CN205355018U - Cavity of reaction chamber structure for solar wafer technology - Google Patents
Cavity of reaction chamber structure for solar wafer technology Download PDFInfo
- Publication number
- CN205355018U CN205355018U CN201620070162.7U CN201620070162U CN205355018U CN 205355018 U CN205355018 U CN 205355018U CN 201620070162 U CN201620070162 U CN 201620070162U CN 205355018 U CN205355018 U CN 205355018U
- Authority
- CN
- China
- Prior art keywords
- cavity
- potsherd
- reaction chamber
- aluminium
- solaode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model discloses a cavity of reaction chamber structure for solar wafer technology, the positive pressure or negative pressure device comprises a cavity. The cavity comprises corrosion resistant plate material, aluminium oxide cladding material, aluminum plate and potsherd, corrosion resistant plate material surface coating has the oxidation aluminium coat, aluminum plate and potsherd can be dismantled to aluminium oxide cladding material surface covering, aluminum plate and potsherd pass through the aluminum alloy fastener to be fixed on aluminium oxide cladding material, the process chemistry gas access has been seted up to the upper end of cavity and electric connection has the RF radio -frequency power supply, is fixed with the plasma spraying ware on the inner wall of the top of cavity, the below of plasma spraying ware is provided with electrically conductive support plate, the inside embedding aluminium alloy plate of aluminum plate and potsherd. At alumina ceramics intralamellar part embedding aluminium alloy plate, can let the positive and negative ions in the cavity flow according to the ideal orientation of design, easy dismounting, alumina ceramics board can stop effectively that high energy particle to the bombardment of coating, guarantees that cavity internal reaction environment is not polluted by metal ion.
Description
Technical field
This utility model relates to solar battery sheet (including thin-film solar cells) and manufactures equipment, plasma etching, the airtight technical field of vacuum reaction chamber, the cavity body structure of the reaction chamber of especially a kind of solaode blade technolgy.
Background technology
In the cavity of the reaction chamber of traditional solaode blade technolgy, reaction gas is known from experience rustless steel cavity etching；Thus reducing the service life of rustless steel cavity, increase production cost；It addition, be an entirety in the cavity of the reaction chamber of traditional solaode blade technolgy, it is impossible to enough dismountings, when cavity inner wall is cleared up and inconvenience, or the cabinet wall being etched can not be replaced, and whole body structure is scrapped, and wastes resource；Negative ions in cavity can not flow by design ideal direction, dismounting inconvenience, it is impossible to effectively stops the high energy particle bombardment to coating, it is impossible to ensures that in cavity, reaction environment is not by metal ion pollution.
Utility model content
Prior art is difficult to meet the needs of people, in order to solve above-mentioned Problems existing, the utility model proposes the cavity body structure of the reaction chamber of a kind of solaode blade technolgy.
For realizing this technical purpose, the technical solution adopted in the utility model is: the cavity body structure of the reaction chamber of a kind of solaode blade technolgy, including cavity；
Described cavity is made up of stainless steel materials, aluminium oxide coating, aluminium sheet and potsherd；Stainless steel materials surface spraying has oxidation aluminium coat, and described aluminium oxide coating surface covers detachable aluminium sheet and potsherd, described aluminium sheet and potsherd are fixed on aluminium oxide coating by aluminum alloy fastener；
The upper end of described cavity offers process chemistry gas access and is electrically connected with RF radio-frequency power supply, the upper inner wall of cavity is fixed with plasma jets, described plasma jets be arranged below conducting carrier plate, it is provided with plasma between described conducting carrier plate and plasma jets, the upper surface of conducting carrier plate is provided with etching sheet, the bottom surface of conducting carrier plate is electrically connected with RF radio frequency DC source, the other end ground connection of described RF radio frequency DC source；Left end in the bottom surface of described cavity is connected to vacuum pump.
Further, described aluminium sheet and potsherd are internally embedded aluminium alloy plate.
Further, the other end of described RF radio-frequency power supply is connected to electric capacity, passes through capacity earth.
Further, the bottom surface of described cavity is connected to earth lead.
Further, described stainless steel materials is that austenitic stainless steel material is made.
Compared with prior art, this utility model has the advantages that and is internally embedded aluminium alloy plate at alumina ceramic plate, the negative ions in cavity can be allowed to flow by design ideal direction, easy accessibility, alumina ceramic plate can effectively stop the high energy particle bombardment to coating, it is ensured that in cavity, reaction environment is not by metal ion pollution.The cavity body structure of the reaction chamber of this solaode blade technolgy is practical, it is easy to promote the use of.
Accompanying drawing explanation
Fig. 1 is overall structure schematic diagram of the present utility model；
Fig. 2 is cavity body structure schematic diagram of the present utility model；
Fig. 3 is cavity enlarged drawing of the present utility model；
In accompanying drawing labelling: 1-process chemistry gas access, 2-ion shower, 3-cavity, 31-stainless steel materials, 32-aluminium oxide coating, 33-aluminium sheet, 331-aluminum alloy fastener, 34-potsherd, 4-RF radio-frequency power supply, 5-RF radio frequency DC source, 6-plasma, 7-vacuum pump, 8-conducting carrier plate, 9-etch sheet.
Detailed description of the invention
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is clearly and completely described, it is clear that described embodiment is only a part of embodiment of this utility model, rather than whole embodiments.Based on the embodiment in this utility model, all other embodiments that those of ordinary skill in the art obtain under not making creative work premise, broadly fall into the scope of this utility model protection.
Referring to Figure of description 1-3, in this utility model embodiment, the cavity body structure of the reaction chamber of a kind of solaode blade technolgy, including cavity 3；
Described cavity 3 is made up of stainless steel materials 31, aluminium oxide coating 32, aluminium sheet 33 and potsherd 34；Stainless steel materials 31 surface spraying has oxidation aluminium coat 32, and described aluminium oxide coating 32 surface is covered detachable aluminium sheet 33 and potsherd 34, described aluminium sheet 33 and potsherd 34 and is fixed on aluminium oxide coating 32 by aluminum alloy fastener 331；
The upper end of described cavity 3 offers process chemistry gas access 1 and is electrically connected with RF radio-frequency power supply 4, the upper inner wall of cavity 3 is fixed with plasma jets 2, described plasma jets 2 be arranged below conducting carrier plate 8, it is provided with plasma 6 between described conducting carrier plate 8 and plasma jets 2, the upper surface of conducting carrier plate 8 is provided with etching sheet 9, the bottom surface of conducting carrier plate 8 is electrically connected with RF radio frequency DC source 5, the other end ground connection of described RF radio frequency DC source 5；Left end in the bottom surface of described cavity 3 is connected to vacuum pump 7.
As optimisation technique scheme of the present utility model: described aluminium sheet 33 and potsherd 34 are internally embedded aluminium alloy plate.
As optimisation technique scheme of the present utility model: the other end of described RF radio-frequency power supply 4 is connected to electric capacity, passes through capacity earth.
As optimisation technique scheme of the present utility model: the bottom surface of described cavity 3 is connected to earth lead.
Operation principle:
This utility model enters the free radical of the chemical gas generation within cavity 3 and cavity 3 inwall may produce corrosion and produce to corrode to etching sheet 9 from process chemistry gas access 1；All inwall can be damaged because of the pollutant produced in cavity 3, precipitate etc..
Cavity 3 main body is austenitic stainless steel material, rustless steel cavity 31 surface spraying aluminium oxide coating 32, aluminium oxide coating 32 surface covers dismountable aluminium sheet 33 and potsherd 34, it is internally embedded aluminium alloy plate at aluminium sheet 33 and potsherd 34, this utility model can allow the negative ions in cavity 3 flow by design ideal direction by the structural design that reaction chamber is unique, easy accessibility, potsherd 34 can effectively stop the high energy particle bombardment to coating, it is ensured that in cavity 3, reaction environment is not by metal ion pollution.
The above; it is only preferred embodiment of the present utility model; not in order to limit this utility model, every any trickle amendment, equivalent replacement and improvement above example made according to technical spirit of the present utility model, should be included within the protection domain of technical solutions of the utility model.
Claims (5)
1. a cavity body structure for the reaction chamber of solaode blade technolgy, including cavity (3)；It is characterized in that；
Described cavity (3) is made up of stainless steel materials (31), aluminium oxide coating (32), aluminium sheet (33) and potsherd (34)；Stainless steel materials (31) surface spraying has oxidation aluminium coat (32), described aluminium oxide coating (32) surface covers detachable aluminium sheet (33) and potsherd (34), described aluminium sheet (33) and potsherd (34) are fixed on aluminium oxide coating (32) by aluminum alloy fastener (331)；
The upper end of described cavity (3) offers process chemistry gas access (1) and is electrically connected with RF radio-frequency power supply (4), the upper inner wall of cavity (3) is fixed with plasma jets (2), described plasma jets (2) be arranged below conducting carrier plate (8), plasma (6) it is provided with between described conducting carrier plate (8) and plasma jets (2), the upper surface of conducting carrier plate (8) is provided with etching sheet (9), the bottom surface of conducting carrier plate (8) is electrically connected with RF radio frequency DC source (5), the other end ground connection of described RF radio frequency DC source (5)；Left end in the bottom surface of described cavity (3) is connected to vacuum pump (7).
2. the cavity body structure of the reaction chamber of a kind of solaode blade technolgy according to claim 1, is characterized in that: described aluminium sheet (33) and potsherd (34) are internally embedded aluminium alloy plate.
3. the cavity body structure of the reaction chamber of a kind of solaode blade technolgy according to claim 1, is characterized in that: the other end of described RF radio-frequency power supply (4) is connected to electric capacity, passes through capacity earth.
4. the cavity body structure of the reaction chamber of a kind of solaode blade technolgy according to claim 1, is characterized in that: the bottom surface of described cavity (3) is connected to earth lead.
5. the cavity body structure of the reaction chamber of a kind of solaode blade technolgy according to claim 1, is characterized in that: described stainless steel materials (31) is made for austenitic stainless steel material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620070162.7U CN205355018U (en) | 2016-01-21 | 2016-01-21 | Cavity of reaction chamber structure for solar wafer technology |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620070162.7U CN205355018U (en) | 2016-01-21 | 2016-01-21 | Cavity of reaction chamber structure for solar wafer technology |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205355018U true CN205355018U (en) | 2016-06-29 |
Family
ID=56180665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620070162.7U Expired - Fee Related CN205355018U (en) | 2016-01-21 | 2016-01-21 | Cavity of reaction chamber structure for solar wafer technology |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205355018U (en) |
-
2016
- 2016-01-21 CN CN201620070162.7U patent/CN205355018U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160629 Termination date: 20170121 |
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| CF01 | Termination of patent right due to non-payment of annual fee |