CN205741278U - A kind of polycrystalline silicon ingot or purifying furnace - Google Patents

A kind of polycrystalline silicon ingot or purifying furnace Download PDF

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Publication number
CN205741278U
CN205741278U CN201620500492.5U CN201620500492U CN205741278U CN 205741278 U CN205741278 U CN 205741278U CN 201620500492 U CN201620500492 U CN 201620500492U CN 205741278 U CN205741278 U CN 205741278U
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CN
China
Prior art keywords
heater
crucible
argon
silicon ingot
polycrystalline silicon
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Expired - Fee Related
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CN201620500492.5U
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Chinese (zh)
Inventor
陈五奎
刘强
冯加保
徐文州
樊茂德
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Leshan Topraycell Co Ltd
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Leshan Topraycell Co Ltd
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Priority to CN201620500492.5U priority Critical patent/CN205741278U/en
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Abstract

The utility model discloses a kind of polycrystalline silicon ingot or purifying furnace being capable of energy-saving and emission-reduction.This polycrystalline silicon ingot or purifying furnace is by arranging gas preheating unit in air inlet pipe, the argon entered in body of heater can be heated by gas preheating unit, temperature in body of heater is caused large effect in entering body of heater by the argon avoiding temperature relatively low, during polycrystalline silicon ingot or purifying furnace works, can ensure that the temperature in body of heater is maintained in a stable scope, avoid the growth of polycrystal silicon ingot is caused large effect, additionally, air pump is utilized the high temperature that aspirating hole is discharged to give up argon by air entraining pipe importing cavity, utilize the high temperature argon that gives up that new argon is preheated, not only can make full use of high temperature to give up the heat contained in argon, realize energy-saving and emission-reduction, simultaneously, the argon being preheated is passed through in body of heater, the heat that argon is taken away in body of heater can be reduced, realize energy-saving and emission-reduction further.It is suitable in production of polysilicon apparatus field popularization and application.

Description

A kind of polycrystalline silicon ingot or purifying furnace
Technical field
This utility model relates to production of polysilicon apparatus field, especially a kind of polycrystalline silicon ingot or purifying furnace.
Background technology
Solaode can convert light energy into electric energy, is an emphasis of modern Energy-saving Society development.According to matrix The difference of material, existing solaode is divided into polysilicon solar cell, monocrystaline silicon solar cell and class monocrystal silicon too Sun can battery.Wherein, the transformation efficiency of monocrystaline silicon solar cell is high, but production cost is the highest, polysilicon solar cell Transformation efficiency 1%-2% lower than monocrystaline silicon solar cell, but its production cost is the lowest, and class monocrystaline silicon solar cell is to be situated between Battery between monocrystalline silicon battery and polysilicon solar cell.Consider, solaode in the market still with Polysilicon solar cell is main.
The polycrystal silicon ingot being currently used for producing polysilicon solar cell generally uses casting ingot process, casting ingot process one As realized by polycrystalline silicon ingot or purifying furnace, existing polycrystalline silicon ingot or purifying furnace includes body of heater, and body of heater is provided with aspirating hole, described Being provided with subiculum warming plate and thermal insulation cover in body of heater, thermal insulation cover is placed on subiculum warming plate, and thermal insulation cover is with subiculum warming plate altogether With constituting insulation cage, described thermal insulation cover connects and has the elevating lever that thermal insulation cover can be made to move up and down, described insulation Crucible, crucible guard boards, graphite base plate, graphite cover plate, side heater, top heater, heat exchange platform, institute it is provided with in cage Stating graphite base plate to be placed on heat exchange platform, crucible is placed on graphite base plate, and crucible guard boards is arranged on outside crucible, sidepiece Heater is arranged on the outside of crucible guard boards, and graphite cover plate is arranged on above crucible, and top heater is arranged on graphite cover plate Side, described heat exchange platform is fixed on bottom of furnace body by graphite column, and the upper end of crucible guard boards is provided with exhaust emissions hole, also Including air inlet pipe, described air inlet pipe stretches in crucible after sequentially passing through body of heater, thermal insulation cover, top heater, graphite cover plate.
Current casting ingot process, is first after spraying-stocking process, enters back into ingot casting operation.
Spraying: can react with crucible after silicon material high temperature melting, introduces impurity, and causes viscous pot, affect silicon ingot Quality, so needing to spray one layer of Silicon nitride solution between crucible and silicon material, utilizes silicon nitride can effectively isolate silicon material With crucible, after Silicon nitride solution has sprayed, then carry out high temperature drying, the moisture in Silicon nitride solution evaporated, it is possible to Crucible internal walls is made to adhere to one layer of silicon nitride coating.
Charging: after crucible is dried, by fragmentary silicon material, in order, requires and silicon material is loaded in crucible by weight.
The crucible of charged can be carried out next step casting ingot process, first charged crucible is loaded ingot furnace In body of heater, after installing on request, by ingot furnace closing lid, the ingot furnace that closing lid is later, it is formed for a chamber sealed, will install The sealed crucible of silicon material is inside ingot furnace, and bring into operation casting ingot process, and whole casting ingot process divides 6 processes, evacuation-add Heat-fusing-long brilliant-annealing-cooling.
S11, evacuation: the air in body of heater is taken away from aspirating hole, during preventing from heating up the oxygen in air with Silicon material generation oxidation reaction, affects Ingot quality.Evacuation is to utilize vacuum pump to be extracted out by the air in body of heater, until reaching to set Standby unlatching requirement.
S12, heating: after evacuation completes, enter the heating period, and heating is to make silicon material be rapidly heated close to molten Changing temperature, now the environment in furnace chamber is vacuum environment, can be conducive to will be attached to the steam on silicon material surface, true by taking out Empty method is extracted out, and is rapidly heated.
S13, fusing: in fusion process, need to fill argon in the chamber sealed, it is to avoid be attached to the nitrogen of crucible internal walls SiClx coating is decomposed reaction, and argon is to be filled with in body of heater by air inlet pipe.After fusing starts, start inflation in body of heater, press After process is inflated to authorized pressure, start dynamically to keep.
S14, long crystalline substance: silicon material melt, proceed by long crystalline substance, the process of long crystalline substance be by the thermal insulation cover of furnace interior to Rising, liquid-state silicon starts heat radiation from bottom, and the liquid-state silicon of bottom becomes solid-state silicon, and along with the rising of thermal insulation cover and heat Scatter and disappear, the most upwards solidify, until whole silicon ingot has solidified.
S15, annealing: owing to long brilliant process starts in bottom, and rise with thermal insulation cover, until top, so push up the end it Between because the reason of heat radiation, will there is certain temperature difference, produce internal stress.The effect of annealing is exactly to ensure isoperibol Under, eliminate temperature difference, thus eliminate internal stress.
S16, cooling: in furnace chamber, silicon ingot is cooled fast to tapping temperature.
Described polycrystalline silicon ingot or purifying furnace includes the body of heater with mezzanine space, and body of heater is provided with aspirating hole, described body of heater Inside being provided with subiculum warming plate and thermal insulation cover, thermal insulation cover is placed on subiculum warming plate, thermal insulation cover and the common structure of subiculum warming plate Becoming insulation cage, described thermal insulation cover connects has the elevating lever that thermal insulation cover can be made to move up and down, in described insulation cage It is provided with crucible, crucible guard boards, graphite base plate, graphite cover plate, side heater, top heater, heat exchange platform, described stone Ink base plate is placed on heat exchange platform, and crucible is placed on graphite base plate, and crucible guard boards is arranged on outside crucible, and sidepiece heats Device is arranged on the outside of crucible guard boards, and graphite cover plate is arranged on above crucible, and top heater is arranged on above graphite cover plate, institute Stating heat exchange platform and be fixed on bottom of furnace body by graphite column, the upper end of crucible guard boards is provided with exhaust emissions hole, also includes Air inlet pipe, one end of described air inlet pipe is connected with argon gas source, and the other end sequentially passes through body of heater, thermal insulation cover, top heater, graphite Stretching into after cover plate in crucible, first this polycrystalline silicon ingot or purifying furnace there is problems in that in actual use, casts at polysilicon During ingot furnaceman makees, the temperature in body of heater need to be maintained in a stable scope, due to existing polycrystalline silicon ingot or purifying furnace It is all directly the argon of room temperature to be passed through in body of heater, owing to the temperature in body of heater is higher, the height of usual Dou Shiji Baidu, room temperature Argon enter in body of heater and the temperature in body of heater will certainly be caused large effect, if temperature fluctuation changes greatly in body of heater The growth of silicon ingot can be caused large effect, the Ingot quality finally grown up to also can level uneven.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of polycrystalline silicon ingot or purifying furnace being capable of energy-saving and emission-reduction.
This utility model solves its technical problem and be the technical scheme is that this polycrystalline silicon ingot or purifying furnace, including having folder The body of heater of sheaf space, body of heater is provided with aspirating hole, is provided with subiculum warming plate and thermal insulation cover in described body of heater, and thermal insulation cover is placed On subiculum warming plate, thermal insulation cover and subiculum warming plate collectively form insulation cage, and described thermal insulation cover connects to be had and can make The elevating lever that thermal insulation cover moves up and down, be provided with in described insulation cage crucible, crucible guard boards, graphite base plate, graphite cover plate, Side heater, top heater, heat exchange platform, described graphite base plate is placed on heat exchange platform, and crucible is placed on stone On ink base plate, crucible guard boards is arranged on outside crucible, and side heater is arranged on the outside of crucible guard boards, and graphite cover plate is arranged on Above crucible, top heater is arranged on above graphite cover plate, and described heat exchange platform is fixed at the bottom of body of heater by graphite column Portion, the upper end of crucible guard boards is provided with exhaust emissions hole, also includes that air inlet pipe, one end of described air inlet pipe are connected with argon gas source, The other end stretches in crucible after sequentially passing through body of heater, thermal insulation cover, top heater, graphite cover plate, and described air inlet pipe is provided with Gas preheating unit, described gas preheating unit includes airtight cavity, is provided with heat exchanger tube, described heat exchanger tube in described cavity To extend respectively to cavity outer and connect with air inlet pipe at two ends, the argon in described argon gas source successively along air inlet pipe, heat exchanger tube, enter Trachea flows in crucible, and described heat exchanger tube seals with the junction of cavity, and described cavity connects air entraining pipe and exhaustor, institute The one end stating air entraining pipe connects with the aspirating hole arranged on body of heater, and the other end of air entraining pipe connects with cavity inside, described bleed Being provided with air pump on pipe, described exhaustor connects with cavity inside.
Further, described heat exchanger tube is metal coil pipe.
Further, described heat exchanger tube uses copper pipe to be made.
Further, described graphite cover plate is provided with multiple through hole.
Further, the uniform setting of the plurality of through hole.
Further, described bottom of furnace body is provided with overflow blanket, and described overflow blanket is four-layer structure, the most successively For knitting ceramic fibre blanket layer, knitting ceramic fibre blanket layer, ceramic fibre blanket layer, carbon felt layer, described knitting ceramic fibre blanket layer Thickness be 10mm, the thickness of knitting ceramic fibre blanket layer be 10mm, the thickness of ceramic fibre blanket layer be 25mm, the thickness of carbon felt layer Degree is 10mm.
Further, the upper surface of described overflow blanket is provided with overflow silk.
Further, described subiculum warming plate is provided with multiple spout hole.
Further, it is provided with carbon felt between described crucible and crucible guard boards.
The beneficial effects of the utility model are: this polycrystalline silicon ingot or purifying furnace passes through to arrange gas preheating unit in air inlet pipe, The argon entered in body of heater can be heated by gas preheating unit, it is to avoid to body of heater in the argon entrance body of heater that temperature is relatively low Interior temperature causes large effect, during polycrystalline silicon ingot or purifying furnace works, it is ensured that the temperature in body of heater is maintained at In one stable scope, it is to avoid the growth to polycrystal silicon ingot causes large effect, it is ensured that the Ingot quality finally grown up to reaches To higher quality level, it addition, utilize the air pump high temperature that aspirating hole is discharged is given up argon by air entraining pipe importing cavity, Utilize the high temperature argon that gives up that new argon is preheated, not only can make full use of high temperature and give up the heat contained in argon, it is achieved Energy-saving and emission-reduction, meanwhile, the argon being preheated is passed through in body of heater, it is possible to reduce argon takes away the heat in body of heater, realizes further Energy-saving and emission-reduction, reduce the production cost of silicon ingot.
Accompanying drawing explanation
Fig. 1 is the structural representation of this utility model polycrystalline silicon ingot or purifying furnace;
Figure is labeled as: body of heater 1, aspirating hole 2, subiculum warming plate 3, thermal insulation cover 4, elevating lever 5, crucible 6, crucible guard boards 7, Graphite base plate 8, graphite cover plate 9, side heater 10, top heater 11, heat exchange platform 12, exhaust emissions hole 13, air inlet Pipe 14, argon gas source 15, gas preheating unit 16, cavity 161, heat exchanger tube 162, air entraining pipe 163, exhaustor 164, air pump 165, Through hole 17, overflow blanket 18, spout hole 20, carbon felt 21, graphite column 22.
Detailed description of the invention
Below in conjunction with the accompanying drawings this utility model is further illustrated.
As it is shown in figure 1, this polycrystalline silicon ingot or purifying furnace, including having the body of heater 1 of mezzanine space, body of heater 1 is provided with aspirating hole 2, be provided with subiculum warming plate 3 and thermal insulation cover 4 in described body of heater 1, thermal insulation cover 4 is placed on subiculum warming plate 3, thermal insulation cover 4 with Subiculum warming plate 3 collectively forms insulation cage, and described thermal insulation cover 4 connects the lifting that thermal insulation cover 4 can be made to move up and down Bar 5, is provided with crucible 6, crucible guard boards 7, graphite base plate 8, graphite cover plate 9, side heater 10, top in described insulation cage Portion's heater 11, heat exchange platform 12, described graphite base plate 8 is placed on heat exchange platform 12, and crucible 6 is placed on graphite base plate On 8, crucible guard boards 7 is arranged on outside crucible 6, and side heater 10 is arranged on the outside of crucible guard boards 7, and graphite cover plate 9 is arranged Above crucible 6, top heater 11 is arranged on above graphite cover plate 9, and described heat exchange platform 12 is solid by graphite column 22 Being scheduled on bottom body of heater 1, the upper end of crucible guard boards 7 is provided with exhaust emissions hole 13, also includes air inlet pipe 14, described air inlet pipe 14 One end is connected with argon gas source 15, and the other end stretches into earthenware after sequentially passing through body of heater 1, thermal insulation cover 4, top heater 11, graphite cover plate 9 In crucible 6, described air inlet pipe 14 being provided with gas preheating unit 16, described gas preheating unit 16 includes airtight cavity 161, Being provided with heat exchanger tube 162 in described cavity 161, the two ends of described heat exchanger tube 162 extend respectively to outside cavity 161 and and air inlet pipe 14 connections, the argon in described argon gas source 15 flows in crucible 6 along air inlet pipe 14, heat exchanger tube 162, air inlet pipe 14 successively, described Heat exchanger tube 162 seals with the junction of cavity 161, and described cavity 161 connects air entraining pipe 163 and exhaustor 164, described in draw One end of trachea 163 connects with the aspirating hole 2 arranged on body of heater 1, and the other end of air entraining pipe 163 is internal with cavity 161 to be connected, institute Stating and be provided with air pump 165 on air entraining pipe 163, described exhaustor 164 is internal with cavity 161 to be connected.By in air inlet pipe 14 Arranging gas preheating unit 16, the argon entered in body of heater 1 can be heated by gas preheating unit 16, it is to avoid temperature is relatively low Argon enter body of heater 1 in the temperature in body of heater 1 is caused large effect, during polycrystalline silicon ingot or purifying furnace works, can To ensure that the temperature in body of heater 1 is maintained in a stable scope, it is to avoid the growth to polycrystal silicon ingot causes large effect, Ensure that the Ingot quality finally grown up to reaches higher quality level, it addition, utilize the height that aspirating hole 2 is discharged by air pump 165 The useless argon of temperature is imported in cavity 161 by air entraining pipe 163, utilizes the high temperature argon that gives up to preheat new argon, the most permissible Make full use of high temperature to give up the heat contained in argon, it is achieved energy-saving and emission-reduction, meanwhile, the argon being preheated is passed through in body of heater 1, permissible Reduce argon and take away the heat in body of heater 1, realize energy-saving and emission-reduction further, reduce the production cost of silicon ingot.
In order to improve heat exchange efficiency, extending heat-exchange time, described heat exchanger tube 162 is metal coil pipe.In order to improve further Heat exchange efficiency, described heat exchanger tube 162 uses copper pipe to be made.
During long crystalline substance, crucible 6 is internal needs have certain thermograde from top to bottom, i.e. the temperature in crucible 6 from On be gradually reduced downwards, thermograde change is the most obvious, and the speed of growth of ingot casting is the fastest, and the temperature of crucible 6 internal upper part is mainly Thering is provided by top heater 11, the heat of top heater 11 is delivered in crucible 6 through after graphite cover plate 9 again, owing to passing through The obstruct of graphite cover plate 9, the temperature above graphite cover plate 9 is higher than the temperature below graphite cover plate 9, due to existing polysilicon Side heater 10 and the top heater 11 of ingot furnace are all uniformly controlled, and in crystal growing stage, temperature must control In certain scope, here it is make side heater 10 all can only work with identical power, the most just with top heater 11 It is to say that the heat that side heater 10 and top heater 11 provide is certain, higher to the temperature making crucible 6 internal upper part, It is necessary for enabling more heat to be delivered in crucible 6 through graphite cover plate 9, so that thermograde change is obvious in crucible 6, This utility model provides a kind of simple and effective way and changes obvious purpose, i.e. in institute to thermograde in reaching crucible 6 State and on graphite cover plate 9, be provided with multiple through hole 17, by arranging multiple through hole 17 on graphite cover plate 9, top heater 11 Heat can be unseparated be delivered in crucible 6 by through hole 17 so that the temperature of crucible 6 internal upper part is for original Can increase, so that the thermograde change in crucible 6 is substantially, and then increase the speed of growth of ingot casting, this mode Only need to beat several through hole 17 on original graphite cover plate 9, substantially without increasing cost, reequip the most very convenient simultaneously.For Make variations in temperature more uniform, the described uniform setting of through hole 17.
In use, it some times happens that the phenomenon of silicon hydrorrhea stream, once there is silicon hydrorrhea stream, overflow in polycrystalline silicon ingot or purifying furnace The silicon liquid flowed out can flow on the subiculum warming plate 3 of lower section along heat exchange platform 12, and then silicon liquid is again from the limit of subiculum warming plate 3 Edge drops onto the bottom of body of heater 1, and owing to silicon liquid temp is higher, silicon liquid is easy to be burnt thus accidents caused by body of heater 1, in order to keep away Body of heater 1 is burnt by the silicon liquid exempting from overflow, is provided with overflow blanket 18 bottom described body of heater 1, the silicon liquid that overflow is gone out by overflow blanket 18 with Body of heater 1 separates, and effectively prevent silicon liquid and is burnt by body of heater 1, even if overflow blanket 18 is burnt by silicon liquid, now the temperature of silicon liquid is the most relatively Low, body of heater 1 will not be caused the biggest loss.In order to prevent silicon liquid from being burnt by overflow blanket 18, described overflow blanket 18 is four layers of knot Structure, is followed successively by knitting ceramic fibre blanket layer, knitting ceramic fibre blanket layer, ceramic fibre blanket layer, carbon felt layer, described pin from top to bottom The thickness knitting ceramic fibre blanket layer is 10mm, the thickness of knitting ceramic fibre blanket layer is 10mm, the thickness of ceramic fibre blanket layer is 25mm, the thickness of carbon felt layer are 10mm.
Whether there occurs silicon hydrorrhea stream to make operator know in time, the upper surface of described overflow blanket 18 is provided with excessive , once there is silicon hydrorrhea stream in stream silk, the silicon liquid that overflow goes out falls will will be arranged on overflowing of overflow blanket 18 surface after overflow blanket 18 Stream silk blows, and overflow silk can send alarm signal after blowing, and prompting operator carry out associative operation.Silicon liquid stream due to overflow After subiculum warming plate 3, the edge of subiculum warming plate 3 to be flowed to could continue to dirty, thus causes overflow phenomena to occur one Just can monitor after the section time, which adds the probability having an accident, therefore, in order to monitor whether quickly to occur Silicon hydrorrhea flow phenomenon, described subiculum warming plate 3 is provided with multiple spout hole 20, excessive by arranging on subiculum warming plate 3 Discharge orifice 20, when directly from the overflow blanket 18 that spout hole 20 flows to lower section, and then setting after silicon liquid stream to subiculum warming plate 3 Put the overflow silk arranged on overflow blanket 18 to blow, thus reach the purpose of fast monitored.
It addition, in order to make crucible 6 be uniformly heated, be provided with carbon felt 21, side between described crucible 6 and crucible guard boards 7 The heat of portion's heater 10 passes to crucible 6 through carbon felt 21 again through after crucible guard boards 7, due to carbon felt 21 have preferably every Hot heat-insulating property, therefore, heat will not fast strikethrough carbon felt 21 be delivered in crucible 6, and heat so can be made through carbon felt Obtain homogenizing when 21, so that crucible 6 is heated evenly, the qualification rate of product can be improved.

Claims (9)

1. a polycrystalline silicon ingot or purifying furnace, including having the body of heater (1) of mezzanine space, body of heater (1) is provided with aspirating hole (2), institute Being provided with subiculum warming plate (3) and thermal insulation cover (4) in stating body of heater (1), thermal insulation cover (4) is placed on subiculum warming plate (3), insulation Cover (4) and subiculum warming plate (3) collectively form insulation cage, and the upper connection of described thermal insulation cover (4) has can be made on thermal insulation cover (4) The elevating lever (5) of lower movement, is provided with crucible (6), crucible guard boards (7), graphite base plate (8), graphite in described insulation cage Cover plate (9), side heater (10), top heater (11), heat exchange platform (12), described graphite base plate (8) is placed on heat On switching plane (12), crucible (6) is placed on graphite base plate (8), and crucible guard boards (7) is arranged on crucible (6) outside, and sidepiece adds Hot device (10) is arranged on the outside of crucible guard boards (7), and graphite cover plate (9) is arranged on crucible (6) top, and top heater (11) sets Putting in graphite cover plate (9) top, described heat exchange platform (12) is fixed on body of heater (1) bottom, crucible by graphite column (22) The upper end of backplate (7) is provided with exhaust emissions hole (13), also includes air inlet pipe (14), one end of described air inlet pipe (14) and argon Source (15) is connected, and the other end sequentially passes through body of heater (1), thermal insulation cover (4), top heater (11), graphite cover plate stretch into earthenware after (9) In crucible (6), it is characterised in that: it is provided with gas preheating unit (16), described gas preheating unit in described air inlet pipe (14) (16) include airtight cavity (161), in described cavity (161), be provided with heat exchanger tube (162), the two of described heat exchanger tube (162) End extends respectively to cavity (161) and outward and connects with air inlet pipe (14), and the argon in described argon gas source (15) is successively along air inlet pipe (14), heat exchanger tube (162), air inlet pipe (14) flow in crucible (6), described heat exchanger tube (162) is close with the junction of cavity (161) Envelope, the upper connection of described cavity (161) has air entraining pipe (163) and exhaustor (164), one end of described air entraining pipe (163) and body of heater (1) upper aspirating hole (2) connection arranged, the other end of air entraining pipe (163) is internal with cavity (161) to be connected, described air entraining pipe (163) being provided with air pump (165) on, described exhaustor (164) is internal with cavity (161) to be connected.
2. polycrystalline silicon ingot or purifying furnace as claimed in claim 1, it is characterised in that: described heat exchanger tube (162) is metal coil pipe.
3. polycrystalline silicon ingot or purifying furnace as claimed in claim 2, it is characterised in that: described heat change pipe (162) use copper pipe making and Become.
4. polycrystalline silicon ingot or purifying furnace as claimed in claim 3, it is characterised in that: it is provided with multiple logical on described graphite cover plate (9) Hole (17).
5. polycrystalline silicon ingot or purifying furnace as claimed in claim 4, it is characterised in that: the plurality of through hole (17) uniform setting.
6. polycrystalline silicon ingot or purifying furnace as claimed in claim 5, it is characterised in that: described body of heater (1) bottom is provided with overflow blanket (18), described overflow blanket (18) is four-layer structure, is followed successively by knitting ceramic fibre blanket layer, knitting ceramic fiber blanket from top to bottom Layer, ceramic fibre blanket layer, carbon felt layer, the thickness of described knitting ceramic fibre blanket layer is 10mm, the thickness of knitting ceramic fibre blanket layer Degree is 10mm, the thickness of ceramic fibre blanket layer is 25mm, the thickness of carbon felt layer is 10mm.
7. polycrystalline silicon ingot or purifying furnace as claimed in claim 6, it is characterised in that: the upper surface of described overflow blanket (18) is provided with excessive Stream silk.
8. polycrystalline silicon ingot or purifying furnace as claimed in claim 7, it is characterised in that: it is provided with multiple on described subiculum warming plate (3) Spout hole (20).
9. polycrystalline silicon ingot or purifying furnace as claimed in claim 8, it is characterised in that: set between described crucible (6) and crucible guard boards (7) It is equipped with carbon felt (21).
CN201620500492.5U 2016-05-26 2016-05-26 A kind of polycrystalline silicon ingot or purifying furnace Expired - Fee Related CN205741278U (en)

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CN201620500492.5U CN205741278U (en) 2016-05-26 2016-05-26 A kind of polycrystalline silicon ingot or purifying furnace

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CN201620500492.5U CN205741278U (en) 2016-05-26 2016-05-26 A kind of polycrystalline silicon ingot or purifying furnace

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117287977A (en) * 2023-11-24 2023-12-26 杭州嘉悦智能设备有限公司 Carbonization preheating furnace

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117287977A (en) * 2023-11-24 2023-12-26 杭州嘉悦智能设备有限公司 Carbonization preheating furnace
CN117287977B (en) * 2023-11-24 2024-02-13 杭州嘉悦智能设备有限公司 Carbonization preheating furnace

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Granted publication date: 20161130