CN205826179U - Flexible array pressure measurement sensor based on piezoresistive effect - Google Patents
Flexible array pressure measurement sensor based on piezoresistive effect Download PDFInfo
- Publication number
- CN205826179U CN205826179U CN201620762440.5U CN201620762440U CN205826179U CN 205826179 U CN205826179 U CN 205826179U CN 201620762440 U CN201620762440 U CN 201620762440U CN 205826179 U CN205826179 U CN 205826179U
- Authority
- CN
- China
- Prior art keywords
- circuit
- unit
- row electrode
- row
- control circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
This utility model relates to flexible array pressure measurement sensor based on piezoresistive effect, including the line control circuit being linked in sequence, touch unit's sensing unit, row control circuit, in the same direction amplifying circuit, filter circuit, micro-control circuit and data communication port, and the equipotential screened circuit being connected with tactile first sensing unit；Described line control circuit, equipotential screened circuit, row control circuit are connected with micro-control circuit.This utility model is based on sensing unit ranks distribution scheme, it is achieved that density 22 points/cm2The measurement of two dimensional surface distributed force, solves Present Domestic external pressure and measures that sensor density is relatively low, detection speed crosses the problems such as slow.
Description
Technical field
This utility model relates to a kind of array pressure measurement technology based on piezoresistive effect for robot electronic skin.
It is particularly used for measuring the measurement system of planar forces distribution, is mainly used in robot bionic electronic skin, man-machine interaction etc.
Field.
Background technology
Human skin is the most powerful a kind of sensor, and it can not only carry out the measurement of multiple physical quantity, such as pressure,
Temperature, texture etc., also can realize same stimulates physical quantity intensity and the detection of stimulation sites simultaneously.Therefore, go out from bionics
Send out, for same physical quantity detection class skin measurement sensor also should carry out stimulate physical quantity strength investigation also can be real
Existing stimulation sites detection, but it is limited by sensor disturbance between processing technique and test point, for a long time, the type sensor density
All it is extremely restricted with precision.This type of imitative skin measurement sensor current mainly has two big classes, and each measurement of a class is sensitive single
Unit is separate, and measurement effect is good, disturbs less between each sensing unit, but major defect is that sensing unit distribution density is less,
General distribution density the highest 4-7 sensing unit every square centimeter；Another kind of is array distribution between sensing unit, draws row respectively
Wire and column wire, the type sensor density compares and more free-standing can improve about 2 times, but owing to introducing target susceptibility unit
Other outer parallel connections are returned, and are vulnerable to the interference of other sensing units to type sensor target susceptibility unit, it is therefore necessary to pass through
External circuit carries out AF panel and filters.Owing to the type sensor performance directly affects robot or other equipment and environment
Mutual effect, therefore the outer research for imitation leather skin physical quantity sensor of Present Domestic is paid much attention to.The such as U.S.
Barrett company is for referring to that with three micro-power array of mechanical hand research and development is measured sensor and can be realized for many with auxiliary manipulator
The flexible crawl of number object.
Utility model content
For above-mentioned technical deficiency, the purpose of this utility model is to provide a kind of high density, and (every square centimeter sensitive single
Unit's quantity >=16) and sensing unit between interfere little and the array that stimulus intensity and stimulation sites are measured can be realized simultaneously
Pressure-measuring system, it is possible to increase the distribution density of bionic skin sensor and certainty of measurement.
This utility model solves its technical problem and be the technical scheme is that flexible array pressure based on piezoresistive effect
Measure sensor, including the line control circuit being linked in sequence, touch unit sensing unit, row control circuit, in the same direction amplifying circuit, filtering
Circuit, microprocessor controls circuit and data communication port, and the equipotential screened circuit being connected with tactile first sensing unit；Institute
State line control circuit, equipotential screened circuit, row control circuit are connected with microprocessor controls circuit.
Described line control circuit is multiway analog switch chip.Described row control circuit is multiway analog switch chip.
Described tactile unit sensing unit includes that pressure drag touches unit, row electrode, row electrode and PET film；Between row electrode, row electrode
Arranging multiple pressure drag and touch unit, row electrode, the outer layer of row electrode are PET film；Pressure drag touches unit and is distributed composition side at grade
Shape array；The spacing that the adjacent pressure drag of any two in row or column touches unit is equal.
Described row electrode, row electrode are strip metal plate, are multiple；Row electrode is transversely arranged, and a line pressure drag touches
Unit is connected on a row electrode；Row electrode is longitudinal arrangement, and string pressure drag touches unit and is connected to a row electrode
On；Described row electrode passes through sampling resistor ground connection.
It is varistor that described pressure drag touches unit.
Described equipotential screened circuit includes decoder and multichannel single-pole single-throw switch (SPST)；Multichannel single-pole single-throw switch (SPST) each
Switch one end is connected with the row electrode touching unit's sensing unit, each switch other end is defeated with the AD of microprocessor controls circuit
Entering end to connect, decoder sends the control end controlling signal to single-pole single-throw switch (SPST), the control line of decoder and microcontroller control
Circuit processed connects.
This utility model has the advantages that and advantage:
1. this utility model is based on sensing unit ranks distribution scheme, based on row column control circuit, equipotential shielding
Circuit, signal processing circuit and microprocessor controls circuit, and embedded real-time operating system achieves density 22 points/cm2
The measurement of two dimensional surface distributed force, solves that Present Domestic external pressure measures that sensor density is relatively low, detection speed crosses slow etc. asking
Topic.
The most in addition this sensor is based on PET film substrate, is a kind of sensor with higher bendable folding endurance, can be mounted on
There is certain curved surface features and be detected face, therefore have and widely use environment.
3. additionally this array pressure measurement scheme does not relies on certain force-sensitive material single, has all quick materials of pressure resistance type power
Expecting general feature, the two-dimentional power that user can select different force-sensitive material to realize different range different accuracy is measured.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model；
Wherein, 1 line control circuit, 2 equipotential screened circuits, 3 touch unit's sensing circuit, and 4 row control circuits, 5 amplify in the same direction
Circuit, 6 filter circuits, 7 microprocessor controls circuit, 8 data communication port；
Fig. 2 is that in Fig. 1, array pressure measures sensor construction schematic diagram.
Wherein, 9 power photosensitive layer, 10 glue, 11 silver medal wires, 12PET thin film
Fig. 3 is for touching unit's sensing unit position distribution schematic diagram.
Wherein, 13 pressure drags touch unit, 14 row-column electrodes.
Fig. 4 is array pressure Survey Software flow chart.
Detailed description of the invention
Below in conjunction with embodiment, this utility model is described in further detail.
A kind of array pressure for robot electronic skin measures system, specifically includes array-type flexible diaphragm pressure and surveys
Quantity sensor, sensor touch unit's switching circuit and acquisition controlling software system thereof, are wherein applied to array-type flexible diaphragm pressure
The change that the power of diverse location on sensor of measuring is presented as the resistance value of different sensing unit, measures some switching circuit by row
Row analog switch can select sensing units different in array is accessed signal conditioning circuit, and signal conditioning circuit is by sensitivity list
Unit's resistance change is converted to the detectable change in voltage of acquisition system, carries out output voltage and pressure through Tension-pressure tester
The demarcation of corresponding relation, can realize array-type flexible diaphragm pressure and measure the measurement of diverse location pressure on sensor.Use
This utility model can realize the measurement of equipment surface diverse location pressure, sets up the two-dimentional power distribution of equipment surface.
Described some switching circuit of measuring is made up of line control circuit 1, row control circuit 4 and equipotential screened circuit 2, signal
Process circuit to be made up of in-phase voltage amplifying circuit 5 and filter circuit 6.Microprocessor controls circuit includes the main core of microcontroller
Sheet, crystal oscillating circuit, reset circuit, debugging interface, CAN telecommunication circuit.
It is the least by having the unit are applying the biggest resistance of pressure that array flexible diaphragm pressure measures sensor sensing unit
Pressure-resistance negative correlation characteristic force sensitive slurry be made, be divided into 7 Rotating fields, be top layer PET film layer respectively, top layer silver
Conductor layer, top layer power photosensitive layer, glue layer, (in Fig. 3, top layer power photosensitive layer, glue layer, bottom power photosensitive layer are to constitute pressure to bottom power photosensitive layer
The basic structure of unit is touched in resistance), bottom silver conductor layer, bottom PET film layer, ranks go between respectively from bottom and top layer silver conductor layer
Draw.Row, column electrode respectively constitutes bottom silver conductor layer, top layer silver conductor layer.
Described Design of System Software, based on embedded real-time operating system, uses microcontroller intervalometer to carry out touching unit
Sensing unit handoff delay, timing by time realize next step Program Synchronization by semaphore, ADC gathers also by signal
Amount realizes synchronizing, and when needs read ADC conversion data, enables ADC and interrupts, send in ADC converts the interruption of triggering
Synchronizing signal amount, main acquisition tasks etc. is until carrying out data storage and transmission processes after semaphore.
A kind of array pressure for robot electronic skin measures system, will by the tactile unit sensing unit being distributed by ranks
The pressure change of diverse location is converted to the resistance change of corresponding sensing unit, is then converted by signal processing circuit
For voltage signal, can realize the perception of pressure size by gathering voltage signal, gatherer process is by software system control.
Line control circuit select need gather target line i, equipotential screened circuit by decoder gating in addition to i row its
He manages it, row control circuit gating target column j, touches unit sensing unit resistance Ri,jSelected, connect with sampling resistor Ref, sampling electricity
On resistance Ref, voltage signal sends into amplifying circuit in the same direction through analog switch 2, after filtering after circuit, sends into ADC conversion equipment and enters
Row data are changed.
Its pressure measurement sensor sensing unit has a piezoresistive effect, each sensing unit simultaneously with top layer, bottom ranks
Lead-in wire connection, its resistance value reduces with executing stressed increase.
Acquisition controlling hardware and software is based respectively on microcontroller and embedded real-time operating system realizes, and by using
Semaphore and mailbox realize acquisition tasks and synchronize.Described microcontroller is integrated with adc data modular converter, CAN communication
Module and timer module, be respectively used to voltage signal acquisition, sensing data communication and timing.
After os starting, the ADC in microcontroller is constantly in transition status, but only cuts at tactile unit sensing unit
Enabling ADC interruption after changing program effective operation, and the disconnected middle ADC of removing is interrupting enable in the adc, therefore can ensure that higher
ADC conversion speed.
After (1) (4) ranks switching circuit completes to touch unit's switching, microcontroller starts timer internal and realizes certain time
Accurate delay, acquisition tasks is blocked wait and is timed to semaphore, then carry out semaphore transmission in timer interruption, gathers and appoint
Business starts to enable ADC and interrupts after obtaining being timed to semaphore, and blocks the current ADC of wait and gathered semaphore, and ADC converts
Rear triggering ADC interrupts, and disconnected middle transmission converts semaphore, before acquisition tasks gets converted to the laggard trade of semaphore in the adc
Sensing unit output voltage values reads and storage.
Carry out data transmission by CAN, press after the complete output voltage signal touching unit's sensing unit of system acquisition
(i, j) is stored in declared RAM district in single-chip microcomputer by voltage data, all sensing units letter in array to touch unit sensing unit position
After number collection completes, acquisition tasks is called CAN and is sent data frame head, each sensing unit voltage data and data postamble.
This utility model array pressure detection ultimate principle: the material with force-sensitive property changes in applied external force
Time, its internal conductance rate changes, the sensing unit resistance value that therefore this material is made can in certain force sphere of action with
Applying power size becomes near-linear dependency.Sensing unit is distributed in diverse location in plane can be different sensitive single by gathering
Unit's resistance value size obtains the force size of plane distribution position.After sensing unit is pressed ranks distribution, by ranks switching electricity
The cooperation of road and other circuit can realize the measurement of two dimension power distribution in a certain plane.
Such as Fig. 1-Fig. 3, a kind of array pressure for robot electronic skin measures sensor, including having 8*8 array
The fexible film pressure measurement sensor of unit's sensing unit is touched in formula distribution, measurement point switching gathers with signal conditioning circuit and ADC
System and software system based on uCOS-III are constituted.Wherein 8*8 fexible film pressure measurement sensor accepts from extraneous work
Firmly, the force signal being applied on thin film being converted to change in resistance signal, change in resistance signal is changed by signal conditioning circuit
For the collectable voltage signal of ADC, ADC acquisition system controls to measure some switching circuit and realizes the selection of diverse location sensing unit
Change with ADC, it is achieved the two-dimentional power of interaction face is measured.
Described 8*8 fexible film pressure measurement sensor can be equivalent to the electric resistance array of ranks distribution and i.e. touch unit's sensing list
Unit, each tactile unit sensing unit resistance changes, its structure with applying the size variation of power on current tactile unit sensing unit position
As in figure 2 it is shown, for simplifying sensor internal circuit, sensor uses top layer, bottom lead design respectively, two-layer lead-in wire has certain
Length difference, top layer connects FPC interface under being, bottom on connect FPC interface, the FPC that sensor may be inserted on PCB arranged side by side patches
In part, simplify sensor and connect circuit.Sensor is actual touches unit's sensing unit distribution scheme as it is shown on figure 3, touch unit and sense single
Ranks distribution is pressed by unit, and the lead-in wire of row or column shares, therefore simplifies sensor internal circuit, improve the sensing unit of sensor
Distribution density, wherein (12) are the PET film of sensor external encapsulation, and (13) are the tactile unit by ranks arrangement, and (14) are top layer
Or bottom row-column electrode, material used is silver slurry.
Measuring some switching and signal conditioning circuit (1)-(7) part as described in Figure 1, STM32 control circuit 7 is by controlling
Line GPIO controls the selected target line i needing to gather of line control circuit 1, controls equipotential screened circuit 2 and is gated by decoder
Other row in addition to i row, control row control circuit 4 and gate target column j, then touch unit sensing circuit Ri, and j is selected, now Ri, and j is same
Sampling resistor Ref constitutes bleeder circuit, and on sampling resistor Ref, voltage signal sends into amplifying circuit 5 in the same direction through analog switch 2,
After filtering after circuit 6, send into STM32 control circuit and carry out ADC conversion and data storage, forward.
Being known by Fig. 1, Ri, j and Ref constitute bleeder circuit, and the voltage of generation sends into in-phase amplification circuit 5 through analog switch,
Therefore the relation of Vout and Ri, j can be tried to achieve:
Wherein, VoutThe magnitude of voltage exported after receiving pressure for tactile unit, Ri,jRepresent linear with applying pressure size
Tactile unit resistance, RefFor sampling resistor, Rs, R be that amplification in in-phase amplification circuit controls resistance, V+For reference voltage,
The i.e. input terminal voltage of multiway analog switch 1.
STM32F103C8T6 master chip is included on described STM32 control circuit fractional hardware, crystal oscillating circuit, reset circuit,
LED drive circuit, Jlink debugging interface, CAN communication circuit, and use STM32 chip to carry ADC to realize adopting of voltage signal
Collection.This fractional hardware control circuit technology maturation, can use the recommendation implementation of respective chip.In order to improve adopting of sensor
Collection speed, have employed programming based on uCOS-III embedded real-time operating system in software design, real by semaphore
The synchronization of existing multiple tasks.
Software system program circuit as shown in Figure 4, is set up due to port level and is needed certain time, therefore carry out in system
Start STM32 intervalometer after port switching carry out us level time delay and block wait time delay to semaphore, tactile when delay time arrives
Sending out timer interruption, trigger intervalometer time delayed signal amount in timer interrupt service, ADC acquisition tasks receives intervalometer time delay
Carry out after semaphore ADC interrupt enable, enable and block wait current ADC convert semaphore, after current ADC converts
Triggering interrupt service routine, trigger ADC and convert semaphore in the service routine that breaks in the adc, ADC acquisition tasks receives ADC
Read transformation result after converting semaphore and further processed, as sent, filtering etc..This strategy avoids the softest
Part starts, closes the time overhead that ADC brings, and main time expense is to interrupt the time of switching, and real-time is the highest.
Claims (7)
1. flexible array pressure measurement sensor based on piezoresistive effect, it is characterised in that: include that the row being linked in sequence controls electricity
Road (1), tactile unit's sensing unit (3), row control circuit (4), in the same direction amplifying circuit (5), filter circuit (6), microprocessor controls
Circuit (7) and data communication port (8), and the equipotential screened circuit (2) being connected with tactile unit's sensing unit (3)；Described row
Control circuit (1), equipotential screened circuit (2), row control circuit (4) are connected with microprocessor controls circuit (7).
Flexible array pressure measurement sensor based on piezoresistive effect the most according to claim 1, it is characterised in that described
Line control circuit (1) is multiway analog switch chip.
Flexible array pressure measurement sensor based on piezoresistive effect the most according to claim 1, it is characterised in that described
Row control circuit (4) is multiway analog switch chip.
Flexible array pressure measurement sensor based on piezoresistive effect the most according to claim 1, it is characterised in that described
Touch unit's sensing unit (3) and include that pressure drag touches unit (14), row electrode, row electrode and PET film (13)；Between row electrode, row electrode
Arranging multiple pressure drag and touch unit (14), row electrode, the outer layer of row electrode are PET film (13)；Pressure drag touches unit (14) at same plane
Upper distribution constitutes square array；The spacing that the adjacent pressure drag of any two in row or column touches unit is equal.
Flexible array pressure measurement sensor based on piezoresistive effect the most according to claim 4, it is characterised in that described
Row electrode, row electrode are strip metal plate, are multiple；Row electrode is transversely arranged, and a line pressure drag touches unit and is connected to
On one row electrode；Row electrode is longitudinal arrangement, and string pressure drag touches unit and is connected on a row electrode；Described row electrode
By sampling resistor ground connection.
6. according to the flexible array pressure measurement sensor based on piezoresistive effect described in claim 4 or 5, it is characterised in that institute
Stating pressure drag and touching unit (14) is varistor.
Flexible array pressure measurement sensor based on piezoresistive effect the most according to claim 1, it is characterised in that described
Equipotential screened circuit (2) includes decoder and multichannel single-pole single-throw switch (SPST)；Each switch one end of multichannel single-pole single-throw switch (SPST)
Be connected with a row electrode of tactile unit's sensing unit (3), each switch other end inputs with the AD of microprocessor controls circuit (7)
End connects, and decoder sends the control end controlling signal to single-pole single-throw switch (SPST), the control line of decoder and microprocessor controls
Circuit (7) connects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620762440.5U CN205826179U (en) | 2016-07-19 | 2016-07-19 | Flexible array pressure measurement sensor based on piezoresistive effect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620762440.5U CN205826179U (en) | 2016-07-19 | 2016-07-19 | Flexible array pressure measurement sensor based on piezoresistive effect |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205826179U true CN205826179U (en) | 2016-12-21 |
Family
ID=57562815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620762440.5U Active CN205826179U (en) | 2016-07-19 | 2016-07-19 | Flexible array pressure measurement sensor based on piezoresistive effect |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205826179U (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106679721A (en) * | 2016-12-23 | 2017-05-17 | 重庆大学 | Surface normal load and temperature double-parameter detecting system |
| CN107631818A (en) * | 2016-07-19 | 2018-01-26 | 中国科学院沈阳自动化研究所 | Flexible array pressure measurement sensor and its measuring method based on piezoresistive effect |
| CN107690306A (en) * | 2016-12-28 | 2018-02-13 | 深圳配天智能技术研究院有限公司 | Pulse signal acquisition device and pressure distribution test equipment |
| CN108571925A (en) * | 2017-03-10 | 2018-09-25 | 上海敏传智能科技有限公司 | A kind of flexible display deformation sensory perceptual system |
| CN109470386A (en) * | 2018-11-09 | 2019-03-15 | 福州大学 | A kind of power/position touch sensor detection system and detection method |
| CN109556767A (en) * | 2018-10-22 | 2019-04-02 | 清瑞博源智能科技河北有限责任公司 | A kind of intelligence pressure drag pliable pressure sensor array |
| CN109916539A (en) * | 2019-03-19 | 2019-06-21 | 华东师范大学 | A kind of pliable pressure sensor array prepared using laser cutting mode |
| CN110770556A (en) * | 2017-07-25 | 2020-02-07 | 贺利氏先进传感器技术有限公司 | Sensor unit for detecting a spatial temperature distribution and method for producing a sensor unit |
| CN111060235A (en) * | 2019-12-31 | 2020-04-24 | 北京航空航天大学 | Device and method for detecting static force applied by finger of user and finger shaking |
| CN111998977A (en) * | 2020-08-25 | 2020-11-27 | 工科思维技术(深圳)有限公司 | High-sensitivity flexible wearable sensor array and preparation method thereof |
| CN113237579A (en) * | 2021-05-06 | 2021-08-10 | 南京邮电大学 | Flexible pressure sensor based on graphene array and preparation method thereof |
| CN113524158A (en) * | 2021-07-14 | 2021-10-22 | 中国人民解放军国防科技大学 | Rigid-flexible composite micro structure with embedded sensing function and preparation method thereof |
-
2016
- 2016-07-19 CN CN201620762440.5U patent/CN205826179U/en active Active
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107631818A (en) * | 2016-07-19 | 2018-01-26 | 中国科学院沈阳自动化研究所 | Flexible array pressure measurement sensor and its measuring method based on piezoresistive effect |
| CN106679721A (en) * | 2016-12-23 | 2017-05-17 | 重庆大学 | Surface normal load and temperature double-parameter detecting system |
| CN106679721B (en) * | 2016-12-23 | 2019-10-22 | 重庆大学 | Surface normal load and temperature biparameter detection system |
| CN107690306A (en) * | 2016-12-28 | 2018-02-13 | 深圳配天智能技术研究院有限公司 | Pulse signal acquisition device and pressure distribution test equipment |
| CN108571925A (en) * | 2017-03-10 | 2018-09-25 | 上海敏传智能科技有限公司 | A kind of flexible display deformation sensory perceptual system |
| CN108571925B (en) * | 2017-03-10 | 2020-10-20 | 上海敏传智能科技有限公司 | Flexible display deformation sensing system |
| CN110770556A (en) * | 2017-07-25 | 2020-02-07 | 贺利氏先进传感器技术有限公司 | Sensor unit for detecting a spatial temperature distribution and method for producing a sensor unit |
| US11268864B2 (en) | 2017-07-25 | 2022-03-08 | Heraeus Nexensos Gmbh | Sensor unit for detecting a spatial temperature profile and method for producing a sensor unit |
| CN109556767B (en) * | 2018-10-22 | 2020-10-16 | 清瑞博源智能科技河北有限责任公司 | Intelligent piezoresistive flexible pressure array sensor |
| CN109556767A (en) * | 2018-10-22 | 2019-04-02 | 清瑞博源智能科技河北有限责任公司 | A kind of intelligence pressure drag pliable pressure sensor array |
| CN109470386B (en) * | 2018-11-09 | 2020-11-10 | 福州大学 | Force/position touch sensor detection system and detection method |
| CN109470386A (en) * | 2018-11-09 | 2019-03-15 | 福州大学 | A kind of power/position touch sensor detection system and detection method |
| CN109916539A (en) * | 2019-03-19 | 2019-06-21 | 华东师范大学 | A kind of pliable pressure sensor array prepared using laser cutting mode |
| CN111060235A (en) * | 2019-12-31 | 2020-04-24 | 北京航空航天大学 | Device and method for detecting static force applied by finger of user and finger shaking |
| CN111060235B (en) * | 2019-12-31 | 2021-11-05 | 北京航空航天大学 | Device and method for detecting static force applied by finger of user and finger shaking |
| CN111998977A (en) * | 2020-08-25 | 2020-11-27 | 工科思维技术(深圳)有限公司 | High-sensitivity flexible wearable sensor array and preparation method thereof |
| CN113237579A (en) * | 2021-05-06 | 2021-08-10 | 南京邮电大学 | Flexible pressure sensor based on graphene array and preparation method thereof |
| CN113237579B (en) * | 2021-05-06 | 2022-10-14 | 南京邮电大学 | Flexible pressure sensor based on graphene array and preparation method thereof |
| CN113524158A (en) * | 2021-07-14 | 2021-10-22 | 中国人民解放军国防科技大学 | Rigid-flexible composite micro structure with embedded sensing function and preparation method thereof |
| CN113524158B (en) * | 2021-07-14 | 2022-12-16 | 中国人民解放军国防科技大学 | Rigid-flexible composite micro structure with embedded sensing function and preparation method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN205826179U (en) | Flexible array pressure measurement sensor based on piezoresistive effect | |
| CN107631818A (en) | Flexible array pressure measurement sensor and its measuring method based on piezoresistive effect | |
| CN104406627B (en) | Wearable flexible touch sensor of artificial hand and touch detection system thereof | |
| CN102207415A (en) | Conductive-rubber-based flexible array clip pressure sensor and manufacturing method | |
| CN204214475U (en) | A kind of prosthetic hand Wearable flexible touch sensation sensor and sense of touch pick-up unit thereof | |
| CN102706489A (en) | Flexible three-dimensional force touch sensor of multi-fingered hands of human-simulated robot and three-dimensional force detecting system thereof | |
| CN104714708B (en) | control point sensing panel and design method thereof | |
| CN109141696B (en) | Flexible touch sensor based on piezoelectric film and signal processing system thereof | |
| CN109443611A (en) | A kind of array pressure sensor and pressure acquisition system | |
| CN108814769A (en) | Sensor, system, pressure detection circuit, method and electronic skin | |
| CN206399476U (en) | A kind of water analysis circuit | |
| CN101695001B (en) | Array piezoresistive tactile sensor adopting voltage array feedback method to weaken return circuit interference of scanning circuits | |
| CN202329850U (en) | Temperature rise detecting system of switch apparatus | |
| CN206223724U (en) | A kind of test system of blood sugar instrument | |
| CN206540646U (en) | A kind of pliable pressure sensor-based system | |
| CN211321316U (en) | Composite dielectric layer based capacitive flexible circuit board touch sensing device | |
| CN106153094B (en) | A kind of load plate and load plate system for photodetector batch testing | |
| CN112256153A (en) | Signal acquisition, processing and display method of touch perception array | |
| CN206892102U (en) | A kind of clothes comfort level long-distance intelligent detecting system | |
| CN105843507A (en) | Webpage switching method and terminal | |
| CN202693769U (en) | Battery voltage acquisition apparatus | |
| CN204287285U (en) | Capture card measured by a kind of multimeter | |
| CN202205078U (en) | Multi-channel data acquisition equipment | |
| CN103439584B (en) | Capacitor with multiple electrode plates on-line measurement system based on electric impedance analyzer | |
| CN102467306B (en) | Capacitive touch device for detecting induced electric field |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |