CN205723491U - A kind of nozzle piece structure metal filled for microcavity and equipment - Google Patents
A kind of nozzle piece structure metal filled for microcavity and equipment Download PDFInfo
- Publication number
- CN205723491U CN205723491U CN201620614255.1U CN201620614255U CN205723491U CN 205723491 U CN205723491 U CN 205723491U CN 201620614255 U CN201620614255 U CN 201620614255U CN 205723491 U CN205723491 U CN 205723491U
- Authority
- CN
- China
- Prior art keywords
- microcavity
- nozzle piece
- nozzle
- piece structure
- metal filled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
- 239000002184 metal Substances 0.000 title claims abstract description 122
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 120
- 229910001338 liquidmetal Inorganic materials 0.000 claims abstract description 94
- 239000000945 filler Substances 0.000 abstract description 105
- 239000000126 substance Substances 0.000 abstract description 14
- 229910001092 metal group alloy Inorganic materials 0.000 abstract description 6
- 150000002739 metals Chemical class 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 19
- 239000007788 liquid Substances 0.000 description 19
- 238000000034 method Methods 0.000 description 13
- 239000007921 spray Substances 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 9
- 239000011521 glass Substances 0.000 description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 9
- 229910052737 gold Inorganic materials 0.000 description 9
- 239000010931 gold Substances 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 239000011888 foil Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000004806 packaging method and process Methods 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005538 encapsulation Methods 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 239000002305 electric material Substances 0.000 description 3
- 230000008595 infiltration Effects 0.000 description 3
- 238000001764 infiltration Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 239000012780 transparent material Substances 0.000 description 3
- 241000218202 Coptis Species 0.000 description 2
- 235000002991 Coptis groenlandica Nutrition 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 208000002925 dental caries Diseases 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000005429 filling process Methods 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 240000000233 Melia azedarach Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 229910052752 metalloid Inorganic materials 0.000 description 1
- 150000002738 metalloids Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Nozzles (AREA)
Abstract
This utility model provides a kind of nozzle piece structure metal filled for microcavity and equipment, and described nozzle piece structure includes: nozzle piece panel；Run through the through hole of described panel upper surface and lower surface；The liquid metal drainage trough connected with described through hole；Described drainage trough is by described panel upper surface opening, and extends toward described panel lower surface direction, but does not runs through described panel lower surface；Article at least two, it is located at described face plate edge and air channel that two ends connect respectively with described drainage trough, described panel sides；Described air channel is by described panel upper surface opening, and extends toward described panel lower surface direction, but does not runs through described panel lower surface.Nozzle piece structure of the present utility model can carry out effective, the Fast Filling of dissimilar metals simple substance or metal alloy for the microcavity of different structure and shape, and through nozzle hole position need not the microcavity position one_to_one corresponding to be filled with on filler piece, thus substantially increase the universality of nozzle piece structure.
Description
Technical field
This utility model belongs to micro-manufacture processing technique field, relates to a kind of metal filled technology of microcavity, particularly relates to
A kind of nozzle piece structure metal filled for microcavity and equipment.
Background technology
In micro-manufacture manufacture field, particularly MEMS field, need to relate to carry out metal filled to the microcavity on substrate.
These substrates can be silicon chip, sheet glass or potsherd etc..These microcavitys can be different shapes.Can be to penetrate substrate
Can also be blind hole shape.Metallization to the metal filled microcavity that is otherwise known as of microcavity.Such as in through-hole interconnection is applied,
It is accomplished by the through hole to array and carries out metal filled to realize the conductive capability of through hole.The most such as fill out in the scroll groove of etching
Fill metal and can produce embed-type spirally inductance.
Electricity mutual connection is used to realize the mode of the transmission of the signal of telecommunication between chip chamber and chip and substrate, is encapsulation
Core component.In existing encapsulation technology, electrical connection is main is bonded (wire-bonding) and flip chip bonding by gold thread
(flip-chip).Wire-bonding is by being bonded in needs respectively carry out electricity by tiny gold thread (about 25 microns thick) two ends
Realize on the electrode of interconnection.Flip-chip is otherwise known as controlled collapse chip connection (C4), should
Method is by directly making salient point on electrode, it is common that stannum ball, it is right with on substrate then to realize by the way of stannum ball refluxes
Answer the connection of electrode.Along with the development of electronic device, above two electrical connection form particularly Wire-bonding is the most not
Higher system in package (SiP) integrated level and the requirement of less encapsulation volume can be met.
The novel electric connection technology having significant impact to Advanced Packaging risen therewith is TSV (Through-
Silicon via) silicon through hole technology, it is the vertical electric connection technology penetrating substrate (particularly silicon chip).TSV is the most permissible
Replace the place of Wire-Bonding in all encapsulation, improve the electric property of all kinds chip package, including significantly carrying
High integration, reduces chip size, particularly encapsulates (System-in-Packaging, SiP) at system collection, wafer level packaging
(Wafer-Level Packaging WLP) and three-dimensional perpendicular stacked package (3D Packaging) these Advanced Packagings it
In.
The application of through hole interconnection is quite varied, covers from ASIC, Memory, IC to various kinds of sensors part such as MEMS
With optical sensor etc..In addition as silicon keyset, ceramic three-dimensional stacked module is required for being applied to through hole interconnection technique.
The manufacture of TSV includes the manufacture of through hole, the deposition of insulating barrier, and the filling of through hole and follow-up chemical machinery are put down
Integralization (CMP) and connect up techniques such as (RDL) again.In these techniques, the filling of through hole is that technical difficulty is maximum, and cost is the highest
One.According to actual application, the aperture of through hole is filled out from tens microns to hundreds of micron, the metal for such bulk
Filling, existing major technique is based on copper electroplating principle, by first carrying out the attachment of Seed Layer on through-hole wall, exists the most again
The Seed Layer copper-plated mode that powers on realizes.In addition, other TSV technology is also in constantly research.As based on low-resistance rate silicon
Silex Via be then to go out columnar silicon body as transmitting medium by the silicon chip silicon deep etching in low-resistance rate.It is additionally based on
The TSV technology of Wire-bonding and magnetic package technique is the most under study for action.Both technology are respectively by placing in through-holes
Metal lead wire or nickel pin are used as conducting medium.The most conventional filling mode is realized by plating, particularly copper
Plating, if for size several microns can also be realized by CVD.But either plating or CVD, because fast
Degree is slow, wants to realize size the most relatively difficult through hole filling or the blind hole filling of tens to hundreds of micron.
Therefore, a kind of new nozzle piece structure metal filled for microcavity and equipment how are provided, to realize in substrate
Microcavity reliable, the most metal filled, becomes the important technological problems that those skilled in the art are urgently to be resolved hurrily.
Utility model content
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide one to fill out for microcavity metal
The nozzle piece structure filled and equipment, be used for solving in prior art that filler metal speed is slow in substrate microcavity and fills yield rate
Low problem.
For achieving the above object and other relevant purposes, this utility model provides a kind of nozzle metal filled for microcavity
Chip architecture, described nozzle piece structure includes:
Nozzle piece panel；Described panel includes upper and lower surface；
Run through the through hole of described panel upper surface and lower surface；
The liquid metal drainage trough connected with described through hole；Described drainage trough is by described panel upper surface opening, and past institute
State panel lower surface direction to extend, but do not run through described panel lower surface；
Article at least two, it is located at described face plate edge and ventilation that two ends connect respectively with described drainage trough, described panel sides
Groove；Described air channel is by described panel upper surface opening, and extends toward described panel lower surface direction, but does not runs through described panel
Lower surface.
Alternatively, described drainage trough is line style drainage trough, including:
The line style major trough connected with described through hole；
Article at least two, the line style nozzle slot that two ends connect with described line style major trough, described air channel respectively.
Alternatively, described line style major trough both sides are all vertically connected with at least two described line style nozzle slots.
Alternatively, the width of described line style nozzle slot is more than the width of described air channel.
Alternatively, the depth bounds of described line style nozzle slot is 1-1000 micron, and width range is 1-1000 micron.
Alternatively, described drainage trough is face type drainage trough, including the face type groove connected with described through hole；Described type groove side
Face connects with described air channel.
Alternatively, the lateral surface profile of described type groove is circular.
Alternatively, the depth bounds of described type groove is 1-1000 micron.
Alternatively, described drainage trough is face offset-type drainage trough, including:
Article at least two, the line style nozzle slot connected with described through hole；
The face type groove that medial surface connects with described line style nozzle slot, described air channel respectively with lateral surface.
Alternatively, the depth bounds of described type groove is 1-1000 micron；The depth bounds of described line style nozzle slot is 1-
1000 microns, width range is 1-1000 micron.
Alternatively, described through hole is positioned at the aperture area of described panel lower surface and is positioned on described panel more than or equal to it
The aperture area on surface.
Alternatively, described through hole is positioned at the center of described panel or deviates the center of described panel.
Alternatively, described panel in the horizontal plane be projected as circle.
Alternatively, the surface of described nozzle piece structure does not infiltrates with liquid metal to be filled.
This utility model also provides for a kind of metal filled equipment of microcavity, the metal filled equipment of described microcavity include above-mentioned arbitrarily
One described nozzle piece structure.
As it has been described above, the nozzle piece structure metal filled for microcavity of the present utility model and equipment, have following useful
Effect: the nozzle piece structure metal filled for microcavity of the present utility model can be carried out for the microcavity of different structure and shape
Dissimilar metals simple substance or effective, the Fast Filling of metal alloy, and through nozzle hole position need not wait to fill out on filler piece
The microcavity position one_to_one corresponding filled, thus substantially increase the universality of nozzle piece structure.Of the present utility model for microcavity gold
Belong to the liquid gold that the nozzle piece structure filled includes that the through hole running through described panel upper surface and lower surface connects with described through hole
Belong to drainage trough and be located at described nozzle piece face plate edge and two ends connects with described drainage trough, described panel sides respectively leads to
Air drain；Described drainage trough and described through hole collectively form the nozzle of described nozzle piece so that enter the liquid metal of described through hole
It is filled in the microcavity of filler piece by described drainage trough.Different graphic design according to described drainage trough, described nozzle piece can
It is divided into three types: line style nozzle piece, face type nozzle piece and face offset-type nozzle piece.For line style nozzle piece, liquid metal leads to
Cross major trough and line style nozzle slot inserts microcavity；For face type nozzle piece, liquid metal inserts microcavity by face type groove；Face is mended
Repaying type nozzle piece, liquid metal is inserted in microcavity by line style nozzle slot, face type groove.Nozzle piece structure of the present utility model and setting
For being applicable not only to the filling of microcavity in through-hole interconnection, it is simultaneously suitable for any technical field needing to carry out microcavity filling.
Accompanying drawing explanation
It is vertical view knot during line style nozzle piece that Fig. 1 is shown as the nozzle piece structure metal filled for microcavity of utility model
Structure schematic diagram.
Fig. 2 is shown as the A-A of structure shown in Fig. 1 to sectional view.
Fig. 3 is shown as the B-B of structure shown in Fig. 1 to sectional view.
Fig. 4 is shown as the C-C of structure shown in Fig. 1 to sectional view.
It is the vertical view during type nozzle piece of face that Fig. 5 is shown as the nozzle piece structure metal filled for microcavity of the present utility model
Structural representation.
Fig. 6 is shown as the D-D of structure shown in Fig. 5 to sectional view.
Fig. 7 is shown as the E-E of structure shown in Fig. 5 to sectional view.
Fig. 8 is shown as when the nozzle piece structure metal filled for microcavity of the present utility model is face offset-type nozzle piece
Plan structure schematic diagram.
Fig. 9 is shown as the F-F of structure shown in Fig. 8 to sectional view.
Figure 10 is shown as the G-G of structure shown in Fig. 8 to sectional view.
Figure 11 be shown with this utility model nozzle piece structure carry out microcavity metal filled time by nozzle piece, filler piece and
The decomposing schematic representation of the sandwich structure that cover plate stacks together.
Figure 12 be shown with this utility model nozzle piece structure carry out microcavity metal filled time put above liquid metal
Putting the schematic diagram of sandwich structure, wherein the microcavity of filling in filler piece is the cavity running through described filler piece up and down.
Figure 13 be shown with this utility model nozzle piece structure carry out microcavity metal filled time by adjust air pressure by liquid
State metal sucks the schematic diagram of described cavity by described nozzle piece structure.
Figure 14 be shown with this utility model nozzle piece structure carry out microcavity metal filled time by adjust air pressure by liquid
The schematic diagram that state metal disconnects at described filler piece with described nozzle piece structural interface.
Figure 15 be shown with this utility model nozzle piece structure carry out microcavity metal filled and fill after, by described
The schematic diagram that filler piece takes out.
Figure 16 be shown with this utility model nozzle piece structure carry out microcavity metal filled time remove described filler piece table
The schematic diagram of the filler metal that face is unnecessary.
Figure 17 be shown with this utility model nozzle piece structure carry out microcavity metal filled time put above liquid metal
Putting the schematic diagram of sandwich structure, wherein the microcavity of filling in filler piece is the blind chamber only running through described filler piece lower surface.
Figure 18 be shown with this utility model nozzle piece structure carry out microcavity metal filled time by adjust air pressure by liquid
State metal sucks the schematic diagram in described blind chamber by described nozzle piece structure.
Figure 19 be shown with this utility model nozzle piece structure carry out microcavity metal filled time by adjust air pressure by liquid
The schematic diagram that state metal disconnects at described filler piece with described nozzle piece structural interface.
Figure 20 be shown with this utility model nozzle piece structure carry out microcavity metal filled time fill after, by described
The schematic diagram that filler piece takes out.
Figure 21 be shown with this utility model nozzle piece structure carry out microcavity metal filled time remove described filler piece table
The schematic diagram of the filler metal that face is unnecessary.
Figure 22 is shown as being provided with the perspective view of the filler piece of spiral cast cavity.
Figure 23 is shown as being provided with the three-dimensional cutaway view of the filler piece of spiral cast cavity.
Figure 24 a-Figure 24 b be shown with this utility model nozzle piece structure carry out microcavity metal filled time at liquid metal
The schematic diagram of sandwich structure is placed in top, and wherein the filling microcavity in filler piece is spiral cast cavity.
Figure 25 be shown with this utility model nozzle piece structure carry out microcavity metal filled time by adjust air pressure by liquid
State metal sucks the schematic diagram of described spiral cast cavity by described nozzle piece structure.
Figure 26 be shown with this utility model nozzle piece structure carry out microcavity metal filled time by adjust air pressure by liquid
The schematic diagram that state metal disconnects at described filler piece with described nozzle piece structural interface.
Figure 27 be shown with this utility model nozzle piece structure carry out microcavity metal filled time fill after, by described
The schematic diagram that filler piece takes out.
Figure 28 be shown with this utility model nozzle piece structure carry out microcavity metal filled time remove described filler piece table
The schematic diagram of the filler metal that face is unnecessary.
Figure 29 be shown with this utility model nozzle piece structure carry out microcavity metal filled after the toroidal winding that obtains
Perspective view.
Element numbers explanation
1 nozzle piece panel
2 through holes
301 line style drainage troughs
3011 line style major troughs
3012 line style nozzle slots
302 type drainage troughs
3021 type grooves
303 offset-type drainage troughs
3031 line style nozzle slots
3032 type grooves
4 air channels
5 nozzle piece structures
6 filler pieces
601 fill microcavity
6011 cavities
6012 blind chambeies
7 cover plates
8 liquid metals
9 spiral cast cavitys
901 pillar holes
902 top line group grooves
903 bottom line group grooves
10 line slots
11 cavitys
Detailed description of the invention
Below by way of specific instantiation, embodiment of the present utility model being described, those skilled in the art can be by this theory
Content disclosed by bright book understands other advantages of the present utility model and effect easily.This utility model can also be by additionally
Different detailed description of the invention is carried out or applies, the every details in this specification can also based on different viewpoints with should
With, under without departing from spirit of the present utility model, carry out various modification or change.
Refer to Fig. 1 to Figure 21.It should be noted that the diagram provided in the present embodiment illustrates this most in a schematic way
The basic conception of utility model, the most graphic in time only display with relevant assembly in this utility model rather than is implemented according to reality
Component count, shape and size are drawn, and during its actual enforcement, the kenel of each assembly, quantity and ratio can be a kind of random changing
Become, and its assembly layout kenel is likely to increasingly complex.
Embodiment one
This utility model provides a kind of line style nozzle piece structure metal filled for microcavity, refers to Fig. 1, is shown as institute
State the top view of line style nozzle piece structure, including:
Nozzle piece panel 1；Described panel 1 includes upper and lower surface；
Run through the through hole 2 of described panel 1 upper surface and lower surface；
The liquid metal line style drainage trough 301 connected with described through hole 2；Described line style drainage trough 301 is by described panel 1
Surface opening, and extend toward described panel 1 lower surface direction, but do not run through described panel 1 lower surface；
Article at least two, be located at described panel 1 edge and two ends respectively with described line style drainage trough 301, described panel 1 side
The air channel 4 of connection；Described air channel 4 is by described panel 1 upper surface open, and extends toward described panel 1 lower surface direction, but
Do not run through described panel 1 lower surface.
As example, described panel 1 in the horizontal plane be projected as circle.Certainly, in other embodiments, described panel
1 projection in the horizontal plane can also be other shape, and such as ellipse, polygon etc., the most should too not limit this practicality
Novel protection domain.
Described through hole 2 may be located at the center of described panel 1, it is also possible to deviates the center of described panel 1.Fig. 1 show
Described through hole 2 is positioned at the situation at round panel center.
As it is shown in figure 1, described line style drainage trough includes the line style major trough 3011 that connects with described through hole 2 and at least two two
The line style nozzle slot 3012 that end connects with described line style major trough 3011, described air channel 4 respectively.
In the present embodiment, described line style major trough 3011 both sides are all vertically connected with at least two described line style nozzle slots
3012.The width of described line style major trough 3011 is more than the width of described line style nozzle slot 3012, described line style nozzle slot 3012
Width is more than the width of described air channel 4.The width of described air channel 4 is set smaller than the width of described line style nozzle slot 3012
When degree is to prevent liquid metal from filling, liquid metal flows to outside from air channel.In other embodiments, described line style spray
Mouth groove 3012 also can be in non-perpendicular annexation, and the width of described line style major trough 3011 can also equal to or less than described line style
The width of nozzle slot 3012, the most should too not limit protection domain of the present utility model.
In the present embodiment, described line style major trough 3011 and described line style nozzle slot 3012 are linear type, implement at other
In example, described line style major trough 3011 or described line style nozzle slot 3012 can also be shaped form, fold-line-shaped or mixed type, herein
Should too not limit protection domain of the present utility model.
It is pointed out that the density of described line style nozzle slot 3012 needs sufficiently large, to allow described linear nozzle groove
3012 can be by the position at all microcavity places on filler piece.
Refer to Fig. 2, Fig. 3 and Fig. 4, be respectively indicated as the A-A of structure shown in Fig. 1 to, B-B to and C-C to sectional view.
As example, described through hole 2 is positioned at the aperture area of described panel 1 lower surface and is positioned on described panel 1 more than it
The aperture area on surface.Bigger under shed area is conducive to more liquid metal to enter described through hole, less upper shed
Be conducive to after follow-up filling the pinch off of molten metal bridge in described through hole.Certainly, in other embodiments, described through hole 2
The aperture area being positioned at described panel 1 upper surface in the aperture area of described panel 1 lower surface with it can also be equal, the most not
Should too limit protection domain of the present utility model.
As example, the depth bounds of described line style nozzle slot is 1-1000 micron, and width range is 1-1000 micron.
Line style nozzle piece structure of the present utility model can carry out variety classes gold for the microcavity of different structure and shape
Belong to simple substance or effective, the Fast Filling of metal alloy, and through nozzle hole position need not the microcavity position to be filled with on filler piece
Put one_to_one corresponding, thus substantially increase the universality of nozzle piece structure.For line style nozzle piece, liquid metal by major trough and
Line style nozzle slot inserts microcavity.Line style nozzle piece structure of the present utility model is applicable not only to the filling of microcavity in through-hole interconnection,
It is simultaneously suitable for any technical field needing to carry out microcavity filling.
Embodiment two
This utility model provides a kind of face type nozzle piece structure metal filled for microcavity, refers to Fig. 5, is shown as institute
State the top view of face type nozzle piece structure, including:
Nozzle piece panel 1；Described panel 1 includes upper and lower surface；
Run through the through hole 2 of described panel 1 upper surface and lower surface；
The liquid metal face type drainage trough 302 connected with described through hole 2；Described type drainage trough 302 is by described panel 1
Surface opening, and extend toward described panel 1 lower surface direction, but do not run through described panel 1 lower surface；
Article at least two, be located at described panel 1 edge and two ends respectively with described type drainage trough 302, described panel 1 side
The air channel 4 of connection；Described air channel 4 is by described panel 1 upper surface open, and extends toward described panel 1 lower surface direction, but
Do not run through described panel 1 lower surface.
As example, described panel 1 in the horizontal plane be projected as circle.Certainly, in other embodiments, described panel
1 projection in the horizontal plane can also be other shape, and such as ellipse, polygon etc., the most should too not limit this practicality
Novel protection domain.
Described through hole 2 may be located at the center of described panel 1, it is also possible to deviates the center of described panel 1.Fig. 5 show
Described through hole 2 is positioned at the situation at round panel center.
As it is shown in figure 5, described type drainage trough 302 includes the face type groove 3021 connected with described through hole 2；Described type groove
3021 sides connect with described air channel 4.
As example, the lateral surface profile of described type groove 3021 is circular.The depth bounds of the 3021 of described type groove
It it is 1-1000 micron.Rounded face type groove can make full use of the area of described panel 1, thus cover and more fill microcavity.When
So, described type groove 3021 can also be other shape, the most should too not limit protection domain of the present utility model.
Refer to Fig. 6 and Fig. 7, be respectively indicated as the D-D of structure shown in Fig. 5 to and E-E to sectional view.
As example, described through hole 2 is positioned at the aperture area of described panel 1 lower surface and is positioned on described panel 1 more than it
The aperture area on surface.Bigger under shed area is conducive to more liquid metal to enter described through hole, less upper shed
Be conducive to after follow-up filling the pinch off of molten metal bridge in described through hole.
As example, the depth bounds of described type groove is 1-1000 micron.
Of the present utility model type nozzle piece structure can carry out variety classes gold for the microcavity of different structure and shape
Belong to simple substance or effective, the Fast Filling of metal alloy, and through nozzle hole position need not the microcavity position to be filled with on filler piece
Put one_to_one corresponding, thus substantially increase the universality of nozzle piece structure.For face type nozzle piece, liquid metal passes through face type groove
Insert microcavity.Of the present utility model type nozzle piece structure is applicable not only to the filling of microcavity in through-hole interconnection, is simultaneously suitable for
Any technical field needing to carry out microcavity filling.
Embodiment three
This utility model provides a kind of face offset-type nozzle piece structure metal filled for microcavity, refers to Fig. 8, display
For the top view of described offset-type nozzle piece structure, including:
Nozzle piece panel 1；Described panel 1 includes upper and lower surface；
Run through the through hole 2 of described panel 1 upper surface and lower surface；
The liquid metal face offset-type drainage trough 303 connected with described through hole 2；Described offset-type drainage trough 303 is by institute
State panel 1 upper surface open, and extend toward described panel 1 lower surface direction, but do not run through described panel 1 lower surface；
Article at least two, be located at described panel 1 edge and two ends respectively with described offset-type drainage trough 303, described panel 1
The air channel 4 of side connection；Described air channel 4 is by described panel 1 upper surface open, and prolongs toward described panel 1 lower surface direction
Stretch, but do not run through described panel 1 lower surface.
As example, described panel 1 in the horizontal plane be projected as circle.Certainly, in other embodiments, described panel
1 projection in the horizontal plane can also be other shape, and such as ellipse, polygon etc., the most should too not limit this practicality
Novel protection domain.
Described through hole 2 may be located at the center of described panel 1, it is also possible to deviates the center of described panel 1.Fig. 8 show
Described through hole 2 is positioned at the situation at round panel center.
As shown in Figure 8, described offset-type drainage trough 303 includes at least two line style nozzles connected with described through hole 2
The face type groove 3032 that groove 3031 and medial surface connect with described line style nozzle slot 3031, described air channel 4 respectively with lateral surface.
As example, lateral surface profile and the medial surface profile of described type groove 3032 are circle.
Refer to Fig. 9 and Figure 10, be respectively indicated as the F-F of structure shown in Fig. 8 to and G-G to sectional view.
As example, described through hole 2 is positioned at the aperture area of described panel 1 lower surface and is positioned on described panel 1 more than it
The aperture area on surface.Bigger under shed area is conducive to more liquid metal to enter described through hole, less upper shed
Be conducive to after follow-up filling the pinch off of molten metal bridge in described through hole.
As example, the depth bounds of described type groove 3032 is 1-1000 micron；Described line style nozzle slot 3031 deep
Degree scope is 1-1000 micron, and width range is 1-1000 micron.
The face offset-type nozzle piece structure of the present embodiment is with the difference of the face type nozzle piece structure maximum of embodiment two:
In the offset-type nozzle piece of face, liquid metal ruptures in line style nozzle slot 3031, so having at face type groove 3032
Complete foil generates.These thin slices can compensate metal when cooling and solidifying shrinks in microcavity the reducing of volume.
Of the present utility model offset-type nozzle piece structure can carry out the most of the same race for the microcavity of different structure and shape
Metalloid simple substance or effective, the Fast Filling of metal alloy, and through nozzle hole position need not to be filled micro-with on filler piece
Position, chamber one_to_one corresponding, thus substantially increase the universality of nozzle piece structure.For face offset-type nozzle piece, liquid metal leads to
Cross line style nozzle slot, face type groove is inserted in microcavity.It is mutual that of the present utility model offset-type nozzle piece structure is applicable not only to through hole
The filling of microcavity in Lian, is simultaneously suitable for any technical field needing to carry out microcavity filling.
Embodiment four
This utility model also provides for a kind of metal filled equipment of microcavity, and the metal filled equipment of described microcavity includes embodiment
One, nozzle piece structure described in any one in embodiment two and embodiment three.
As example, the metal filled equipment of described microcavity includes cover plate and described nozzle piece structure, for being pressed from both sides by filler piece
In centre, form the sandwich structure being followed successively by nozzle piece, filler piece and cover plate from bottom to top；When carrying out metal filled, institute
State sandwich structure to be placed horizontally on liquid metal groove, and described nozzle piece structure lower surface is close to the upper of liquid metal in groove
Surface.
Refer to Figure 11, the sandwich structure being shown as being stacked together by nozzle piece structure 5, filler piece 6 and cover plate 7 point
Solve schematic diagram.Wherein, described nozzle piece structure 5 is as a example by the offset-type nozzle piece structure of face.Described filler piece 6 has filling micro-
Chamber 601；Described filling microcavity 601 can be to run through the cavity of described filler piece 601 up and down or only run through described filler piece 601 times
The blind chamber on surface.
As example, the metal filled equipment of described microcavity also includes the first annular seal space, during it is with described sandwich structure
Gap connects, for adjusting the air pressure inside of described sandwich structure.
As example, the metal filled equipment of described microcavity also includes the second annular seal space, runs through described liquid metal groove sidewall
Or bottom, and stretch in described liquid metal, for the air pressure transmission in described second annular seal space is handed to described liquid metal table
Face；Described second annular seal space does not connects with the gap in described sandwich structure.
As example, the part that described second annular seal space stretches into described liquid metal includes corrugated tube.Described first seals
It is equipped with pipeline in the cavity wall of chamber and the second annular seal space, and described pipeline is provided with valve, can change by bleeding or ventilating
Air pressure in annular seal space.
The metal filled equipment of microcavity of the present utility model is applicable not only to the filling of cavity, applies also for the filling in blind chamber.
Wherein when carrying out blind chamber and filling, it is also possible to need not described cover plate.
Embodiment five
Use nozzle piece structure of the present utility model that microcavity carries out a kind of metal filled method as follows, including walking as follows
Rapid:
Step S1: as shown in figure 12, it is provided that a liquid metal groove, on described liquid metal groove, horizontal positioned is from bottom to top
The sandwich structure being formed by stacking by described nozzle piece structure 5, filler piece 6 and cover plate 7 successively；Wherein, described nozzle piece structure 5
Lower surface is close to the upper surface of liquid metal 8 in groove；Described filler piece 6 has filling microcavity；Described filling microcavity is upper and lower
Run through the cavity 6011 of described filler piece.
Concrete, described liquid metal can be metal simple-substance or its alloy, includes but not limited to that stannum, copper, silver, gold etc. are led
Electric material.
Concrete, it is provided with airspace (not shown) between described cover plate 7 and described filler piece 6.This airspace can lead to
Cross between described cover plate 7 and described filler piece 6, place pad realization, it is also possible to by being arranged at the air channel on described cover plate
Realizing, this air channel has opening in described cover plate side.
Concrete, described nozzle piece structure 5 can use line style nozzle piece structure, face type nozzle piece structure or the spray of face offset-type
Mouth chip architecture.The surface of described nozzle piece structure 5 does not infiltrates with liquid metal to be filled.
Concrete, the material of described filler piece 6 includes but not limited to Si, glass or pottery etc..Described filling cavity 6011
Include but not limited to pass, straight line groove type, broken line groove type or curve groove type.Described filling microcavity can be arranged in the form of an array
Row, or arrange according to preset rules according to concrete application, the most should too not limit protection domain of the present utility model.Described fill out
The surface filling sheet 6 needs not infiltrate with liquid metal to be filled in principle, but does not also interfere with filling in the case of infiltration
Result.
Concrete, the material of described cover plate 7 includes but not limited to Si, glass or pottery etc..In the present embodiment, described cover plate
Preferably employ transparent material, such as glass, facilitate look at the situation of filling.The surface of described cover plate 7 and liquid to be filled
Metal does not infiltrates.
Step S2: as shown in figure 13, adjusts air pressure inside P of described sandwich structure1And the surface of described liquid metal
Air pressure P2, make the draught head of the two reach the first preset value, with by the liquid metal in described liquid metal groove by described spray
Mouth chip architecture 6 sucks described cavity 6011, completes the metal filled of described cavity 6011.
Step S3: as shown in figure 14, adjusts air pressure inside P of described sandwich structure further1And described liquid metal
Surface pressure P2, make the draught head of the two reach the second preset value, with by liquid metal 8 in described filler piece 6 and described spray
Mouth chip architecture 5 interface disconnects.
It is pointed out that, for face offset-type nozzle piece structure (seeing Fig. 8), liquid metal is only at line style nozzle slot
Fracture at 3031, and at face type groove 3032, have complete foil generate.These thin slices can compensate metal cold
But during cure shrinkage in microcavity the reducing of volume.
Compensate if the upper surface at filler piece 6 is also required for cure shrinkage, at described cover plate 7 towards described filler piece 6
One side also can manufacture a face type groove for shrinkage-compensating.Figure 12-Figure 14 all illustrates this face type groove.
Step S4: as shown in figure 15, after filling, takes out described filler piece 6.
Concrete, by filler piece 6 before sandwich sheet takes out, need first to allow the liquid metal filled in microcavity cold
But solidify.
Step S5: as shown in figure 16, removes the filler metal of described filler piece 6 excess surface.
As example, by chemical mechanical polishing method, described filler piece 6 upper surface and lower surface are all planarized, go simultaneously
Filler metal except the described upper and lower excess surface of filler piece 6.
So far, complete in filler piece and fill the metal filled of microcavity.
Use nozzle piece structure of the present utility model that microcavity is carried out metal filled theoretical foundation as follows: to set sandwich knot
Air pressure in structure is P1, the surface pressure of liquid metal is P2.Due to nozzle slot width, nozzle slot height, fill microcavity, gap
Highly equidimension all only has micron level, and the effect of the liquid metal of micron-scale is negligible by gravity.Simultaneously as
The size of liquid metal groove is relatively big, and the pressure of liquid metal internal can also be ignored.Metal nozzle slot, fill microcavity with
And the pressure acting on each surface that the shape in gap is subject to by it is determined.
Before filling process starts, P1=P2, Δ P=P2-P1=0.Metal bath surface is level.
Filling process: first pass through reduction P1Mode increase Δ P.When Δ P increases to certain value, liquid metal will
Sucked in the microcavity of press-in filling in other words by nozzle piece structure.If at P1In the case of being evacuated, liquid gold
Genus can't suck in filling microcavity, then can be by increasing P2Mode continue increase Δ P, with reach by liquid alloy inhale
Enter to fill the condition of microcavity.
Cutting process: after liquid metal sucks/be pressed into filling microcavity by nozzle piece structure, inserts in filling micropore
Liquid metal is also connected to by nozzle piece structure with liquid metal groove, and liquid metal is formed in the through hole of nozzle piece structure
Constant pressure liquid bridge, the pressure maintaining this liquid bridge is certain value.By reducing P2Mode low delta p drops so that constant pressure liquid bridge spray
Rupturing in mouth, meanwhile, the liquid metal filled in microcavity will not be pulled, thus realizes filling the liquid metal in microcavity and liquid
The controlled cutting of state metallic channel.
The fracture in nozzle bore of the liquid bridge cannot be observed from the external world, therefore P2Dropped to vacuum, with P always1Unanimously, from
And Δ P also reduces to zero.Last P2And P1The most slowly go back up to atmospheric pressure.Treat that liquid metal solidifies, i.e. can be taken off filler piece.
Nozzle piece structure of the present utility model is applicable to the filling micropore that pore diameter range is at 1～1000 micron, or width model
Being trapped among the microflute of 1-1000 micron, especially for the filling micropore of 20～200 micron pore size, nozzle piece of the present utility model is tied
Structure advantage is particularly evident.
Embodiment six
Use unlike micro-cavity is filled with by nozzle piece structure of the present utility model from embodiment five, the present embodiment
It is to use nozzle piece structure of the present utility model that micro-blind chamber is filled with, comprises the steps:
Step S1: as shown in figure 17, it is provided that a liquid metal groove, on described liquid metal groove, horizontal positioned is from bottom to top
The sandwich structure being formed by stacking by described nozzle piece structure 5, filler piece 6 and cover plate 7 successively；Wherein, described nozzle piece structure 5
Lower surface is close to the upper surface of liquid metal 8 in groove；Described filler piece 6 has filling microcavity；Described filling microcavity is for only to pass through
Wear the blind chamber 6012 of described filler piece lower surface.
Concrete, described liquid metal can be metal simple-substance or its alloy, includes but not limited to that stannum, copper, silver, gold etc. are led
Electric material.
Concrete, unlike embodiment five, between described cover plate 7 and described filler piece 6, airspace need not be set.
Concrete, described nozzle piece structure 5 can use line style nozzle piece structure, face type nozzle piece structure or the spray of face offset-type
Mouth chip architecture.The surface of described nozzle piece structure 5 does not infiltrates with liquid metal to be filled.
Concrete, the material of described filler piece 6 includes but not limited to Si, glass or pottery etc..Described filling cavity 6011
Include but not limited to pass, straight line groove type, broken line groove type or curve groove type.The surface of described filler piece 6 needs in principle
Do not infiltrate with liquid metal to be filled, but also do not interfere with filling result in the case of infiltration.
Concrete, the material of described cover plate 7 includes but not limited to Si, glass or pottery etc..In the present embodiment, described cover plate
Preferably employ transparent material, such as glass, facilitate look at the situation of filling.The surface of described cover plate 7 and liquid to be filled
Metal does not infiltrates.
Step S2: as shown in figure 18, adjusts air pressure inside P of described sandwich structure1And the surface of described liquid metal
Air pressure P2, make the draught head of the two reach the first preset value, with by the liquid metal in described liquid metal groove by described spray
Mouth chip architecture 6 sucks described blind chamber 6012, completes the metal filled of described blind chamber 6012.
Step S3: as shown in figure 19, adjusts air pressure inside P of described sandwich structure further1And described liquid metal
Surface pressure P2, make the draught head of the two reach the second preset value, with by liquid metal 8 in described filler piece 6 and described spray
Mouth chip architecture 5 interface disconnects.
It is pointed out that, for face offset-type nozzle piece structure (seeing Fig. 8), liquid metal is only at line style nozzle slot
Fracture at 3031, and at face type groove 3032, have complete foil generate.These thin slices can compensate metal cold
But during cure shrinkage in microcavity the reducing of volume.
Owing to described filler piece 6 upper surface is not run through in described blind chamber 6012, it is not necessary to cure shrinkage compensates, therefore, with enforcement
Unlike example five, the face type groove for shrinkage-compensating need not be manufactured at described cover plate 7 towards the one side of described filler piece 6.When
So, even if arranging described type groove, also will not be on the metal filled generation impact in blind chamber.
Step S4: as shown in figure 20, after filling, takes out described filler piece 6.
Concrete, by filler piece 20 before sandwich sheet takes out, need first to allow the liquid metal filled in microcavity
Cooling and solidifying.
Step S5: as shown in figure 21, removes the filler metal of described filler piece 6 excess surface.
As example, by chemical mechanical polishing method by surface flattening for described filler piece 6, remove described filler piece simultaneously
The filler metal of 6 excess surface.
So far, complete in filler piece and fill the metal filled of microcavity.
The present embodiment is essentially identical to the principle that cavity is metal filled with embodiment five to the principle that blind chamber is metal filled, this
Place repeats no more.
Embodiment seven
The present embodiment and embodiment six use essentially identical technical scheme, and difference is in the present embodiment to be provided without
Cover plate.
Concrete, use nozzle piece structure of the present utility model that micro-blind chamber is carried out metal filled comprising the steps:
Thering is provided a liquid metal groove, on described liquid metal groove, horizontal positioned is tied by described nozzle piece the most successively
The double-decker that structure and filler piece are formed by stacking；Wherein, the upper surface of liquid metal in described nozzle piece lower surface is close to groove；Institute
State and filler piece has filling microcavity；Described filling microcavity is the blind chamber only running through described filler piece lower surface；
Adjust described double-deck air pressure inside P1And the surface pressure P of described liquid metal2, make the draught head of the two
Reach the first preset value, micro-so that the liquid metal in described liquid metal groove is sucked described filling by described nozzle piece structure
Chamber, completes the metal filled of described filling microcavity；
Adjust air pressure inside P of described sandwich structure further1And the surface pressure P of described liquid metal2, make the two
Draught head reach the second preset value, to be disconnected at described filler piece and described nozzle piece structural interface by liquid metal.
Further, after filling, described filler piece is taken out, and remove the filling gold of described filler piece excess surface
Belong to.
As example, by chemical mechanical polishing method by surface flattening for described filler piece, remove described filler piece simultaneously
The filler metal of excess surface.
Embodiment eight
In the present embodiment use embodiment one, embodiment two and embodiment three, the nozzle piece structure described in any one is to filling out
Filling sheet to be filled with, wherein, the filling microcavity of filler piece includes spiral cast cavity, is used for obtaining toroidal winding.
Refer to Figure 22 and Figure 23, be respectively indicated as being provided with the perspective view of the filler piece 6 of spiral cast cavity 9
And sectional view.The described filler piece 6 being provided with spiral cast cavity 9 can be obtained by biplate bonding, described spiral cast cavity 9 table
Face can be provided with the passivation layer for being isolated by filler metal with filler piece base material.
Concrete, described spiral cast cavity 9 includes pillar hole 901, top line group groove 902 and bottom line group groove 903, institute
Stating and also can be provided with line slot 10 around spiral cast cavity 9, described line slot 10 includes but not limited to ground connection wire casing, test wire casing
Deng.
Further, being additionally provided with and be not used in metal filled cavity 11 in described filler piece 6, the existence of this cavity 11 is permissible
Reduce the loss of filler piece substrate faradic current.
Concrete, the filler piece 6 being provided with spiral cast cavity 9 is carried out the metal filled method of microcavity and includes walking as follows
Rapid:
Step S1: as shown in figure 24, it is provided that a liquid metal groove, on described liquid metal groove, horizontal positioned is from bottom to top
The sandwich structure that the filler piece 6 by described nozzle piece structure 5, being provided with spiral cast cavity successively and cover plate 7 are formed by stacking；Its
In, described nozzle piece structure 5 lower surface is close to the upper surface of liquid metal 8 in groove.
As example, being provided with at least two through hole 2 in described nozzle piece structure 5, described through hole 2 is made up of two parts: position
The upper through hole unanimous between the higher and lower levels in top and aperture, is positioned at bottom and lower through-hole that aperture is gradually increased from top to bottom.Real at other
Executing in example, described through hole 2 also only can be made up of a part as Fig. 2,6 or 9.
Additionally, Figure 24 a show the situation of the corresponding face groove of a spiral cast cavity, in another embodiment, also
Can be that multiple spiral cast cavity shares a face groove, as shown in Figure 24 b, the most should too not limit guarantor of the present utility model
Protect scope.
Concrete, described liquid metal can be metal simple-substance or its alloy, includes but not limited to that stannum, copper, silver, gold etc. are led
Electric material.
Concrete, described nozzle piece structure 5 can use line style nozzle piece structure, face type nozzle piece structure or the spray of face offset-type
Mouth chip architecture.The surface of described nozzle piece structure 5 does not infiltrates with liquid metal to be filled.
Concrete, the material of described filler piece 6 includes but not limited to Si, glass or pottery etc..The surface of described filler piece 6
Need in principle not infiltrate with liquid metal to be filled, but also do not interfere with filling result in the case of infiltration.
Concrete, the material of described cover plate 7 includes but not limited to Si, glass or pottery etc..In the present embodiment, described cover plate
Preferably employ transparent material, such as glass, facilitate look at the situation of filling.The surface of described cover plate 7 and liquid to be filled
Metal does not infiltrates.
Step S2: as shown in figure 25, adjusts air pressure inside P of described sandwich structure1And the surface of described liquid metal
Air pressure P2, make the draught head of the two reach the first preset value, with by the liquid metal in described liquid metal groove by described spray
Mouth chip architecture 6 sucks described spiral cast cavity 9, completes the metal filled of described spiral cast cavity 9.Wherein, described spiral
Cast cavity 9 cavity 11 within and around, the line slot 10 being located at described filler piece 6 upper surface are not filled by into liquid metal.
Step S3: as shown in figure 26, adjusts air pressure inside P of described sandwich structure further1And described liquid metal
Surface pressure P2, make the draught head of the two reach the second preset value, with by liquid metal 8 in described filler piece 6 and described spray
Mouth chip architecture 5 interface disconnects.
It is pointed out that, for face offset-type nozzle piece structure (seeing Fig. 8), liquid metal is only at line style nozzle slot
Fracture at 3031, and at face type groove 3032, have complete foil generate.These thin slices can compensate metal cold
But during cure shrinkage in microcavity the reducing of volume.
Step S4: as shown in figure 27, after filling, takes out described filler piece 6.Visible, described filler piece lower surface
Foil is had to generate.And in the present embodiment, described cover plate 7 is manufactured without for shrinkage-compensating towards the one side of described filler piece 6
Face type groove, the most described filler piece upper surface without foil generate.Certainly, in other embodiments, it is possible to use table
Face makes the cover plate having the face type groove for shrinkage-compensating, the most should too not limit protection domain of the present utility model.
Concrete, by filler piece 20 before sandwich sheet takes out, need first to allow the liquid metal filled in microcavity
Cooling and solidifying.
Step S5: as shown in figure 28, removes the filler metal of described filler piece 6 excess surface.
As example, by chemical mechanical polishing method by surface flattening for described filler piece 6, remove described filler piece simultaneously
The filler metal of 6 excess surface.
So far, completing the metal filled of spiral cast cavity in filler piece, one-shot forming has obtained toroidal winding.Figure
29 perspective view (for ease of illustration, not shown base material about) being shown as the toroidal winding obtained
The principle base that the present embodiment is metal filled to cavity with embodiment five to the principle that spiral cast cavity is metal filled
This is identical, and here is omitted.
In sum, the nozzle piece structure metal filled for microcavity of the present utility model can be for different structure and shape
The microcavity of shape carries out effective, the Fast Filling of dissimilar metals simple substance or metal alloy, and through nozzle hole position need not with
Microcavity position one_to_one corresponding to be filled on filler piece, thus substantially increase the universality of nozzle piece structure.This utility model
The nozzle piece structure metal filled for microcavity include running through described panel upper surface and the through hole of lower surface and described through hole
The liquid metal drainage trough of connection and be located at described nozzle piece face plate edge and two ends respectively with described drainage trough, described panel
The air channel of side connection；Described drainage trough and described through hole collectively form the nozzle of described nozzle piece so that enter described logical
The liquid metal in hole is filled in the microcavity of filler piece by described drainage trough.Different graphic design according to described drainage trough,
Described nozzle piece can be divided into three types: line style nozzle piece, face type nozzle piece and face offset-type nozzle piece.For line style nozzle
Sheet, liquid metal inserts microcavity by major trough and line style nozzle slot；For face type nozzle piece, liquid metal is inserted by face type groove
Microcavity；For face offset-type nozzle piece, liquid metal is inserted in microcavity by line style nozzle slot, face type groove.Of the present utility model
Nozzle piece structure and equipment are applicable not only to the filling of microcavity in through-hole interconnection, are simultaneously suitable for any needs and carry out microcavity filling
Technical field.So, this utility model effectively overcomes various shortcoming of the prior art and has high industrial utilization.
Above-described embodiment only illustrative principle of the present utility model and effect thereof are new not for limiting this practicality
Type.Above-described embodiment all can be carried out by any person skilled in the art under spirit and the scope of the present utility model
Modify or change.Therefore, art has usually intellectual such as without departing from the essence disclosed in this utility model
All equivalences completed under god and technological thought are modified or change, and must be contained by claim of the present utility model.
Claims (15)
1. one kind is used for the nozzle piece structure that microcavity is metal filled, it is characterised in that described nozzle piece structure includes:
Nozzle piece panel；Described panel includes upper and lower surface；
Run through the through hole of described panel upper surface and lower surface；
The liquid metal drainage trough connected with described through hole；Described drainage trough is by described panel upper surface opening, and toward described
Plate lower surface direction extends, but does not runs through described panel lower surface；
Article at least two, it is located at described face plate edge and air channel that two ends connect respectively with described drainage trough, described panel sides；
Described air channel is by described panel upper surface opening, and extends toward described panel lower surface direction, but does not runs through under described panel
Surface.
The nozzle piece structure metal filled for microcavity the most according to claim 1, it is characterised in that: described drainage trough is
Line style drainage trough, including:
The line style major trough connected with described through hole；
Article at least two, the line style nozzle slot that major trough is stated with institute line style respectively in two ends, described air channel connects.
The nozzle piece structure metal filled for microcavity the most according to claim 2, it is characterised in that: described line style major trough
Both sides are all vertically connected with at least two described line style nozzle slots.
The nozzle piece structure metal filled for microcavity the most according to claim 2, it is characterised in that: described line style nozzle
The width of groove is more than the width of described air channel.
The nozzle piece structure metal filled for microcavity the most according to claim 2, it is characterised in that: described line style nozzle
The depth bounds of groove is 1-1000 micron, and width range is 1-1000 micron.
The nozzle piece structure metal filled for microcavity the most according to claim 1, it is characterised in that: described drainage trough is
Face type drainage trough, including the face type groove connected with described through hole；Described type groove side connects with described air channel.
The nozzle piece structure metal filled for microcavity the most according to claim 6, it is characterised in that: described type groove
Lateral surface profile is circular.
The nozzle piece structure metal filled for microcavity the most according to claim 6, it is characterised in that: described type groove
Depth bounds is 1-1000 micron.
The nozzle piece structure metal filled for microcavity the most according to claim 1, it is characterised in that: described drainage trough is
Face offset-type drainage trough, including:
Article at least two, the line style nozzle slot connected with described through hole；
The face type groove that medial surface connects with described line style nozzle slot, described air channel respectively with lateral surface.
The nozzle piece structure metal filled for microcavity the most according to claim 9, it is characterised in that: described type groove
Depth bounds be 1-1000 micron；The depth bounds of described line style nozzle slot is 1-1000 micron, and width range is 1-1000
Micron.
The 11. nozzle piece structures metal filled for microcavity according to claim 1, it is characterised in that: described through hole position
Aperture area in described panel lower surface is more than or equal to its aperture area being positioned at described panel upper surface.
The 12. nozzle piece structures metal filled for microcavity according to claim 1, it is characterised in that: described through hole position
In the center of described panel or the center of deviateing described panel.
The 13. nozzle piece structures metal filled for microcavity according to claim 12, it is characterised in that: described panel exists
It is projected as circle on horizontal plane.
The 14. nozzle piece structures metal filled for microcavity according to claim 1, it is characterised in that: described nozzle piece
The surface of structure does not infiltrates with liquid metal to be filled.
15. 1 kinds of metal filled equipment of microcavity, it is characterised in that: the metal filled equipment of described microcavity includes such as claim 1-14
Nozzle piece structure described in any one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620614255.1U CN205723491U (en) | 2016-06-21 | 2016-06-21 | A kind of nozzle piece structure metal filled for microcavity and equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620614255.1U CN205723491U (en) | 2016-06-21 | 2016-06-21 | A kind of nozzle piece structure metal filled for microcavity and equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205723491U true CN205723491U (en) | 2016-11-23 |
Family
ID=57316037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620614255.1U Withdrawn - After Issue CN205723491U (en) | 2016-06-21 | 2016-06-21 | A kind of nozzle piece structure metal filled for microcavity and equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205723491U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107527861A (en) * | 2016-06-21 | 2017-12-29 | 中国科学院上海微系统与信息技术研究所 | A kind of nozzle chip architecture, equipment and the fill method metal filled for microcavity |
-
2016
- 2016-06-21 CN CN201620614255.1U patent/CN205723491U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107527861A (en) * | 2016-06-21 | 2017-12-29 | 中国科学院上海微系统与信息技术研究所 | A kind of nozzle chip architecture, equipment and the fill method metal filled for microcavity |
| CN107527861B (en) * | 2016-06-21 | 2024-05-24 | 中国科学院上海微系统与信息技术研究所 | Nozzle plate structure, device and filling method for filling microcavity metal |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10615110B2 (en) | Thin recon interposer package without TSV for fine input/output pitch fan-out | |
| CN107851615B (en) | Independent 3D stacking | |
| CN104051337B (en) | Manufacturing method and testing method for chip package of stereoscopically-stacked integrated circuit system | |
| US9679882B2 (en) | Method of multi-chip wafer level packaging | |
| KR101963984B1 (en) | Stacked semiconductor die assemblies with high efficiency thermal paths and associated systems | |
| US10615104B2 (en) | Modified leadframe design with adhesive overflow recesses | |
| US7446424B2 (en) | Interconnect structure for semiconductor package | |
| DE102010000269B4 (en) | Semiconductor package-on-package stack | |
| CN105118823A (en) | Stacked type chip packaging structure and packaging method | |
| KR101996154B1 (en) | Stacked semiconductor die assemblies with high efficiency thermal paths and associated systems | |
| CN107533985A (en) | Vertical stacking system in package and its manufacture method including first order nude film, the second level nude film of back-to-back stacking and third level nude film and corresponding first redistribution layer, the second redistribution layer and the 3rd redistribution layer | |
| US8461691B2 (en) | Chip-packaging module for a chip and a method for forming a chip-packaging module | |
| CN105140213A (en) | Chip packaging structure and chip packaging method | |
| CN106992170A (en) | The packaging system of multiple planes with embedded electronic device | |
| US10340254B2 (en) | Method of producing an interposer-chip-arrangement for dense packaging of chips | |
| CN105244347B (en) | A kind of embedded encapsulation and packaging method | |
| CN103400830B (en) | Multilayer chiop stacked structure and its implementation | |
| CN109192718A (en) | More wafer bonding structures and bonding method | |
| WO2018129908A1 (en) | Double-sided fan-out wafer level packaging method and packaging structure | |
| CN104576508B (en) | The forming method of silicon hole | |
| CN103066040A (en) | Wafer level penetrating silicon transmission structure and manufacturing method for microwave frequency band | |
| US9418876B2 (en) | Method of three dimensional integrated circuit assembly | |
| CN109037188A (en) | Semiconductor device packages | |
| CN113161325A (en) | Passive device module | |
| CN104766806B (en) | The method of wafer three-dimensional integration |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20161123 Effective date of abandoning: 20240524 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20161123 Effective date of abandoning: 20240524 |
|
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |