpose of facilitating and distinctly claiming the invention.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced otherwise than as specifically described herein, and thus the scope of the present invention is not limited by the specific embodiments disclosed below.
Some examples of the invention are described below in conjunction with the appended drawings.
The invention provides a micro device testing cavity which comprises a testing cavity body 1, a trapezoidal sample inlet baffle 2, a probe tube 3 and a light-transmitting glass fixing plate 4. A sample import has been seted up at test chamber main part 1 rear portion, and trapezoidal sample import baffle 2 passes through the bolt fastening on the sample import in this example, and trapezoidal sample import baffle 2 sets up trapezoidal arch towards one side of test chamber main part, and is not necessarily trapezoidal, but trapezoidal main part must with corresponding sample import size and size phase-match. The test cavity body is made of common metal materials or plastics, such as aluminum, stainless steel and the like, and the interior of the test cavity body is hollowed and flat.
The top of the test cavity body is provided with a light inlet 5, in the example, the light inlet 5 is circular, but not necessarily circular, and a corresponding circular light-transmitting glass fixing plate 4 fixes light-transmitting glass on the light inlet 5 through bolts and adopts a rubber sealing ring to ensure the sealing property. Wherein, light inlet 5 comprises three echelonment circular recess, and wherein the circular recess of radius minimum is used for placing printing opacity glass, and the recess of middle diameter is provided with 6 bolt mouths for fixed printing opacity glass fixed plate 4, the circular recess of radius maximum is used for placing printing opacity glass fixed plate 4. The invention can test the electrical and optical properties of the device under the irradiation of different light sources, and the light source is irradiated to the device through the light inlet 5. The shape of the light-transmitting glass fixing plate is matched with the shape and size of the light inlet, the light-transmitting glass fixing plate and the light inlet are fixed in a sealing mode, the light-transmitting glass fixing plate is a two-stage stepped circular boss and comprises a large circular ring part and a small circular ring part, a plurality of bolt openings are uniformly arranged on the circular surface of the small circular ring part, and a limiting block is arranged on the circular surface of the large circular ring part on the outer side of one bolt opening of the small circular ring part; the outer edge of the light inlet at the upper part of the testing cavity body is provided with a limiting port, and the limiting block is matched with the limiting port to be used for rapidly aligning and fixing the light-transmitting glass fixing plate and the testing cavity body.
The test cavity main part is also provided with 4 probe tube windows 6 which are symmetrically distributed at the front part of the test cavity main part and are used for placing the probe tubes 3 and the probes so that the probes can be in contact with the sample. The end part of the probe tube 3 in the testing cavity body 1 is sealed by rubber, the probe tube is placed at the position of the probe tube window 6, the end part of the probe tube outside the testing cavity body and the edge of the probe tube window 6 contacted with the probe tube 3 are sealed by high vacuum sealing grease, and the probe enters the testing cavity body through the probe tube 3 and is contacted with a sample for testing.
The test cavity body is also symmetrically provided with two vent holes 7 which are respectively an air inlet hole and an air outlet hole, and a gas pipeline is arranged for introducing and discharging test gas. The gas-sensitive performance of the device can be tested by changing the type, flow rate and other parameters of the introduced gas. The invention can replace the rubber on the probe tube after each test, thereby ensuring the tightness in the current test process, the rubber covers the end surface of the probe tube in the form of a rubber film, the rubber is very cheap, and the test cost is lower.
The following is a brief description of the testing operation of the device:
step 1: the device to be tested is arranged in the testing cavity main body 1 through the sample inlet, and the sample to be tested can be observed through the light inlet 5.
Step 2: the trapezoidal sample inlet baffle 2 is fixed at the sample inlet through a bolt, and then a device sample to be tested is sealed in the testing cavity main body 1.
And step 3: the venting duct of the gas is connected to the venting hole 7.
And 4, step 4: the light-transmitting glass fixing plate 4 is fixed on the light inlet 5 through bolts and rubber sealing rings.
And 5: the probe tube 3 is placed in the probe tube window 6, the side of the probe tube inside the test chamber is sealed with rubber, and the edges of the probe tube 3 and the probe tube window 6 are sealed with high vacuum sealing grease.
Step 6: the standby light source can irradiate on the sample through the light inlet.
And 7: and (3) a probe enters the test cavity body through the probe tube 3 and contacts with a device to be tested for testing.
The micro-scale test chamber can test the electrical properties of the electronic device in the micron scale compared with the large-scale integrated test platform. The device can be subjected to photosensitive property testing, gas-sensitive property testing and common electrical property testing, and is also provided with four probe tube windows, so that the device can be connected with four probes and can be used for measuring miniature field effect tubes and the like. The probes are symmetrically arranged, so that the operation difficulty of a later-stage measurement experiment can be effectively reduced, and the accuracy of the test is improved.
Examples
The testing chamber of the micro device comprises a testing chamber main body 1, a trapezoidal sample inlet baffle 2, a probe tube 3 and a light-transmitting glass fixing plate 4. The shape of probe pipe is the cylinder, and a sample import has been seted up at 1 rear portion of test chamber main part, and trapezoidal sample import baffle 2 passes through the bolt fastening on the sample import in this example, and trapezoidal sample import baffle 2 sets up trapezoidal arch towards one side of test chamber main part, and trapezoidal main part must be with corresponding sample import size and size phase-match, is equipped with the sealing washer on trapezoidal arch. The test cavity main body is made of stainless steel, and the interior of the test cavity main body is hollowed and flat.
The top of the test cavity body is provided with a light inlet 5, the light inlet 5 is circular in the example, a corresponding circular light-transmitting glass fixing plate 4 fixes light-transmitting glass on the light inlet 5 through bolts, and a rubber sealing ring is adopted to ensure the sealing property. The light inlet 5 is composed of three step-shaped circular grooves, wherein the circular groove with the smallest radius is used for placing the light-transmitting glass, the groove with the middle diameter is provided with 6 bolt ports for fixing the light-transmitting glass fixing plate 4, and the circular groove with the largest radius is used for placing the light-transmitting glass fixing plate 4. The shape of the light-transmitting glass fixing plate is matched with the shape and size of the light inlet, the light-transmitting glass fixing plate and the light inlet are fixed in a sealing mode, the light-transmitting glass fixing plate is a two-stage stepped circular boss and comprises a large circular ring part and a small circular ring part, six bolt openings are uniformly distributed on the circular surface of the small circular ring part, and a limiting block is arranged on the circular surface of the large circular ring part on the outer side of one bolt opening of the small circular ring part; the outer edge of the light inlet at the upper part of the testing cavity body is provided with a limiting port for quickly aligning and fixing the light-transmitting glass fixing plate with the testing cavity body.
The test chamber main part is still seted up 4 probe tube windows 6 that the symmetry set up, cooperates four probe tubes, and the length of probe tube is not less than probe tube window thickness, and probe tube window downward sloping 45, the diameter of probe tube is 1.5cm, and inside the probe stretched into test chamber main part through the probe tube, the device to be tested was tested and is tested, and probe tube both ends are sealed.
The test chamber main body is also symmetrically provided with two vent holes 7 which are respectively an air inlet hole and an air outlet hole, and the inside of the test chamber main body is subjected to exhaust treatment before an experiment. The gas flow meter, model seven stars D07-11C, was used to control the flow rate of the gas.
The device to be tested in the embodiment is a micron-sized photoresistor, the size of the photoresistor is about 10 micrometers, the length and width of the main body of the testing cavity are about 10cm, the probe station is an instrument quasi-technology PW600 manual probe station, the length of the probe is 5cm, the diameter of the needle point is 2 micrometers, the diameter of the probe tube 3 is 1.5cm, and the electrical signal testing equipment is a Dekoshihiki Keysight B1500A semiconductor parameter instrument. The test cavity main body is placed on a manual probe station, two ends of the photoresistor are connected with the semiconductor parameter instrument through the probes and the probe tubes, and when the test is carried out, the two symmetrical probe tubes are used for measuring current, one is an output end, and the other is an input end.
The micro device testing cavity is suitable for testing the electrical and optical properties of a micron-sized device, can effectively avoid the interference of air on the device test in the device measuring process, and can be used for gas-sensitive performance measurement of the micron-sized device by changing the parameters of gas types, flow rates and the like.
In the description of the present invention, the terms "mounted," "connected," "fixed," and the like are used in a broad sense, for example, "connected" may be a fixed connection, a detachable connection, or an integral connection; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the description herein, the description of the terms "one embodiment," "some embodiments," "specific embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Although the embodiments of the present invention have been described above, the above description is only for the convenience of understanding the present invention, and is not intended to limit the present invention. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (6)

1. A micro device testing chamber for testing electrical properties of micro-scale electronic devices, the testing chamber comprising: the test cavity comprises a test cavity body, a light-transmitting glass fixing plate, light-transmitting glass, a sample inlet baffle plate and a probe tube, wherein the test cavity body, the light-transmitting glass and the sample inlet baffle plate enclose a closed space, and the light-transmitting glass is fixed on the test cavity body through the light-transmitting glass fixing plate; a sample to be tested is placed in the test cavity main body, a light inlet is formed in the test cavity main body above the sample to be tested, a plurality of probe tube windows are uniformly formed in the side wall of the test cavity main body and are obliquely arranged towards the direction of the test sample, a probe tube is hermetically connected in each probe tube window, a probe is arranged in each probe tube, and one end, penetrating out of each probe tube, of each probe tube is in contact with the sample to be tested; the inner side of the probe tube arranged in the cavity of the test cavity body is sealed by elastic rubber so as to ensure the airtight environment of the test cavity and the free movement of the probe, and the test cavity body is also provided with a vent hole.
2. The microdevice testing chamber of claim 1, wherein the sample inlet baffle has a protrusion matching with the shape of the sample inlet of the testing chamber body, and the sample inlet baffle is fixed to the testing chamber body in a sealing manner.
3. The microdevice testing chamber of claim 2, wherein the sample inlet of the testing chamber body has a trapezoidal shape, and a plurality of probe tube windows are formed to connect probes having different functions.
4. The microdevice testing chamber according to claim 1, wherein a groove is formed in the light inlet at the top of the testing chamber body, a rubber sealing ring is disposed in the groove, the transparent glass fixing plate is provided with a limiting plate matching with the light inlet, and bolt holes having the same size as the bolt holes around the light inlet are formed in the transparent glass fixing plate, and the transparent glass fixing plate is fixed to the testing chamber body by using bolts.
5. The micro device testing chamber of claim 1, wherein the contact edges of the probe tubes and the probe tube windows are sealed with high vacuum sealing grease, and the probe tubes are nested on the probes.
6. The micro device testing chamber according to claim 1, wherein the light-transmitting glass fixing plate is a two-stage stepped circular ring boss comprising a large circular ring part and a small circular ring part, a plurality of bolt openings are uniformly arranged on the circular surface of the small circular ring part, and a limiting block is arranged on the circular surface of the large circular ring part outside one bolt opening of the small circular ring part; the outer edge of the light inlet at the upper part of the testing cavity body is provided with a limiting port, and the limiting block is matched with the limiting port to be used for rapidly aligning and fixing the light-transmitting glass fixing plate and the testing cavity body.
CN201910368208.1A 2019-05-05 2019-05-05 Micro device test cavity Active CN110045158B (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102175713A (en) * 2010-12-25 2011-09-07 浙江理工大学 Method and device for detecting thermal physical parameters of rock through press-in in-site delamination
CN204721702U (en) * 2015-05-22 2015-10-21 中国科学院等离子体物理研究所 A kind of ion source connects scalable water-cooling type Langmuir double probe soon
CN205679639U (en) * 2016-05-25 2016-11-09 苏州德睿科仪仪器设备有限公司 Sealing test box
CN205844243U (en) * 2016-07-15 2016-12-28 中国科学院福建物质结构研究所 A kind of atmosphere controlled many devices chemistry resistor-type gas sensor sealing test device
CN106526256A (en) * 2016-11-03 2017-03-22 上海纳米技术及应用国家工程研究中心有限公司 Gas sensitivity test composite probe and application thereof

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106855529A (en) * 2015-12-09 2017-06-16 中国科学院大连化学物理研究所 A kind of controllable miniature test box of humidity and its application

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102175713A (en) * 2010-12-25 2011-09-07 浙江理工大学 Method and device for detecting thermal physical parameters of rock through press-in in-site delamination
CN204721702U (en) * 2015-05-22 2015-10-21 中国科学院等离子体物理研究所 A kind of ion source connects scalable water-cooling type Langmuir double probe soon
CN205679639U (en) * 2016-05-25 2016-11-09 苏州德睿科仪仪器设备有限公司 Sealing test box
CN205844243U (en) * 2016-07-15 2016-12-28 中国科学院福建物质结构研究所 A kind of atmosphere controlled many devices chemistry resistor-type gas sensor sealing test device
CN106526256A (en) * 2016-11-03 2017-03-22 上海纳米技术及应用国家工程研究中心有限公司 Gas sensitivity test composite probe and application thereof

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