CN205765648U - Sandblasting machine and sandblasting production line - Google Patents
Sandblasting machine and sandblasting production line Download PDFInfo
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- CN205765648U CN205765648U CN201620459824.XU CN201620459824U CN205765648U CN 205765648 U CN205765648 U CN 205765648U CN 201620459824 U CN201620459824 U CN 201620459824U CN 205765648 U CN205765648 U CN 205765648U
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Abstract
The utility model discloses a kind of sandblasting machine, including frame and the blast room being arranged in described frame, the actuating device for driving workpiece to rotate it is provided with in described blast room, it is provided with nozzle in described frame, the number at least two of described nozzle, the injection direction of nozzle described at least two is different.Disclosed in application this utility model during sandblasting machine, workpiece is placed on die holder, actuating device drives workpiece to rotate, the number at least two of the nozzle in frame, when operation, can be according to the grinding angle of the good nozzle of the position adjustment of workpiece, one nozzle grinding silicon chip edge, another nozzle grinding silicon chip root, makes every batch silicon chip abrasive blasting angle consistent, is effectively guaranteed product quality, the abrasive blasting simultaneously of at least two nozzle, shorten the abrasive blasting time of monolithic, improve production efficiency, improve product quality.The invention also discloses a kind of sandblasting production line including above-mentioned sandblasting machine.
Description
Technical field
This utility model relates to semiconductor processing equipment field, more particularly, it relates to a kind of sandblasting machine,
Further relate to a kind of sandblasting production line.
Background technology
Sandblasting machine is mainly used in a kind of special of electronics manufacturing high-power semiconductor controlled silicon chip processing
Use equipment.Sandblasting machine be use compressed air be power, to form high velocity spray beam by material spray high velocity jet
To silicon chip surface need to be processed, make a kind of machine that the mechanical performance of the outer surface of silicon chip surface changes.
Its operation principle is with compressed air as power, the negative pressure formed in spray gun by the high-speed motion of air-flow,
Abrasive material sucked spray gun by sediment transport pipe and sprays through nozzle, being ejected into surface to be machined, reach intended
Processing purpose.
The nozzle only one of current existing sandblasting machine is few, the most only through the abrasive material flow of nozzle ejection
Can be processed a silicon chip, its production efficiency is relatively low, and product quality is difficult to ensure that.
In sum, how to efficiently solve that sandblasting machine production efficiency is low, product quality is difficult to ensure that asks
Topic, is current those skilled in the art's urgent problem.
Utility model content
In view of this, first purpose of the present utility model is to provide a kind of sandblasting machine, to solve sandblasting
The problem that machine production efficiency is low, product quality is difficult to ensure that.Second purpose of the present utility model is to provide
A kind of production line including sandblasting machine.
In order to reach above-mentioned first purpose, this utility model following technical scheme of offer:
A kind of sandblasting machine, including frame and the blast room being arranged in described frame, sets in described blast room
Be equipped with the actuating device for driving workpiece to rotate, described frame be provided with nozzle, described nozzle
Counting at least two, described at least two, the injection direction of nozzle is different.
Preferably, in above-mentioned sandblasting machine, the number of described actuating device is multiple.
Preferably, in above-mentioned sandblasting machine, described actuating device is specially shaft coupling.
Preferably, in above-mentioned sandblasting machine, the injection direction of each described nozzle is adjustable.
Preferably, in above-mentioned sandblasting machine, also include the sandbox vibrating device being connected with described blast room,
Described sandbox vibrating device includes pressure regulation filter.
The sandblasting machine that this utility model provides includes frame and blast room, and blast room is arranged in frame.Its
In, it is provided with the actuating device for driving workpiece to rotate in blast room, frame is provided with nozzle, spray
The number at least two of mouth, the injection direction of nozzle described at least two is different.
During the sandblasting machine that application this utility model provides, being placed on die holder by workpiece, actuating device drives
Workpiece rotates, the number at least two of the nozzle in frame, the injection direction of at least two nozzle
Different.When operation, can be according to the grinding angle of the good nozzle of the position adjustment of workpiece, a nozzle grinding
Silicon chip edge, another nozzle grinding silicon chip root, make every batch silicon chip abrasive blasting angle consistent, effectively
Ensure that product quality, the abrasive blasting simultaneously of at least two nozzle, shorten the abrasive blasting time of monolithic, improve and produce
Efficiency, improves product quality.
In order to reach above-mentioned second purpose, this utility model additionally provides the production line of a kind of sandblasting machine,
This production line includes any of the above-described kind of sandblasting machine, owing to above-mentioned sandblasting machine has above-mentioned technique effect, and tool
The sandblasting production line having this sandblasting machine also should have corresponding technique effect.
