CN2057744U - Interference scanning microbit shift admeasuring apparatus with microcomputer - Google Patents
Interference scanning microbit shift admeasuring apparatus with microcomputer Download PDFInfo
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- CN2057744U CN2057744U CN 89206552 CN89206552U CN2057744U CN 2057744 U CN2057744 U CN 2057744U CN 89206552 CN89206552 CN 89206552 CN 89206552 U CN89206552 U CN 89206552U CN 2057744 U CN2057744 U CN 2057744U
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- microcomputer
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- displacement meter
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Abstract
The utility model relates to a microcomputer interference scanning micro displacement measurer, which belongs to the technical field of length measurement. According to the principle of a scanning interferometer, the utility model a Fabry-white interferometer which adopts three-light beam injection unity to separately judge the displacement direction, integral number and decimal, and the measurement range is raised by one time; simultaneously, the utility model adopts a piezoelectric scanning nonlinear compensation device, an optical alignment system, an optical fiber, an oblique beam interference collecting mirror, a micro expansion alloy structure and a microcomputer to enhance the accuracy and measurement automation. The utility model can make the measuring range reach 100 micrometers and the precision reach 0.005 micrometers, and the utility model can be used for block gauge verification, physical quantity measurement, seismic study and synchrotron radiation experiments.
Description
The utility model relates to measurement technology, belongs to the principle with the light interferential scanning, measures micro-displacement.
Existing " diagonal optical interferometer ductilimeter metering method and device " (CN86104916) adopts common non-frequency stabilized laser and three the white Lip river of Fabry interferometers, pass through interferometer, the placement of beam splitter and catoptron, utilize the relation of the corresponding different telescopic displacement value of different directions interference light maximum value spacing, obtain to be measured.The shortcoming of this device is as follows: contain three Fabry white Lip river interferometers and three piezoelectric ceramics in (1) device, and complex structure not only, and, produce additional measuring error because each interferometer and performance of piezoelectric ceramics differ.(2) do not consider the influence of other factors to measuring accuracy.Non-linear as piezoelectric ceramics, general piezoelectric ceramics has the scan non-linearity of 5-10%, and the interferometer sweep waveform is had nothing in common with each other in the peak separation of diverse location, causes the integer error of interference fringe.For range is the instrument of n (λ)/2, and scan non-linearity should be better than 1/n at least, therefore must compensate the non-linear of piezoelectric ceramics.And for example; Variation of temperature causes the distortion of apparatus structure, directly influences measurement result, and the temperature fluctuation in several years at zero point can cause the measuring error of a nearly striped (～0.3 micron) to general structure.For another example, the out of plumb of light beam and interferometric cavity sheet can be brought cosine error, the quality of interference signal, and the noise of small-signal, the malalignment of interferometric cavity sheet motion and the nonparallelism of interferometer two chamber sheets all have a direct impact accuracy of instrument.(3) can not differentiate the direction of micrometric displacement, range is little.
Task of the present utility model is to make a kind of microcomputer practical instrument wide-measuring range, that guarantee high precision and measurement full-automation that has.
Task of the present utility model is to solve by such approach: this instrument adopts single Fabry white Lip river interferometer and single piezoelectric ceramics, makes the instrument small compact.Three-beam through beam split drift angle system is injected in the white Lip river of the Fabry interferometer of scanning simultaneously with different angles.Wherein, a branch of light (claiming central light beam A) is vertical with interferometer, can measure the decimal of the interference fringe corresponding with displacement; A branch of light (claiming light beam b) is θ with the angle of central light beam A
0, light beam b can measure the interference fringe integer corresponding with displacement, if the instrument range is n (λ)/2, the maximum mobile number of interference fringes that then can survey is n=1/ (1-COS θ
' O), θ
0Diminish, measurement range can enlarge, but for guaranteeing the high precision of instrument, requires each beam shape error at interval less than 1/n; Three-beam (claiming light beam C) is θ with the angle of central light beam A
1, get θ
1When making central light beam move maximum range n striped, the displacement of the relative central light beam A waveform of c beam shape is less than 1/2 peak separation.When measuring, the interval of adjacent two crests of c light beam and folded A light beam crest must have one less than 1/2 peak separation, if should be less than 1/2 at interval c light beam crest on the left side of A light beam crest, direction of motion is " just ", if on the right side, direction of motion is " bearing " so.All can measure because of positive and negative direction, make range enlarge one times.
