CN205452244U - 半导体成膜设备、晶圆自动定位卡紧结构 - Google Patents
半导体成膜设备、晶圆自动定位卡紧结构 Download PDFInfo
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CN105448785A (zh) * | 2015-12-31 | 2016-03-30 | 北京七星华创电子股份有限公司 | 半导体成膜设备、晶圆自动定位卡紧结构及卡紧方法 |
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CN105448785A (zh) * | 2015-12-31 | 2016-03-30 | 北京七星华创电子股份有限公司 | 半导体成膜设备、晶圆自动定位卡紧结构及卡紧方法 |
CN105448785B (zh) * | 2015-12-31 | 2018-12-18 | 北京北方华创微电子装备有限公司 | 半导体成膜设备、晶圆自动定位卡紧结构及卡紧方法 |
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Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
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Effective date of registration: 20180104 Address after: 100176 No. 8, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |