CN205711036U - A kind of device monitoring carborundum crystals furnace temperature - Google Patents
A kind of device monitoring carborundum crystals furnace temperature Download PDFInfo
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- CN205711036U CN205711036U CN201620557486.3U CN201620557486U CN205711036U CN 205711036 U CN205711036 U CN 205711036U CN 201620557486 U CN201620557486 U CN 201620557486U CN 205711036 U CN205711036 U CN 205711036U
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Abstract
A kind of device monitoring carborundum crystals furnace temperature includes monitoring device, industrial camera, industrial lens, narrow pass filter and attenuator；Described industrial lens install with industrial camera on, described industrial lens narrow pass filter is installed foremost, be provided with attenuator between described narrow pass filter and industrial lens；The described narrow pass filter infrared light by wavelength 800um to 1100um；Described industrial camera is connected with monitoring device.Having the beneficial effects that of technical scheme described in the utility model: the application of this device can effectively solve every technological deficiency that conventional art exists, has low cost, efficiency height and vision can directly observe the advantages such as thermometer hole situation.
Description
Technical field
This utility model belongs to silicon carbide growth technique field, particularly relates to a kind of dress monitoring carborundum crystals furnace temperature
Put.
Background technology
At present, PVT method (physical vapor transport) is the method that growth single-crystal silicon carbide is the most ripe.At PVT method carborundum
In single crystal growth process, generally using silicon carbide powder source to do raw material, its grower is by graphite crucible with in crucible outer wrap
Porous insulation graphite heat-insulation layer composition.Grow indoor temperature during silicon carbide monocrystal growth and can reach 2400 DEG C even more
Height, for reaching the accurate control to growth temperature, can only carry out infrared measurement of temperature temperature control to growth crucible top, bottom.And graphite
Crucible is easily to form a large amount of carbon dust on its surface at such high temperatures, and graphite heat-insulation layer then can produce more dust even
Granule, descends slowly and lightly to the thermometer hole on body of heater top, is accumulated to form temperature measuring optical path the most afterwards hinder, has a strong impact on temperature
The accurate control of degree, affects the normal growth of crystal then.
Meanwhile, during growing silicon carbice crystals, need in growth room, be constantly passed through Ar gas, and combine air pump and make raw
Long room air pressure is in stable dynamic equilibrium (coarse vacuum of typically less than 5mbar), the most stacked granule of thermometer hole,
Dust covers, it is impossible to clear up it from outside；And controllable cleaning plant is set in growth room, inevitably
Substituting into impurity in system, this is fatal for single crystal preparation.
It addition, especially for Gem Grade carborundum crystals, the temperature window of its growth is relatively wide, so heating power leads to
Frequently with opened loop control.For guaranteeing heating-up temperature, in the heating furnace of Gem Grade carborundum crystals, it is provided with thermometer hole, this thermometric
The diameter in hole only 10 millimeters, arranges infrared radiation thermometer on thermometer hole and measures temperature, but which exists certain defect: (1)
Such as aforementioned carborundum crystals production process, the thermometer hole of only 10 millimeters easily blocked after heating a period of time, affects temperature and sees
Survey.(2) current domestic general employing double color infrared temperature measuring instrument is converted into analog quantity after directly measuring and is directly output to control system
After be converted into temperature and show, it is impossible to check that thermometer hole gambles plug situation, need every stove to correct point for measuring temperature once.And it is existing with regarding
Costly, the E1RH-F2-V-0-0 video newly pushed away such as Lei Tai company of the U.S. aims at high accuracy Dual band IR to the monitoring device of frequency
Temperature measurer and the temperature measurer price containing window vision are the highest；Germany's far infrared industry vidicon price is higher, up to 200,000
One, unit.(3) after shove charge, the point for measuring temperature on crucible is not each all on same coordinate position, it is therefore desirable to every stove is both needed to by the time
After crucible is heated to more than 1000 degree, in the position adjusting infrared radiation thermometer and actual point for measuring temperature, and fixing infrared radiation thermometer props up
Frame.
Summary of the invention
This utility model is for the deficiencies in the prior art, it is proposed that a kind of device monitoring carborundum crystals furnace temperature, should
The application of device can effectively solve every technological deficiency that conventional art exists, and has low cost, efficiency height and energy vision direct
Observe the advantages such as thermometer hole situation.
A kind of device monitoring carborundum crystals furnace temperature described in the utility model include monitoring device, industrial camera,
Industrial lens, narrow pass filter and attenuator；
Described industrial lens is arranged on industrial camera, described industrial lens narrow pass filter, institute are installed foremost
State and be provided with attenuator between narrow pass filter and industrial lens, and, described narrow pass filter is equivalently-sized with attenuator；
The described narrow pass filter infrared light by wavelength 800um to 1100um；
Described industrial camera is connected with monitoring device, and, the I/O interface of described industrial camera includes numeral I/O interface
With triggering interface, the method for synchronization of described industrial camera is external trigger or continuous acquisition.
Further, described industrial camera is black and white camera.
Further, described industrial lens is M5018-MP2 type.
Further, the mode signal output of described industrial camera is the output of GigE gigabit Ethernet.
Further, the number of elements of described attenuator is more than or equal to 1.
Further, described narrow pass filter and attenuator is equivalently-sized.
Further, described monitoring device is the detection device of existing carborundum crystals production and application.
Having the beneficial effects that of technical scheme described in the utility model: (1) uses industrial camera can intuitively observe thermometer hole
Stopping state, to temperature accurately control provide guarantee.(2) by installing narrow logical optical filtering, effective mistake before industrial lens
Filter inessential spectrum, by installing attenuator before industrial lens, effectively reduce high temperature to industrial camera inner components
Damage.(3) in conventional solution, after crucible temperature is more than 1000 degree, needs to adjust bushing position and make thermometer hole position
Accurately it is directed at point for measuring temperature, there is the defect the longest, efficiency is low and cost is high；And the employing of industrial camera, it is not necessary to crucible
Carry out accurate position adjustment, there is efficiency height and the feature of low cost.(4) device for monitoring temperature described in the utility model tool
Have simple in construction, assemble easily, the advantage such as low cost, easy to use and visual inspection point directly perceived.
Accompanying drawing explanation
Fig. 1: the structural representation of a kind of device monitoring carborundum crystals furnace temperature described in the utility model.
Detailed description of the invention
In order to make those skilled in the art be more fully understood that the technical solution of the utility model, below in conjunction with specific embodiment
The utility model is described in further detail.
As it is shown in figure 1, a kind of device monitoring carborundum crystals furnace temperature described in the utility model include monitoring device,
Industrial camera, industrial lens, narrow pass filter and attenuator；Described industrial lens is arranged on industrial camera, described industry mirror
Head narrow pass filter is installed foremost, be provided with attenuator between described narrow pass filter and industrial lens；Described narrow logical
The optical filter infrared light by wavelength 800um to 1100um；Described industrial camera is connected with monitoring device.
Industrial lens described in the utility model is M5018-MP2 type.
For ensureing using effect, described industrial camera is that usually black and white camera, generally its I/O interface include numeral I/O
Interface and two kinds of interface of triggering；Generally its method of synchronization is external trigger or continuous acquisition；Generally its mode signal output is GigE
Gigabit Ethernet exports.
In actual use, owing to the too high emittance of testee temperature is too strong, for guaranteeing in industrial camera zero
The safety of parts, can be provided be more than according to the needs of time detecting temperature range between narrow pass filter and industrial lens
Attenuator equal to 1.
Common, fixing for ease of installing, described narrow pass filter is equivalently-sized with attenuator.
It addition, applicant is it should be strongly noted that monitoring device described in the utility model is existing carborundum crystals
The supervising device of production and application, described supervising device includes computer, panel computer, industrial computer, notebook computer.When
So, being provided with monitoring software in described supervising device, this monitoring software is used for determining in real time the temperature of crucible thermometer hole.
During actually used a kind of device monitoring carborundum crystals furnace temperature described in the utility model, for more preferably
Optimization monitored results, existing monitoring software can be carried out adaptation, this improvement is primarily directed to industrial camera pair
The most visual characteristic of thermometer hole is adjusted, and it adjusts the adjustment being primarily referred to as industrial camera exposure rate Yu temperature range,
Concrete mode is as follows:
Step one: after crucible is heated by high power, set 15mm*15mm rectangle temperature acquisition district；
Step 2: in timing cycle timing to temperature acquisition district collecting temperature (gather in such as 10 minutes 100 temperature or
Gather 80 times in gathering 120 times or 12 minutes in 8 minutes, determine with specific reference to being actually needed), then use bubbling queue pair
The temperature gathered in timing cycle carries out being arranged on earth by height；
Step 3: the thermometric numerical value taking front 2% asks for average A, and the temperature measurement data then taking front 21% to 30% is asked for averagely
Number B；
Step 4: compare average A and average B, determine difference, when difference exceedes specification error alarming value, prompting
Check thermometer hole；
Step 5: if the difference in step 4 is in specification error alarming value, according to exposure rate and temperature range value
Calculate measuring and calculating temperature；
Step 6: according to the precision of industrial camera, measuring and calculating temperature is carried out coefficient adjustment and determine sample temperature and export.
Wherein in step 5, in the range of different temperatures exposure value be respectively as follows: temperature below 1500 time exposure value be
50000, temperature exposure value when 1650 to 1500 spend is 36000, and temperature exposure value when 1900 to 1650 spend is 24000, temperature
Degree exposure value when 2000 to 1900 spend is 1000, and temperature exposure value when 2300 to 2000 spend is 200.
Above a kind of device monitoring carborundum crystals furnace temperature provided by the utility model is described in detail,
Principle and the embodiment of the application are set forth by embodiment used herein, and the explanation of above example is only intended to
Help understands the present processes and core concept thereof；Simultaneously for one of ordinary skill in the art, according to the think of of the application
Thinking, the most all will change, in sum, it is right that this specification content should not be construed as
The restriction of the application.
Claims (6)
1. the device monitoring carborundum crystals furnace temperature, it is characterised in that: the dress of described monitoring carborundum crystals furnace temperature
Put and include monitoring device, industrial camera, industrial lens, narrow pass filter and attenuator；
Described industrial lens is arranged on industrial camera, described industrial lens narrow pass filter is installed foremost, described narrow
Attenuator it is provided with between pass filter and industrial lens, and, described narrow pass filter is equivalently-sized with attenuator；
The described narrow pass filter infrared light by wavelength 800um to 1100um；
Described industrial camera is connected with monitoring device, and, the I/O interface of described industrial camera includes numeral I/O interface and touches
Sending out interface, the method for synchronization of described industrial camera is external trigger or continuous acquisition.
A kind of device monitoring carborundum crystals furnace temperature the most as claimed in claim 1, it is characterised in that: described industrial mirror
Head is M5018-MP2 type.
A kind of device monitoring carborundum crystals furnace temperature the most as claimed in claim 1, it is characterised in that: described attenuator
Quantity is more than or equal to 1.
A kind of device monitoring carborundum crystals furnace temperature the most as claimed in claim 1, it is characterised in that: described monitoring device
Detection device for existing carborundum crystals production and application.
A kind of device monitoring carborundum crystals furnace temperature the most as claimed in claim 1, it is characterised in that: described industrial camera
For black and white camera.
A kind of device monitoring carborundum crystals furnace temperature the most as claimed in claim 1, it is characterised in that: described industrial camera
Mode signal output be GigE gigabit Ethernet output.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620557486.3U CN205711036U (en) | 2016-06-12 | 2016-06-12 | A kind of device monitoring carborundum crystals furnace temperature |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620557486.3U CN205711036U (en) | 2016-06-12 | 2016-06-12 | A kind of device monitoring carborundum crystals furnace temperature |
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| CN205711036U true CN205711036U (en) | 2016-11-23 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113209915A (en) * | 2020-08-12 | 2021-08-06 | 本合(天津)科技有限公司 | Constant-temperature reaction system for lubricating oil additive production and preparation method thereof |
| CN114318515A (en) * | 2021-12-16 | 2022-04-12 | 唤月照雪(厦门)科技有限责任公司 | PVT growth device for large-size silicon carbide single crystal |
| CN117552107A (en) * | 2023-11-14 | 2024-02-13 | 江苏超芯星半导体有限公司 | Control method for silicon carbide growth process, silicon carbide and device |
-
2016
- 2016-06-12 CN CN201620557486.3U patent/CN205711036U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113209915A (en) * | 2020-08-12 | 2021-08-06 | 本合(天津)科技有限公司 | Constant-temperature reaction system for lubricating oil additive production and preparation method thereof |
| CN114318515A (en) * | 2021-12-16 | 2022-04-12 | 唤月照雪(厦门)科技有限责任公司 | PVT growth device for large-size silicon carbide single crystal |
| CN117552107A (en) * | 2023-11-14 | 2024-02-13 | 江苏超芯星半导体有限公司 | Control method for silicon carbide growth process, silicon carbide and device |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 071066 No. 6001, North Third Ring Road, Baoding City, Hebei Province Patentee after: Hebei Tongguang Semiconductor Co.,Ltd. Address before: 071051 4th floor, block B, building 6, University Science Park, 5699 North 2nd Ring Road, Baoding City, Hebei Province Patentee before: HEBEI TONGGUANG CRYSTAL Co.,Ltd. |
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| CP03 | Change of name, title or address |