CN205374166U - Microstructure observation device suitable for metal material bending deformation - Google Patents

Microstructure observation device suitable for metal material bending deformation Download PDF

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Publication number
CN205374166U
CN205374166U CN201520962208.1U CN201520962208U CN205374166U CN 205374166 U CN205374166 U CN 205374166U CN 201520962208 U CN201520962208 U CN 201520962208U CN 205374166 U CN205374166 U CN 205374166U
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China
Prior art keywords
slide block
deformation
chuck
sample
bending
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Withdrawn - After Issue
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CN201520962208.1U
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Chinese (zh)
Inventor
但文蛟
张卫刚
任闯
缑瑞宾
黄婷婷
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Shanghai Jiaotong University
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Shanghai Jiaotong University
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Abstract

The utility model relates to a microstructure observation device suitable for metal material bending deformation belongs to metal plastic forming field. A microstructure observation device suitable for metal material bending deformation, is including machinery tensile module, mechanical testing module and crooked module, the await measuring top of central point bending roll in crooked module of sample, the rotation wheel no. 1 of both sides in crooked module passes with the below of rotating wheel no. 2 and through the chuck no. 1 in the tensile module of machinery and the both ends of two centre gripping samples of chuck, to sample both ends applying tension load simultaneously, the sample is at bending roll position emergence bending deformation, the microdeformation field characteristic in sample bending deformation district is recorded through micro - equipment, it is corresponding the macroscopical mechanical property parameter under the deformation condition to acquire the sample through the mechanical testing module simultaneously. The utility model discloses can realize metal stretch bending in -process, the visual field normal position in large deformation district is observed to through mechanics sensor and displacement sensor, establish macroscopical mechanical properties of material.

Description

A kind of microstructure observation device suitable in the deformation of metal material stretch bending
Technical field
This utility model relates to metal forming field, particularly to a kind of microstructure observation device suitable in the deformation of metal material stretch bending.
Background technology
Micro-(be situated between and see) plastic forming technology, due to have high efficiency, low-costly and in high volume, in high precision, the cycle highly dense, short, some distinctive advantages such as pollution-free, clean shaping, the part produced have high intensity, in high precision, the feature such as high-quality, it has also become the new focus of research field and industry.Material structure heterogeneity and microdeformation characteristic thereof under meso-scale, produce impact to material macro-mechanical property.Especially be situated between the heterogeneous metal material seen under shaping, and due to the existence of microstructure soft, hard, the heterogeneity of its microstructure is further obvious.Therefore, heterogeneous metal material is in the sight plastic forming process that is situated between, and how research microcosmic phase constitution soft, hard heterogeneous deformation occurs, and how macroscopic deformation field is produced impact, thus instructing meso-scale lower thin sheet plastic forming process, it it is one of key releasing restriction microsecond delay technology application.
China Patent Publication No. is CN102346117A (name is called under scanning electron microscope microradian class precision original position reverses material mechanical performance test device), by accurate loading unit, sophisticated signal detection and control unit, grip unit and connect unit composition;Under the observation of all kinds of Image-forming instruments, carry out the microdeformation under the trans-scale in-situ torsion test for three-dimensional macro test specimen and twisting action and damage process carries out home position observation.This patent is primarily directed to the test of fiber-like sample, adopts the mode that drivewheel rotates and follower is fixing to test, and is relatively suitable for rotating class part in-situ test.But for the metallic microscopic mechanics study of stretch bending pattern inapplicable.
China Patent Publication No. CN102033003A (name is called the thin plate dynamic tensile test method based on home position observation), this patent adopts processing to have the sample of two symmetrical circular arc concave surfaces, can farthest eliminate stress to concentrate, and the inclined-plane processed, it is actually the surface being made up of multiple cross sections, can the inside of sample or even centre be transferred on sightingpiston, therefore when stretching, by observing the change of specimen surface and inclined-plane simultaneously, it is achieved that the approximate three-dimensional of thin plate dynamic tensile is observed online.It is primarily directed to thin plate dynamic tensile experiment and carries out the home position observation of macroscopic view Geometrical change, and for the metallic microscopic mechanics study of stretch bending pattern inapplicable.
China Patent Publication No. CN103575593A (name is called a kind of in-situ uniaxial tension observation device for mesoscale metal material), this device mainly adopts the microdeformation field in the maximum distortion district of simple tension analysis metal.Microstructure change feature when research different distortion degree, sets up the deformation field feature of micro-scale when macroscopic deformation, obtains macro-mechanical property parameter under corresponding deformation condition by Force meansurement module with displacement measurement module simultaneously.But this device can not test the metallic microscopic deformation field characteristic in bending deformation process.