Vertical for guaranteeing central light beam A with the interferometric cavity sheet, this instrument has adopted the optical alignment system, it is by plane beam splitter, beam split alignment sheets and view window are formed, and laser beam enters the beam split alignment sheets behind plane beam splitter, regulate whole laser instrument and optical alignment system, make respectively two light beams behind beam split alignment sheets and the interferometer reflection,, form two inregister luminous points at view window through plane beam splitter.Guarantee that central light beam is vertical with interferometer, eliminated cosine error.
Adopt the computing machine digital to analog converter to produce compensated scanning waveform R(Fig. 3), through amplifier rear drive piezoelectric ceramics corrugation pitch is all equated in variant position, and record remaining non-linearly from measured value, deduct as systematic error with instrument itself, further improve measuring accuracy, this external sweep waveform recurrence destination county is established garden angle S(and is seen Fig. 3), to reduce the influence of mechanical vibration to waveform.
The thermal source laser instrument is placed the top of instrument, and it and apparatus subject heat insulation placement respectively, measuring staff and all moving components are full microdilatancy alloy structure, have improved the temperature stability of instrument.
Condenser is placed on interferometer back, the white Lip river of Fabry converges at some the diagonal beam that repeatedly reflects in the interferometer, forms good interference waveform.
Light transmitting fiber places the silicon photo diode front end, and the small-signal of silicon photo diode is separated with the scanning high voltage, is right after amplifier thereafter, greatly reduces interference.
Interferometric cavity sheet depth of parallelism micro-adjusting mechanism, parallel moving guide rail are arranged in the instrument and make central light beam A and wide-angle light beam b intersects at the structure at interferometer center, the white Lip river of Fabry, so that the error that nonparallelism is brought reduces to minimum.
Whole instrument and measuring process, data processing are all carried out automatically by IBM PC/XT follow procedure, and at the accurate measurement data and the curve that provide on the screen and on the printer after removing interference and systematic error.
Compact conformation of the present utility model, easy to operate, it is 0.005 micron that measurement range reaches 100 microns precision, can be used for the calibrating of standard metering slip gauge, physical quantity test, seismic study and synchrotron radiation experiment.
Concrete structure of the present utility model is provided by following examples and accompanying drawing thereof.
Fig. 1 is the utility model concrete structure instrument sectional view.
Fig. 2 is the process of measurement synoptic diagram.
Fig. 3 is the sweep signal compensation oscillogram of piezoelectric ceramics.
Fig. 4 is the detail drawing of (23) among Fig. 1, (24)
Fig. 5 is the detail drawing of (21) among Fig. 1, (23)
Power-on (25), light beam process plane beam splitter (2) from common not stabilizing He Ne laser (1), beam split alignment sheets (4), behind the aperture (5), enter prism spectroscope (6 I or 6 II), obtain the three beams spacing and be 5 millimeters directional light A, B, C, wherein A is a central light beam, and it is directly vertically got on the epicoele sheet (10) and cavity of resorption sheet (11) of interferometer.In addition two light beam B, C be by wedge shape mirror (8), and (7) become with central light beam A and become θ
0And θ
1The light beam b at angle, c, wherein θ
0＞θ
1Beam split alignment sheets (4) is vertical with laser beam, after plane beam splitter (2) forms two luminous points at view window, central light beam A is vertical with interferometric cavity sheet (10) from alignment sheets (4) and interferometer reflection for light beam.Chamber sheet (10) by piezoelectric ceramics (9) with the 10-100HZ frequency sweeping, it be by microcomputer (28) major clock φ by frequency division after (Fig. 4) address signal of forming, after being added on the ROM, the compensated scanning Wave data that is solidificated among the ROM is taken out automatically, give D/A AD7541 and convert sweep waveform to, after waveform amplifier (24) amplifies, be added on the piezoelectric ceramics (9) again.The depth of parallelism of epicoele sheet (10) and cavity of resorption sheet (11) is cooperated by machine screws coarse adjustment and piezoelectric micromotor regulating mechanism (12) to be finished, and depth of parallelism difference is not more than 1 second, upper and lower chamber sheet be spaced apart the 0.05-0.15 millimeter.By condenser (13), reflective mirror (14) forms three little interference luminous points respectively to three light beams on the entrance face of three light transmitting fibers (20) after repeatedly reflecting.Light signal converts electric signal to through silicon light diode (26), and after amplifier (21) amplifies, be added to A/D converter (22) and convert digital quantity (Fig. 5) to, after machine is handled as calculated, provide measurement result and curve by display (29) and printer (27) again.Cavity of resorption sheet (11) becomes rigidity to link with condenser (13) with measuring staff (16).It goes up parallel moving with the variation of test specimen (17) at closed slide (15).Whole instrument is connected by adjustable pedestal (19).Test specimen (17) is placed on the fine setting platform (18).
When test specimen with after measuring staff contacts, just start the microcomputer testing program, measure real-time remaining non-linearly and calculate and deposit internal memory at first automatically, determine number of sampling and sample interval as requested, and with they input computing machines.Microcomputer carries out 16 sub-samplings to each measuring point successively and on average deposits internal memory in, after calculating integer, the decimal of each measuring point and remove systematic error after judging direction of measurement, shows displacement and displacement curve, realizes measuring full-automatic.
Claims (6)
1, a kind of microcomputer interferential scanning micro displacement meter, it is made up of mechanical system, electro-optical system, measurement display system, wherein:
(1) mechanical system has parallel spring guide rail (15), center measuring staff (16).
(2) electro-optical system has laser instrument (1), piezoelectric ceramics (9), the white Lip river of Fabry interferometer (10,11).
(3) measure display system and amplifier (21) is arranged, interface (22).
It is characterized in that: enter the white Lip river of Fabry interferometer (10,11) from the light beam of laser instrument (1) after through optical alignment system, beam split drift angle system, this light beam passes condenser (13) then, is mapped on the catoptron (14); Piezoelectric ceramics (9) links to each other with the epicoele sheet (10) of interferometer, is driven by the piezoelectric scanning nonlinear compensating device; The cavity of resorption sheet (11) of condenser (13), the white Lip river of Fabry interferometer and measuring staff (16) are rigidly connected into the movable part in the instrument, light transmitting fiber (20) places the front portion of photoelectric commutator (26), microcomputer (28) is through analog to digital converter (22), and amplifier (21) is connected with photoelectric commutator (26).
2, according to the micro displacement meter of claim 1 regulation, it is characterized in that described light beam after the system of beam split drift angle, be divided into (A, b, c) three-beam and enter the white Lip river of a Fabry interferometer (10,11) simultaneously.
3, the micro displacement meter of stipulating according to claim 1, it is characterized in that said beam split drift angle system has spectroscope (6 I or 6 II) and left and right wedge shape mirror (7,8) to form, spectroscope (6 I or 6 II) has two light splitting surfaces, wedge shape mirror (7,8) has the different angles of wedge.
4,, it is characterized in that said piezoelectric scanning nonlinear compensating device has the sweep waveform digital to analog converter (23) of microcomputer (28) control and waveform amplifier (24) to form according to the micro displacement meter of claim 1 regulation.
5, the micro displacement meter of stipulating according to claim 1, it is characterized in that there is plane beam splitter (2) in said optical alignment system, beam split alignment sheets (4) and view window (3) are formed, the wherein plane of plane beam splitter (2) and laser beam angle at 45, beam split alignment sheets (4) is accurately vertical with laser beam.
6, according to the micro displacement meter of claim 1 regulation, it is characterized in that movable part is full microdilatancy alloy structure in the said instrument.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 89206552 CN2057744U (en) | 1989-04-29 | 1989-04-29 | Interference scanning microbit shift admeasuring apparatus with microcomputer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 89206552 CN2057744U (en) | 1989-04-29 | 1989-04-29 | Interference scanning microbit shift admeasuring apparatus with microcomputer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2057744U true CN2057744U (en) | 1990-05-30 |
Family
ID=4863579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 89206552 Withdrawn CN2057744U (en) | 1989-04-29 | 1989-04-29 | Interference scanning microbit shift admeasuring apparatus with microcomputer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2057744U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110375642A (en) * | 2019-07-31 | 2019-10-25 | 北京航空航天大学 | A kind of interferometer piezoelectric ceramic control device and its control method |
-
1989
- 1989-04-29 CN CN 89206552 patent/CN2057744U/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110375642A (en) * | 2019-07-31 | 2019-10-25 | 北京航空航天大学 | A kind of interferometer piezoelectric ceramic control device and its control method |
| CN110375642B (en) * | 2019-07-31 | 2020-12-08 | 北京航空航天大学 | Piezoelectric ceramic control device for interferometer and control method thereof |
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| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |