CN205394859U - Excellent squaring machine of vertical list of monocrystalline silicon - Google Patents
Excellent squaring machine of vertical list of monocrystalline silicon Download PDFInfo
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- CN205394859U CN205394859U CN201620162992.2U CN201620162992U CN205394859U CN 205394859 U CN205394859 U CN 205394859U CN 201620162992 U CN201620162992 U CN 201620162992U CN 205394859 U CN205394859 U CN 205394859U
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Abstract
The utility model discloses an excellent squaring machine of vertical list of monocrystalline silicon, including cutting room, wiring closet, go up unloader, electrical control room / electric room, the cutting room is including the cutting head that is used for single silicon rod of cutting, the cutting room still compresses tightly fixed silicon rod hold -down mechanism with being used for to the silicon rod upper end including the silicon rod supporting seat that is used for supporting the silicon rod lower extreme, silicon rod hold -down mechanism compresses tightly the seat including compressing tightly the support, fixing extension rod on compressing tightly the support, fixing being used for on the extension rod with the silicon rod is connected, fluting that the gauze that is equipped with the confession cutting head on the extension rod passed. The utility model discloses vertical cutting, non cohesive gel, trimming net, automatic to brilliant line and the automatic high -efficient processing effect that goes up the cutting simultaneously of unloading, four sides have not been reached to simple process, convenient operation, processing cost are hanged down, easily realize the automation according with the demand of user to equipment.
Description
Technical field
This utility model relates to crystal silicon cutting technique field, is specifically related to the vertical single rod excavation machine of a kind of monocrystal silicon.
Background technology
The method for making of monocrystal silicon usually first prepares polysilicon or amorphous silicon, then grows bar-like single crystal silicon from melt by vertical pulling method or floating zone method.Melted elemental silicon silicon atom when solidification is arranged in many nucleus with diamond lattice, if these nucleus grow up to the crystal grain that high preferred orientation is identical, then these crystal grain parallel junction just crystallize into monocrystal silicon altogether.Monocrystal silicon, also referred to as silicon single crystal, is most basic material in electronic information material and photovoltaic industry, belongs to semi-conducting material class.Monocrystal silicon has penetrated into every field in national economy and science and techniques of defence.
Tradition excavation machine adopts vertical evolution, is first sticked with glue by bar and is connected in crystal holder, then utilizes electromagnetic technique crystal holder to be inhaled on pallet, and then cutting head cuts from top to bottom.16 or 25 bars of cutting every time, need to use some lines of cut, threading is more complicated, and the bonding and blanking of silicon rod takies a large amount of artificial and time, has cut rear head and cannot directly return, need to cut off gauze and pallet pull-out could be carried out blanking, also bar being carried out degumming process during blanking, clipping time is long, and gauze cuts rear not reproducible utilization, causing the waste of consumptive material, next time, cutting needed threading again.On the whole, tradition monocrystal silicon excavation machine complex process, non-cutting time is long, and cost of labor is high, and production efficiency is low, and line consumption is higher, threading difficulty, operation inconvenience.
Now, country extremely payes attention to exploitation and the application of new forms of energy, and put into substantial contribution photovoltaic industry is helped, the demand of domestic monocrystal silicon is continuously increased, external advanced device fabrication manufacturer has been proposed for manufacturing the automatic production line of monocrystal silicon, and excavation machine occupies a very important link in production line, it carries the task that the pole blocked is processed into square rod, so that next procedure carries out grinding, need silicon rod is carried out bonding and degumming during cutting every time, realize bringing difficulty to automatization.Simultaneously blocking operation, grinding process before and after evolution operation, adding man-hour bar is all horizontal putting, and traditional equipment is vertical putting, and is also realize the one of automatic production line to hinder greatly.
Utility model content
This utility model solve the technical problem that be to provide a kind of vertical cutting, non cohesive gel, not trimming net, automatically to the cutting simultaneously of brilliant line, automatic loading/unloading, four sides, the vertical single rod excavation machine of monocrystal silicon that efficiency is high.
In order to solve above-mentioned technical problem, the technical solution of the utility model is:
The vertical single rod excavation machine of a kind of monocrystal silicon, including cutting chamber, wiring closet, handling equipment, electric panel room, described cutting chamber includes the cutting head for cutting single silicon rod, for supporting the silicon rod supporting seat of silicon rod lower end and the silicon rod hold-down mechanism for silicon rod upper end is fixed, described silicon rod hold-down mechanism includes compressing support, is fixed on the elongation bar compressed on support, the fixing pressed seat for being connected with silicon rod on the wand, engageable, and described elongation bar is provided with mean for the fluting of the gauze traverse of described cutting head.Silicon rod supporting seat is arranged on bottom cutting chamber, supports silicon rod lower end, and pressed seat compresses the top of silicon rod, it is achieved that the vertical clamping of silicon single crystal rod, silicon rod need not be carried out bonding and degumming, solve the problem that viscose glue is wasted time and energy.Gauze moves from the bottom up and realizes cutting to silicon rod, and gauze moves to elongation bar place, continues up, and arrives fluting, is got out of the way the position of silicon rod, facilitate silicon rod blanking, be conducive to the realization of automatization.Meanwhile, adopt vertical cutting, cut rear flaw-piece and can automatically drop, do not resulted in and collapse limit.
The vertical single rod excavation machine of monocrystal silicon as above, described cutting head includes gauze installing rack and is installed on passively cutting wheel assembly, actively cut wheel assembly, reverse wheel assembly on gauze installing rack, line of cut forms groined type gauze through actively cutting wheel assembly, reverse wheel assembly and passive cutting wheel assembly cabling, and described cutting head is driven by cutting head driving mechanism and realizes pumping of cutting head.On cutting wheel, line of cut is formed groined type gauze, and groined type is arranged, cuts from the bottom up, can cut four faces simultaneously, and once cutting just can complete evolution, it is achieved that the high efficiency cutting of silicon single crystal rod, and does not need trimming net.Being arranged below pulp-collecting box in cutting chamber, after once having cut, flaw-piece can be dropped in pulp-collecting box by action of gravity automatically.
The vertical single rod excavation machine of monocrystal silicon as above, described compression support is fixed on the first slide block, and described first slide block and the first vertically-mounted line slideway are slidably connected.Compress support and can move up and down the bar adapting to different length.
The vertical single rod excavation machine of monocrystal silicon as above, described silicon rod supporting seat is provided with the multiple clamping cylinders for compressing silicon rod flaw-piece.Preferred clamping cylinder is four, is evenly distributed on around silicon rod, and the cylinder body of clamping cylinder is fixed on silicon rod supporting seat, fixed stop on the piston rod of clamping cylinder, and piston rod is vertically arranged, and piston rod drives block to move upward and flaw-piece is compressed.Silicon rod supporting seat is arranged on bottom cutting chamber, supports silicon rod lower end, compresses flaw-piece equipped with four clamping cylinders, forms 5 supports, adapts to the irregular situation in silicon rod cross section.
The vertical single rod excavation machine of monocrystal silicon as above, described handling equipment includes bearing support, transport the loading and unloading carriage device of at least one silicon rod, the mechanical hand running gear that is arranged on bearing support and be arranged on the mechanical hand on mechanical hand running gear and lowering or hoisting gear that driving mechanical hands moves up and down, described mechanical hand running gear includes horizontal walking device and lengthwise rows walking apparatus, and described mechanical hand includes the clamp system for clamping silicon rod and for driving the luffing mechanism of clamp system pitching motion.Lowering or hoisting gear is arranged on mechanical hand running gear, and mechanical hand is arranged on this lowering or hoisting gear, and mechanical hand running gear drives lowering or hoisting gear action realize the transverse shifting of mechanical hand and vertically move, and lowering or hoisting gear realizes moving up and down of mechanical hand.Mechanical hand includes again clamp system and luffing mechanism, it is achieved that clamping and the pitching to bar, it is achieved the clamping of bar, relieving, and the 90 of bar ° of rotations.Realized the automatization of loading and unloading by handling equipment, save cutting time and human cost, before and after cutting, utilize mechanical hand by bar half-twist, make that bar is horizontal when loading and unloading to be put, adapt to the demand of automatic production line.
The vertical single rod excavation machine of monocrystal silicon as above, described bearing support is provided with at least one sensor detecting the presence of silicon rod, the installation site of sensor and each silicon rod position one_to_one corresponding on loading and unloading carriage device.
The vertical single rod excavation machine of monocrystal silicon as above, in order to form groined type gauze, described wiring closet includes main body frame and the symmetrically arranged two set connecton layouts being installed on main body frame, and often set connecton layout includes coiling assembly, bus cable device, tension mechanism.Adopting two groups of connecton layouts to connect up, a piece line of cut of one group of supply, two lines of cut form groined type gauze at cutting head place cabling, and threading is simple simultaneously.
The vertical single rod excavation machine of monocrystal silicon as above, described coiling assembly includes coiling bearing, the retractable cable spool that is installed on coiling bearing is connected with retractable cable spool folding and unfolding spool driving mechanism, is arranged on the brake unit for braking folding and unfolding spool below folding and unfolding spool.The glass pulley that described bus cable device includes linear module, be arranged on linear module slide block by winding displacement slide is connected with linear module and for the glass pulley driving mechanism driving glass pulley to move, the truckle assembly that leads for line of cut.Linear module is utilized to replace the structure that conventional straight-line ball leading screw and line slideway are separately fixed, decrease line slideway in the requirement of the straight-line ball leading screw depth of parallelism, simultaneously, linear module operation is simple, straight-line ball leading screw and line slideway are fixed together, line type precision is higher, and the life-span used is also relatively long.
The vertical single rod excavation machine of monocrystal silicon as above, also including the brilliant line detector for detecting silicon rod crystalline substance line position, described brilliant line detector includes the clamping station for fixing silicon rod, for the silicon rod rotating mechanism driving silicon rod to rotate along silicon rod axis with for detecting the detecting element of crystalline substance line.Owing to conventional excavation machine adopts artificial loading and unloading, they are all the methods adopting manual detection crystalline substance line, and efficiency is low.Adopt this crystalline substance line detector, silicon rod is fixed by clamping station, silicon rod rotating mechanism drives silicon rod rotating 360 degrees, detecting element adopts mechanical contact detecting element, in silicon rod rotary course, detecting element records four brilliant lines position in a cross section, is calculated by mathematics model analysis, and silicon rod is rotated in the state of uniformly alignment.And can carrying out with bar cutting, after a upper bar has cut blanking, this bar can in place cut simultaneously, next bar just can start brilliant line simultaneously, it is achieved that high efficiency cutting.
The vertical single rod excavation machine of monocrystal silicon as above, preferably, in order to the vertical clamping of silicon rod is more firm, float in fixing one end, silicon rod one end in cutting chamber, described elongation bar and pressed seat are by multiple chuck floating connections, one end of chuck is connected with elongation bar by spring, pressed seat surface is fixed and passed to the other end of chuck and pressed seat, chuck forms multiple projection on pressed seat surface, these projections are arranged at pressed seat Dispersion on surface, multiple spot can be formed with the conical tip of monocrystal silicon silicon rod to fix, fixing more firm, the floating realizing bar upper end compresses.
Technique effect of the present utility model is: this utility model bar is vertically placed, and clamps silicon rod by silicon rod supporting seat and silicon rod hold-down mechanism, solves the problem that viscose glue is wasted time and energy, reduces cost of labor；Gauze groined type is arranged, cuts from the bottom up, and four faces of cutting simultaneously, and cutting efficiency is high, line consumption low need not trimming net, processing cost is low；Adopt vertical cutting, cut rear flaw-piece and can automatically drop, do not resulted in and collapse limit；By mechanical contact detecting element, in the process of rod rotating 360 degrees, record four brilliant lines position in a cross section, carry out analysis by mathematical model and calculate, silicon rod is rotated to the state of uniformly alignment, can realize automatically to brilliant line, and can carrying out with bar cutting, after a upper bar has cut blanking, this bar can in place cut simultaneously, next bar just can start brilliant line simultaneously, it is achieved that high efficiency cutting；Realized the automatization of loading and unloading by handling equipment, save cutting time and human cost, before and after cutting, utilize mechanical hand by bar half-twist, make that bar is horizontal when loading and unloading to be put, and adapt to the demand of current automatic production line.On the whole, the vertical single rod excavation machine of monocrystal silicon that this utility model provides, vertical cutting, non cohesive gel, not trimming net, the highly-efficient processing effect automatically brilliant line and automatic loading/unloading, four sides cut simultaneously are reached, and technique is simple, easy to operate, processing cost is low, it easily is automated, meets user's demand to equipment.
Accompanying drawing explanation
Fig. 1 is the top view of the vertical single rod excavation machine of monocrystal silicon in the present embodiment；
Fig. 2 is the perspective view of the vertical single rod excavation machine of monocrystal silicon in the present embodiment；
Fig. 3 is the structural representation of cutting chamber in the present embodiment；
Fig. 4 is the structural representation of silicon rod supporting seat in the present embodiment；
Fig. 5 is the structural representation of silicon rod hold-down mechanism in the present embodiment；
Fig. 6 is the structural representation of cutting head in the present embodiment；
Fig. 7 is the passive structural representation cutting wheel assembly in the present embodiment；
Fig. 8 is the structural representation actively cutting wheel assembly in the present embodiment；
Fig. 9 is the structural representation of reverse wheel assembly in the present embodiment；
Figure 10 is the structural representation of left connecton layout in the present embodiment；
Figure 11 is the structural representation of right bus cable device in the present embodiment；
Figure 12 is the structural representation of handling equipment in the present embodiment；
Figure 13 is the structural representation of mechanical hand in handling equipment in the present embodiment；
Figure 14 is the structural representation of brilliant line detector.
Figure 15 is the structural representation extending bar in the present embodiment；
Wherein: 1, electric panel room；2, wiring closet；3, cutting chamber；4, brilliant line detector；5, handling equipment；6, silicon rod；
201, main body frame；202, coiling assembly；203, bus cable device；204, tension mechanism；2021, coiling bearing；2022, folding and unfolding spool；2023, folding and unfolding spool driving mechanism；2031, linear module；2032, winding displacement slide；2033, glass pulley；2034, truckle assembly；
301, silicon rod supporting seat；302, silicon rod hold-down mechanism；303, cutting head；304, clamping cylinder；3021, elongation bar；3022, pressed seat；3023, support is compressed；3024, fluting；3025, the first slide block；3026, chuck；3027, spring；3028, the first line slideway；
401, clamping station；402, silicon rod rotating mechanism；403, detecting element；
501, bearing support；502, loading and unloading carriage device；503, mechanical hand running gear；504, mechanical hand；505, lowering or hoisting gear；5041, clamp system；5042, luffing mechanism；
601, wheel is passively cut；602, passive cutting wheel shaft bearing sleeve；603, the first biserial deep groove ball bearing；604, wheel shaft is passively cut；605, passive cutting wheel bearing end cap；
701, cutting wheel drive motor；702, wheel shaft is actively cut；703, wheel is actively cut；704, wheel shaft end cap is actively cut；705, cutting wheel pad；706, wheel bearing case is actively cut；707, wheel bearing end cap is actively cut；708, the second biserial deep groove ball bearing；709, actively spacer ring is taken turns in cutting；710, locking nut；
801, reverse wheel bearing holder (housing, cover)；802, commutation guide wheel；803, the 3rd biserial deep groove ball bearing；804, commutation wheel shaft；805, reverse wheel bearing (ball) cover；806, pressing plate.
Detailed description of the invention
It is described in further detail below in conjunction with 1～15 pair of detailed description of the invention of the present utility model of accompanying drawing.
Present embodiment discloses the vertical single rod excavation machine of a kind of monocrystal silicon, as shown in Figure 1-2, including cutting chamber 3, electric panel room 1, be arranged on the wiring closet 2 of cutting chamber 3 side and be arranged on brilliant line detector 4 and the handling equipment 5 of cutting chamber 1 opposite side.
Cutting chamber 1, such as Fig. 3～5, shown in 15, including the cutting head 303 for cutting single silicon rod 6, for supporting the silicon rod supporting seat 301 of silicon rod 6 lower end and the silicon rod hold-down mechanism 302 for silicon rod 6 upper end is fixed.Silicon rod supporting seat 301 is arranged on bottom cutting chamber 1, supports silicon rod lower end, and silicon rod supporting seat 301 is provided with four clamping cylinders 304 for compressing silicon rod 6 flaw-piece, forms 5 supports, adapts to the irregular situation in silicon rod cross section.The pressed seat 3022 for being connected with silicon rod 6 that silicon rod hold-down mechanism includes compressing support 3023, is fixed on the elongation bar 3021 compressed on support 3023, is fixed on elongation bar 3021, elongation bar 3021 is provided with mean for the fluting 3024 of the gauze traverse of described cutting head 303, gauze moves from the bottom up and realizes cutting to silicon rod 6, in process, gauze moves to elongation bar 3021 place, continue up, arrive fluting 3024, the position of silicon rod is got out of the way.Compressing support 3023 and be fixed on the first slide block 3025, the first slide block 3025 is slidably connected with the first vertically-mounted line slideway 3028.In the present embodiment, adopt preferred mode, is floated in fixing for one end of silicon rod 6 one end, as shown in figure 15, elongation bar 3021 and pressed seat 3022 are respectively through six chuck 3026 floating connections, one end of each chuck 3026 is connected with elongation bar 3021 by spring 3027, and the other end of chuck 3026 fixes and pass, with pressed seat 3222, the surface that pressed seat 3022 contacts with silicon rod, it is achieved the floating of bar upper end compresses.
Cutting head 303, as shown in Fig. 6～9, including gauze installing rack 3031 and the passive cutting wheel assembly 3032 being installed on gauze installing rack 3031, actively cuts wheel assembly 3033, reverse wheel assembly 3034.Wherein, passive cutting wheel assembly 503 include the passive cutting wheel 601 for cutting wire cabling and passive cutting wheel inner hole passive cutting wheel shaft bearing sleeve 602, be arranged on the first internal biserial deep groove ball bearing 603 of passive cutting wheel shaft bearing sleeve 602, passive cutting wheel shaft 604, be arranged at passive cutting wheel shaft bearing sleeve 602 one end passively cut wheel bearing end cap 605.Passive cutting wheel 601 outer ring adopts polyurethane material, coating post-treatment cutting wire casing, has certain degree of hardness, does not damage line of cut.Actively cut wheel assembly 3033 and include cutting wheel drive motor 701, actively cut wheel shaft 702, it is arranged on actively to cut and wheel shaft 702 actively cuts wheel 703, be arranged on actively cut wheel shaft 702 termination actively cut wheel shaft end cap 704, it is arranged on the cutting wheel pad 705 of actively cutting wheel 703 right-hand members, what be arranged on cutting wheel drive motor 701 outlet side actively cuts wheel bearing case 706, it is arranged on actively to cut and actively cuts wheel bearing end cap 707 on the right side of wheel bearing case 706, it is arranged on the second biserial deep groove ball bearing 708 actively cut on wheel shaft 702, it is arranged on the active cutting wheel spacer ring 709 holding out against bearing actively cutting on wheel shaft 702 and holds out against the locking nut 710 of spacer ring.Actively cutting is taken turns 703 outer rings and is adopted polyurethane material, is coated with post-treatment wire casing, has certain degree of hardness, do not damage line of cut, uses position when changing wire casing by minimizing cutting wheel pad 705 after cutting abrasion.Reverse wheel assembly 3034 includes reverse wheel bearing holder (housing, cover) 801, be arranged on reverse wheel bearing holder (housing, cover) 801 commutation guide wheel 802, it is arranged on the 3rd biserial deep groove ball bearing 803 reverse wheel bearing holder (housing, cover) 801 within, is arranged on the wheel shaft 804 that commutates at the 3rd biserial deep groove ball bearing 803 center, is arranged on the reverse wheel bearing (ball) cover 805 of reverse wheel bearing holder (housing, cover) 801 side, also include the pressing plate 806 for positioning bearing.Pressing plate 806 is screwed on commutation wheel shaft 804.Reverse wheel 802 outer ring adopts polyurethane material, is coated with post-treatment wire casing, has certain degree of hardness, do not damage line of cut.In the present embodiment, cutting head 3 adopts two groups actively to cut wheel assembly 3033, six groups and passively cuts wheel assembly 3032, often group is actively cut wheel assembly 3033 and is driven three groups of cutting wheel assemblies 3032, by six groups of reverse wheel assemblies 3034, forming groined type gauze on each cutting wheel, once cutting just can complete evolution.Being arranged below pulp-collecting box in cutting chamber, after once having cut, flaw-piece can be dropped in pulp-collecting box by action of gravity automatically.Cutting head 303 is driven by cutting head driving mechanism and realizes pumping of cutting head 303, and cutting head driving mechanism includes the second slide block, the second vertically-mounted line slideway and the corresponding power set driving the second slide block to move up and down along the second line slideway.
Wiring closet 2, such as Figure 10, shown in 11, including main body frame 201 and symmetrically arranged two set connecton layout, respectively left connecton layout and the right connecton layouts being installed on main body frame 201, often set connecton layout includes coiling assembly 202, bus cable device 203, tension mechanism 204.Folding and unfolding spool driving mechanism 2023 that the retractable cable spool 2022 that coiling assembly 202 includes coiling bearing 2021, be installed on coiling bearing 2021 is connected with retractable cable spool 2022, being arranged on the brake unit 2024 for braking folding and unfolding spool below folding and unfolding spool 2022, described folding and unfolding spool driving mechanism 2023 adopts servomotor and shaft coupling.The glass pulley 2033 that bus cable device 203 includes linear module 2031, be arranged on linear module 2031 slide block by winding displacement slide 2032 is connected with linear module 2031 and for the glass pulley driving mechanism driving glass pulley 2033 move, for the truckle assembly 2034 of line of cut guiding, glass pulley driving mechanism employing servomotor.Bus cable device 203 is for controlling take-up and the unwrapping wire of cutting wire during equipment operation, and carry out winding displacement by a constant pitch, folding and unfolding spool 2022 in the coiling assembly 202 of equipment side winds line of cut uniformly, by the Serve Motor Control in coiling assembly 202, drive retractable cable spool to come and go at a high speed to rotate, make the line of cut being covered with in spool participate in cutting cycling mechanism.Bus cable device 203, by driving the glass pulley driving mechanisms control moved of glass pulley 2033, makes what cutting wire can be uniform sequential in high-speed cruising to be arranged in retractable cable spool 2022 by linear module 2031, winding displacement slide 2032 and truckle assembly 2034 etc..Considering when equipment is inoperative, retractable cable spool 2022, it may happen that rotate, causes loosening of line of cut in equipment, the therefore braking of retractable cable spool 2022 when the brake unit that is arranged below 2024 of retractable cable spool 2022 ensures not work.Cutting wire wire, winding displacement process in, situation about loosening easily occurs, apply tension force to the cutting wire in wire-moving system by tension mechanism 204, make cutting wire be unlikely to loosening during winding displacement in retractable cable spool, compensate the cutting wire ductility when cyclic wire, prevent fracture of wire from affecting precision.
Handling equipment 5, as shown in Fig. 2,12,13, including bearing support 501, the loading and unloading carriage device 502 transporting at least one silicon rod 6, the mechanical hand running gear 503 being arranged on bearing support 501 and be arranged on the lowering or hoisting gear 505 that the mechanical hand 504 on mechanical hand running gear 503 and driving mechanical hands 504 move up and down.Mechanical hand running gear 503 includes horizontal walking device and lengthwise rows walking apparatus, lowering or hoisting gear 505 is arranged on mechanical hand running gear 503, mechanical hand 504 is arranged on this lowering or hoisting gear 505, it is achieved that the transverse shifting of mechanical hand 504, vertically moves, move up and down.Mechanical hand 504 includes the clamp system 5041 for clamping silicon rod and for driving the luffing mechanism 5042 of clamp system 5041 pitching motion, it is achieved that clamping and the pitching to bar, is specially and realizes the clamping of bar, relieving, and the 90 of bar ° of rotations.Realized the automatization of loading and unloading by handling equipment, save cutting time and human cost, before and after cutting, utilize mechanical hand by bar half-twist, make that bar is horizontal when loading and unloading to be put, adapt to the demand of automatic production line.Bearing support 501 is provided with the guide rail moved for loading and unloading carriage device, and is provided with at least one sensor detecting the presence of silicon rod, each silicon rod 6 position one_to_one corresponding in the installation site of sensor and loading and unloading carriage device 502.In the present embodiment, the silicon rod on loading and unloading carriage device is placed position and is set to three, and the sensor detecting the presence of silicon rod is also 3.Mechanical hand running gear 503, lowering or hoisting gear 505, clamp system 5041, luffing mechanism 5042 all can adopt the kind of drive well known to those skilled in the art.In the present embodiment, the horizontal walking device of mechanical hand running gear 503 and lengthwise rows walking apparatus are realized moving horizontally action by servomotor, reductor, rack pinion transmission respectively, it may be achieved big stroke is accurately positioned.Lowering or hoisting gear 505 is realized lifting action by servomotor, reductor, precision ball screw transmission.Clamp system 5041 includes tong arm, be arranged on tong arm two chelas, drive the cylinder of chela pinching action.Luffing mechanism 5042 adopts the tong arm pitching in air cylinder driven clamp system to realize 90 ° of spinning movements of silicon rod.After silicon rod 6 has been placed, loading and unloading carriage device 502 being pushed into loading and unloading station place, the guide rail on bearing support 501 is directed to specify position.Mechanical hand running gear 503 driving mechanical hands 504 and lowering or hoisting gear 505 thereof, along tooth bar length to movement, are movable to each station.After mechanical hand 504 will specify silicon rod clamping, lowering or hoisting gear 505 is promoted to appointment position.Mechanical hand 504 is by bar half-twist, and mechanical hand running gear 503 drives and moves on to brilliant line detector 4 place.After brilliant line is completed, mechanical hand 504 is again by this bar half-twist, delivers to cutting chamber and cuts.Cut rear mechanical hand 504 and again the bar of the side of ending is shipped back loading and unloading carriage device 502.
Brilliant line detector 4, as shown in figure 14, including the clamping station 401 for fixing silicon rod 6, for driving silicon rod rotating mechanism 402 that silicon rod 6 rotates along silicon rod axis and for detecting the detecting element 403 of crystalline substance line.Utilize silicon rod rotating mechanism 402 by silicon rod 6 rotating 360 degrees, utilize mechanical contact detecting element 403, record four brilliant lines position in a cross section, carry out analysis by mathematical model and calculate, silicon rod is rotated in the state of uniformly alignment.
Certainly; described above is not to restriction of the present utility model; this utility model is also not limited to the example above, the change made in essential scope of the present utility model of those skilled in the art, remodeling, interpolation or replacement, also should belong to protection domain of the present utility model.
Claims (10)
1. the vertical single rod excavation machine of monocrystal silicon, including cutting chamber, wiring closet, handling equipment, electric panel room, described cutting chamber includes the cutting head for cutting single silicon rod, it is characterized in that: described cutting chamber also includes the silicon rod supporting seat for supporting silicon rod lower end and the silicon rod hold-down mechanism for silicon rod upper end is fixed, described silicon rod hold-down mechanism includes compressing support, is fixed on the elongation bar compressed on support, the fixing pressed seat for being connected with silicon rod on the wand, engageable, and described elongation bar is provided with mean for the fluting of the gauze traverse of described cutting head.
2. the vertical single rod excavation machine of monocrystal silicon according to claim 1, it is characterized in that: described cutting head includes gauze installing rack and is installed on passively cutting wheel assembly, actively cut wheel assembly, reverse wheel assembly on gauze installing rack, line of cut forms groined type gauze through actively cutting wheel assembly, reverse wheel assembly and passive cutting wheel assembly cabling, and described cutting head is driven by cutting head driving mechanism and realizes pumping of cutting head.
3. the vertical single rod excavation machine of monocrystal silicon according to claim 1, it is characterised in that: described compression support is fixed on the first slide block, and described first slide block and the first vertically-mounted line slideway are slidably connected.
4. the vertical single rod excavation machine of monocrystal silicon according to claim 1, it is characterised in that: described silicon rod supporting seat is provided with the multiple clamping cylinders for compressing silicon rod flaw-piece.
5. the vertical single rod excavation machine of monocrystal silicon according to claim 1, it is characterized in that: described handling equipment includes bearing support, transport the loading and unloading carriage device of at least one silicon rod, the mechanical hand running gear that is arranged on bearing support and be arranged on the mechanical hand on mechanical hand running gear and lowering or hoisting gear that driving mechanical hands moves up and down, described mechanical hand running gear includes horizontal walking device and lengthwise rows walking apparatus, and described mechanical hand includes the clamp system for clamping silicon rod and for driving the luffing mechanism of clamp system pitching motion.
6. the vertical single rod excavation machine of monocrystal silicon according to claim 5, it is characterised in that: described bearing support is provided with at least one sensor detecting the presence of silicon rod, the installation site of sensor and each silicon rod position one_to_one corresponding on loading and unloading carriage device.
7. the vertical single rod excavation machine of monocrystal silicon according to claim 1, it is characterized in that: described wiring closet includes main body frame and the symmetrically arranged two set connecton layouts being installed on main body frame, and often set connecton layout includes coiling assembly, bus cable device, tension mechanism.
8. the vertical single rod excavation machine of monocrystal silicon according to claim 7, it is characterised in that: described coiling assembly includes coiling bearing, the retractable cable spool that is installed on coiling bearing is connected with retractable cable spool folding and unfolding spool driving mechanism, it is arranged on the brake unit for braking folding and unfolding spool below folding and unfolding spool；The glass pulley that described bus cable device includes linear module, be arranged on linear module slide block by winding displacement slide is connected with linear module and for the glass pulley driving mechanism driving glass pulley to move, the truckle assembly that leads for line of cut.
9. the vertical single rod excavation machine of monocrystal silicon according to claim 1 or 5, it is characterized in that: also include the brilliant line detector for detecting silicon rod crystalline substance line position, described brilliant line detector includes the clamping station for fixing silicon rod, for the silicon rod rotating mechanism driving silicon rod to rotate along silicon rod axis with for detecting the detecting element of crystalline substance line.
10. the vertical single rod excavation machine of monocrystal silicon according to claim 1, it is characterized in that: described elongation bar and pressed seat are by multiple chuck floating connections, one end of chuck is connected with elongation bar by spring, and pressed seat surface is fixed and passed to the other end of chuck and pressed seat.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201620162992.2U CN205394859U (en) | 2016-03-03 | 2016-03-03 | Excellent squaring machine of vertical list of monocrystalline silicon |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201620162992.2U CN205394859U (en) | 2016-03-03 | 2016-03-03 | Excellent squaring machine of vertical list of monocrystalline silicon |
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| CN205394859U true CN205394859U (en) | 2016-07-27 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105583958A (en) * | 2016-03-03 | 2016-05-18 | 青岛高测科技股份有限公司 | Vertical type single-rod squaring machine for monocrystalline silicon |
| CN106426581A (en) * | 2016-10-20 | 2017-02-22 | 青岛高测科技股份有限公司 | Novel silicon rod loading and unloading fixture |
| CN111203991A (en) * | 2020-02-26 | 2020-05-29 | 青岛高测科技股份有限公司 | Crystal silicon vertical squarer and use method thereof |
-
2016
- 2016-03-03 CN CN201620162992.2U patent/CN205394859U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105583958A (en) * | 2016-03-03 | 2016-05-18 | 青岛高测科技股份有限公司 | Vertical type single-rod squaring machine for monocrystalline silicon |
| CN105583958B (en) * | 2016-03-03 | 2017-11-10 | 青岛高测科技股份有限公司 | A kind of vertical single rod excavation machine of monocrystalline silicon |
| CN106426581A (en) * | 2016-10-20 | 2017-02-22 | 青岛高测科技股份有限公司 | Novel silicon rod loading and unloading fixture |
| CN106426581B (en) * | 2016-10-20 | 2018-09-28 | 青岛高测科技股份有限公司 | A kind of upper and lower stick tooling of novel silicon rod |
| CN111203991A (en) * | 2020-02-26 | 2020-05-29 | 青岛高测科技股份有限公司 | Crystal silicon vertical squarer and use method thereof |
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