Accompanying drawing explanation
In order to be illustrated more clearly that this utility model embodiment or technical scheme of the prior art, below will
The accompanying drawing used required in embodiment or description of the prior art is briefly described, it should be apparent that,
Accompanying drawing in describing below is only embodiments more of the present utility model, for ordinary skill people
From the point of view of Yuan, on the premise of not paying creative work, it is also possible to obtain the attached of other according to these accompanying drawings
Figure.
The main TV structure schematic diagram of the sandblasting machine that Fig. 1 provides for this utility model embodiment;
The side-looking structural representation of the sandblasting machine that Fig. 2 provides for this utility model embodiment;
The plan structure schematic diagram of the sandblasting machine that Fig. 3 provides for this utility model embodiment;
The structural representation of the sandblasting vibrating device of the sandblasting machine that Fig. 4 provides for this utility model embodiment.
In accompanying drawing, labelling is as follows:
Adjusting means 1, frame 2, blast room 3, actuating device 4, sandbox vibrating device 5.
Detailed description of the invention
This utility model embodiment discloses a kind of sandblasting machine, and to solve, sandblasting machine production efficiency is low, product
The problem of difficult quality guarantee.
Below in conjunction with the accompanying drawing in this utility model embodiment, to the technology in this utility model embodiment
Scheme is clearly and completely described, it is clear that described embodiment is only this utility model one
Divide embodiment rather than whole embodiments.Based on the embodiment in this utility model, this area is common
The every other embodiment that technical staff is obtained under not making creative work premise, broadly falls into this
The scope of utility model protection.
Refer to the main TV structure signal of the sandblasting machine that Fig. 1-Fig. 4, Fig. 1 provide for this utility model embodiment
Figure;The side-looking structural representation of the sandblasting machine that Fig. 2 provides for this utility model embodiment;Fig. 3 is this practicality
The plan structure schematic diagram of the sandblasting machine that new embodiment provides;Fig. 4 provides for this utility model embodiment
The structural representation of the sandblasting vibrating device of sandblasting machine.
In a kind of specific embodiment, sandblasting machine includes frame 2 and blast room 3.Wherein, blast room 3
It is arranged in frame 2, is provided with the actuating device 4 for driving silicon slice rotating in blast room 3, in frame 2
Adjusting means 1 can be provided with, adjusting means 1 is provided with nozzle, be used for spraying abrasive material, the number of nozzle
At least two, the injection direction of nozzle described at least two is different.The spray that application this utility model provides
During sand machine, being placed on by workpiece in the die holder of actuating device 4 and fix, starting power supply, actuating device 4 carries
Part of starting building rotates, and is moved to the position adapted with workpiece by electric rod control and regulation device 1, adjusts
Nozzle on regulating device 1 carries out abrasive blasting to workpiece, the number at least two of nozzle, as can be excellent when arranging
Elect two as, adjust the grinding angle of two nozzles respectively, a nozzle grinding work piece edge, another
Individual nozzle grinding work piece root, it is consistent for making every batch products abrasive blasting angle, is effectively guaranteed product
Quality, in other embodiments, it is also possible to three nozzles, the injection side of at least two of which nozzle are set
To difference, as can the edge of two nozzle injection workpiece, the root of a nozzle injection workpiece, to protect
Card carries out the grinding of Multi-angle omnibearing, at least two nozzle simultaneous grinding to silicon chip, shortens the spray of monolithic
Time consuming, improves work efficiency and the quality of production.
Concrete, the number of actuating device 4 is multiple.In order to preferably improve work efficiency, actuating device
The number of 4 can be multiple, in one embodiment, can be specially four.Four silicon chips of grinding,
Corresponding adjusting means 1 is also four, and actuating device 4 and adjusting means 1 are with the use of a so that grinding
Workpiece increase, improve work efficiency, in other embodiments, it is also possible to more sandblasting machine size,
The power of power set is configured the number of actuating device 4 voluntarily.
Further, actuating device 4 is specially shaft coupling.Shaft coupling is used for connecting two in different institutions
Root axle is allowed to the common choice machine components with transmission moment of torsion, is connected with driving shaft and driven shaft respectively.Adopt
By motor, the integral drive mode of shaft coupling, reduce and run noise.In other embodiments, it is also possible to
Select other kinds of actuating device 4, such as Chain conveyer or gear drive etc., all in protection of the present utility model
In the range of.
On the basis of the various embodiments described above, the injection direction of each nozzle is adjustable.General, can basis
The injection direction of nozzle is pre-set by the angle to be processed of actual workpiece, the most again with frame the most even
Connect, by workpiece being completed after arranging abrasive blasting technique.In other embodiments, it is also possible to control dress is set
Put the injection direction to each nozzle remotely to control, change according to the abrasive blasting situation of workpiece in the course of processing
Become the injection direction of nozzle and then complete the abrasive blasting to workpiece, concrete, can be according to actual generation needs
Select voluntarily.
Concrete, also including the sandbox vibrating device 5 being connected with blast room 3, sandbox vibrating device 5 includes adjusting
Press through filter.By increasing mixing sandbox, after gas enters sandbox cylinder, make the grinding powder in sandbox cylinder
Entering mixing sandbox, powder is organic mixes with grinding to make high pressure draught, and pressure regulation filter is carried out by electromagnetic valve
Control.Sandbox is implemented dither by vibrator, controls the flow of grounds travel simultaneously, makes mixing sandbox produce
What raw high pressure abrasive jet flow was uniform, strong implements effective grinding to workpiece.
General, dry clean gas is after gas source triplet, and the sandbox controlled through electromagnetic valve sprays through nozzle
Go out, complete the grinding to workpiece.
Concrete work process is: accessing 220V alternating current power supply, power supply indicator is bright;Set blast time,
Pressing lamp switch, operating room's lamp is bright;Select switch to put manual mode, workpiece to be processed loaded in die holder,
Pressing " forward " button, electric rod moves forward and puts in place, regulation cutting distance and cutting angle;By " opening
Dynamic " button, driven by motor silicon slice rotating, adjust motor speed to specifying rotating speed according to silicon chip size;Will
The time relay is set as the time of the required processing of workpiece;Debugging completes, and selection switch is put automatic mode,
Press " startup " button, be automatically performed sandblasting, open 3, blast room, change four workpiece, close sandblasting
3, room, is automatically performed 4 workpiece sandblastings.This device reduce workman labor intensity, during work noise little,
Without flying dust, meet industrial environment health requirement, owing to have employed electrical equipment regulation abrasive blasting distance and angle and determining
Position abrasive disc, workpiece abrasive blasting is uniform, and concordance is good, and a collection of workpiece abrasive blasting angle is consistent, effectively protects
Demonstrate,prove product quality, improve work efficiency.
Based on the sandblasting machine provided in above-described embodiment, this utility model additionally provides a kind of sandblasting production line,
This sandblasting production line includes any one sandblasting machine in above-described embodiment.Owing to this sandblasting production line have employed
Sandblasting machine in above-described embodiment, so the beneficial effect of this sandblasting production line refer to above-described embodiment.
In this specification, each embodiment uses the mode gone forward one by one to describe, and each embodiment stresses
Being the difference with other embodiments, between each embodiment, identical similar portion sees mutually.
Described above to the disclosed embodiments, makes professional and technical personnel in the field be capable of or uses
This utility model.Multiple amendment to these embodiments will be aobvious for those skilled in the art
And be clear to, generic principles defined herein can be without departing from spirit or scope of the present utility model
In the case of, realize in other embodiments.Therefore, this utility model is not intended to be limited to institute herein
These embodiments shown, and it is to fit to consistent with principles disclosed herein and features of novelty the widest
Scope.
Claims (6)
1. a sandblasting machine, including frame (2) and the blast room (3) that is arranged in described frame (2),
It is characterized in that, in described blast room (3), be provided with the actuating device (4) for driving workpiece to rotate,
Nozzle it is provided with in described frame (2), the number at least two of described nozzle, spray described at least two
The injection direction of mouth is different.
Sandblasting machine the most according to claim 1, it is characterised in that described actuating device (4)
Number is multiple.
Sandblasting machine the most according to claim 2, it is characterised in that described actuating device (4) has
Body is shaft coupling.
4. according to the sandblasting machine described in any one of claim 1-3, it is characterised in that each described nozzle
Injection direction adjustable.
Sandblasting machine the most according to claim 4, it is characterised in that also include and described blast room (3)
The sandbox vibrating device (5) connected, described sandbox vibrating device (5) includes pressure regulation filter.
6. a sandblasting production line, it is characterised in that include the spray as described in any one of claim 1-5
Sand machine.
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CN201620459824.XU CN205765648U (en) | 2016-05-19 | 2016-05-19 | Sandblasting machine and sandblasting production line |
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CN201620459824.XU CN205765648U (en) | 2016-05-19 | 2016-05-19 | Sandblasting machine and sandblasting production line |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106584285A (en) * | 2016-12-29 | 2017-04-26 | 苏州阿特斯阳光电力科技有限公司 | Method for repairing edge breakage of silicon wafers |
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2016
- 2016-05-19 CN CN201620459824.XU patent/CN205765648U/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106584285A (en) * | 2016-12-29 | 2017-04-26 | 苏州阿特斯阳光电力科技有限公司 | Method for repairing edge breakage of silicon wafers |
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