CN205679203U - A kind of 3D laser scanning device of external feedback control - Google Patents
A kind of 3D laser scanning device of external feedback control Download PDFInfo
- Publication number
- CN205679203U CN205679203U CN201620436961.1U CN201620436961U CN205679203U CN 205679203 U CN205679203 U CN 205679203U CN 201620436961 U CN201620436961 U CN 201620436961U CN 205679203 U CN205679203 U CN 205679203U
- Authority
- CN
- China
- Prior art keywords
- galvanometer
- laser
- light
- lens
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
A kind of 3D laser scanning device of external feedback control, including laser instrument, plus lens, dispersing lens, scanning galvanometer, block window control system, feedback system, laser instrument is incident upon on plus lens after going out light, plus lens is incident upon on dispersing lens after going out light, dispersing lens is incident upon on scanning galvanometer after going out light, control system is used for controlling laser instrument and scanning galvanometer, described scanning galvanometer is positioned at dispersing lens and goes out at light laser beam waist, feedback system is arranged on the oblique upper of scanning galvanometer, receive the reflection light of scanning galvanometer, the feedback control that is connected with control system galvanometer works.This utility model is modulated owing to receiving optical signal, set feedback system can monitor the vibrations more than 10M/S, the operating frequency of 3D laser scanning device 10K/S is completely covered, thoroughly achieves the real-time monitoring to surface sweeping galvanometer duty, thus substantially increase the precision of laser scanning module.
Description
Technical field
This utility model belongs to micro photo-electro-mechanical field, particularly to a kind of 3D laser scanning device.
Background technology
Specific active scan formula laser is irradiated on object under test, then the structure light modulated by body surface by shooting
Count out the range information of body surface, be the most conventional a kind of 3D scanning imaging technology.One important bottleneck of this technology
In the working condition with the most real-time monitoring scanning galvanometer, the general change using built in arrangement monitoring galvanometer resistance capacitance
Realizing, but limited by rate of scanning, effect is unsatisfactory.
Existing scanning galvanometer feedback system is built-in mostly, during scanning galvanometer, has nonconducting groove around minute surface
Existence, by eyeglass isolate；Then the accurate capacitance caused, resistance are rotated by uncharged detection comb to obtaining minute surface
Change obtains the job information of galvanometer.And the prominent drawback of both signals of telecommunication to be in response to frequency the highest.Relative to laser
Scanning module is close to 10k/S frequency, and monitoring accuracy is inadequate, thus allows laser scanning quality be greatly reduced.
Summary of the invention
Unresolved the problems referred to above, this utility model provides the 3D laser scanning device of a kind of external feedback control, is adopted
Technical scheme be:
The 3D laser scanning device of a kind of external feedback control, including laser instrument, plus lens, dispersing lens, scanning is shaken
Mirror, blocks window control system, feedback system, and laser instrument is incident upon on plus lens after going out light, and plus lens is incident upon after going out light
On dispersing lens, dispersing lens is incident upon on scanning galvanometer after going out light, and control system is used for controlling laser instrument and scanning galvanometer, institute
Stating scanning galvanometer to be positioned at dispersing lens and go out at light laser beam waist, feedback system is arranged on the oblique upper of scanning galvanometer, and reception is swept
Retouching the reflection light of galvanometer, the feedback control that is connected with control system galvanometer works.
Further, described feedback system includes: light portal, photo-sensitive cell, control chip.
Particularly, described light portal is coated with anti-reflection film, improves feedback signal quality.
Further, the wavelength of the light that described anti-reflection film sends with described laser instrument matches.
This utility model is modulated owing to receiving optical signal, and set feedback system can monitor the vibrations more than 10M/S,
The operating frequency of 3D laser scanning device 10K/S is completely covered, thoroughly achieves the real-time monitoring to surface sweeping galvanometer duty,
Thus substantially increase the precision of laser scanning module.
Accompanying drawing explanation
Fig. 1 is this utility model structural representation
Fig. 2 is this utility model feedback system structure schematic diagram
Detailed description of the invention
As it is shown in figure 1, the 3D laser scanning device of a kind of external feedback control, including laser instrument 102, plus lens 104,
Dispersing lens 106, scanning galvanometer 108, feedback system 110 and control system 112.
Laser instrument 102 is incident upon after going out light on plus lens 104, and plus lens 104 is incident upon dispersing lens 106 after going out light
On, dispersing lens 106 is incident upon after going out light on scanning galvanometer 108, described scanning galvanometer be positioned at dispersing lens 106 go out light line swash
At beam waist, it goes out light and is incident upon target area, and control system 112 is for controlling laser instrument 102 and scanning galvanometer 108.
Described laser instrument 102, its wavelength can be all laser wavelengths, infrared, it is seen that light, or ultraviolet, according to
Practical service environment selects laser instrument 102 power, and this laser instrument 102 has colimated light system, and its emerging beam is Gaussian beam, greatly
The little launching spot requirement meeting plus lens 104 and dispersing lens 106.
Described plus lens 104, modulates beam energy so that mid portion Energy distribution is high, and marginal distribution is weak.Described
Plus lens 104, can be cylindrical mirror.Owing to the line laser intermediate energy of dispersing lens 106 shaping is distributed low, edge energy divides
Cloth is strong, so making line laser Energy distribution after twice modulation evenly.
Described dispersing lens 106, becomes by incoming laser beam into line laser bundle.Its disposing way is: ridge is for going out light side
To.In certain embodiments, plus lens 104 and dispersing lens 106 can make an optics.
Described scanning galvanometer 108, the most in one direction can twisting vibration, it should not have object to hide in going out optical range
Gear.
Described feedback system 110 receives the reflection light of scanning galvanometer 108, and the feedback control that is connected with control system 112 is swept
Retouch galvanometer 108 to work.
Described control system 112 possesses energy of lasers modulation function, can control scanning under feedback system 110 coordinates
Galvanometer 108 vibrates and extracts scanning galvanometer 108 and reverses and angle information, can control under the control of external command or built-in command
Scanning galvanometer 108 processed motion and the brightness of laser instrument 102 so that realize specific light curtain figure.
Described feedback system 110 is as in figure 2 it is shown, feedback system 110 is arranged on the top of scanning galvanometer 108, by light inlet window
Mouth 202 receives the scanning light beam of vibration mirror reflected, then by photo-sensitive cell 204, converts optical signals to the signal of telecommunication, is sent to control core
Sheet 206, in the control system 112 coordinating scanning galvanometer 108, it is achieved the feedback control to whole 3D scanning process.
Claims (4)
1. a 3D laser scanning device for external feedback control, including laser instrument, plus lens, dispersing lens, scanning galvanometer,
Blocking window control system, feedback system, laser instrument is incident upon on plus lens after going out light, and plus lens is incident upon scattering after going out light
On lens, dispersing lens is incident upon on scanning galvanometer after going out light, and control system is used for controlling laser instrument and scanning galvanometer, its feature
Being, described scanning galvanometer is positioned at dispersing lens and goes out at light laser beam waist, and feedback system is arranged on the oblique upper of scanning galvanometer,
Receiving the reflection light of scanning galvanometer, the feedback control that is connected with control system galvanometer works.
Laser scanning device the most according to claim 1, it is characterised in that described feedback system includes: light portal, sense
Optical element, control chip.
Laser scanning device the most according to claim 2, it is characterised in that described light portal is coated with anti-reflection film, improves
Feedback signal quality.
Laser scanning device the most according to claim 3, it is characterised in that described anti-reflection film sends with described laser instrument
The wavelength of light matches.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620436961.1U CN205679203U (en) | 2016-05-12 | 2016-05-12 | A kind of 3D laser scanning device of external feedback control |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620436961.1U CN205679203U (en) | 2016-05-12 | 2016-05-12 | A kind of 3D laser scanning device of external feedback control |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205679203U true CN205679203U (en) | 2016-11-09 |
Family
ID=57435760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620436961.1U Active CN205679203U (en) | 2016-05-12 | 2016-05-12 | A kind of 3D laser scanning device of external feedback control |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205679203U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108562229A (en) * | 2018-06-08 | 2018-09-21 | 厦门麦克玛视电子信息技术有限公司 | A kind of die forming detection device |
-
2016
- 2016-05-12 CN CN201620436961.1U patent/CN205679203U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108562229A (en) * | 2018-06-08 | 2018-09-21 | 厦门麦克玛视电子信息技术有限公司 | A kind of die forming detection device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN211669428U (en) | Automatic focusing device based on inner coaxial vision | |
| CN205301703U (en) | Laser light curtain projection scanning device | |
| CN107843886B (en) | Non-mechanical scanning laser radar optical device and laser radar system | |
| CN103658140B (en) | A kind of optics integer type device of Portable Laser Washing Machine | |
| CN110488247A (en) | A kind of two dimension MEMS scanning galvanometer laser radar system | |
| CN105241857A (en) | Super-resolution imaging system | |
| CN107388983B (en) | A kind of uniform scanning laser line generation system and method for energy | |
| CN109297940A (en) | One kind laser defocusing amount self-checking device and its adjusting method under micro-meter scale | |
| CN106441571A (en) | Light source module and line scanning multispectral imaging system using the same | |
| CN106773025B (en) | Focusing lens and lens vibrating type laser scanning system | |
| CN208743253U (en) | A kind of integrated laser cleaning electro-optical system | |
| CN103245613A (en) | Focalizing system and method of divergent terahertz light source optic light path | |
| CN205679203U (en) | A kind of 3D laser scanning device of external feedback control | |
| DE112018005682T5 (en) | OPTICAL ELEMENTS WITH FOCUS REGION FOR HIGH-PERFORMANCE OPTICAL SCANNERS | |
| CN109512382A (en) | A kind of Line beam modulation module and retinal imaging device | |
| CN106970049A (en) | Transmissivity distribution measurement system and method | |
| CN104967759A (en) | Scanning imaging system for weak light signals | |
| CN107063092B (en) | A kind of coaxial calibration system of double light sources that big visual field quickly scans and method of adjustment | |
| CN107390225B (en) | Laser ranging device and application method thereof | |
| CN206248212U (en) | A kind of light source module and the line scanning multi-optical spectrum imaging system using it | |
| CN206876569U (en) | A kind of terahertz imaging system | |
| CN220381291U (en) | Laser radar system of common light path | |
| CN105510234A (en) | Optical fiber sensing-based laser excitation heat wave signal detection device | |
| CN104951725A (en) | Laser barcode scanner and scanning engine thereof | |
| CN112186475B (en) | Laser pulse shaping device and method, pulse shaper and optical system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |