CN205394861U - Excellent squaring machine of horizontal list of monocrystalline silicon - Google Patents

Abstract

The utility model belongs to the technical field of the crystal silicon cutting, in particular to excellent squaring machine of horizontal list of monocrystalline silicon. This squaring machine includes the lathe bed device, install at the aircraft nose mounting bracket device of lathe bed device one side, install the gauze device on aircraft nose mounting bracket device, the lathe bed device includes the lathe bed base, install headstock subassembly and tailstock subassembly on the lathe bed base, install the linear guide who is connected on the lathe bed base with the tailstock subassembly. This squaring machine has reached horizontal cutting, non cohesive gel, trimming net, automatic to brilliant line and the automatic high -efficient processing effect that goes up the cutting simultaneously of unloading, four sides not to simple process, convenient operation, processing cost are hanged down, easily realize the automation according with the demand of user to equipment.

Description

The horizontal single rod excavation machine of a kind of monocrystal silicon

Technical field

This utility model relates to crystal silicon cutting technique field, particularly to the horizontal single rod excavation machine of a kind of monocrystal silicon.

Background technology

The method for making of monocrystal silicon usually first prepares polysilicon or amorphous silicon, then from melt, bar-like single crystal silicon is grown by vertical pulling method or floating zone method, melted elemental silicon silicon atom when solidification is arranged in many nucleus with diamond lattice, if these nucleus grow up to the crystal grain that high preferred orientation is identical, then these crystal grain parallel junction just crystallize into monocrystal silicon altogether.Monocrystal silicon, also referred to as silicon single crystal, is most basic material in electronic information material and photovoltaic industry, belongs to semi-conducting material class.Monocrystal silicon has penetrated into every field in national economy and science and techniques of defence.

Excavation machine of the prior art adopts vertical evolution, is first sticked with glue by bar and is connected in crystal holder, then utilizes electromagnetic technique crystal holder to be inhaled on pallet, and last cutting head cuts from top to bottom, every time 16 or 25 bars of cutting；Clipping time is long, bonding and the blanking of silicon rod takies a large amount of artificial and time, cut rear head cannot directly return, need to cut off gauze and pallet pull-out could be carried out blanking, gauze cuts rear not reproducible utilization, causes the waste of consumptive material, and also bar is carried out degumming process during blanking, operation is loaded down with trivial details, operation inconvenience；On the whole, tradition monocrystal silicon excavation machine complex process, non-cutting time is long, and cost of labor is high, and production efficiency is low, and line consumption is higher, threading difficulty, operation inconvenience.

Now, country extremely payes attention to exploitation and the application of new forms of energy, and put into substantial contribution photovoltaic industry is helped, the demand of domestic and international monocrystal silicon is continuously increased, device fabrication manufacturer has been proposed for manufacturing the idea of the automatic production line of monocrystal silicon, and evolution is a very important link in production line, it carries the task that the pole blocked is processed into square rod, so that the grinding process in lower road, and to realize the automatic production line of monocrystal silicon, when carrying out evolution and grinding process, bar is required for horizontal putting, and the equipment of tradition evolution is vertical putting, also need to carry out degumming process, it is realize the one of automatic production line to hinder greatly, therefore, there is provided a kind of and horizontal can either put and be avoided that single rod evolution equipment of degumming process and gauze waste is significant.

Utility model content

In view of this, this utility model provides the horizontal single rod excavation machine of a kind of monocrystal silicon, a kind of horizontal cutting that this utility model provides a kind of, non cohesive gel, not trimming net, automatically to the cutting simultaneously of brilliant line, automatic loading/unloading, four sides, the horizontal single rod excavation machine of monocrystal silicon that efficiency is high.

In order to solve above-mentioned utility model purpose, this utility model by the following technical solutions:

The horizontal single rod excavation machine of a kind of monocrystal silicon, including lathe bed device, the head installing rack device being arranged on lathe bed device side, the gauze device that is arranged on head installing rack device；Lathe bed device includes lathe bed base, be installed on lathe bed base head frame assembly and tailstock assemblies, the headstock that head frame assembly includes the headstock, be arranged on the headstock connects seat and is arranged on the headstock and connects the clamping cylinder on seat, tailstock assemblies includes tailstock, be arranged on tailstock elongation bar, connect tailstock on the wand, engageable and connect seat and be connected the servo electric jar that seat is connected with tailstock, elastic component and the floating clamp of elastic component support are set inside elongation bar, and floating clamp runs through tailstock and connects seat, and elongation bar surface also sets up the fluting for the turnover of gauze device.

Lathe bed device is except as the basis of equipment, and Main Function is that bar is carried out horizontal type level clamping, it is achieved that the horizontal of monocrystal silicon is put, and makes the automated production of manufacture monocrystal silicon be possibly realized；Connect seat by the headstock and bar main body is carried out level and steps up by tailstock connection seat, the flaw-piece of bar is clamped by the clamping cylinder of the headstock and tailstock end floating clamp, the floating clamp of tailstock end realizes floating clamping mechanism under the effect of elastic component, the cylinder that steps up of the headstock realizes fixing to clamp, the lathe bed device that this utility model provides adopts the mode floated in fixing one end, one end that bar is stepped up, and solves the situation of unbalance stress during the out-of-flatness of bar two ends；And extending the fluting on bar upper surface makes gauze device make diamond wire enter in fluting after having cut silicon rod, so can avoid that prior art has cut rear cutting head cannot directly return, need to cut off gauze and pallet pull-out could be carried out blanking, the problem of not reproducible utilization after causing gauze to be cut.

As preferably, the line slideway that lathe bed device also includes being arranged on lathe bed base and is connected with tailstock assemblies；Tailstock assemblies also includes the fixing seat being fixed on lathe bed base, and servo electric jar one end is connected with fixing seat by tailstock hinged seat, and the servo electric jar other end is connected seat by electricity cylinder rod connection seat and is connected with tailstock；Also set up tailstock jacking block bottom tailstock assemblies, bottom head frame assembly, also set up headstock jacking block；Servo electric jar periphery can arrange the protective cover of protection electricity cylinder, and guide rail can also arrange guide rail protection cover.By driven by servomotor tailstock mobile bar adapting to different length on line slideway；Headstock jacking block and tailstock jacking block are as mechanical position limitation, it is ensured that once equipment is out of control, and gauze device will not collide with the headstock in lathe bed device and tailstock.

Mechanism's installing rack device includes head rack, is arranged on the feeder assembly of upper end, is arranged on the line slideway being parallel to each other at the upper and lower two ends of head rack, is arranged on the splicing support outside head rack and is arranged on the pulp-collecting box on splicing support；Splicing support is arranged below the line slideway moved for splicing support, and splicing support side also sets up the cylinder that splicing support can be driven to move.As preferably, being arranged on the line slideway at the upper and lower two ends of head rack and be respectively provided with the slide block being connected with gauze device.

Feeder assembly includes the shaft coupling of the servomotor, ball-screw and connection servomotor and the ball-screw that are arranged on head rack；Ball-screw two ends arrange the support unit of back-up roller ballscrew, and ball-screw arranges the feed screw nut that gauze device can be driven to move.

The mechanism mounting device that this utility model provides can realize the disposable cutting from bar top to tail end of the gauze device and just can complete evolution, after having cut, pulp-collecting box can complete the collection of flaw-piece under air cylinder driven, and line slideway all adopts the structure of two slide blocks of a guide rail, good stress performance, makes moving member operate steadily.

Gauze device includes gauze installing rack, the drivewheel supporting seat being arranged on gauze installing rack, the drive wheel assemblies being arranged on drivewheel supporting seat, the follower supporting seat being arranged on gauze installing rack, the follower assembly being arranged on follower supporting seat and the reverse wheel assembly being arranged on gauze installing rack.

The gauze device that this utility model provides includes two groups of drive wheel assemblies and six groups of follower assemblies, and often group drive wheel assemblies drives three groups of cutting wheel assemblies, by six groups of reverse wheel assemblies, forms groined type gauze on cutting wheel, and once cutting just can complete evolution.Cutting wheel is by driven by servomotor, it is ensured that gauze cutting force and gauze tension stability, and the cutting foot wheel abrasion little life-span is long, and reliability is high.

The gauze device that this utility model provides, its drive wheel assemblies includes active cutting wheel that drive sprocket axle, the bearing being arranged on drive sprocket axle and the drive wheel bearing case that drive motor is connected with drive motor coordinate with drive wheel bearing case and is arranged on the several adjustment pads actively cut on the drive sprocket axle taking turns end；Wherein, actively offering wire casing on cutting wheel, the quantity of wire casing ratio adjusts few one of pad quantity, and the distance of adjacent wire casing is equal with the thickness adjusting pad, drive sprocket axle end cap can also be set in drive sprocket axle termination, it is possible to arranges drive wheel bearing case end cap on the right side of drive wheel bearing case.

The gauze device that this utility model provides, its follower assembly includes the follower bearing holder (housing, cover) passively cutting wheel and passive cutting wheel inner hole of cutting wire cabling, is arranged on bearing follower bearing holder (housing, cover) within, is arranged on the passive wheel shaft of bearing centre and is arranged on passive cutting and take turns the several adjustment pads on the passive wheel shaft of end；Wherein, passive cutting wheel offering wire casing, the quantity of wire casing ratio adjusts few one of pad quantity, and the distance of adjacent wire casing is equal with the thickness adjusting pad；Axis of a movable block bearing sleeve end cap can also be set in follower bearing holder (housing, cover) one end.

The gauze device that this utility model provides, its reverse wheel assembly includes the reverse wheel bearing holder (housing, cover) of the commutation guide wheel for commutating and reverse wheel inner hole, is arranged on the bearing within reverse wheel bearing holder (housing, cover) and is arranged on the commutation wheel shaft of bearing centre；Commutation wheel shaft is installed the pressing plate for positioning bearing, wire casing is offered by commutation guide wheel, it is also possible to reverse wheel bearing (ball) cover is set in reverse wheel bearing holder (housing, cover) one end.

All cutting wheels and reverse wheel outer ring that this utility model provides all adopt polyurethane material, are coated with post-treatment wire casing, have certain degree of hardness, do not damage line of cut；The setting adjusting pad on the upper wire casing of cutting wheel and wheel shaft substantially increases the replacing efficiency cutting wheel, uses position when changing wire casing by minimizing cutting wheel sheet after the wire casing abrasion on cutting wheel；In prior art, multiple cutting wheels are arranged on same main shaft, without relative translation between each cutting wheel, when after the wire casing abrasion of one of them cutting wheel, need integral replacing wire casing, and change wire casing and need to adjust operating position and the position of some reverse wheels, also need afterwards to carry out the adjustment that each reverse wheel is coplanar, very very complicated, replacing efficiency is low, the wire casing of rail network structure of the present utility model and cutting wheel and the setting of pad, when after the upper wire casing abrasion of cutting wheel, only need to dismantle adjustment pad makes the cutting installed on cutting axis and axle thereof wheel move integrally, can reach to change the effect of cutting wire casing, do not need to adjust workbench and reverse wheel etc., convenient and swift, substantially increase replacing efficiency, and do not affect cutting wheel coplanarity.

The excavation machine that this utility model provides also includes the Winder being arranged on lathe bed device one end, and Winder includes the spooler apparatus arranged on thread fixing plate, the row's of being arranged on thread fixing plate being arranged on lathe bed base, the bus cable device arranged on thread fixing plate being arranged on roll both sides and the tenslator on the row's of being arranged on thread fixing plate.

Wherein, spooler apparatus includes the roll mounting seat on the row's of being arranged on thread fixing plate, the retractable cable spool that is arranged in roll mounting seat is connected with retractable cable spool driving mechanism and the lower section being arranged on retractable cable spool for braking the brake unit of retractable cable spool.

Bus cable device includes the linear module on the row's of being arranged on thread fixing plate, it is arranged on the glass pulley on linear module slide block by winding displacement slide, it is connected with linear module and is used for the driving mechanism driving glass pulley to move, line of cut is imported, derive the first guide roller and second guide roller of tenslator, it is arranged on the upper and lower two ends of linear module and for limiting the limit switch of glass pulley displacement, it is connected with glass pulley and is used for the offset sensor rectified a deviation, and the rustless steel protective cover for protecting.

Tenslator is arranged on row's thread fixing plate by mounting seat, and described tenslator includes straining pulley, tension axis, respectively connection straining pulley and the tension arm of tension axis, the angular displacement sensor being arranged on tension axis and the air cylinder driven mechanism driving tension axis to rotate.

Bus cable device is for controlling take-up and the unwrapping wire of cutting wire during equipment operation, and carries out winding displacement by a constant pitch；Retractable cable spool in Winder winds diamond wire uniformly, by the driving mechanisms control in spooler apparatus, drives retractable cable spool to come and go at a high speed and rotate, make the diamond wire being covered with in spool be wound to gauze device through devices such as conducting mechanisms.

The excavation machine that this utility model provides also includes automatization's handling equipment of being arranged on lathe bed device side, running gear that the mechanical hand that automatic loading and unloading device includes bearing support, the loading and unloading carriage device of transport bar, the mechanical hand running gear that is arranged on bearing support are connected with mechanical hand running gear is connected with mechanical hand and be arranged on bearing support to crystalline substance line apparatus.

Loading and unloading carriage device includes loading and unloading station, for the corresponding sensor of the dolly of loading and unloading, the guide rail moved for loading and unloading dolly and the up and down material station that is arranged on bearing support；As preferably, loading and unloading carriage device can also include V-type locating piece, revolution clamping cylinder and guide rail, loading and unloading dolly is directed to appointment position and positions by V-type locating piece, revolution clamping cylinder, and sensor is arranged on the loading and unloading station place of bearing support, can detect each station with or without bar；Bar can be transported to appointment position and position by loading and unloading carriage device automatically, and can detect the presence of bar.

Loading and unloading dolly is directed to appointment position along guide rail under the effect of driving device and positions, mechanical hand is clamped bar by air cylinder driven, after clamping, lowering or hoisting gear is driven lifting action by servomotor, reductor and precision ball screw, mechanical hand running gear is in driven by servomotor, drive lowering or hoisting gear and mechanical hand thereof along tooth bar length to movement under reductor and rack pinion, being movable to each to brilliant lineman position, mechanical hand running gear is capable of big stroke and is accurately positioned.

Include brilliant line apparatus being arranged on bearing support to brilliant lineman position and mechanical contact detection unit, mechanical contact detection unit is positioned at the lower section to brilliant lineman position；Brilliant lineman position is utilized mechanical contact detecting element, by rod rotating 360 degrees, record four brilliant lines position in a cross section, carry out analysis by mathematical model to calculate, silicon rod is rotated in the state of uniformly alignment, and after brilliant line is completed, this bar is carried out stepping up and cutting of bar with delivering to lathe bed device place by mechanical hand again.

The excavation machine that this utility model provides also includes the preventer for equipment protection and the actuation means for equipment manipulation.Preventer can protect equipment operation safety, effectively prevents the sprinkling of cutting liquid and the safety of operator, checks working condition by the observation window personnel of being convenient to operation on protective door, and the equipment that also can guarantee that avoids interference and the pollution of external environment condition.Actuation means adopts manipulation display screen, it is possible to manually moves, facilitates operator's controlling equipment in operating area.

This utility model provides the horizontal single rod excavation machine of a kind of monocrystal silicon, compared with prior art, the structure that this excavation machine is floated by fixing one end, one end that tailstock assemblies and head frame assembly are formed, achieve the horizontal type level clamping of silicon single crystal rod, need not be bonding, loading and unloading are convenient, and adapted to the demand of current automatic production line；Arranging of gauze device the equipment disposable cutting from bar top to tail end just can complete evolution, and four faces of cutting simultaneously, it is achieved that the horizontal efficient cutting of silicon single crystal rod, line consumption low need not trimming net, processing cost is low；Can realize automatically to brilliant line, and can carry out with bar cutting simultaneously, it is achieved that high efficiency cutting；Realized the automatization of loading and unloading by material conveying trolley and truss-like mechanical hand, save cutting time and human cost；From above technical scheme, this excavation machine has reached horizontal cutting, non cohesive gel, not trimming net, the highly-efficient processing effect automatically brilliant line and automatic loading/unloading, four sides cut simultaneously, and technique is simple, easy to operate, processing cost is low, it easily is automated, meets user's demand to equipment.

Accompanying drawing explanation

Fig. 1 is the top view of the horizontal single rod excavation machine of monocrystal silicon provided by the utility model；

Fig. 2 and Fig. 3 is the structural representation of the horizontal single rod excavation machine of monocrystal silicon provided by the utility model；

Fig. 4 is the structural representation of lathe bed device provided by the utility model；

Fig. 5 is the structural representation of head frame assembly provided by the utility model；

Fig. 6 is the structural representation of tailstock assemblies provided by the utility model；

Fig. 7 is the sectional view of elongation bar provided by the utility model；

Fig. 8 is the sectional view of servo electric jar provided by the utility model；

Fig. 9 is the structural representation of head installing rack device provided by the utility model；

Figure 10 is the structural representation of gauze device provided by the utility model；

Figure 11 is drive wheel assemblies structural representation provided by the utility model；

Figure 12 is passive cutting wheel assembly structural representation provided by the utility model；

Figure 13 is reverse wheel modular construction schematic diagram provided by the utility model；

Figure 14 is the side view of Winder provided by the utility model；

Figure 15 is the structural representation of bus cable device provided by the utility model；

Figure 16 is the side schematic view of tenslator provided by the utility model；

Figure 17 is the structural representation of automatization provided by the utility model handling equipment；

Figure 18 is the part-structure schematic diagram of automatization provided by the utility model handling equipment；

Figure 19 is the structural representation of preventer provided by the utility model.

Detailed description of the invention

This utility model aims to provide the horizontal single rod excavation machine of a kind of monocrystal silicon, with solve bar in prior art vertical put be difficult to that automatization, feeding viscose glue blanking degumming process operation be loaded down with trivial details, gauze waste and problem to brilliant line and automatic loading/unloading difficulty automatically.

In order to enable those skilled in the art to be better understood from this utility model, below in conjunction with detailed description of the invention and accompanying drawing, the utility model is described in further detail.

The horizontal single rod excavation machine of a kind of monocrystal silicon, including lathe bed device 1, the head installing rack device 2 being arranged on lathe bed device side, the gauze device 3 that is arranged on head installing rack device；nullLathe bed device includes lathe bed base 101、It is installed on the head frame assembly 102 on lathe bed base 101 and tailstock assemblies 103、The line slideway 104 being arranged on lathe bed base 101 to be connected with tailstock assemblies 103，Wherein，Head frame assembly includes the headstock 201、Be arranged on the headstock 201 the headstock connect seat 202 and be arranged on the headstock and connect the clamping cylinder 203 on seat 202，Tailstock assemblies includes tailstock 301、It is arranged on the elongation bar 302 on tailstock、Connect tailstock on the wand, engageable connect seat 303 and be connected the servo electric jar 309 that seat is connected with tailstock，Elastic component 307 and the floating clamp 308 of elastic component support are set inside elongation bar，And floating clamp 308 runs through tailstock and connects seat 303，Elongation bar 302 surface also sets up the fluting 315 for the turnover of gauze device.

In a preferred embodiment, tailstock assemblies also includes the fixing seat 304 being fixed on lathe bed base, servo electric jar 309 one end is connected with fixing seat 304 by tailstock hinged seat 313 (bearing pin 312 such as can be adopted to fix tailstock hinged seat), and the servo electric jar other end is connected seat 303 by electricity cylinder rod connection seat 311 (the fixing electricity cylinder rod of bearing pin 310 such as can be adopted to connect seat 310) and is connected with tailstock；Also set up tailstock jacking block 306 bottom tailstock assemblies, bottom head frame assembly, also set up headstock jacking block 204；Servo electric jar periphery can arrange the protective cover 314 of protection electricity cylinder, and guide rail 104 can also arrange guide rail protection cover 105.

Mechanism's installing rack device 2 includes head rack 401, is arranged on the feeder assembly 402 of support 401 upper end, is arranged on the line slideway 403 being parallel to each other and the slide block 414 at head rack about 401 two ends, is arranged on the splicing support 404 outside head rack and the pulp-collecting box 407 being arranged on splicing support；Splicing support 404 is arranged below the line slideway 405 moved for splicing support, and splicing support side also sets up the cylinder 406 that splicing support can be driven to move.

Feeder assembly 402 includes the shaft coupling 412 of the servomotor 411, ball-screw 408 and connection servomotor 411 and the ball-screw 408 that are arranged on head rack；Ball-screw 408 two ends arrange the support unit 409 of back-up roller ballscrew 408, and ball-screw 408 arranges the feed screw nut 413 being connected with gauze device 3.

Gauze device includes gauze installing rack 501, the drivewheel supporting seat 504 being arranged on gauze installing rack, the drive wheel assemblies 505 being arranged on drivewheel supporting seat 504, the follower supporting seat 502 being arranged on gauze installing rack, the follower assembly 503 being arranged on follower supporting seat 502 and the reverse wheel assembly 506 that is arranged on gauze installing rack 501.

The gauze device that this utility model provides, its drive wheel assemblies 505 includes active cutting wheel 703 that drive sprocket axle 702, the bearing 708 being arranged on drive sprocket axle 702 and the drive wheel bearing case 706 that drive motor 701 is connected with drive motor 701 coordinate with drive wheel bearing case 706 and is arranged on the several adjustment pads 705 cut on the drive sprocket axle 702 taking turns end；Wherein, actively cutting wheel 703 offers wire casing, the quantity of wire casing ratio adjusts few one of pad quantity, the distance of adjacent wire casing is equal with the thickness adjusting pad, drive sprocket axle end cap 704 can also be set in drive sprocket axle 702 termination, it is possible to drive wheel bearing case end cap 707 is set on the right side of drive wheel bearing case 706.

The gauze device that this utility model provides, its follower assembly 503 includes passively cutting wheel 601 and the follower bearing holder (housing, cover) 602 of passive cutting wheel 601 inner hole, the passive wheel shaft 604 being arranged on the bearing 603 within follower bearing holder (housing, cover) 602, installation and bearing 603 center and the several adjustment pads 606 being arranged on passive wheel shaft 604 of cutting wire cabling；Wherein, passive cutting wheel offering wire casing, the quantity of wire casing ratio adjusts few one of pad quantity, and the distance of adjacent wire casing is equal with the thickness adjusting pad, it is also possible to arrange axis of a movable block bearing sleeve end cap 605 in follower bearing holder (housing, cover) one end.

The gauze device that this utility model provides, its reverse wheel assembly 506 includes the reverse wheel bearing holder (housing, cover) 801 of the commutation guide wheel 802 for commutating and commutation guide wheel 802 inner hole, is arranged on the bearing 803 within reverse wheel bearing holder (housing, cover) and is arranged on the commutation wheel shaft 804 at bearing 803 center；Commutation wheel shaft 804 is installed the pressing plate 806 for positioning bearing 803, wire casing is offered by commutation guide wheel 802, it is also possible to reverse wheel bearing (ball) cover 805 is set in reverse wheel bearing holder (housing, cover) one end.

The excavation machine that this utility model provides also includes the Winder 4 being arranged on lathe bed device one end, and Winder 4 includes the spooler apparatus 902 arranged on thread fixing plate 901, the row's of being arranged on thread fixing plate 901 being arranged on lathe bed base, the bus cable device 903 arranged on thread fixing plate being arranged on spooler apparatus 905 both sides and the tenslator 904 on the row's of being arranged on thread fixing plate.

Wherein, spooler apparatus 902 includes the roll mounting seat 905 on the row's of being arranged on thread fixing plate, the retractable cable spool 906 that is arranged in roll mounting seat 905 is connected with retractable cable spool driving mechanism 907 and the lower section being arranged on retractable cable spool 906 for braking the brake unit 908 of retractable cable spool.

Bus cable device includes the linear module 911 on the row's of being arranged on thread fixing plate, it is arranged on the glass pulley 912 on linear module slide block by winding displacement slide, it is connected with linear module and is used for the driving mechanism 917 driving glass pulley to move, line of cut is imported, derive the first guide roller 909 and the second guide roller 910 of tenslator 904, it is arranged on linear module about 911 two ends and for limiting the limit switch 913 of glass pulley displacement, it is connected with glass pulley and is used for the offset sensor 914 rectified a deviation, and the rustless steel protective cover for protecting.

Tenslator 904 is arranged on row's thread fixing plate by mounting seat, and described tenslator includes straining pulley 918, tension axis 919, respectively connection straining pulley 918 and the tension arm 920 of tension axis 919, the angular displacement sensor 921 being arranged on tension axis 919 and the air cylinder driven mechanism 923 driving tension axis to rotate.

In equipment running process, retractable cable spool 906 in Winder 4 winds diamond wire uniformly, controlled by the driving mechanism 907 in spooler apparatus 902, drive retractable cable spool 906 to come and go at a high speed and rotate, make the diamond wire being covered with in spool participate in cutting cycling mechanism.Bus cable device 903 is controlled by the driving mechanism 917 driving glass pulley 912 to move, make what cutting wire can be uniform sequential in high-speed cruising to be arranged in retractable cable spool 906 by linear module 911, winding displacement slide 916 and glass pulley 912 etc., and rectified a deviation by offset sensor 914, avoid cutting wire to come off, improve line type precision；By limit switch 913, the displacement of glass pulley 912 is limited within required scope, it is thus possible to by importing orderly for the cutting wire on spooler apparatus 902 or derivation, and the signal wandered off by cutting wire by offset sensor 914 is sent to switch board, switch board is rectified a deviation by controlling the driving mechanism 917 of glass pulley 912, consider when equipment is inoperative, retractable cable spool 906 is it may happen that rotate, cause loosening of line of cut in equipment, the therefore braking of retractable cable spool when the brake unit that is arranged below of retractable cable spool 906 ensures not work；Cutting wire wire, winding displacement process in, situation about loosening easily occurs, control the swing of tension arm 920 by the air cylinder driven mechanism 923 in tenslator 904, drive straining pulley 918 to move, and with angular displacement sensor 921, tension force is applied to the cutting wire in wire-moving system, regulated Tensity size by angular displacement sensor 921, make cutting wire be unlikely to loosening during winding displacement in retractable cable spool 906, compensate the cutting wire ductility when cyclic wire, prevent fracture of wire from affecting precision；Retractable cable spool the 906, first guide roller 909, second guide roller 910 of bus cable device 903, glass pulley 912, straining pulley 904 collectively constitute the wire-moving system of equipment with the reverse wheel in cutting chamber, cutting wheel etc., move in circles.The linear module 911 that bus cable device 903 used by this utility model adopts, diamond wire in retractable cable spool 906 is arranged, what conventional bus cable device adopted is straight-line ball leading screw and line slideway are separately fixing, this just requires to require higher to the depth of parallelism of line slideway and straight-line ball leading screw when mounted, and linearly module 911 is simple to operate, straight-line ball leading screw and line slideway being fixed together, line type precision is higher, and the life-span used is also relatively long.

The excavation machine that this utility model provides also includes the automatization's handling equipment 5 being arranged on lathe bed device side, the mechanical hand 16 that the lowering or hoisting gear 14 that automatic loading and unloading device includes bearing support 11, the loading and unloading carriage device 12 of transport bar, the mechanical hand running gear 13 that is arranged on bearing support are connected with mechanical hand running gear is connected with lowering or hoisting gear, and be arranged on bearing support to crystalline substance line apparatus 15.

Loading and unloading carriage device 12 includes loading and unloading station 1006, dolly 1001 for loading and unloading, for the guide rail 1002 that loading and unloading dolly moves, the sensor 1003 for detect the presence of bar corresponding with loading and unloading station 1006, in a preferred embodiment, loading and unloading carriage device also includes V-type locating piece, revolution clamping cylinder and guide rail, V-type locating piece, loading and unloading dolly 1001 is directed to appointment position and positions by revolution clamping cylinder, sensor 1003 is arranged on the loading and unloading station corresponding section of bearing support 11, can according to the position relative set of bar three on loading and unloading dolly 1001, each station can be detected with or without bar.

After loading and unloading dolly 1001 is directed to appointment position along guide rail and positions under the effect of driving device, mechanical hand 16 is clamped bar by air cylinder driven, after clamping, lowering or hoisting gear 14 is driven lifting action by servomotor, reductor and precision ball screw, mechanical hand running gear 13 is in driven by servomotor, under reductor and rack pinion, driving mechanical hands 16 and lowering or hoisting gear thereof are along tooth bar length to movement, being movable to each to brilliant lineman position 1005, mechanical hand running gear is capable of big stroke and is accurately positioned.

Include brilliant line apparatus 15 being arranged on bearing support 11 to brilliant lineman position 1005 and mechanical contact detection unit 1004, mechanical contact detection unit 1004 is positioned at the lower section to brilliant lineman position 1005；Brilliant lineman position is utilized mechanical contact detecting element, by rod rotating 360 degrees, record four brilliant lines position in a cross section, carry out analysis by mathematical model to calculate, silicon rod is rotated in the state of uniformly alignment, and after brilliant line is completed, this bar is carried out stepping up and cutting of bar with delivering to lathe bed device place by mechanical hand 16, lowering or hoisting gear 14 combine hands running gear 13 again.

The excavation machine that this utility model provides also includes the preventer 6 for equipment protection and the actuation means 7 for equipment manipulation.Preventer can protect equipment operation safety, effectively prevents the sprinkling of cutting liquid and the safety of operator, checks working condition by the observation window personnel of being convenient to operation on protective door, and the equipment that also can guarantee that avoids interference and the pollution of external environment condition.Actuation means adopts manipulation display screen, it is possible to manually moves, facilitates operator's controlling equipment in operating area.

Above the horizontal single rod excavation machine of a kind of monocrystal silicon provided by the utility model is described in detail, principle of the present utility model and embodiment are set forth by specific case used herein, and the explanation of above example is only intended to help to understand method of the present utility model and central idea.Should be understood that; those skilled in the art for the art; under the premise without departing from this utility model principle, it is also possible to this utility model carries out some improvement and modification, these improve and modification also falls in this utility model scope of the claims.

Claims (13)

1. the horizontal single rod excavation machine of monocrystal silicon, including lathe bed device, the head installing rack device being arranged on lathe bed device side, the gauze device that is arranged on head installing rack device；It is characterized in that: lathe bed device includes lathe bed base, it is installed on the head frame assembly on lathe bed base and tailstock assemblies, head frame assembly includes the headstock, it is arranged on the headstock on the headstock connect seat and be arranged on the clamping cylinder on headstock connection seat, tailstock assemblies includes tailstock, it is arranged on the elongation bar on tailstock, connect tailstock on the wand, engageable connect seat and be connected the servo electric jar that seat is connected with tailstock, elastic component and the floating clamp of elastic component support are set inside elongation bar, and floating clamp runs through tailstock and connects seat, elongation bar surface also sets up the fluting for the turnover of gauze device.

2. the horizontal single rod excavation machine of monocrystal silicon as claimed in claim 1, it is characterised in that: the line slideway that lathe bed device also includes being arranged on lathe bed base and is connected with tailstock assemblies；Tailstock assemblies also includes the fixing seat being fixed on lathe bed base, and servo electric jar one end is connected with fixing seat by tailstock hinged seat, and the servo electric jar other end is connected seat by electricity cylinder rod connection seat and is connected with tailstock；Also set up tailstock jacking block bottom tailstock assemblies, bottom head frame assembly, also set up headstock jacking block.

3. the horizontal single rod excavation machine of monocrystal silicon as claimed in claim 1, it is characterised in that: mechanism's installing rack device includes head rack, is arranged on the feeder assembly of upper end, is arranged on the line slideway being parallel to each other at the upper and lower two ends of head rack, is arranged on the splicing support outside head rack and is arranged on the pulp-collecting box on splicing support；Splicing support is arranged below the line slideway moved for splicing support, and splicing support side also sets up the cylinder that splicing support can be driven to move.

4. the horizontal single rod excavation machine of monocrystal silicon as claimed in claim 3, it is characterised in that: feeder assembly includes the shaft coupling of the servomotor, ball-screw and connection servomotor and the ball-screw that are arranged on head rack；Ball-screw two ends arrange the support unit of back-up roller ballscrew, and ball-screw arranges the feed screw nut driving gauze device to move.

5. the horizontal single rod excavation machine of monocrystal silicon as claimed in claim 1, it is characterised in that: gauze device includes gauze installing rack, the drivewheel supporting seat being arranged on gauze installing rack, the drive wheel assemblies being arranged on drivewheel supporting seat, the follower supporting seat being arranged on gauze installing rack, the follower assembly being arranged on follower supporting seat and the reverse wheel assembly being arranged on gauze installing rack.

6. the horizontal single rod excavation machine of monocrystal silicon as claimed in claim 5, it is characterised in that: drive wheel assemblies includes active cutting wheel that drive sprocket axle, the bearing being arranged on drive sprocket axle and the drive wheel bearing case that drive motor is connected with drive motor coordinate with drive wheel bearing case and is arranged on the several adjustment pads actively cut on the drive sprocket axle taking turns end；Wherein, actively offering wire casing on cutting wheel, the quantity of wire casing ratio adjusts few one of pad quantity, and the distance of adjacent wire casing is equal with the thickness adjusting pad.

7. the horizontal single rod excavation machine of monocrystal silicon as claimed in claim 5, it is characterised in that: follower assembly includes the follower bearing holder (housing, cover) passively cutting wheel and passive cutting wheel inner hole of cutting wire cabling, is arranged on bearing follower bearing holder (housing, cover) within, is arranged on the passive wheel shaft of bearing centre and is arranged on passive cutting and take turns the several adjustment pads on the passive wheel shaft of end；Wherein, passive cutting wheel offering wire casing, the quantity of wire casing ratio adjusts few one of pad quantity, and the distance of adjacent wire casing is equal with the thickness adjusting pad.

8. the horizontal single rod excavation machine of monocrystal silicon as claimed in claim 5, it is characterised in that: reverse wheel assembly includes the reverse wheel bearing holder (housing, cover) of the commutation guide wheel for commutating and reverse wheel inner hole, is arranged on the bearing within reverse wheel bearing holder (housing, cover) and is arranged on the commutation wheel shaft of bearing centre；Commutation wheel shaft is installed the pressing plate for positioning bearing, wire casing offered by commutation guide wheel.

9. the horizontal single rod excavation machine of monocrystal silicon as claimed in claim 1, it is characterized in that: excavation machine also includes being arranged on the Winder of lathe bed device one end, Winder includes the spooler apparatus arranged on thread fixing plate, the row's of being arranged on thread fixing plate being arranged on lathe bed base, the bus cable device arranged on thread fixing plate being arranged on roll both sides and the tenslator on the row's of being arranged on thread fixing plate.

10. the horizontal single rod excavation machine of monocrystal silicon described in claim 1, it is characterised in that: mechanical hand that the lowering or hoisting gear that automatic loading and unloading device includes bearing support, the loading and unloading carriage device of transport bar, the mechanical hand running gear that is arranged on bearing support are connected with mechanical hand running gear is connected with lowering or hoisting gear and be arranged on bearing support to crystalline substance line apparatus.

11. the horizontal single rod excavation machine of monocrystal silicon described in claim 10, it is characterised in that: loading and unloading carriage device includes loading and unloading station, for the corresponding sensor of the dolly of loading and unloading, the guide rail moved for loading and unloading dolly and the up and down material station that is arranged on bearing support.

12. the horizontal single rod excavation machine of monocrystal silicon described in claim 10, it is characterised in that: include brilliant line apparatus being arranged on bearing support to brilliant lineman position and mechanical contact detection unit, mechanical contact detection unit is positioned at the lower section to brilliant lineman position place.

13. the horizontal single rod excavation machine of monocrystal silicon described in claim 1, it is characterised in that: excavation machine also includes the preventer for equipment protection and the actuation means for equipment manipulation.