CN205821443U - System is manufactured at the increasing material of surface of the work fast deposition by vacuum plasma - Google Patents

Abstract

nullThis utility model relate to a kind of by vacuum plasma surface of the work fast deposition increasing material manufacture system，Including vacuum acquirement and measurement apparatus and vacuum chamber，Sidewall at vacuum chamber is provided with multiple sidewall cathode target pair，It is characterized in that: a cylindrical cathode target and rotary supporting device are installed in the center of vacuum chamber，Cylindrical cathode target is by connecting high-power arc power、To export big electric current，The power input of cylindrical cathode target connects the outfan of PLC control system，Both positive and negative polarity input switching change is repeated by PLC control system and acts on the electromagnetic field direction of cylindrical cathode target target surface，The arc speckle being in target surface is made to make upwards screw along target surface，Shift from one end toward the other end，And form arc speckle and make spiral transfer movement repeatedly at the target surface of cylindrical cathode target，Form surface of the work Rapid Circulation deposition structure，Surface of the work is made the most quickly to obtain thick coating.This utility model has the beneficial effects such as the coating deposition efficiency height of surface of the work.

Description

System is manufactured at the increasing material of surface of the work fast deposition by vacuum plasma

Technical field

This utility model relates to a kind of manufacturing system by vacuum plasma at the increasing material of surface of the work fast deposition, suitable Increase material manufacture for plasma at the resurfacing of surface fast deposition spy's thick coating of workpiece, be particularly well-suited to complex part table The quickly high performance thick coating of formation in face.Belong to plasma resurfacing and increase material manufacturing technology field.

Background technology

At present, increasing material manufacture (Additive Manufacturing, AM) technology is the method using material gradually to add up Manufacture the technology of entity component, relative to traditional material removal-Machining Technology for Cutting, be the manufacture of a kind of " from bottom to top " Technology, wherein the resurfacing of equipment is one of key technology increasing material manufacturing technology.The automatization's coating increasing material manufacture is material Cumulative necessary operation, the process of resurfacing manufacture directly determines the workpiece precision in cumulative direction and quality.Existing In technology, owing to resurfacing increasing material manufacturing system structure is unreasonable, the coating deposition efficiency that accordingly, there exist surface of the work is low, heavy The defects such as long-pending coating layer thickness is thin and uneven, the deposition coating result of complex part difference.

For response country about the propelling of increasing material plan, produce towards major fields product development and design and complex structural member Demand, with technological innovation as power, puts forth effort to solve the underlying issue of the aspect such as critical material and equipment independent research, particularly exists Making mold, the important technology field of the Aero-Space such as bearing and aircraft engine blade and high-end equipment manufacturing, this system Research and development and application use the method for vacuum plasma to increase material at the resurfacing of surface fast deposition spy's thick coating of workpiece exactly Manufacture new technique.

Utility model content:

This utility model purpose, is the painting that there is surface of the work in order to solve the resurfacing of prior art increasing material manufacture system Layer deposition efficiency coating layer thickness low, deposition is thin and uneven, the problem of the deposition coating result difference of complex part, it is provided that a kind of System is manufactured at the increasing material of surface of the work fast deposition by vacuum plasma.This system has the coating deposition of surface of the work The features such as efficiency is high, the coating layer thickness of deposition deposition coating result thick and uniform, complex part is good.

Particularly at Making mold, the Aero-Space such as bearing and aircraft engine blade and the important skill of high-end equipment manufacturing Art field, the research and development of this system and application use the method for vacuum plasma to be coated with in surface fast deposition spy's thickness of workpiece exactly The resurfacing of layer increases material and manufactures new technique.This technology the most disposably can deposit at complicated piece surface, forms high efficiency, low Cost, high performance thick coating, this thick coating is mainly applied at die casting, bearing, aircraft engine blade, steam turbine leaf Sheets etc. manufacture field.

The purpose of this utility model can reach by adopting the following technical scheme that:

System is manufactured at the increasing material of surface of the work fast deposition, including vacuum acquirement and measurement dress by vacuum plasma Putting and vacuum chamber, vacuum acquirement and measurement apparatus are by vacuum pipe and vacuum chamber, and the sidewall at vacuum chamber is provided with many Individual sidewall cathode target pair, its construction features is: install a cylindrical cathode target and rotary in the center of vacuum chamber Holding mechanism, cylindrical cathode target has circuit configuration high-power, big, and cylindrical cathode target is by connecting high-power arc power, with output Big electric current, the power input of cylindrical cathode target is connected the outfan of PLC control system, is repeated by PLC control system Both positive and negative polarity input switching changes the electromagnetic field direction acting on cylindrical cathode target target surface, makes the arc speckle being in target surface make along target surface Upwards screw, shifts from one end toward the other end, and forms arc speckle and make repeatedly spiral transfer fortune at the target surface of cylindrical cathode target Dynamic, form surface of the work Rapid Circulation deposition structure, make surface of the work the most quickly obtain thick coating；Sidewall cathode target to Cylindrical cathode target respectively connects an arc power, and grid bias power supply is connected on rotary supporting device；Sidewall cathode target is to by even The arc power connect forms negative and positive counter-electrodes, arranges control switch in the junction of sidewall cathode target pair with arc power, by control The sidewall cathode target on/off electricity of on-off control processed pairing, forms assistant depositing and cleaning structure；Made by rotary supporting device Workpiece cylindrical cathode target and sidewall cathode target between revolve round the sun and spinning motion；Constitute the increasing material of surface of the work fast deposition Manufacture system.

The purpose of this utility model can also reach by adopting the following technical scheme that:

Further, the inside of cylindrical cathode target is configured with multiple coil, between each coil insulation and respectively with arc power Connecting, connect tap water in the target bucket of cylindrical cathode target, to cool down target body and coil, the power control terminal of each coil is with PLC's Control output end connects, and is controlled the ON/OFF of each coil by PLC, passes through in order and turn on and off coil Arc power, until to after a last coil electricity charged, more just carried out by the circuit input end of PLC control all coils Negative pole input switching, makes original positive pole become negative pole input, is simultaneously first starting point with last coil, reverse work successively Make, by turn switching on one and simultaneously closing off the step mode of a coil, make the north and south in magnetic field produced by hot-wire coil An exchange has been done in extreme direction, changes the direction of electromagnetic field.

Further, being provided with choke valve on vacuum pipe, the sidewall at vacuum chamber is provided with vacuum gauge and vent valve, post Shape cathode target is circumscribed with cylindrical cathodes target chilled water unit and cylindrical cathodes target arc power input equipment；Rotary supporting device sets Putting the intracavity bottom at vacuum chamber, rotary supporting device has workpiece displacement structure and rotation, revolution structure；Vacuum chamber is Limit octagonal, has eight rectangular surfaces, and one of them rectangular surfaces connects vacuum acquiring system by vacuum pipe and measures dress Putting, other seven rectangular surfaces have rectangular opening, for connecting rectangular flange, wherein on the rectangular flange in four faces or six faces Respectively being provided with cathode target, described cathode target is circumscribed with cathode target arc power input equipment, cooling water in-out apparatus, at cathode target Be provided around electromagnetic field, formed two to or three pairs of sidewall cathode targets pair；It is provided with one on the shape flange relative with vacuum pipe Observation window, for observing the situation in vacuum chamber.

Further, the rectangular flange in wherein four faces of vacuum chamber is respectively provided with cathode target, outside described cathode target It is connected to cathode target arc power input equipment, cooling water in-out apparatus, at the electromagnetic field that is provided around of cathode target, forms two to sidewall Cathode target pair；Heat-generating pipe is respectively installed, to heat before workpiece plated film in the inner side of two rectangular surfaces adjacent with observation window；Very Empty acquisition system and measurement apparatus, choke valve, vent valve, cylindrical cathodes target, cylindrical cathodes target arc power input equipment, cylindricality Cathode target chilled water unit, rotary supporting device, cathode target, cathode target arc power input equipment, cooling water in-out apparatus and Electromagnetic field controls input and respectively connects the control signal outfan of an electrical control cabinet, and Computer Integrated System constitutes automatically Control structure.

Further, the junction at vacuum acquirement and measurement apparatus and vacuum chamber is provided with shutter；Vacuum chamber is provided with Vacuum chamber fire door, is provided with oven door sealing bar in the junction of vacuum chamber Yu vacuum chamber fire door, and observation window is arranged on vacuum chamber fire door On.

Further, rotary supporting device includes that planetary gear guard shield, planetary wheeling mechanism, transmission input mechanism, transmission are defeated Entering reductor and frequency conversion motor, the clutch end of frequency conversion motor connects the dynamic of transmission input mechanism by transmission input reductor Power input, the clutch end of transmission input mechanism connects the power intake of planetary wheeling mechanism, and star-wheel mechanism is provided with work Making rotating disk, constitute rotary supporting device, planetary gear guard shield covers star-wheel mechanism；It is provided with grid bias power supply at transmission input mechanism Input equipment.

Further, circular generating means is arranged in target bucket, is i.e. risen by circular generating means sealing cover by target bucket Come, form enclosed construction.

Further, at transmission input mechanism, one encoder is installed, to measure rotating speed and the product orientation of workpiece.

Further, the input in electrical control cubicles connects computer switch board, constitutes LPC control structure.

This utility model has a following prominent beneficial effect:

1, this utility model is owing to having surface of the work Rapid Circulation deposition structure, making surface of the work the most quickly obtain Thick coating, and there is assistant depositing and cleaning structure；Deposit therefore, it is possible to the resurfacing solving prior art increases material manufacture system Coating deposition efficiency at surface of the work coating layer thickness deposition coating result thin and uneven, complex part low, deposition is poor Problem, have the coating deposition efficiency coating layer thickness high, deposition of surface of the work thick and uniformly, the deposition coating of complex part Effective beneficial effect such as grade.

2, the cathode target of this utility model sidewall is as the mode of Ion Cleaning, improves ionization level, and the surface making product is clear Clean clean and with strongly active, add the adhesive force of product film layer, film layer increases with the adhesion of product matrix surface, reduces The probability of demoulding, improves the quality of product, makes improve 3-5 times the service life of product, simultaneously can also be as deposition Time supplementary means, for assistant depositing, increase the kind of coated film layer and increase the method extending deposition.

3, this utility model uses intermediate cylindrical cathode target to increase the occurring source of material as product film deposition, external high-power Arc power, can high-power high-current output, arc source electric current is up to 300～1000A, and conventional arc source electric current, and can more than 700A Working long hours, stream time is more than 24 hours, sedimentation rate ＞ 15 μm/h, and primary depositing thickness can be more than 80 μm, should Method greatly improves the deposition efficiency of film layer, and the electromagnetic field pilot arc speckle in cylindrical cathodes target is upper and lower on the surface of target Mobile, making each is identical through the arc speckle working time of product surface, the most just while ensureing the thickness of product film layer Also ensure that the uniformity of film layer, it is ensured that film layer has good adhesion, thus can decrease the working time of plated film, reduce Labor intensity, improves efficiency, reduces production cost, and the most uniform thicknesses of layers can make the quality of product be carried Height, obtains the depositional coating having the uniform super thick of excellent combination power, reaches product and increases the purpose of material.

4, the decapacitation of this utility model coating obtains outside the most single composition, simultaneously can be according to changing different target material Composition and the gas with various being passed through in stove, control vacuum, it is thus achieved that the coating of different material compositions or composite coating.

5, this utility model utilizes information-based and intelligentized control system, improves the degree of automatization, reduces labor Fatigue resistance.This system uses information-based and intelligentized control integrated system, and each action can be by information-based and intelligent The control integrated system changed sends instruction one by one, makes each action carry out the most in order, significantly reduces the peace of product work Full property and drastically increase automaticity, makes the process of whole plated film achieve the most controlled, thus it is strong to reduce work Spend and improve quality and the stability of product.

Accompanying drawing illustrates:

Fig. 1 is structural representation of the present utility model.

Fig. 2 is cathode target structural representation of the present utility model.

Fig. 2-1 is the loop construction schematic diagram of cylindrical cathode target of the present utility model.

Fig. 3 is the structural representation front view of this utility model specific embodiment 1.

Fig. 4 is the structural representation top view of this utility model specific embodiment 1.

Fig. 5 is the structural representation A-A side view of this utility model specific embodiment 1.

Fig. 6 is the structural representation front view of this utility model specific embodiment 3.

Fig. 7 is the structural representation top view of this utility model specific embodiment 3.

Fig. 8 is the structural representation A-A side view of this utility model specific embodiment 3.

Fig. 9 is the structural representation front view of this utility model specific embodiment 4.

Figure 10 is the structural representation top view of this utility model specific embodiment 4.

Figure 11 is the structural representation A-A side view of this utility model specific embodiment 4.

Figure 12 is the structural representation front view of this utility model specific embodiment 5.

Figure 13 is the structural representation top view of this utility model specific embodiment 5.

Figure 14 is the structural representation A-A side view of this utility model specific embodiment 5.

Detailed description of the invention:

Specific embodiment 1:

Referring to figs. 1 through Fig. 5, the present embodiment includes vacuum acquirement and measurement apparatus 1 and vacuum chamber 10, vacuum acquirement and measurement Device 1 is connected with vacuum chamber 10 by vacuum pipe 2, and the sidewall at vacuum chamber 10 is provided with multiple sidewall cathode target pair, very A cylindrical cathode target 4 and rotary supporting device 3 are installed in the center of empty room 10, and cylindrical cathode target 4 has high-power, big Circuit configuration, cylindrical cathode target 4 by connect high-power arc power, to export big electric current, the power input of cylindrical cathode target 4 Connect the outfan of PLC control system, both positive and negative polarity input switching change is repeated by PLC control system and acts on column the moon The electromagnetic field direction of pole target 4 target surface, makes the arc speckle being in target surface make upwards screw along target surface, turns toward the other end from one end Move, and form arc speckle and make spiral transfer movement repeatedly at the target surface of cylindrical cathode target 4, form surface of the work Rapid Circulation deposition knot Structure, makes surface of the work the most quickly obtain thick coating；Sidewall cathode target to and cylindrical cathode target 4 respectively connect an arc power, Grid bias power supply is connected on rotary supporting device 3；Sidewall cathode target forms negative and positive counter-electrodes to the arc power by connecting, Control switch is set in the junction of sidewall cathode target pair with arc power, by controlling the sidewall cathode target of on-off control pairing On/off electricity, forms assistant depositing and cleaning structure；Make workpiece cloudy at cylindrical cathode target 4 and sidewall by rotary supporting device 3 Pole target between revolve round the sun and spinning motion；The increasing material constituting surface of the work fast deposition manufactures system.

In the present embodiment:

The inside of cylindrical cathode target 4 is configured with multiple coil, insulate and be connected with arc power respectively, column between each coil Connect tap water in the target bucket of cathode target 4, to cool down target body and coil, the control output of the power control terminal of each coil and PLC End connects, and is controlled the ON/OFF of each coil by PLC, passes through in order and turn on and off the arc power of coil, Until to after a last coil electricity charged, then carry out both positive and negative polarity input by the circuit input end of PLC control all coils Switching, makes original positive pole become negative pole input, is simultaneously first starting point with last coil, the most reversely operated, by depending on Secondary connection one also simultaneously closes off the step mode of a coil, makes the south poles direction in magnetic field produced by hot-wire coil do One exchange, changes the direction of electromagnetic field.

Being provided with choke valve 3-1 on vacuum pipe 2, the sidewall at vacuum chamber 10 is provided with vacuum gauge 5 and vent valve 6, post Shape cathode target 4 is circumscribed with cylindrical cathodes target chilled water unit 7 and cylindrical cathodes target arc power input equipment 8；Rotary supporting machine Structure 3 is arranged on the intracavity bottom of vacuum chamber 10, and rotary supporting device 3 has workpiece displacement structure and rotation, revolution structure；Very Empty room 10 is equilateral octagonal, has eight rectangular surfaces, and one of them rectangular surfaces connects vacuum acquiring system by vacuum pipe 2 And measurement apparatus 1, other seven rectangular surfaces have rectangular opening, for connecting rectangular flange, the Rectangular Method in four faces wherein Respectively being provided with cathode target 23 on orchid, described cathode target 23 is circumscribed with cathode target arc power input equipment 24, cooling water in-out apparatus 25, it is provided around electromagnetic field 22 at cathode target 23, forms two to sidewall cathode target pair；The shape flange relative with vacuum pipe 2 On an observation window 21, situation in observing vacuum chamber 10 are installed.

Respectively being provided with cathode target 23 on the rectangular flange in wherein four faces of vacuum chamber 10, described cathode target 23 is circumscribed with Cathode target arc power input equipment 24, cooling water in-out apparatus 25, be provided around electromagnetic field 22 at cathode target 23, forms two right Sidewall cathode target pair；Heat-generating pipe 20 is respectively installed, with at workpiece plated film in the inner side of two rectangular surfaces adjacent with observation window 21 Front heating；Vacuum acquiring system and measurement apparatus 1, choke valve 3-1, vent valve 6, cylindrical cathodes target 4, cylindrical cathodes target arc electricity Source input equipment 8, cylindrical cathodes target chilled water unit 7, rotary supporting device 3, cathode target 23, cathode target arc power input dress Put 24, cooling water in-out apparatus 25 and electromagnetic field 22 control input and respectively connect the control signal output of an electrical control cabinet 26 Hold, and Computer Integrated System 27 constitutes automatic control structure.

It is provided with shutter 4 in the junction of vacuum acquiring system and measurement apparatus 1 and vacuum chamber 10；Vacuum chamber 10 sets Having vacuum chamber fire door 11, be provided with oven door sealing bar 14 in the junction of vacuum chamber 10 with vacuum chamber fire door 11, observation window 21 is arranged On vacuum chamber fire door 11.

Rotary supporting device includes that planetary gear guard shield 12, planetary wheeling mechanism 13, transmission input mechanism 15, transmission input subtract Speed machine 17 and frequency conversion motor 18, the clutch end of frequency conversion motor 18 connects transmission input mechanism by transmission input reductor 17 The power intake of 15, the clutch end of transmission input mechanism 15 connects the power intake of planetary wheeling mechanism 13, star-wheel machine Structure 13 is provided with working rotary table, constitutes rotary supporting device, and planetary gear guard shield 12 covers star-wheel mechanism 13；Machine is inputted in transmission Grid bias power supply input equipment 16 it is provided with at structure 15.

Cathode target 23 is arranged in target bucket 19, is i.e. risen by circle (rectangle or cylindricality) cathode target 23 sealing cover by target bucket 19 Come, form enclosed construction.

At transmission input mechanism 15, an encoder is installed, to measure rotating speed and the product orientation of workpiece.

Input in electrical control cubicles 26 connects computer switch board 27, configuration information and intelligentized control system.

Air inlet pipe 28, liner plate 29 it is provided with at the two ends of vacuum chamber 10.

Vacuum acquirement and measure when service system 1 major function is to obtain plated film required background vacuum and keep plated film Time vacuum, utilize vacuum pipe throttle flap valve 3 stably to fluctuate big vacuum after being simultaneously introduced gas, and vacuum gauge I.e. as the detecting instrument of vacuum in detection vacuum chamber, determine the size of vacuum, issue a signal to the quality of air inlet pipe 28 Effusion meter is adjusted air inflow, controls to measure vacuum during plated film.

The heat-generating pipe 20 arranged in vacuum chamber, the heating when product plated film and heat insulation function, add heat pipe side attached It is controlled the work of heat-generating pipe with thermocouple, uses the temperature control method of PID that vacuum cavity is carried out temperature control, the most all right It is warmed up to the diffusion temperature of product coating, is diffused film layer processing.

At 4 sets (2 overlap or the overlap more) cathode target 23 set by vacuum chamber 10 sidewall, it is to be paired into a negative electrode and a sun two-by-two Pole, forms a pair potential difference, carries out when plated film increases material exciting the ion pair workpiece producing ionization to be carried out, and increases ionization Rate, they are that the both positive and negative polarity docking utilizing external arc power is formed, and external arc power passes through cathode target arc power input equipment 24 act on cathode target.

The cylindrical cathodes target 9 in centre position in vacuum chamber 10, the main film deposition source functioning as workpiece, is fast The main vaporising device of speed shape film forming layer, this device is arc power by external cylindrical cathodes target arc power input equipment Arc stream acts on target, then by glow discharge, cathode target target is ionized and evaporates, and by grid bias power supply 16 Under effect, deposit to the surface of workpiece, form depositional coating together with ionized gas.

The working rotary table of vacuum chamber 10 inner planet wheel mechanism 13 is used to place workpiece, makes workpiece do rotation and revolution fortune Dynamic, it is the active platform placing workpiece, in the outer individual grid bias power supply input equipment 16 arranged of transmission input mechanism 15, makes workpiece band Upper bias, is provided with an encoder at transmission input mechanism 15 simultaneously, can measure rotating speed and the product orientation of workpiece.

Path when electromagnetic field 22 is for controlling the arc speckle work on target, makes arc speckle move according to the direction in magnetic field, makes The unlikely current interruption of arc speckle is the most controlled.

Ignition voltage is i.e. used to excite cathode target to produce aura, produces aura arc speckle at target material surface, produces plasma Body deposition increases material source.

The shutter 4 installed between vacuum chamber 10 and vacuum pipe 2, produced pollution source when being used for stopping plated film, Pollute vacuum pump and vacuum measurement system thereof.At the cooling water that the end of vacuum chamber 10 surrounding and each arc source vaporising device is arranged In-out apparatus is respectively connected in hot and cold water blood circulation, for cooling vacuum room and the sealing ring of target junction, as being passed through heat Fire door (11) can be opened during water again vacuum cavity is carried out Heat preservation, drive away because of after oven door opening air setting in vacuum Indoor steam, reduces time during evacuation, improves efficiency.

The operation principle of the present embodiment is as follows:

The working method of this enforcement, is first to open vacuum chamber fire door 11, workpiece is placed on the work of planetary wheeling mechanism 13 Make on rotating disk, start frequency conversion motor 18, transmission input mechanism 15 inputs rotational power, makes workpiece make on planetary mechanism 13 Revolution and spinning motion, be then shut off vacuum chamber fire door 11, starts vacuum acquirement and measures the vacuum pump of service system 1, true Background vacuum before empty twitch plated film, then opens the control switch of heat-generating pipe 20, heats, until temperature rises to plating Design temperature before film is incubated, and before opening heating, cooling water to be connected, then opens gas flowmeter and valve, Be passed through gas, make the vacuum in vacuum chamber 10 reach a vacuum degree set, and stable after, open grid bias power supply input The switch of mechanism 16, makes to bias on workpiece band, then opens the arc power of circular cathode target, make cathode target connect, and start, and these are two years old It is that a pair anode and cathode is matched to arc power, the gas being passed through thus can be made to produce the highest ionization level, make workpiece Surface clean clean, and have good activity and be conducive to increasing adhesive force.After work after a while, close circle The arc power of shape cathode target, and regulate the flow of bias and mass flowmenter, the vacuum in regulation vacuum chamber, open cylindricality cloudy The on and off switch in the magnetic field of pole target, then open the switch of its arc power, and start, producing arc speckle, arc speckle is along with the change in magnetic field Being changed, arc speckle, in vertical direction screw, makes metallic plasma be evaporated, or after being combined with gas, logical Overbias is attached on the surface of workpiece, after the regular hour, forms certain thickness alloy film layer, is then shut off arc electricity Source, closes magnetic field, turns off grid bias power supply, is then shut off adding the power supply of heat pipe, closes and adds heat pipe, stops heating, simultaneously closes off Mass-flow gas meter, stops the addition of gas, continues evacuation, until after the temperature in vacuum chamber reaches predetermined temperature, Close vacuum gauge, stop the vacuum pump in vacuum system, then open vent valve, make vacuum chamber and atmosphere, work as vacuum After indoor pressure is identical with air, opening fire door, then take out workpiece, the filming process of product completes.

The inside of cylindrical cathode target 4 is configured with multiple coil, insulate and be connected with arc power respectively, column between each coil Connect tap water in the target bucket of cathode target 4, to cool down target body and coil, the control output of the power control terminal of each coil and PLC End connects, and is controlled the ON/OFF of each coil by PLC, turns on and off the arc power of coil the most from top to bottom, when first After several seconds of individual coil electricity, then second coil is made to be energized, and simultaneously first coil blackout, and so on, until After a last coil electricity charged, then carry out both positive and negative polarity input switching by the circuit input end of PLC control all coils, Make original positive pole become negative pole input, be simultaneously first starting point with last coil, the most reversely operated, by turn switching on One and simultaneously close off the step mode of a coil, the south poles direction in magnetic field produced by hot-wire coil is made to have done a tune Change, change the direction of electromagnetic field.In this way, the arc speckle lighted on target surface top will be by the top of target surface along with line The direction of loop current, spins on the surface of target and moves downward, until last several circles of a coil last below target, passes through PLC controls, and the positive antipole of coil is switched over, fast the direction changing coil current, namely changes and act on target The direction of the electromagnetic field in face, makes to be in target basifacial arc speckle and is made screw upwards by lower to upper part along target surface, directly Coil to topmost has almost worked, once more the electric current input direction of switching coil, changes the direction of electromagnetic field, makes target The arc speckle adverse movement in face, works the most repeatedly, makes arc speckle make screw repeatedly, greatly at the target surface of the cathode target of column Improve the evaporation efficiency of target, make surface of the work the most quickly obtain thick coating.

In the anode and cathode connection also power transmission of pairing target to cathode target during cleaning, by the gas of negative electrode electric vacuum intracavity Come the surface of cleaning workpiece, if need the technique doing deposition plating, disconnect arc power anode and cathode connecting valve, at this moment The cathode target of each sidewall and the negative pole of arc power connect, and just workpiece can be carried out assistant depositing once energising.

The present embodiment uses information-based and intelligentized control model, and wherein central authorities' integrated system is responsible for performing components and parts Controlling, and unit parts data gathers, computer mainly realizes the function of data acquisition, editor and communication.Running During coating process, computer display screen can show all technological parameters in real time, all technological parameters are automatically recorded in computer For calling at any time；Also can export as form and be furnished with printer output function for analysis, system, be available for data output and print. Computer controls to use open customer interface, and by control system, experienced client can complete any multilamellar by self-developing And composite coating.Control system function includes the following:

(1) manual operation: each parts of native system all the most independently can be operated by computer, in order to draws a design and technique adjustment.

(2) it is automatically brought into operation: native system has Automatic-bleeding, automatic film coating and safeguards that vacuum is stablized, vacuum chamber recharges automatically Big airway dysfunction；As these three kinds of functions are used in conjunction the full-automatic function being native system, operative employee only needs piece installing, pickup, switch gate ?.

(3) display function: all can set on display screen the electric current of power supply, voltage, current process parameter and process time and The technique number of plies, display is when vacuum and temperature in forehearth, and pivoted frame rotating speed and each pump valve state, various fault alarm show Deng.

(4) report to the police, defencive function: have that discharge is not enough, cut off the water supply, each pump valve fault alarm；Cut off the water supply, vacuum not Equipment self-lock protection when, power failure etc. is not possessed safety production condition.

(5) warning message automatic spring: native system is automatic spring warning message when fault occurs, and report in detail is provided Alarming information, it is simple to staff carries out fault diagnosis to equipment.

(6) coating process: native system carries technology library, technology library can carry out editing, revising.

(7) data analysis: native system can carry out reality to parameters such as each gas flow, the electric current of power supply, voltage, arc source electric currents Time curve, the display of history curve and preservation, and these data can be printed, analyze.

(8) time book: native system possesses clocking capability accumulative to mechanical part (such as vacuum pump etc.) work, can determine Phase reminds staff to carry out corrective maintenance.

Material in the arc target and columnar target of evaporation can be identical material as requested, it is also possible to is different materials Matter, each target can be single or compound material, it is also possible to be that several different material forms different targets, it is possible to install In same vacuum chamber, carry out ionization evaporation, form composite plasma, finally constitute composite coating structure.

This system is provided with heater in vacuum chamber, so coating can carry out heating and expand under a vacuum Dissipating, heating diffusion temperature can be up to 1000 DEG C, adapts to the diffusion of multiple coating, increases adhesion, because of can be at height Vacuum is diffused, so product and coating oxidation can be prevented, and can increase the extrinsic motive spread, improve diffusion rate.

Specific embodiment 2:

The feature of the present embodiment 2 is: vacuum chamber 10 is equilateral octagonal, has eight rectangular surfaces, one of them rectangular surfaces Connecting vacuum acquiring system and measurement apparatus 1 thereof by vacuum pipe 2, other seven rectangular surfaces have rectangular opening, for connecting Rectangular flange, is respectively provided with cathode target 23 wherein on the rectangular flange in six faces, described cathode target 23 is circumscribed with cathode target arc Power input 24, cooling water in-out apparatus 25, be provided around electromagnetic field 22 at cathode target 23, forms three to sidewall negative electrode Target pair.Remaining is with specific embodiment 1.

Specific embodiment 3:

With reference to Fig. 6 to Fig. 8, the feature of this utility model specific embodiment 4 is, the structure of vacuum chamber 10 can be circular, Circumferentially forming four to eight windows, one of them window connects vacuum acquiring system by vacuum pipe 2 and measures dress Putting 1, other three to seven windows are arcuate rectangular mouth (being projected as rectangle), for adpting flange, four or six windows wherein Respectively being provided with cathode target 23 on the flange of mouth, described cathode target 23 is circumscribed with cathode target arc power input equipment 24, cooling water enters Go out device 25, be provided around electromagnetic field 22 at cathode target 23, formed two to or three pairs of sidewall cathode targets pair.Remaining is with concrete real Execute example 1 or specific embodiment 2.

Specific embodiment 4:

With reference to Fig. 9 to Figure 11, the feature of this utility model specific embodiment 4 is, the structure of vacuum chamber 10 can be square Or rectangle, there are four rectangular surfaces, one of them rectangular surfaces connects vacuum acquiring system by vacuum pipe 2 and measures dress Putting 1, the other three rectangular surfaces has rectangular opening, for connecting rectangular flange, respectively installs wherein on the rectangular flange in two faces Cathode target 23, described cathode target 23 is had to be circumscribed with cathode target arc power input equipment 24, cooling water in-out apparatus 25, at cathode target 23 be provided around electromagnetic field 22, form pair of sidewalls cathode target pair.Remaining is with specific embodiment 1.

Specific embodiment 5:

With reference to Figure 12 to Figure 14, the feature of this utility model specific embodiment 4 is, rotating-table apparatus and the position of cylindrical cathodes target Putting and can exchange up and down, remaining is with specific embodiment 1, and vacuum chamber 10 can be embodiment 2 to 4.

In other specific embodiments of the present utility model, the structure of vacuum chamber 10 can be with other polygons, and remaining is with concrete Embodiment 1 to 5.

This utility model is the repasting of surface fast deposition spy's thick coating of workpiece by the method for vacuum plasma Layer increases material and manufactures new technique, can work continuously, until the additional issue cathode targets in vacuum chamber exhausts.This system can be complicated zero Part surface quickly forms high efficiency, low cost, high performance thick coating, and this thick coating is mainly at die casting, bearing, aircraft Engine blade, the manufacture field such as turbine blade has obtained sufficient application.

This utility model is towards major fields product development and design and complex structural member Production requirement, with technological innovation is Power, puts forth effort to solve critical material and the underlying issue of the equipment aspects such as independent research, particularly at Making mold, and bearing and flying Aero-Space and the important technology fields of high-end equipment manufacturing such as machine engine blade, the research and development of this system and application are just by true Empty plasma, in the method increasing material manufacture system of surface of the work fast deposition, is the new technique of resurfacing increasing material manufacture.

The above, only utility model more specific embodiment, but the protection domain of utility model does not limit to and this, Any those familiar with the art is in the range of this utility model discloses, according to the technical solution of the utility model And utility model conceives equivalent or change in addition, broadly fall into protection domain of the present utility model.

Claims (9)

1. manufacture system, including vacuum acquirement and measurement apparatus by vacuum plasma at the increasing material of surface of the work fast deposition (1) connected, at vacuum chamber with vacuum chamber (10) by vacuum pipe (2) with vacuum chamber (10), vacuum acquirement and measurement apparatus (1) (10) sidewall is provided with multiple sidewall cathode target pair, it is characterised in that: a post is installed in the center of vacuum chamber (10) Shape cathode target (4) and rotary supporting device (3), cylindrical cathode target (4) has circuit configuration high-power, big, cylindrical cathode target (4) by connecting high-power arc power, to export big electric current, the power input of cylindrical cathode target (4) connects PLC control system Outfan, both positive and negative polarity input switching change is repeated by PLC control system and acts on the electricity of cylindrical cathode target (4) target surface Magnetic direction, makes the arc speckle being in target surface make upwards screw along target surface, shifts from one end toward the other end, and forms arc speckle Target surface at cylindrical cathode target (4) makees spiral transfer movement repeatedly, forms surface of the work Rapid Circulation deposition structure, makes workpiece table Face the most quickly obtains thick coating；Sidewall cathode target to and cylindrical cathode target 4 respectively connect an arc power, grid bias power supply connects On rotary supporting device (3)；Sidewall cathode target forms negative and positive counter-electrodes to the arc power by connecting, at sidewall negative electrode Target pair arranges control switch with the junction of arc power, by controlling the sidewall cathode target on/off electricity of on-off control pairing, is formed Assistant depositing and cleaning structure；Make workpiece at cylindrical cathode target (4) and sidewall cathode target to it by rotary supporting device (3) Between revolve round the sun and spinning motion；The increasing material constituting surface of the work fast deposition manufactures system.

The most according to claim 1 by vacuum plasma surface of the work fast deposition increasing material manufacture system, its It is characterised by: the inside of cylindrical cathode target (4) is configured with multiple coil, insulate between each coil and be connected with arc power respectively, Connect tap water in the target bucket of cylindrical cathode target (4), to cool down target body and coil, the power control terminal of each coil and the control of PLC Outfan processed connects, and is controlled the ON/OFF of each coil by PLC, passes through in order and turn on and off coil Arc power, until to after a last coil electricity charged, then carry out positive and negative by the circuit input end of PLC control all coils Pole input switching, makes original positive pole become negative pole input, is simultaneously first starting point with last coil, the most reversely operated, By in turn switching on one and simultaneously closing off the step mode of a coil, make the south poles side in magnetic field produced by hot-wire coil To having done an exchange, change the direction of electromagnetic field.

The most according to claim 1 and 2 by vacuum plasma surface of the work fast deposition increasing material manufacture system, It is characterized in that: on vacuum pipe (2), be provided with choke valve (3-1), the sidewall at vacuum chamber (10) be provided with vacuum gauge (5) and Vent valve (6), cylindrical cathodes target (4) is circumscribed with cylindrical cathodes target chilled water unit (7) and cylindrical cathodes target arc power input dress Put (8)；Rotary supporting device (3) is arranged on the intracavity bottom of vacuum chamber (10), and rotary supporting device (3) has workpiece and puts Put structure and rotation, revolution structure；Vacuum chamber (10) is equilateral octagonal, has eight rectangular surfaces, and one of them rectangular surfaces is led to Crossing vacuum pipe (2) and connect vacuum acquiring system and measurement apparatus (1) thereof, other seven rectangular surfaces have rectangular opening, for even Connect rectangular flange, cathode target (23), described cathode target (23) are respectively installed on the rectangular flange in four faces or six faces wherein It is circumscribed with cathode target arc power input equipment (24), cooling water in-out apparatus (25), is provided around electromagnetism at cathode target (23) (22), formed two to or three pairs of sidewall cathode targets pair；One observation window is installed on the shape flange relative with vacuum pipe (2) (21), it is used for observing the situation in vacuum chamber (10).

The most according to claim 3 by vacuum plasma surface of the work fast deposition increasing material manufacture system, its It is characterised by: on the rectangular flange in wherein four faces of vacuum chamber (10), cathode target (23), described cathode target are respectively installed (23) cathode target arc power input equipment (24), cooling water in-out apparatus (25) it are circumscribed with, being provided around of cathode target (23) Electromagnetic field (22), forms two to sidewall cathode target pair；Respectively it is provided with in the inner side of two rectangular surfaces adjacent with observation window (21) Heat-generating pipe (20), with before workpiece plated film heat；Vacuum acquiring system and measurement apparatus (1), choke valve (3-1), vent valve (6), cylindrical cathodes target (4), cylindrical cathodes target arc power input equipment (8), cylindrical cathodes target chilled water unit (7), rotary Supporting device (3), cathode target (23), cathode target arc power input equipment (24), cooling water in-out apparatus (25) and electromagnetic field (22) control input and respectively connect the control signal outfan of an electrical control cabinet (26), and Computer Integrated System (27) is constituted Automatic control structure.

The most according to claim 1 and 2 by vacuum plasma surface of the work fast deposition increasing material manufacture system, It is characterized in that: be provided with shutter (4) in the junction of vacuum acquirement and measurement apparatus (1) and vacuum chamber (10)；Vacuum chamber (10) it is provided with vacuum chamber fire door (11) in, is provided with oven door sealing bar in the junction of vacuum chamber (10) Yu vacuum chamber fire door (11) (14), observation window (21) is arranged on vacuum chamber fire door (11).

The most according to claim 1 and 2 by vacuum plasma surface of the work fast deposition increasing material manufacture system, It is characterized in that: rotary supporting device include planetary gear guard shield (12), planetary wheeling mechanism (13), transmission input mechanism (15), Transmission input reductor (17) and frequency conversion motor (18), the clutch end of frequency conversion motor (18) inputs reductor by transmission (17) connecting the power intake of transmission input mechanism (15), the clutch end of transmission input mechanism (15) connects planet turbine The power intake of structure (13), star-wheel mechanism (13) is provided with working rotary table, constitutes rotary supporting device, planetary gear guard shield (12) star-wheel mechanism (13) is covered；It is provided with grid bias power supply input equipment (16) at transmission input mechanism (15) place.

The most according to claim 1 and 2 by vacuum plasma surface of the work fast deposition increasing material manufacture system, It is characterized in that: circular generating means (23) is arranged in target bucket (19), i.e. by target bucket (19) by circular generating means (23) sealing cover gets up, forms enclosed construction.

The most according to claim 1 and 2 by vacuum plasma surface of the work fast deposition increasing material manufacture system, It is characterized in that: at transmission input mechanism (15), an encoder is installed, to measure rotating speed and the product orientation of workpiece.

The most according to claim 1 and 2 by vacuum plasma surface of the work fast deposition increasing material manufacture system, It is characterized in that: the input in electrical control cubicles (26) connects computer switch board (27), constitutes LPC control structure.