CN205834405U - A kind of air film mask array electrode electrochemical micromachining device - Google Patents
A kind of air film mask array electrode electrochemical micromachining device Download PDFInfo
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- CN205834405U CN205834405U CN201620280121.0U CN201620280121U CN205834405U CN 205834405 U CN205834405 U CN 205834405U CN 201620280121 U CN201620280121 U CN 201620280121U CN 205834405 U CN205834405 U CN 205834405U
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Abstract
The utility model discloses air film mask array electrode electrochemical micromachining device, including fixing device, gripper shoe and tool-electrode, air chamber and liquid chambers it is provided with in fixing device, liquid chambers includes upper liquid chamber and lower liquid chamber, being provided with gripper shoe between upper liquid chamber and central liquid chamber, gripper shoe is provided with the through hole of circumference array groove-like；Tool-electrode uses the group hole columnar electrode of 3 × 3, and the bottom of fixing device is provided with 3 × 3 liquid outlets matched with tool-electrode；The bottom of fixing device is additionally provided with 3 × 3 ventholes, and venthole is annular, and each liquid outlet is positioned at the inner circle of a venthole.This utility model uses the method for electrolyte one layer of air film of bundle outer cladding, the spray regime of electrolyte is limited, control electrolyte and focus on tool-electrode just in the region of workpiece, change the electrolyte distribution character at surface of the work, improve electrochemical micromachining working (machining) efficiency in the micron order yardstick range of work and machining accuracy.
Description
Technical field
This utility model relates to Micrometer-Nanometer Processing Technology field, in particular, particularly relating to a kind of air film mask array electricity
Atomic thin electrolytic machining device.
Background technology
Along with scientific research and the development of industrial technology, new high-tech product is integrated to function, superfinishing densification and profile
Miniaturization develops, the size of parts microminiaturization increasingly；Meanwhile, develop height along with emerging MEMS (MEMS)
The urgent needs of precision micromachine, the most incident is the most different microscale structure and high-precision part
Be continuously increased.Multiple micro-holes array as the typical fine structure of one at MEMS, Aero-Space, precision instrument, chemical fibre etc.
Field has a wide range of applications, such as high-speed printer nozzle plate, the joints of optical fibre, chemical fibre spinneret, aero-engine high pressure pressure
The fine structure etc. in the vibrationproof of damping bushing after-burner, heat screen and micro-spray, Micropump in mechanism of qi air conduit.
And the important development direction that microfabrication is current world manufacturing industry to be paid close attention to.Silicon manufacturing technology and in recent years
The LIGA technology grown up is all very successful micro-fabrication technology.Electrochemical micromachining is to dissolve based on electrochemical metal
On basis, the minimizing process of its material is carried out with the form of ion, and surface accuracy and processing dimension are permissible in theory
Reach micron order.In electrochemical micromachining, processing gap the least (for micron-scale), in course of reaction, workpiece anode metal is continuous
Lose electronics and become ion and be dissolved in electrolyte, negative electrode has hydrogen to release simultaneously, this micro dissolution mode make its
Fine precision manufactures field the biggest development potentiality.Simultaneously electrochemical micromachining have that instrument is lossless, production efficiency is high,
Machined surface quality and the advantage such as unrelated with material hardness, therefore, some developed countries such as U.S., Japan, Germany, Korea S
A lot of research institutions in country have carried out the research of electrochemical micromachining technology the most one after another, and obtain in some key technologies
Certain progress.And while proposing the increase day by day of metal surface micro structure application and demand, how to realize micro structure
The theory that processing stable, efficient, high-precision seems the most urgent and important.
Utility model content
The purpose of this utility model is that provides a kind of micro structure to stablize to solve the problems referred to above, working (machining) efficiency
The air film mask array electrode electrochemical micromachining device high, machining accuracy is high.
This utility model is achieved through the following technical solutions above-mentioned purpose: a kind of air film mask array electrode micro-electrochemical machining
Processing unit (plant), including fixing device, gripper shoe and tool-electrode, is provided with air chamber and liquid chambers, institute in described fixing device
Stating liquid chambers and include upper liquid chamber and lower liquid chamber, described upper liquid chamber is provided with inlet opening, described inlet opening is even
Connect feed pipe, connect solution tank by feed pipe, between described upper liquid chamber and central liquid chamber, be provided with gripper shoe, described
Fagging is provided with the through hole of circumference array groove-like；Described tool-electrode uses the group hole columnar electrode of 3 × 3, and tool-electrode is solid
Being scheduled in fixing device, the upper end of described tool-electrode is connected, in tool-electrode by four keyways and fixing device are fixing
Portion is positioned at lower liquid intracavity, and the lower end of tool-electrode stretches out in outside described fixing device；The bottom of described fixing device is arranged
Having 3 × 3 liquid outlets matched with tool-electrode, liquid outlet connects with lower liquid chamber；It is provided with air inlet in described air chamber
Mouthful, it being provided with air supply pipe at described air inlet, described air chamber passes through the external air compressor of air supply pipe, described fixing device
Bottom is additionally provided with 3 × 3 ventholes, and described venthole is annular and 3 × 3 ventholes surround 3 × 3 respectively and go out liquid
Hole, each liquid outlet is positioned at the inner circle of a venthole.
Further, described air inlet, inlet opening, liquid outlet and venthole and tool-electrode on cross section all in one heart
Circular.
Further, described tool-electrode is 3 × 3 cuboids using spark cutting to be processed into, and by using
2mol/L mass fraction be 8% NaOH solution corrode into columned 3 × 3 array electrodes.
Further, described fixing device is arranged on machine tool chief axis, adjusts instrument by the feed motion of machine tool chief axis
Processing gap between electrode and workpiece.By controlling the movement radially, axially moving control tool-electrode of lathe, Ke Yijia
Work goes out the group hole etc. needed and processes pattern.
Further, described fixing device is overall in seedpod of the lotus shape, and air chamber is arranged on the outer layer of liquid chambers.
Further, the diameter of each venthole is gradually reduced from top to bottom.
The method that this device uses is as follows: by the negative pole will connect power supply in the tool-electrode of 3 × 3 array-like distributions,
Workpiece connects the negative pole of power supply, and electrolyte is assigned to each unipolar liquid outlet on tool-electrode by liquid chambers, participates in single
Chemical reaction between electrode and workpiece；Drive tool-electrode to the supply motion of workpiece direction by machine tool chief axis, control instrument
Processing gap between electrode and workpiece, then by the venthole around each liquid outlet by spraying high-pressure gas to workpiece,
The spray regime of electrolyte is controlled, controls electrolyte and focus on the region just to workpiece of each single electrode on tool-electrode
In, change electrolyte at the distribution character of surface of the work, it is achieved surface of the work Flow Field Distribution corresponding to each single electrode from interior to
It is followed successively by outward electrolyte, gas-liquid mixed flow field and airflow field, thus the electric current distribution changed under electric field action on workpiece is advised
Rule, control electric field energy more concentrate on each single electrode on tool-electrode just to workpiece area in, until completion of processing, obtain
The processing pattern that must need.
Electrolyte enters branch chamber through feed pipe, is then dispensed for the liquid outlet of each tool-electrode, participates in industry electrode
And the electrochemical reaction between workpiece；Lathe actively drive branch chamber and tool-electrode to workpiece direction supply, keep workpiece and
Processing gap certain between tool-electrode, makes gases at high pressure be ejected into workpiece from venthole, it is achieved the processing in group hole simultaneously；
Persistently this process is until team control completion of processing, it is thus achieved that the processing pattern of needs.
The beneficial effects of the utility model are:
1, this utility model is simple and compact for structure, and production cost is low；The method using electrolyte one layer of air film of bundle outer cladding,
The spray regime of electrolyte is limited, controls electrolyte and focus on tool-electrode just in the region of workpiece, change electrolysis
Liquid at the distribution character of surface of the work, thus control electric field energy more concentrate on piece pole just to workpiece area in,
To improve electrochemical micromachining working (machining) efficiency in the micron order yardstick range of work and machining accuracy.
2, this utility model arranges gripper shoe liquid chambers being separated inside liquid chambers, on the one hand also add spray
The intensity of head, the most also utilizes the through hole of the circumference array groove-like in gripper shoe to relax the electrolyte pulsation caused by industrial pump
Etc. unstable factor, make the flow in each electrode tube more uniform.
3, this utility model utilizes similarity principle, and by the structure of the seedpod of the lotus, utility model goes out air film shielding first
Array electrode, shields air film electrochemical micromachining and combines with array electrode group processing, process with single electrode positioned in sequence
Array hole is compared, and uses array electrode disposably to process array hole, improves working (machining) efficiency, and in the effect of air film shielding
Under, greatly improve the locality of group hole machined.
Accompanying drawing explanation
Fig. 1 be air film mask array electrode electrochemical micromachining device described in the utility model partly cut open structural representation.
Fig. 2 is the amplification schematic cross-section of this utility model liquid outlet, venthole.
Fig. 3 is the schematic cross-section of air film mask array electrode electrochemical micromachining device described in the utility model.
In figure, 1-inlet opening, 2-upper liquid chamber, 3-gripper shoe, 4-lower liquid chamber, 5-tool-electrode, 6-workpiece, 7-
Air chamber cavity wall, 8-air chamber, 9-air inlet, 10-keyway, 11-liquid outlet, 12-venthole.
Detailed description of the invention
The utility model is described in further detail below in conjunction with the accompanying drawings:
As Figure 1-3, a kind of air film mask array electrode electrochemical micromachining device, including fixing device, gripper shoe 3
With tool-electrode 5, in described fixing device, be provided with air chamber 8 and liquid chambers, described liquid chambers include upper liquid chamber 2 and under
Portion's liquid chambers 4, described upper liquid chamber 2 is provided with inlet opening 1, and described inlet opening 1 is connected feed pipe, connected by feed pipe
Solution tank, is provided with gripper shoe 3 between described upper liquid chamber 2 and central liquid chamber, it is recessed that described gripper shoe 3 is provided with circumference array
The through hole of channel-shaped, electrolyte can entrance lower liquid chamber 4 evenly by the circumference array shape through hole in gripper shoe；Described
Tool-electrode 5 uses the group hole columnar electrode of 3 × 3, and tool-electrode 5 is fixed in fixing device, the upper end of described tool-electrode 5
Is connected by four keyways 10 and fixing device are fixing, so with the internal chamber wall no-float of air chamber and liquid chambers, instrument is electric
The middle part of pole 5 is positioned at lower liquid chamber 4, and the lower end of tool-electrode 5 stretches out in outside described fixing device；Described fixing device
Bottom is provided with 3 × 3 liquid outlets 11 matched with tool-electrode 5, and liquid outlet 11 connects with lower liquid chamber 4；Described gas
Being provided with air inlet 9 on chamber 8, be provided with air supply pipe at described air inlet 9, described air chamber 8 is by air supply pipe external air pressure
Contracting machine, the bottom of described fixing device is additionally provided with 3 × 3 ventholes 12, described venthole 12 in annular and 3 × 3 go out
Pore 12 surrounds 3 × 3 liquid outlets 11 respectively, and each liquid outlet 11 is positioned at the inner circle of a venthole 12.
Described tool-electrode 5 is 3 × 3 cuboids using spark cutting to be processed into, and by using 2mol/L mass
Mark be 8% NaOH solution corrode into columned 3 × 3 array electrodes.
Described air inlet 9, inlet opening 1, liquid outlet 11 and venthole 12 and tool-electrode 5 on cross section all in concentric circular
Shape.Described fixing device is overall in seedpod of the lotus shape, and air chamber 8 is arranged on the outer layer of liquid chambers.Fixing device is followed successively by from outside to inside
Air chamber cavity wall 7, air chamber 8, common cavity wall, liquid chambers and liquid chambers inwall between air chamber 8 and liquid chambers, in liquid chambers
Wall is provided with the groove for installation tool electrode.
The diameter of each venthole 12 is gradually reduced from top to bottom.
Described fixing device is arranged on machine tool chief axis, adjusts tool-electrode 5 and work by the feed motion of machine tool chief axis
Processing gap between part 6.By controlling the movement radially, axially moving control tool-electrode 5 of lathe, can process and need
The processing such as the group hole wanted pattern.
Above-described embodiment is preferred embodiment of the present utility model, is not the limit to technical solutions of the utility model
System, as long as the technical scheme that can realize on the basis of above-described embodiment without creative work, is regarded as falling into
In the range of the rights protection of this utility model patent.
Claims (6)
1. an air film mask array electrode electrochemical micromachining device, it is characterised in that: include fixing device, gripper shoe and work
Tool electrode, is provided with air chamber and liquid chambers in described fixing device, described liquid chambers includes upper liquid chamber and lower liquid
Chamber, described upper liquid chamber is provided with inlet opening, and described inlet opening connects feed pipe, connects solution tank, institute by feed pipe
Stating and be provided with gripper shoe between upper liquid chamber and central liquid chamber, described gripper shoe is provided with the through hole of circumference array groove-like；
Described tool-electrode uses the group hole columnar electrode of 3 × 3, and tool-electrode is fixed in fixing device, described tool-electrode upper
Holding and be connected by four keyways and fixing device are fixing, the middle part of tool-electrode is positioned at lower liquid intracavity, under tool-electrode
End stretches out in outside described fixing device；The bottom of described fixing device is provided with 3 × 3 liquid outlets matched with tool-electrode,
Liquid outlet connects with lower liquid chamber；Being provided with air inlet in described air chamber, described air inlet position is provided with air supply pipe, described
Air chamber pass through the external air compressor of air supply pipe, the bottom of described fixing device is additionally provided with 3 × 3 ventholes, described in go out
Pore is annular and 3 × 3 ventholes surround 3 × 3 liquid outlets respectively, and each liquid outlet is positioned at the inner circle of a venthole
Place.
A kind of air film mask array electrode electrochemical micromachining device the most according to claim 1, it is characterised in that: described
Air inlet, inlet opening, liquid outlet and venthole and tool-electrode on cross section all in circular concentric.
A kind of air film mask array electrode electrochemical micromachining device the most according to claim 1, it is characterised in that: described
Tool-electrode is to use 3 × 3 cuboids be processed into of spark cutting, and by being 8% with 2mol/L mass fraction
NaOH solution corrodes into columned 3 × 3 array electrodes.
A kind of air film mask array electrode electrochemical micromachining device the most according to claim 1, it is characterised in that: described
Fixing device is arranged on machine tool chief axis, is adjusted by the feed motion of machine tool chief axis and adds break between tool-electrode and workpiece
Gap.
A kind of air film mask array electrode electrochemical micromachining device the most according to claim 1, it is characterised in that: described
Fixing device is overall in seedpod of the lotus shape, and air chamber is arranged on the outer layer of liquid chambers.
A kind of air film mask array electrode electrochemical micromachining device the most according to claim 1, it is characterised in that: each
The diameter of venthole is gradually reduced from top to bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620280121.0U CN205834405U (en) | 2016-04-06 | 2016-04-06 | A kind of air film mask array electrode electrochemical micromachining device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620280121.0U CN205834405U (en) | 2016-04-06 | 2016-04-06 | A kind of air film mask array electrode electrochemical micromachining device |
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| Publication Number | Publication Date |
|---|---|
| CN205834405U true CN205834405U (en) | 2016-12-28 |
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| CN201620280121.0U Expired - Fee Related CN205834405U (en) | 2016-04-06 | 2016-04-06 | A kind of air film mask array electrode electrochemical micromachining device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113084279A (en) * | 2021-03-12 | 2021-07-09 | 河南航天液压气动技术有限公司 | High-precision micro electrochemical machining device and method for surface of floating shaft sleeve |
-
2016
- 2016-04-06 CN CN201620280121.0U patent/CN205834405U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113084279A (en) * | 2021-03-12 | 2021-07-09 | 河南航天液压气动技术有限公司 | High-precision micro electrochemical machining device and method for surface of floating shaft sleeve |
| CN113084279B (en) * | 2021-03-12 | 2022-07-12 | 河南航天液压气动技术有限公司 | High-precision micro electrochemical machining device and method for surface of floating shaft sleeve |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161228 Termination date: 20190406 |
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| CF01 | Termination of patent right due to non-payment of annual fee |