Therefore, design a kind of microstructure observation device suitable in the deformation of metal material stretch bending, for analyzing the microdeformation field of stretch bending, macro-mechanical property, and the corresponding relation between macroscopic view-microcosmic, how there is heterogeneous deformation in research microcosmic phase constitution soft, hard, how macroscopic deformation field is produced impact, the dependency rule that under different stretch power operative condition, the heterogeneous microstructure of material is machine-processed with deformation damage, significant.
Utility model content
The purpose of this utility model is in that for the problems referred to above, provide a kind of microstructure observation device suitable in the deformation of metal material stretch bending, it is capable of in metal stretch bending process, the visual field home position observation in maximum distortion district, and by mechanics sensor and displacement transducer, set up the macro-mechanical property of material, it is achieved that the real-time online of Fine Texture of Material change is observed, and sets up the one-to-one relationship of macromechanics and microstructure deformation field.
The purpose of this utility model is achieved in that
A kind of microstructure observation device suitable in the deformation of metal material stretch bending, it is characterised in that include mechanical stretching module, mechanical test module and bending module;
Described mechanical stretching module includes being left and right symmetrically arranged on base and along the slide block one of base slip and slide block two, and slide block one and slide block two can being driven to carry out the driving mechanism towards or away from motion;The top of described slide block one and slide block two is separately installed with symmetrical chuck one and chuck two, for clamping the two ends of sample respectively;
Described mechanical test module includes the force test system that is separately mounted on chuck one and chuck two and is separately mounted to the displacement test system on slide block one and slide block two;Described force test system for separately detect sample stretch time chuck one and chuck two used by power;Described displacement test system is for detecting slide block one and the displacement of slide block two;
Described bending module includes the door shape frame bracket of both sides before and after the heart in the base, the top center of described door shape frame bracket upwards vertically protrudes out the bending roll with ogival, the unsettled micro-positioning component being provided with placement microscopy apparatus above bending roll, the top of described door shape frame bracket is also equipped with elevating mechanism, this elevating mechanism has two pieces and lays respectively at a lifting riser for the rear and front end at shape frame bracket top, extend vertically through two pieces lifting risers be provided be parallel to each other and along bending roll symmetrical rotate wheel one and rotate wheel two;
Sample to be tested is centrally located at the top of bending roll, the two ends passing below and being clamped by chuck one and chuck two sample of both sides rotation driving wheel one and rotation wheel two, sample two ends are applied tensile load by driving mechanism simultaneously, sample occurs bending and deformation in bending roll position, recorded the microdeformation field feature of sample bending deformation area by microscopy apparatus, obtain sample macro-mechanical property parameter under corresponding deformation condition by mechanical test module simultaneously.
Wherein, described driving mechanism includes DC servo motor and Bidirectional driving leading screw, and DC servo motor is arranged on the one end of base, and Bidirectional driving leading screw is arranged on the central shaft of base and is connected with slide block one and slide block two respectively;Described DC servo motor drives Bidirectional driving leading screw, and then band movable slider one and slide block two make constant speed towards or away from motion on base.
Wherein, it is the symmetrical slideways in front and back that described base is provided with along its central shaft, and described slide block one and slide block two are arranged on slideway, and can make towards or away from moving along slideway.
Wherein, described force test system includes being separately mounted to the force transducer one on chuck one and chuck two and force transducer two and the force data capture card being connected respectively with force transducer one and force transducer two;Described displacement test system includes the displacement transducer being separately mounted on slide block one and the displacement data capture card being connected with displacement transducer.
Wherein, described elevating mechanism drives two pieces of lifting risers to do elevating movement by the hydraulic system being arranged on below two pieces of lifting risers.
Wherein, described hydraulic system includes the fuel tank being arranged at bottom elevating mechanism, it is set in parallel in the oil cylinder one above fuel tank, and it is respectively arranged at the oil cylinder two below two pieces of lifting risers, communicate respectively through check valve one and stop valve between described fuel tank with oil cylinder one and oil cylinder two, communicated by check valve two between described oil cylinder one and oil cylinder two;
Described check valve one and check valve two are linked by control handle;Being lifted up control handle, check valve one is opened, and check valve two is closed, and the hydraulic oil in fuel tank enters oil cylinder one;Pressing down on control handle, check valve one is closed, and check valve two is opened, and the hydraulic oil in oil cylinder one enters oil cylinder two, and two pieces lift risers and rise so that rotate wheel one and rotation wheel two starts to raise from initial position;Opening stop valve, the hydraulic oil in removal oil cylinder two, two pieces of lifting risers decline so that rotate wheel one with rotating wheel two and return to initial position.
Wherein, described wheel one and the rotation wheel two of rotating is when initial position, and the clamping face of the lower edge and chuck one and chuck two that rotate wheel one and rotation wheel two is maintained on same level height.
Wherein, the ogival of described bending roll is higher than rotating wheel one and rotating the lower edge of wheel two, and the ogival of bending roll is made rounding and processed.
Wherein, micro-positioning component having the groove circular hole for placing microscopy apparatus, this groove circular hole has the function finely tuned up and down of left and right, the center of circle of groove circular hole just ogival to bending roll.
Wherein, described bending roll realizes detachable installation by bolt and door shape frame bracket.
The beneficial effects of the utility model are: this utility model can be used for observing the macro-mechanical property during deformation of metal material stretch bending, microdeformation field deformation feature during meso-scale Plastic Deformation of Metal Materials, the corresponding relation between macromechanics, microdeformation field, the many persons of material properties can also be set up simultaneously, provide corresponding method for studying the heterogeneous microstructure of material under different stretch bending power operative condition with the dependency rule of deformation damage mechanism.
Accompanying drawing explanation
Fig. 1 is overall structure schematic diagram of the present utility model.
Fig. 2 is the structural representation of elevating mechanism in this utility model.
Fig. 3 is the structural representation of hydraulic system in this utility model.
Fig. 4 is the structural representation of mechanical test module in this utility model.
Detailed description of the invention
Below in conjunction with specific embodiments and the drawings, this utility model is expanded on further.
As it is shown in figure 1, a kind of microstructure observation device suitable in the deformation of metal material stretch bending, it is characterised in that include mechanical stretching module, mechanical test module and bending module.
Mechanical stretching module includes being left and right symmetrically arranged on the pedestal 11 and along the slide block 1 of base 11 slip and slide block 2 22, and slide block 1 and slide block 2 22 can being driven to carry out the driving mechanism 23 towards or away from motion.The top of slide block 1 and slide block 2 22 is separately installed with symmetrical chuck 1 and chuck 2 25, for clamping the two ends of sample respectively.
Wherein, driving mechanism 23 is specifically made up of DC servo motor 231 and Bidirectional driving leading screw 232, DC servo motor 231 is arranged on the one end of base 11, and Bidirectional driving leading screw 232 is arranged on the central shaft of base 11 and respectively with slide block 1 and slide block 2 22 and is connected.DC servo motor 231 drives Bidirectional driving leading screw 232, and then band movable slider 1 and slide block 2 22 make constant speed on the pedestal 11 towards or away from motion.
Sliding on the pedestal 11 for ease of slide block 1 and slide block 2 22, it is the symmetrical slideways 12 in front and back that base 11 is provided with along its central shaft, and slide block 1 and slide block 2 22 are arranged on slideway 12 can to make towards or away from moving along slideway 12.
As shown in Figure 4, mechanical test module includes the force test system that is separately mounted on chuck 1 and chuck 2 25 and is separately mounted to the displacement test system on slide block 1 and slide block 2 22.Wherein, force test system for separately detect sample stretch time chuck 1 and chuck 2 25 used by power, specifically include the force transducer 1 and force transducer 2 32 that are separately mounted on chuck 1 and chuck 2 25 and the force data capture card 33 being connected respectively with force transducer 1 and force transducer 2 32.Displacement test system then for detecting slide block 1 and the displacement of slide block 2 22, specifically includes the displacement transducer 34 being separately mounted on slide block 1 and the displacement data capture card 35 being connected with displacement transducer 34.
As depicted in figs. 1 and 2, bending module includes the door shape frame bracket 41 across both sides before and after base 11 center, the top center of door shape frame bracket 41 upwards vertically protrudes out the bending roll 42 with ogival, the unsettled micro-positioning component 43 being provided with placement microscopy apparatus above bending roll 42, the top of door shape frame bracket 41 is also equipped with elevating mechanism 44, this elevating mechanism 44 has two pieces and lays respectively at a lifting riser 441 for the rear and front end at shape frame bracket 41 top, extend vertically through two pieces lifting risers 441 be provided be parallel to each other and along bending roll 42 symmetrical rotate wheel 1 and rotate wheel 2 443.
Wherein, the ogival of bending roll 42 is higher than rotating wheel 1 and rotating the lower edge of wheel 2 443, and the ogival of bending roll 42 is made rounding and processed.For ease of replacing and the installation of bending roll 42, bending roll 42 specifically can pass through bolt and detachably install with door shape frame bracket 41.
The center of sample quickly and is accurately navigated to for ease of realizing microscopy apparatus, micro-positioning component 43 has the groove circular hole 431 for placing microscopy apparatus, this groove circular hole 431 has the function finely tuned up and down of left and right, and the center of circle of groove circular hole 431 just ogival to bending roll 42.
In this device, elevating mechanism 44 drives two pieces of lifting risers 441 to do elevating movement especially by the hydraulic system 45 being arranged on below two pieces of lifting risers 441.Hydraulic system 45, as it is shown on figure 3, specifically include the fuel tank 451 being arranged at bottom elevating mechanism 44, is set in parallel in the oil cylinder 1 above fuel tank 451, and is respectively arranged at the oil cylinder 2 453 below two pieces of lifting risers 441.Communicate respectively through check valve 1 and stop valve 456 between fuel tank 451 with oil cylinder 1 and oil cylinder 2 453, communicated by check valve 2 455 between oil cylinder 1 and oil cylinder 2 453.Check valve 1 and check valve 2 455 are linked by control handle 457, particularly as follows: when being lifted up control handle 457, check valve 1 is opened, check valve 2 455 is closed, and the hydraulic oil in fuel tank 451 enters oil cylinder 1;When pressing down on control handle 457, check valve 1 is closed, and check valve 2 455 is opened, the hydraulic oil entrance oil cylinder 2 453 in oil cylinder 1, and two pieces of lifting risers 441 rise so that rotate wheel 1 and rotation wheel 2 443 starts to raise from initial position;When opening stop valve 456, the hydraulic oil in removal oil cylinder 2 453, two pieces of lifting risers 441 decline so that rotate wheel 1 and rotation wheel 2 443 returns to initial position.
When rotating wheel 1 and rotation wheel 2 443 when initial position, the clamping face of the lower edge and chuck 1 and chuck 2 25 that rotate wheel 1 and rotation wheel 2 443 is maintained on same level height.
During use, sample to be tested is centrally located at the top of bending roll 42, the two ends passing below and being clamped by chuck 1 and chuck 2 25 sample of both sides rotation driving wheel 1 and rotation wheel 2 443, sample two ends are applied tensile load by driving mechanism 23 simultaneously, sample occurs bending and deformation in bending roll 42 position, recorded the microdeformation field feature of sample bending deformation area by microscopy apparatus, obtain sample macro-mechanical property parameter under corresponding deformation condition by mechanical test module simultaneously.
Embodiment:
Using the DP590 steel of thickness 0.5mm as object of study, test process specifically includes following step:
1) prepared by sample: DP590 steel plate adopts line cutting more than 0.5mm, is then milled to 0.5mm thickness, adopt nital to carry out etching pit.
2) elevating mechanism is installed: elevating mechanism is arranged on the top of a frame support by bolt;Then first pass through hydraulic system and rotation wheel one and rotation two are adjusted to initial position, namely rotate wheel one and the clamping face rotating lower edge and chuck one and the chuck two taking turns two is maintained on same level height;Then again through hydraulic system, rotation taken turns one and rotate wheel and two raise, until the upper surface flush of the sample after rotating wheel one and rotating the lower edge of wheel two and install;Finally by control handle in fixed hydraulic system, rotation wheel one and rotation wheel two is made to be maintained at this highly constant.
3) specimen clamping: open chuck one and chuck two, after sample slight curvature, the position carrying out etching pit in the middle of sample is placed on bending rod, the both sides of sample are then respectively from rotating wheel one and rotating the downside traverse of wheel two, and the two ends of final sample are fixed clamping respectively through chuck one and chuck two;Then, by force transducer one and force transducer two, sample is carried out single-candidate pretightning force stretching, to ensure that sample is when stretching, two ends uniform force, do the opposing motion of constant speed.
4) microscopy apparatus is installed: micro-locating support is first arranged on a top for shape frame bracket, then microscopy apparatus is arranged on the groove circular hole place of micro-locating support, finely tunes groove circular hole so that microscopy apparatus can observe the metallographic structure in the middle part of sample.
5) sample testing: opening DC servo motor and drive two-way screw turns, thus doing the opposing motion of constant speed on the slideway of base with movable slider, namely making chuck one and chuck two move at the uniform velocity in opposite direction.Owing to the rounding place of bending roll is higher than drawing plane, chuck one and chuck two, respectively to two lateral movements, drive sample to stretch so that sample occurs bending and deformation at bending roll rounding place.Power during tensile sample used by chuck one and chuck two measured respectively by force transducer one and force transducer two, and data is stored by force data capture card;If after the power used by chuck one and chuck two differs by more than certain value, sample should be suspended and stretch, by adjusting sample, it is ensured that what two ends stretched overcomes possible equal in magnitude.Moving displacement between displacement sensor slide block one and slide block two, and displacement data is processed through displacement data capture card storage.Finally, by connecting computer, the data in force data capture card and displacement data capture card can be derived to computer, draw out corresponding power-displacement figure, set up macromechanics relation.
6) microstructure obtains: the metallographic structure change of DP590 steel is obtained by microscopy apparatus and preserves, and is carried out real-time monitored and record by imaging device.
In whole test process, crackle produces, grow up and the microphenomenon such as extended mode can be monitored in real time by micro-imaging equipment such as microscopes, and the power-displacement diagram picture of test is obtained in conjunction with debugging software, thus the change of the microstructures such as the Aurum metallicum phase constitution set up under corresponding drawing force, obtain the one-to-one relationship of macromechanics and microstructure deformation field.

Claims (10)

1. the microstructure observation device being applicable to the deformation of metal material stretch bending, it is characterised in that include mechanical stretching module, mechanical test module and bending module;
Described mechanical stretching module includes being left and right symmetrically arranged slide block one (21) that is upper at base (11) and that can slide along base (11) and slide block two (22), and driving slide block one (21) and slide block two (22) carry out in opposite directions/the driving mechanism (23) of opposing motion;The top of described slide block one (21) and slide block two (22) is separately installed with symmetrical chuck one (24) and chuck two (25), for clamping the two ends of sample respectively;
Described mechanical test module includes the force test system that is separately mounted on chuck one (24) and chuck two (25) and is separately mounted to the displacement test system on slide block one (21) and slide block two (22);Described force test system is used for separately detecting power when sample stretches used by chuck one (24) and chuck two (25);Described displacement test system is used for the displacement detecting slide block one (21) and slide block two (22);
Described bending module includes door shape frame bracket (41) across both sides before and after base (11) center, the top center of described door shape frame bracket (41) upwards vertically protrudes out the bending roll (42) with ogival, the unsettled micro-positioning component (43) being provided with placement microscopy apparatus in the top of bending roll (42), the top of described door shape frame bracket (41) is also equipped with elevating mechanism (44), this elevating mechanism (44) has two pieces of lifting risers (441) laying respectively at a rear and front end at shape frame bracket (41) top, extend vertically through two pieces lifting riser (441) be provided be parallel to each other and along the symmetrical rotation wheel one (442) of bending roll (42) and rotation wheel two (443);
Sample to be tested is centrally located at the top of bending roll (42), the two ends passing below and being clamped by chuck one (24) and chuck two (25) sample of both sides rotation driving wheel one (442) and rotation wheel two (443), sample two ends are applied tensile load by driving mechanism (23) simultaneously, sample occurs bending and deformation in bending roll (42) position, recorded the microdeformation field feature of sample bending deformation area by microscopy apparatus, obtain sample macro-mechanical property parameter under corresponding deformation condition by mechanical test module simultaneously.
2. a kind of microstructure observation device suitable in the deformation of metal material stretch bending according to claim 1, it is characterized in that, described driving mechanism (23) includes DC servo motor (231) and Bidirectional driving leading screw (232), DC servo motor (231) is arranged on the one end of base (11), and Bidirectional driving leading screw (232) is arranged on the central shaft of base (11) and is connected with slide block one (21) and slide block two (22) respectively;Described DC servo motor (231) drives Bidirectional driving leading screw (232), and then band movable slider one (21) and slide block two (22) make constant speed towards or away from motion on base (11).
3. a kind of microstructure observation device suitable in the deformation of metal material stretch bending according to claim 1, it is characterized in that, it is the symmetrical slideways (12) in front and back that described base (11) is provided with along its central shaft, described slide block one (21) and slide block two (22) are arranged on slideway (12), and can make towards or away from motion along slideway (12).
4. a kind of microstructure observation device suitable in the deformation of metal material stretch bending according to claim 1, it is characterized in that, described force test system includes being separately mounted to the force transducer one (31) on chuck one (24) and chuck two (25) and force transducer two (32) and the force data capture card (33) being connected respectively with force transducer one (31) and force transducer two (32);Described displacement test system includes the displacement transducer (34) being separately mounted on slide block one (21) and the displacement data capture card (35) being connected with displacement transducer (34).
5. a kind of microstructure observation device suitable in the deformation of metal material stretch bending according to claim 1, it is characterized in that, described elevating mechanism (44) drives two pieces of liftings riser (441) to do elevating movement by being arranged on the hydraulic system (45) of two pieces of lifting riser (441) lower sections.
6. a kind of microstructure observation device suitable in the deformation of metal material stretch bending according to claim 5, it is characterized in that, described hydraulic system (45) includes the fuel tank (451) being arranged at elevating mechanism (44) bottom, it is set in parallel in the oil cylinder one (452) of fuel tank (451) top, and it is respectively arranged at the oil cylinder two (453) of two pieces of lifting riser (441) lower sections, communicate respectively through check valve one (454) and stop valve (456) between described fuel tank (451) with oil cylinder one (452) and oil cylinder two (453), communicated by check valve two (455) between described oil cylinder one (452) and oil cylinder two (453);
Described check valve one (454) and check valve two (455) are linked by control handle (457);Being lifted up control handle (457), check valve one (454) is opened, and check valve two (455) is closed, and the hydraulic oil in fuel tank (451) enters oil cylinder one (452);Press down on control handle (457), check valve one (454) is closed, check valve two (455) is opened, hydraulic oil in oil cylinder one (452) enters oil cylinder two (453), two pieces of liftings riser (441) rise so that rotate wheel one (442) and rotation wheel two (443) starts to raise from initial position;Opening stop valve (456), the hydraulic oil in removal oil cylinder two (453), two pieces of liftings riser (441) decline so that rotate wheel one (442) and rotation wheel two (443) returns to initial position.
7. a kind of microstructure observation device suitable in the deformation of metal material stretch bending according to claim 6, it is characterized in that, described rotation wheel one (442) and rotation wheel two (443) are when initial position, and the clamping face of the lower edge and chuck one (24) and chuck two (25) that rotate wheel one (442) and rotation wheel two (443) is maintained on same level height.
8. a kind of microstructure observation device suitable in the deformation of metal material stretch bending according to claim 1, it is characterized in that, the ogival of described bending roll (42) is higher than rotating wheel one (442) and rotating the lower edge of wheel two (443), and the ogival of bending roll (42) is made rounding and processed.
9. a kind of microstructure observation device suitable in the deformation of metal material stretch bending according to claim 1, it is characterized in that, micro-positioning component (43) has the groove circular hole (431) for placing microscopy apparatus, this groove circular hole (431) has the function finely tuned up and down of left and right, the center of circle of groove circular hole (431) just ogival to bending roll (42).
10. a kind of microstructure observation device suitable in the deformation of metal material stretch bending according to claim 1, it is characterised in that described bending roll (42) realizes detachable installation by bolt and door shape frame bracket (41).
CN201520962208.1U 2015-11-26 2015-11-26 Microstructure observation device suitable for metal material bending deformation Withdrawn - After Issue CN205374166U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105372126A (en) * 2015-11-26 2016-03-02 上海交通大学 Microstructure observation device applicable to metal material bending deformation
CN111504765A (en) * 2020-05-08 2020-08-07 强一半导体(苏州)有限公司 MEMS palladium alloy probe testing device and key structure and method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105372126A (en) * 2015-11-26 2016-03-02 上海交通大学 Microstructure observation device applicable to metal material bending deformation
CN105372126B (en) * 2015-11-26 2018-02-02 上海交通大学 A kind of microstructure observation device suitable for the deformation of metal material stretch bending
CN111504765A (en) * 2020-05-08 2020-08-07 强一半导体(苏州)有限公司 MEMS palladium alloy probe testing device and key structure and method thereof
CN111504765B (en) * 2020-05-08 2020-11-03 强一半导体(苏州)有限公司 MEMS palladium alloy probe testing device

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