CN205539927U - Two -sided exposure system of slope is directly write to DMD projection optical path laser - Google Patents
Two -sided exposure system of slope is directly write to DMD projection optical path laser Download PDFInfo
- Publication number
- CN205539927U CN205539927U CN201620065117.2U CN201620065117U CN205539927U CN 205539927 U CN205539927 U CN 205539927U CN 201620065117 U CN201620065117 U CN 201620065117U CN 205539927 U CN205539927 U CN 205539927U
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- China
- Prior art keywords
- dmd
- light path
- optical path
- projection optical
- projecting light
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Abstract
The utility model discloses a two -sided exposure system of slope is directly write to DMD projection optical path laser belongs to the formula of directly writing litho machine fast scan exposure technical field. Include in vertical side tilt up and be parallel to each other DMD projection optical path (2) on arranging base (4) both ends in, and cross -distribution in DMD integrated component (3) on DMD projection optical path (2), DMD integrated component (3) on both ends DMD projection optical path (2) are symmetrical arrangement each other, direction removal parallel with PCB board (1) of being expose can be followed in DMD projection optical path (2), PCB board (1) of being expose can follow the horizontal direction and remove. This two -sided exposure system of slope is directly write to DMD projection optical path laser can expose by exposure workpiece's tow sides simultaneously for the efficiency of work promotes the one time, simultaneously, reducible light path quantity still, better improvement the productivity, reduced the cost, increased the efficiency of working.
Description
Technical field
This utility model relates to a kind of exposure system, and specifically a kind of DMD projecting light path laser direct-writing tilts two-sided
Exposure system, belongs to direct-write type lithography machine quick scan exposure technical field.
Background technology
Write-through photoetching technique be development in recent years faster, to substitute the shadow of the board-like photoetching technique of traditional mask
As direct transfer techniques, in quasiconductor and PCB production field, there is increasingly consequence.Utilize this skill
Art with shortened process, and can reduce production cost.In the market the direct-write type lithography machine of main flow mostly with
Single work stage mode is scanned exposure, after first having been exposed in the A face being exposed workpiece, then carries out reprint,
Then B face is exposed.In single workpiece table system, for exposure substrate upper plate, be directed at, expose,
Lower plate is carried out successively.According to current structural system, each operating process has reached the time-consuming upper limit,
Being difficult to shorten the operating time of certain operating procedure, the direct-write type lithography machine of i.e. single work stage is due to each operation stream again
The serial nature of journey, has been difficult to improve production capacity more.
Utility model content
The problem existed for above-mentioned prior art, this utility model provides a kind of DMD projecting light path laser direct-writing
Tilt double-sided exposure system, it is possible to exposure simultaneously is exposed the tow sides of workpiece so that the improved efficiency of work
One times, meanwhile, also can reduce light path quantity, preferably improve production capacity, reduce cost, the efficiency of increase work.
To achieve these goals, this DMD projecting light path laser direct-writing inclination double-sided exposure system is included in vertically
Side is inclined upwardly and the DMD projecting light path being placed on base two ends that is parallel to each other；
And the DMD integrated package that cross-distribution is in described DMD projecting light path, in the DMD projecting light path of two ends
DMD integrated package arrange symmetrically；
Described DMD projecting light path can move along the direction parallel with the pcb board being exposed；
The described pcb board being exposed can move in the horizontal direction.
Further, the DMD projecting light path on described base two ends is 1 ° with vertical direction angulation scope and arrives
89°。
Further, described DMD projecting light path is connected servomotor with the stepping axle of the pcb board being exposed.
Compared with prior art, this DMD projecting light path laser direct-writing inclination double-sided exposure system can expose simultaneously
It is exposed the tow sides of workpiece so that the improved efficiency of work one times, meanwhile, also can reduce light path quantity,
Preferably improve production capacity, decrease cost, add the efficiency of work.
Accompanying drawing explanation
Fig. 1 is agent structure schematic diagram of the present utility model；
In figure: 1, pcb board, 2, DMD projecting light path, 3, DMD integrated package, 4, base.
Detailed description of the invention
Below in conjunction with the accompanying drawings this utility model is described further.
As it is shown in figure 1, this DMD projecting light path laser direct-writing tilts double-sided exposure system includes in the vertical direction
Tilt and the DMD projecting light path 2 being placed on base 4 two ends that is parallel to each other；
And the DMD integrated package 3 that cross-distribution is in described DMD projecting light path 2, two ends DMD projected light
DMD integrated package 3 on road 2 is arranged symmetrically；
Two ends DMD projecting light path 2 can move along the direction parallel with the pcb board 1 being exposed；
The described pcb board 1 being exposed can move in the horizontal direction.
Described DMD projecting light path 2 is made up of one group of small planar mirror array.LASER Light Source passes through illumination light
Laser is got in described DMD projecting light path 2 by road, reflexes on one side.When described DMD projecting light path 2 receives
Corresponding plane mirror finite element rotation certain angle is controlled by software processes during the picture signal sent to computer
Laser vertical is irradiated on workpiece.The most described DMD projecting light path 2 is to utilize the micro mirror on DMD device by number
Word signal changes into graphic projection on corresponding base material through exciting of oversampling circuit.
Further, the DMD projecting light path 2 on described base 4 two ends is 1 ° with vertical direction angulation scope
To 89 °.This angular range arbitrarily can regulate according to needs of production, meets different Production requirements.
Further, described DMD projecting light path 2 is connected servomotor with the stepping axle of the pcb board 1 being exposed,
Coordinate fine control element, drive screw mandrel, it is achieved the movement of DMD projecting light path 2 and the pcb board 1 being exposed.
The operation principle that this DMD projecting light path laser direct-writing tilts double-sided exposure system is as follows:
The pcb board 1 being exposed is placed in the centre of two ends DMD projecting light path 2, and the angle of inclination of pcb board 1
Keep consistent with DMD projecting light path 2 so that DMD projecting light path 2 and the pcb board 1 being exposed keep hanging down
Directly, during exposure, two ends DMD projecting light path 2 can in the horizontal direction and parallel with the pcb board 1 being exposed
Direction is moved, the most right by two ends cross-distribution DMD integrated package 3 in described DMD projecting light path 2
The two-sided of pcb board 1 being exposed is exposed.
In sum, this DMD projecting light path laser direct-writing inclination double-sided exposure system can expose simultaneously be exposed
The tow sides of workpiece so that the improved efficiency of work one times, meanwhile, also can reduce light path quantity, preferably
Improve production capacity, decrease cost, add the efficiency of work.
Claims (3)
1. a DMD projecting light path laser direct-writing tilts double-sided exposure system, it is characterised in that
It is included on vertical direction the DMD projecting light path (2) tilting and being parallel to each other to be placed on base (4) two ends；
And the DMD integrated package (3) that cross-distribution is on described DMD projecting light path (2), two ends DMD
DMD integrated package (3) in projecting light path (2) is arranged symmetrically；
Described DMD projecting light path (2) can be moved along the direction parallel with the pcb board (1) being exposed；
The described pcb board (1) being exposed can move in the horizontal direction.
A kind of DMD projecting light path the most according to claim 1 laser direct-writing tilts double-sided exposure system,
It is characterized in that,
DMD projecting light path (2) on described base (4) two ends and vertical direction angulation scope are 1 °
To 89 °.
A kind of DMD projecting light path the most according to claim 1 laser direct-writing tilts double-sided exposure system,
It is characterized in that,
Described DMD projecting light path (2) is connected servomotor with the stepping axle of the pcb board (1) being exposed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620065117.2U CN205539927U (en) | 2016-01-22 | 2016-01-22 | Two -sided exposure system of slope is directly write to DMD projection optical path laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620065117.2U CN205539927U (en) | 2016-01-22 | 2016-01-22 | Two -sided exposure system of slope is directly write to DMD projection optical path laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205539927U true CN205539927U (en) | 2016-08-31 |
Family
ID=56768721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620065117.2U Expired - Fee Related CN205539927U (en) | 2016-01-22 | 2016-01-22 | Two -sided exposure system of slope is directly write to DMD projection optical path laser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205539927U (en) |
-
2016
- 2016-01-22 CN CN201620065117.2U patent/CN205539927U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 221000 west side of Hengshan Road, Pizhou City, Xuzhou City, Jiangsu Province Patentee after: Jiangsu Yingsu integrated circuit equipment Co.,Ltd. Address before: 221399 Huashan Road, Pizhou Economic Development Zone, Xuzhou, Jiangsu Patentee before: JIANGSU YINGSU PHOTOELECTRIC TECHNOLOGY Co.,Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160831 Termination date: 20220122 |