CN205786446U - A kind of piezoelectric type humidity sensor based on MEMS - Google Patents
A kind of piezoelectric type humidity sensor based on MEMS Download PDFInfo
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- CN205786446U CN205786446U CN201620712415.6U CN201620712415U CN205786446U CN 205786446 U CN205786446 U CN 205786446U CN 201620712415 U CN201620712415 U CN 201620712415U CN 205786446 U CN205786446 U CN 205786446U
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Abstract
This utility model belongs to the technical field of humidity sensor, is specifically related to a kind of piezoelectric type humidity sensor based on MEMS；Solve the technical problem that for: the piezoelectric type humidity sensor based on MEMS that a kind of simple in construction, cost of manufacture be relatively low, circuit is easily achieved is provided；The technical scheme used is: a kind of piezoelectric type humidity sensor based on MEMS, including silicon base, described silicon base is provided with the first cavity, described first cavity is arranged over cantilever beam, the two ends of described cantilever beam are respectively fixing end and free end, described fixing end is fixing with described silicon base to be connected, described free end is suspended in above described first cavity, described free end is provided with mass, described mass is provided with the second cavity, it is provided with hydroscopic substance in described second cavity, described fixing end is provided with pressure drag diaphragm, the two ends of described pressure drag diaphragm are provided with extraction electrode；This utility model is applicable to humidity sensor field.
Description
Technical field
This utility model belongs to the technical field of humidity sensor, is specifically related to a kind of piezoelectric type humidity based on MEMS and passes
Sensor.
Background technology
Humidity is the parameter characterizing steam content in an atmosphere, is typically expressed as relative humidity (%RH), its value
Represent pressure and the ratio of saturation vapor pressure at identical temperature of water vapor in air.Air humidity and the daily work of the common people
Make, live and production has directly contact, so the monitoring for humidity seems more and more important with control.But, humidity
Measurement can be affected by other factors (atmospheric pressure, temperature), its calibration is also a difficult problem simultaneously, accordingly, it can be said that
In conventional ambient parameter, humidity is to be most difficult to one of parameter of accurately measuring.Widely known hair hygrometer, wet and dry bulb are wet
Degree meter waits can not meet being actually needed of present stage.
Along with mankind's stepped into information epoch, humidity sensor is in Aero-Space, weather monitoring, industrial and agricultural production and medical treatment
The national economy fields such as diagnosis are widely used.MEMS humidity sensor uses microelectronics and micromachining technology manufacture, with biography
The humidity sensor (such as wet and dry bulb) of system is compared, and it has, and volume is little, low in energy consumption, concordance is good and is easily integrated and realizes intelligence
The feature of energyization, is therefore one of the main flow direction of humidity sensor development.But, humidity sensor based on MEMS now
Mostly have that structure is complicated, relatively costly, circuit is difficult to the shortcomings such as realization, limit its development and application.
Utility model content
This utility model overcomes the deficiency that prior art exists, technical problem to be solved to be: provide a kind of structure letter
Piezoelectric type humidity sensor based on MEMS single, that cost of manufacture is relatively low, circuit is easily achieved.
In order to solve above-mentioned technical problem, the technical solution adopted in the utility model is: a kind of piezoelectric type based on MEMS
Humidity sensor, including silicon base, described silicon base is provided with the first cavity, and described first cavity is arranged over cantilever beam, institute
The two ends stating cantilever beam are respectively fixing end and free end, and described fixing end is fixing with described silicon base to be connected, described free end
Being suspended in above described first cavity, described free end is provided with mass, and described mass is provided with the second cavity, and described second
Being provided with hydroscopic substance in cavity, described fixing end is provided with pressure drag diaphragm, and the two ends of described pressure drag diaphragm are provided with extraction electrode.
Alternatively, the making material of described hydroscopic substance is sponge, or is moisture absorption variable color silica gel, or is calcium lime powder.
Alternatively, described silicon base is monocrystal silicon substrate.
Alternatively, described first cavity is open cavity.
Alternatively, described second cavity is open cavity, or is semi open model cavity, or is partly open formula cavity.
Alternatively, described cantilever beam and mass are all fabricated from a silicon.
This utility model compared with prior art has the advantages that this utility model passes through MEMS technology silica-based
Forming the first cavity and the cantilever beam of band mass, pressure drag diaphragm is placed on the fixing end of cantilever beam, mass position at the end
On the free end of cantilever beam, in mass, offer the second cavity, in the second cavity, place hydroscopic substance, utilize hydroscopic substance to inhale
Wet or volatilization dampness adjustable weight, thus causes cantilever beam to deform, causes the pressure drag diaphragm being connected to become the most therewith
Shape, its resistance value will change due to piezoresistive effect, causes the monitoring voltage value at pressure drag diaphragm two ends to change,
Such that it is able to derive the change of mass weight and the relation of output voltage values, finally measure the relative humidity variations of environment；This
Piezoelectric type humidity sensor in utility model, has the spies such as simple in construction, cost of manufacture is relatively low, circuit is easily achieved
Point, it is possible to be more widely used, it is also possible to produce in enormous quantities.
Accompanying drawing explanation
The utility model is described in more detail below in conjunction with the accompanying drawings；
The structural representation of a kind of based on MEMS piezoelectric type humidity sensor that Fig. 1 provides for this utility model embodiment
Figure；
In figure: 1 is silicon base, 2 is cantilever beam, and 3 is mass, and 4 is hydroscopic substance, and 5 is pressure drag diaphragm.
Detailed description of the invention
For making the purpose of this utility model embodiment, technical scheme and advantage clearer, new below in conjunction with this practicality
Accompanying drawing in type embodiment, is clearly and completely described the technical scheme in this utility model embodiment, it is clear that retouched
The embodiment stated is a part of embodiment of the present utility model rather than whole embodiments；Based on the reality in this utility model
Execute example, the every other embodiment that those of ordinary skill in the art are obtained under not making creative work premise, all belong to
Scope in this utility model protection.
The structural representation of a kind of based on MEMS piezoelectric type humidity sensor that Fig. 1 provides for this utility model embodiment
Figure, as it is shown in figure 1, a kind of piezoelectric type humidity sensor based on MEMS, it may include silicon base 1, described silicon base 1 can be provided with
First cavity, described first cavity can be provided with cantilever beam 2, and the two ends of described cantilever beam 2 are respectively fixing end and free end,
Described fixing end can fixing with described silicon base 1 be connected, and described free end can be suspended in above described first cavity, described unsettled
End can be provided with mass 3, and described mass 3 can be provided with the second cavity, can be provided with hydroscopic substance 4 in described second cavity, described
Can be provided with pressure drag diaphragm 5 on fixing end, the two ends of described pressure drag diaphragm 5 can be provided with extraction electrode.
In the present embodiment, silicon base 1 provides base substrate structure and supports and graphical knot such as be correlated with MEMS etching, deposition etc.
Structure processing local.
Cantilever beam 2 is that silicon base 1 is formed after MEMS technology is processed, and its one end completes to be connected with silicon base 1, other end band
Mass 3, belongs to MEMS micro-mechanical movable part；When hydroscopic substance 4 moisture absorption or volatilize wet in the mass 3 of cantilever beam 2 free end
During gas adjustable weight, cantilever beam 2 can be caused to deform i.e. mechanical movable.
Mass 3 is the structure that silicon base 1 is formed in cantilever beam 1 one end after MEMS technology is processed, the internal shape of mass 3
Become to place hygroscopic material cavity body structure.
Pressure drag diaphragm 5 is close to the fixing end being placed on cantilever beam 2, primarily serve the purpose of when in mass 3 hydroscopic substance 4 to ring
Border moisture adsorption or volatilization and cause mass 3 weight to change, thus cause cantilever beam 2 to deform, thus cause the pressure drag being connected
Diaphragm 5 also deforms with cantilever beam 2, and its pressure drag diaphragm 5 resistance value will change due to piezoresistive effect, causes
The detection magnitude of voltage at pressure drag two ends changes, such that it is able to derive the relation of the change of mass weight and output voltage values, from
And measure environment relative humidity variations.
Further, the making material of described hydroscopic substance 4 can be sponge, can be maybe moisture absorption variable color silica gel, can be maybe calculogenesis
As long as ashes etc. can moisture absorption or the material of volatilization dampness.
Further, described silicon base 1 can be monocrystal silicon substrate.
Further, described first cavity can be open cavity.
Further, described second cavity can be open cavity, can be maybe semi open model cavity, can be maybe partly open
Formula cavity.
Further, described cantilever beam 2 and mass 3 all can be fabricated from a silicon.
Piezoelectric type humidity sensor in this utility model, has that simple in construction, cost of manufacture be relatively low, circuit is prone to
The features such as realization, it is possible to be more widely used, it is also possible to produce in enormous quantities, have substantive distinguishing features and progress.
Last it is noted that various embodiments above is only in order to illustrate the technical solution of the utility model, rather than it is limited
System；Although being described in detail this utility model with reference to foregoing embodiments, those of ordinary skill in the art should
Understand: the technical scheme described in foregoing embodiments still can be modified by it, or to the most some or all of
Technical characteristic carries out equivalent；And these amendments or replacement, do not make the essence of appropriate technical solution depart from this practicality new
The scope of type each embodiment technical scheme.
Claims (6)
1. a piezoelectric type humidity sensor based on MEMS, it is characterised in that: include silicon base (1), in described silicon base (1)
Being provided with the first cavity, described first cavity is arranged over cantilever beam (2), the two ends of described cantilever beam (2) be respectively fixing end and
Free end, described fixing end is fixing with described silicon base (1) to be connected, and described free end is suspended in above described first cavity, institute
Stating free end and be provided with mass (3), described mass (3) is provided with the second cavity, is provided with hydroscopic substance in described second cavity
(4), described fixing end is provided with pressure drag diaphragm (5), and the two ends of described pressure drag diaphragm (5) are provided with extraction electrode.
A kind of piezoelectric type humidity sensor based on MEMS the most according to claim 1, it is characterised in that: described hydroscopic substance
(4) making material is sponge, or is moisture absorption variable color silica gel, or is calcium lime powder.
A kind of piezoelectric type humidity sensor based on MEMS the most according to claim 1, it is characterised in that: described silicon base
(1) it is monocrystal silicon substrate.
A kind of piezoelectric type humidity sensor based on MEMS the most according to claim 1, it is characterised in that: described first is empty
Chamber is open cavity.
A kind of piezoelectric type humidity sensor based on MEMS the most according to claim 1, it is characterised in that: described second is empty
Chamber is open cavity, or is semi open model cavity, or is partly open formula cavity.
A kind of piezoelectric type humidity sensor based on MEMS the most according to claim 1, it is characterised in that: described cantilever beam
(2) all it is fabricated from a silicon with mass (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620712415.6U CN205786446U (en) | 2016-07-07 | 2016-07-07 | A kind of piezoelectric type humidity sensor based on MEMS |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620712415.6U CN205786446U (en) | 2016-07-07 | 2016-07-07 | A kind of piezoelectric type humidity sensor based on MEMS |
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| Publication Number | Publication Date |
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| CN205786446U true CN205786446U (en) | 2016-12-07 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108680611A (en) * | 2018-07-02 | 2018-10-19 | 京东方科技集团股份有限公司 | Humidity sensor, measuring system, switch controller and humidity measuring method |
| CN109283224A (en) * | 2018-11-16 | 2019-01-29 | 东南大学 | A kind of MEMS humidity sensor and its operating method |
-
2016
- 2016-07-07 CN CN201620712415.6U patent/CN205786446U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108680611A (en) * | 2018-07-02 | 2018-10-19 | 京东方科技集团股份有限公司 | Humidity sensor, measuring system, switch controller and humidity measuring method |
| CN108680611B (en) * | 2018-07-02 | 2021-02-12 | 京东方科技集团股份有限公司 | Humidity sensor, measurement system, switch controller and humidity measurement method |
| CN109283224A (en) * | 2018-11-16 | 2019-01-29 | 东南大学 | A kind of MEMS humidity sensor and its operating method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information |
Inventor after: Bai Zhanliang Inventor before: Bai Zhanliang Inventor before: Zhang Ting |
|
| CB03 | Change of inventor or designer information |