CN205335279U - Solar cell prepares system - Google Patents
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- CN205335279U CN205335279U CN201521135687.6U CN201521135687U CN205335279U CN 205335279 U CN205335279 U CN 205335279U CN 201521135687 U CN201521135687 U CN 201521135687U CN 205335279 U CN205335279 U CN 205335279U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The utility model discloses a solar cell prepares system, including characteristic storage module, first sort module, a plurality of first technology processing module, second sort module and a plurality of second technology processing module, characteristic storage module is configured as the feature parameter of the substrate that the storage detected in advance, first sort module all is connected with the communication of characteristic storage module with the second sort module, first categorised module setting is at the front end of first technology processing module's material loading mouth for carry not homogeneous substrate to different first technology processing module's material loading mouth department, the categorised module setting of second is between first technology processing module's feed opening and second technology processing module's material loading mouth for carry not homogeneous substrate to different second technology processing module's material loading mouth department. It has reached effect that the differentiation was processed, has effectively promoted solar cell's efficiency distribution concentration degree.
Description
Technical field
This utility model relates to technical field of solar batteries, particularly relates to a kind of solaode preparation system。
Background technology
When preparing the polysilicon of solaode at present, generally all adopt directional solidification method production technology。And adopt polysilicon prepared by directional solidification method owing to being subject to the impact of impurity and grain boundary quality, it is in the Si wafer quality difference to some extent of silico briquette various location。Meanwhile, silico briquette is cut, the operation such as frock time, the obtained thickness of every a piece of silicon chip, damage layer and reflecting rate also differ to the greatest extent。
Thus, when the preparation adopting above-mentioned silicon chip to carry out solaode, need first (namely silicon chip to be carried out homogeneous classification, respectively the external appearance characteristic parameters such as the thickness of silicon chip, resistivity and overall dimensions are detected, and then according to testing result, silicon chip is classified), then the silicon chip after homogeneous classification is carried out the processing technique such as unified making herbs into wool, diffusion, etching, pre-oxidation film and plated film again, thus preparing solaode。That is, first pass through after silicon chip screening installation is shown in silicon chip sorting, be more directly thrown in solaode Preparation equipment to carry out a series of manufacturing procedure unified。When adopt above-mentioned silicon chip is classified after carry out again the equipment of unified processing of silicon chip prepare solaode time; still adopting the phenomenon of identical processing technique processing silicon chip when would generally there is a certain characteristic parameter difference in multiple characteristic parameters of silicon chip, the efficiency distribution concentration degree thus easilying lead to final production solaode is relatively low。
Utility model content
Based on this, it is necessary to be easily caused, for traditional solaode Preparation equipment, the problem that the efficiency distribution concentration degree of final production solaode is relatively low, it is provided that a kind of solaode preparation system。
For realizing a kind of solaode preparation system that this utility model purpose provides, including characteristic storage module, the first sort module, multiple first process handling module, the second sort module and multiple second process handling module；
Described characteristic storage module, is configured to store the characteristic parameter of the substrate detected in advance；
Described first sort module is all connected with described characteristic storage module communication with described second sort module；
Described first sort module is arranged on the front end of the feeding port of described first process handling module, and it is configured to the fisrt feature parameter reading in described characteristic parameter, according to described fisrt feature parameter, described substrate is classified, and inhomogeneous described substrate is delivered to the feeding port place of the first different process handling module；
Different described first process handling module, is configured to sorted described substrate is carried out the first PROCESS FOR TREATMENT of different technology conditions；
Described second sort module is arranged between the feed opening of described first process handling module and the feeding port of described second process handling module, and it is configured to the second feature parameter reading in described characteristic parameter, according to described second feature parameter, the described substrate after described first PROCESS FOR TREATMENT is carried out subseries again, inhomogeneous described substrate is delivered to the feeding port place of different described second process handling module；
Different described second process handling module, is configured to sorted described substrate again is carried out the second PROCESS FOR TREATMENT of different technology conditions。
Wherein in an embodiment, described fisrt feature parameter includes stria depth parameter and resistance parameter；
Described first sort module includes the first sub-device of classification and the second sub-device of classification；
Described first process handling module includes etching device and diffusion facilities；
Wherein, the described first sub-device of classification is positioned at the front end of the feeding port of described etching device, and be configured to read described stria depth parameter, according to described stria depth parameter, described substrate carried out the first classification, and the feeding port place of different described etching devices will be delivered to through the first sorted described substrate；
Different described etching devices, the process for etching being configured to the first sorted described substrate is carried out different technology conditions processes；
The described second sub-device of classification is arranged between the feed opening of described etching device and the feeding port of described diffusion facilities, and be configured to read and described according to described resistance parameter, described substrate carried out the second classification, and the feeding port place of different described diffusion facilitieses will be delivered to through the second sorted described substrate；
Different described diffusion facilitieses, the diffusion technique being configured to the second sorted described substrate is carried out different technology conditions processes。
Wherein in an embodiment, the described second sub-device of classification includes data memory module and match stop module；
Described data memory module, is configured to the first electrical resistivity range, the second electrical resistivity range, the 3rd electrical resistivity range and the 4th electrical resistivity range that storage is preset；
Described match stop module, is configured to compare described resistance parameter respectively with described first electrical resistivity range, described second electrical resistivity range, described 3rd electrical resistivity range and described 4th electrical resistivity range；And when described resistance parameter is positioned at described first electrical resistivity range, corresponding described substrate is divided into the first estate；When described resistance parameter is positioned at described second electrical resistivity range, corresponding described substrate is divided into the second grade；When described resistance parameter is positioned at described three electrical resistivity range, corresponding described substrate is divided into the tertiary gradient；When described resistance parameter is positioned at described four electrical resistivity range, corresponding described substrate is divided into the fourth estate。
Wherein in an embodiment, described second feature parameter includes thickness parameter；Described second sort module includes the 3rd sub-device of classification；Described second process handling module includes filming equipment and agglomerating plant；
Different described filming equipments, the coating process being configured to sorted described substrate again is carried out different technology conditions processes；
The described 3rd sub-device of classification is arranged between the feed opening of described filming equipment and the feeding port of described agglomerating plant, and be configured to read described thickness parameter, according to described thickness parameter, the described substrate after described coating process processes is carried out the 3rd classification, and the feeding port place of different described agglomerating plants will be delivered to through the 3rd sorted described substrate；
Different described agglomerating plants, the sintering process being configured to the 3rd sorted described substrate is carried out different technology conditions processes。
Wherein in an embodiment, also include sheet resistance on-line measuring device；Described second sort module also includes the 4th sub-device of classification；Described second feature parameter also includes sheet resistance parameter；
Described sheet resistance on-line measuring device is connected with described characteristic storage module communication, and is arranged on the side of transmitting device for carrying described substrate, is positioned at the feed opening place of described first process handling module；
Described sheet resistance on-line measuring device, is configured to detect the sheet resistance of described substrate, obtains corresponding sheet resistance parameter, and described sheet resistance parameter is stored to characteristic storage module；
The described 4th sub-device of classification is arranged between described sheet resistance on-line measuring device and the feeding port of described filming equipment, and be configured to, according to described sheet resistance parameter, described substrate carries out the 3rd subclassification, and the described substrate after the 3rd subclassification is delivered to the feeding port place of different described filming equipments。
Wherein in an embodiment, also include colour system detecting device, the 3rd sort module and multiple component devices；
Described colour system detecting device is arranged on the side of the transmitting device for transmitting described substrate, it is positioned at the feed opening place of described second process handling module, and it is configured to detect the color of the described substrate after described second PROCESS FOR TREATMENT, obtain corresponding color parameter；
Described 3rd sort module is arranged between described colour system detecting device and the feeding port of described component devices, and be configured to according to described colour system parameter, described substrate be classified, and sorted described substrate is delivered to the feeding port place of different component devices；
Different described component devices, the component process being configured to sorted described substrate is carried out different technology conditions processes。
Wherein in an embodiment, also include laser grooving coding module；
Described laser grooving coding module, it is adaptable to communication connection detects the feature detection module of described substrate, and is configured to before described feature detection module detects the feature of described substrate, and the either side at described substrate carries out cutting, forms coded faces；
Wherein, described coded faces is as described characteristic storage module, for loading and store the described characteristic parameter detected by described feature detection module。
Wherein in an embodiment, described first sort module includes the first evaluator and the first mechanical hand；
Described first evaluator is arranged on described first mechanical hand, and is configured to the described characteristic parameter identifying in described coded faces；
Described first mechanical hand, is configured to the described characteristic parameter identified according to described first evaluator, described substrate is positioned over the feeding port place of the first different process handling module。
Wherein in an embodiment, described second sort module includes the second evaluator and the second mechanical hand；
Described second evaluator is arranged on described second mechanical hand, and is configured to the described second feature parameter identifying in described coded faces；
Described second mechanical hand, is configured to the described second feature parameter identified according to described second evaluator, described substrate is positioned over the feeding port place of the second different process handling module。
Wherein in an embodiment, described first evaluator is laser barcode scanning evaluator。
The beneficial effect of above-mentioned solaode preparation system:
It by arranging characteristic storage module relative set the first sort module and the second sort module in solaode preparation system, before substrate is carried out the first PROCESS FOR TREATMENT, the fisrt feature parameter read in characteristic storage module in the characteristic parameter of storage by the first sort module, after substrate being classified according to the fisrt feature parameter read, then by multiple first technical modules, inhomogeneous substrate is carried out the processed of different technology conditions。And then the second feature parameter read in characteristic storage module in the characteristic parameter of storage by the second sort module again, substrate after the first PROCESS FOR TREATMENT is carried out subseries again by the second feature parameter according to reading, thus sorted substrate again carries out the second PROCESS FOR TREATMENT of different technology conditions again through multiple second process handling module。Finally achieve when substrate is carried out per pass manufacturing procedure, inhomogeneous substrate can be carried out the PROCESS FOR TREATMENT of different technology conditions, this also avoids the phenomenon by being uniformly carried out a series of manufacturing procedure after substrate classification again, thus having reached the effect of differentiation processing preparation, it is achieved that the purpose that the characteristic information that substrate detects passes down in solaode manufacturing procedure with the shared of solaode manufacturing procedure and substrate features information。Finally efficiently solve traditional solaode Preparation equipment and be easily caused the problem that the efficiency distribution concentration degree of final production solaode is relatively low。
Accompanying drawing explanation
Fig. 1 is the structural representation of a specific embodiment of solaode preparation system of the present utility model；
Fig. 2 is the structural representation of another specific embodiment of solaode preparation system of the present utility model。
Detailed description of the invention
For making technical solutions of the utility model clearly, below in conjunction with drawings and the specific embodiments, this utility model is described in further detail。
First, it is noted that the substrate that the substrate in this utility model adopts when referring to for preparing solaode。That is, the substrate layer portion in solaode。It can be various material, as: the silicon chip such as monocrystal silicon or polysilicon。
One or Partial Feature it addition, the fisrt feature parameter mentioned in this utility model and second feature parameter then refer to and be processed in processing procedure to substrate, in multiple features that substrate has。As, fisrt feature parameter includes the stria degree of depth (surface damage layer) and two features of resistivity of substrate。Second feature parameter then includes sheet resistance and two features of thickness of substrate。Wherein it is desired to illustrate, the division of fisrt feature parameter and second feature parameter can have numerous embodiments, and it is not limited to above-mentioned a kind of mode。
Referring to Fig. 1, as a specific embodiment of solaode preparation system 100 of the present utility model, it includes characteristic storage module (not shown), the first sort module 110, multiple first process handling module the 120, second sort modules 130 and multiple second process handling module 140。
Wherein, characteristic storage module, it is configured to store the characteristic parameter of the substrate detected in advance。It is to say, before carrying out solaode preparation, first pass through feature detection module 001 and substrate carried out the detection of various features, obtain corresponding characteristic parameter。This characteristic parameter includes the various external appearance characteristics (such as surface damage situation) of substrate and performance characteristic (such as resistivity, sheet resistance and thickness) etc.。And then the various features of the substrate detected in advance by feature detection module 001 again through characteristic storage module stores。
First sort module 110 and the second sort module 130 then all carry out communication with characteristic storage module and are connected, in order to read stored characteristic parameter in characteristic storage module。
Wherein, first sort module 110 is arranged on the front end of the feeding port of the first process handling module 120, and it is configured to the fisrt feature parameter read in characteristic storage module in the characteristic parameter of storage, according to fisrt feature parameter, substrate is classified, and inhomogeneous substrate is delivered to the feeding port place of the first different process handling module 120。So that sorted substrate is carried out the first PROCESS FOR TREATMENT of different technology conditions by the first different process handling module 120 respectively。
Simultaneously, second sort module 130 is then arranged between the feed opening of the first process handling module 120 and the feeding port of the second process handling module 140, and it is configured to the second feature parameter read in characteristic storage module in the characteristic parameter of storage, according to second feature parameter, the substrate after the first PROCESS FOR TREATMENT carried out subseries again, and inhomogeneous substrate is delivered to the feeding port place of the second different process handling module 140。Make the second different process handling module 140 that sorted substrate again can carry out the second PROCESS FOR TREATMENT of different technology conditions。
Thus, by arranging characteristic storage module, the first sort module 110 and the second sort module 130 in solaode preparation system 100, and the first sort module 110 is set and the second sort module 130 all carries out data transmission with characteristic storage module, this allows for before substrate carries out every one manufacturing procedure, each specific features of substrate can both be obtained, and classify accordingly according to each specific features, to realize carrying out the customized purpose of each road production preparation section for each substrate, thus reaching the effect that differentiation produces。
That is, by arranging characteristic storage module in solaode preparation system 100, the various features making detected substrate can obtain utilizing the most fully in solaode manufacturing procedure, reaches the purpose that feature detection information is shared with manufacturing procedure and passed down。Simultaneously, also relative set and characteristic storage module carry out the first sort module 110 and the second sort module 130 of data communication, making each substrate all can carry out every one processing technique under optimal process conditions, this has also just been effectively ensured the every a piece of solar battery sheet finally prepared all can have good performance。Therefore, it is effectively increased the utilization rate of product, reduces the ratio of poor efficiency sheet, is finally effectively improved integral battery door efficiency。
It should be noted that the number of the first process handling module 120 and the second process handling module 140 can carry out free setting according to practical situation, generally its equal at least two。
Further, for the ease of the reading of the characteristic parameter of substrate detected in advance and identification, it is preferred that it also includes laser grooving coding module。Laser grooving coding module is applicable to the feature detection module 001 of communication connection detection substrate features, in order to stored by the characteristic parameter that feature detection module 001 detects。Wherein, feature detection module 001 can include multiple substrate detection equipment, as: thickness detecting equipment, TTV detect equipment, Resistivity testing equipment, minority carrier life time detection equipment, dirty detection equipment, collapse frontier inspection measurement equipment etc.。No longer repeat one by one herein。
Concrete, laser grooving coding module, before being configured to the feature that feature detection module 001 detects substrate, either side (any one side in being preferably four long) at substrate carries out cutting, formed and be similar to the coded faces of Quick Response Code, so that realize can the purpose of load substrates characteristic information。Wherein, the coded faces of formation is as characteristic storage module, for loading and store the characteristic parameter of substrate detected in advance。Further, the coded faces formed also can load the various information such as production table number, substrate number, substrate position information, in order to identify the concrete model etc. of substrate。
Simultaneously, it should be noted that when substrate end is bonding, coded faces is generally placed upon fixed position, side, keeps coded faces direction consistent when ensureing inserted sheet and packaging simultaneously。Further, substrate adds man-hour carrying out feeding, it should keep coded faces direction consistent。
Accordingly, as a specific embodiment of solaode preparation system 100 of the present utility model, its first sort module 110 can be realized by the first evaluator and the first mechanical hand。Wherein, the first evaluator is arranged on the first mechanical hand, and is configured to the fisrt feature parameter on recognition coding face。First mechanical hand, is configured to the fisrt feature parameter identified according to the first evaluator, and substrate is positioned over the feeding port place of the first different process handling module 120。Wherein, the first evaluator is preferably laser barcode scanning evaluator。
In like manner, the second sort module 130 realizes also by the second evaluator and the second mechanical hand。Wherein, the second evaluator is arranged on the second mechanical hand, and is configured to the second feature parameter on recognition coding face。Second mechanical hand, is configured to the second feature parameter identified according to the second evaluator, and substrate is positioned over the feeding port place of the second different process handling module 140。Wherein, the second evaluator is preferably again laser barcode scanning evaluator。
Additionally, owing to, in the preparation process carrying out solaode, its processing preparation section is generally: making herbs into wool (antireflective) diffusion (PN junction making) etching (removal edge PN junction) pre-oxidation film (anti-PID) plated film (PECVD) printing-sintering testing, sorting。Therefore, when first substrate being carried out the first PROCESS FOR TREATMENT, it can include process for etching and process and diffusion technique process。Accordingly, owing to when carrying out process for etching and processing, its topmost substrate features arranging process conditions institute foundation is the stria degree of depth, and when being diffused PROCESS FOR TREATMENT, its topmost substrate features arranging corresponding process conditions institute foundation is resistivity。Therefore, fisrt feature parameter is preferably stria depth parameter and resistance parameter。
Thus, referring to Fig. 2, as another specific embodiment of solaode preparation system 100 of the present utility model, its first sort module 110 includes the first sub-device of classification 111 and the second sub-device 112 of classification。First process handling module 120 includes etching device 121 and diffusion facilities 122。
Wherein, the first sub-device 111 of classification is arranged on the front end of the feeding port of etching device 121, and it is configured to the stria depth parameter read in characteristic storage module in the characteristic parameter of storage, according to stria depth parameter, substrate carried out the first classification, and the feeding port place of different etching devices 121 will be delivered to through the first sorted substrate。
Herein, it is necessary to explanation, the first sub-device 111 of classifying should be positioned at the same side of transmitting device with characteristic storage module (that is, coded faces), in order to the first sub-device 111 of classifying reads and identify the stria depth parameter of substrate smoothly。
And then, again through arranging different etching devices 121, different etching devices 121 first sorted substrate is carried out the process for etching process of different technology conditions。Concrete, the stria degree of depth is less or surface damage layer is less substrate is thrown to the making herbs into wool degree of depth and is arranged in etching device 121 3 ± 0.5 μm interior and carries out process for etching process, thus reducing the consumption of chemical liquid。The substrate that the stria degree of depth is relatively big or damage layer is deeper is then thrown to the making herbs into wool degree of depth and is arranged in etching device 121 4 ± 0.5 μm interior and carries out process for etching process, to reach to fall into preferably light effect。
When by different etching devices 121 substrate being carried out after process for etching completes, prepare manufacturing procedure according to solaode it can be seen that need the substrate after making herbs into wool is diffused technique。Again owing to the sheet resistance of the substrate after diffusion and the base resistivity of substrate are linear, therefore, when substrate completes process for etching, after being sent by the feed opening of etching device 121, the second sub-device 112 of classification can be set by the side of the transmitting device between the feeding port of the feed opening of etching device 121 and diffusion facilities 122, the resistance parameter of storage in characteristic storage module is read by the second sub-device 112 of classification, according to resistance parameter, substrate carried out the second classification, and the feeding port place of different diffusion facilitieses 122 will be delivered to through the second sorted substrate。Wherein, the second sub-device 112 of classifying should be positioned at the same side of transmitting device with characteristic storage module (that is, coded faces) equally。
Concrete, laser barcode scanning evaluator can be increased as the second sub-device 112 of classification at the mechanical hand place at the feed opening place of etching device 121, by the resistance parameter information detected by laser barcode scanning evaluator identification, and according to this information, silicon chip is classified, in order to put into different film magazines and be diffused。
And, when substrate is carried out the second classification according to resistance parameter by the second classification sub-device 112, it specifically can be classified according to the relation of the actual resistivity of the substrate recognized with the first electrical resistivity range prestored, the second electrical resistivity range, the 3rd electrical resistivity range and the 4th electrical resistivity range。
That is, by classifying sub-device 112 internal configuration data memory module and match stop module (in figure all not shown) second。By data memory module, the first electrical resistivity range, the second electrical resistivity range, the 3rd electrical resistivity range and the 4th electrical resistivity range that storage is preset。And then be that resistance parameter is compared with the first electrical resistivity range, the second electrical resistivity range, the 3rd electrical resistivity range and the 4th electrical resistivity range respectively by match stop module again。When pass through compare show that resistance parameter is positioned at the first electrical resistivity range time, corresponding substrate is divided into the first estate；When resistance parameter is positioned at the second electrical resistivity range, corresponding substrate is divided into the second grade；When resistance parameter is positioned at three electrical resistivity range, corresponding substrate is divided into the tertiary gradient；When resistance parameter is positioned at four electrical resistivity range, corresponding substrate is divided into the fourth estate。
Herein, it should be noted that, a specific embodiment as preparation method of solar battery of the present utility model, first electrical resistivity range may be configured as 1.5 Ω .cm 2.0 Ω .cm, second electrical resistivity range may be configured as 2.0 Ω .cm 2.5 Ω .cm, 3rd electrical resistivity range may be configured as 2.5 Ω .cm 3.5 Ω .cm, and the 4th electrical resistivity range may be configured as 3.5 Ω .cm 5.0 Ω .cm。
Further, after the substrate after process for etching processes is carried out the second classification according to resistance parameter by the second sub-device 112 of classification by arranging, again through set different diffusion facilities 122, the diffusion technique that the second sorted substrate carries out different technology conditions processes。Concrete, the relatively low substrate of resistance parameter is when diffusion, and the p-doped concentration set by diffusion facilities 122 of its correspondence can be higher。The higher substrate of resistance parameter is when diffusion, and the p-doped concentration set by diffusion facilities 122 of its correspondence can be lower。Wherein, the base resistivity of sheet resistance with substrate owing to spreading meron is linear, and therefore each grade adopts different diffusion techniques can effectively realize the equal control of substrate sheet resistance, and obtains good short wave response, promote the minority carrier life time of battery, it is achieved the increase of photoproduction color。
Further, after substrate having been carried out different diffusion technique process by different diffusion facilitieses 122, substrate is performed etching by preparation section according to solaode noted earlier it can be seen that now need, pre-oxidation film, coating process and printing-sintering PROCESS FOR TREATMENT。That is, it is necessary on substrate, carry out coating process, and substrate is sintered PROCESS FOR TREATMENT。Wherein, the process that the series of process such as what coating process referred to perform etching substrate exactly, pre-oxidation film and plated film process。
Wherein, before substrate carries out coating process (process of etching technics, pre-oxidation membrane process and coating process) and sintering process, the substrate after diffusion technique processes is sent by the feed opening of different diffusion facilitieses 122。Now, as a kind of embodiment, directly the substrate having carried out diffusion technique can be sent into different filming equipments 141 and carry out coating process。And then again through arranging the 3rd sub-device 132 of classification between the feed opening and the feeding port of agglomerating plant 142 of filming equipment 141, sub-device 132 is classified by characteristic storage module reads corresponding thickness parameter by the 3rd, and according to the thickness parameter read, substrate is carried out the 3rd classification, will be respectively fed in different agglomerating plants 142 to be sintered through the 3rd sorted inhomogeneous substrate。
It addition, the performance in order to be further ensured that prepared solaode obtains optimization, as another kind of embodiment, it may also include sheet resistance on-line measuring device 150。Accordingly, the second sort module 130 then also includes the 4th sub-device 131 of classification。Second feature parameter also includes sheet resistance parameter。
Namely, referring to Fig. 2, another specific embodiment as solaode preparation system 100 of the present utility model, wherein, sheet resistance on-line measuring device 150 is arranged on the side of the transmitting device for carrying substrate, and the feed opening and the 4th at the first process handling module 120 is classified between sub-device 131, and is configured to the sheet resistance of detection substrate, obtain corresponding sheet resistance parameter, and the sheet resistance parameter detected is stored to characteristic storage module。
4th classifies sub-device 131 then relative set between the feeding port of sheet resistance on-line measuring device 150 and filming equipment 141, and it is configured to read the sheet resistance parameter of storage in characteristic storage module, according to sheet resistance parameter, substrate carried out the 3rd subclassification, and the substrate after the 3rd subclassification is delivered to the feeding port place of different filming equipments 141。
Concrete, by increasing sheet resistance online detection instrument at the feed opening place of diffusion facilities 122, sheet resistance online detection instrument the substrate after diffusion technique is carried out sheet resistance detection, obtain corresponding sheet resistance parameter。Simultaneously, on the mechanical hand at feed opening place, also increase laser barcode scanning evaluator as the 4th sub-device 131 of classification, by the sheet resistance parameter detected by laser barcode scanning evaluator identification, and then according to sheet resistance parameter, substrate is carried out the 3rd subclassification, arrange so that the film source realizing different gear throws in different plated film preparation, as: the purpose of plated film (PECVD) equipment。Wherein, the 4th classifies sub-device 131 when substrate being carried out three subclassification according to sheet resistance parameter, can by realizing substrate to be classified for one grade at interval of 8 ohm。Concrete, it is possible to it is divided into four gears, for instance: 81 ohm (Ω) 88 ohm, 89 ohm 96 ohm, 97 ohm 104 ohm and 105 ohm 112 ohm。Herein, it should be noted that the shelves of drawing of sheet resistance parameter are classified and can be carried out free setting according to practical situation, it is not limited to above-mentioned a kind of division set-up mode。
After substrate being carried out the 3rd subclassification by the 4th sub-device 131 of classification according to sheet resistance parameter, by arranging different filming equipments 141, the coating process that the substrate after the 3rd subclassification carries out different technology conditions processes。Shows that as: sheet resistance parameter is higher short wave response is better, therefore only the PECVD being used for PECVD plated film need to be finely tuned, and realize the increase of short-wave absorption amount by reducing thickness, and then promote the assembly of the thus part silicon wafer to manufacture one-tenth performance under low light condition。Sheet resistance parameter is relatively low, needs additionally to arrange its corresponding etch technological condition, pre-oxidation membrane process condition and coating process condition performs etching, pre-oxidation film and coating process。Wherein, carrying out pre-oxidation after etching, the silicon dioxide film namely forming densification on diffusingsurface is the anti-PID technique that current battery sheet main flow adopts。Owing to sheet resistance parameter is more high, the anti-PID performance of substrate is more good, it is possible to carries out substrate classification according to sheet resistance parameter and realizes the collection of the anti-PID film source of high-quality。
Additionally, owing to the thickness of substrate directly affects the setting of the sintering temperature in sintering process and sintering time, therefore, as a specific embodiment of preparation method of solar battery of the present utility model, it is additionally provided with thickness detection apparatus and the 3rd sub-device 132 of classification in the side of the transmitting device at the feed opening place being positioned at plated film Preparation equipment。
The 3rd sub-device 132 of classification is arranged between the feed opening of filming equipment 141 and the feeding port of agglomerating plant 142, and be configured to read thickness parameter, according to thickness parameter, substrate carried out the 3rd classification, and the feeding port place of different agglomerating plants 142 will be delivered to through the 3rd sorted substrate。
It should be noted that, the 3rd sub-device 132 of classification realizes also by Laser scanner measuring device。Namely, mechanical hand place between the feed opening and the feeding port of agglomerating plant 142 of filming equipment 141 increases laser barcode scanning evaluator as the 3rd sub-device 132 of classification, by the thickness parameter detected by laser barcode scanning evaluator identification, and according to thickness parameter, substrate is carried out the 3rd classification。Wherein, when substrate is carried out the 3rd classification according to thickness parameter by the 3rd classification sub-device 132, can specifically to divide for one grade at interval of 5 μm。As: 186 μm 190 μm, 191 μm 195 μm, 196 μm 200 μm and 201 μm of 205 μm of four gears, according to detection information, the substrate of different-thickness is loaded into different collection film magazines by mechanical hand, in order to the substrate of point good class carries out different sintering process in next step track。
Finally, again through set multiple different agglomerating plant 142, the 3rd sorted substrate is carried out the sintering process process of different technology conditions。Wherein, substrate thickness is bigger, then be thrown to sintering temperature and arrange in higher agglomerating plant 142, to realize can effectively reducing aluminum slurry and the resistance of silicon series string, increases the purpose of fill factor, curve factor and then raising efficiency。Substrate thickness is less, then can be thrown to sintering temperature and arrange in relatively low agglomerating plant 142 and be sintered。
After substrate has been carried out sintering process, now substrate overall structure has been the structure of solar battery sheet。That is, after substrate having been carried out sintering process, the preparation of solar battery sheet is just completed。Generally, when preparing solaode, it also includes the manufacturing procedure of sorting component, to realize the assembling of multiple solar battery sheet。Accordingly, as the still another embodiment of solaode preparation system 100 of the present utility model, it may also include colour system detecting device, the 3rd sort module and multiple component devices (all not shown in figure)。
Wherein, colour system detecting device is arranged on the side of the transmitting device for substrate transport, is positioned at the feed opening place of the second process handling module 140, and is configured to detect the color of the substrate after the second PROCESS FOR TREATMENT, obtains corresponding color parameter。3rd sorter is arranged between color detection means and the feeding port of component devices, and is configured to according to color parameter, substrate be classified, and sorted substrate is delivered to the feeding port place of different component devices。Different component devices, the component process being configured to sorted substrate is carried out different technology conditions processes, to reduce the purpose of the bad order caused due to aberration。
Embodiment described above only have expressed several embodiments of the present utility model, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to this utility model the scope of the claims。It should be pointed out that, for the person of ordinary skill of the art, without departing from the concept of the premise utility, it is also possible to make some deformation and improvement, these broadly fall into protection domain of the present utility model。Therefore, the protection domain of this utility model patent should be as the criterion with claims。
Claims (10)
1. a solaode preparation system, it is characterised in that include characteristic storage module, the first sort module, multiple first process handling module, the second sort module and multiple second process handling module；
Described characteristic storage module, is configured to store the characteristic parameter of the substrate detected in advance；
Described first sort module is all connected with described characteristic storage module communication with described second sort module；
Described first sort module is arranged on the front end of the feeding port of described first process handling module, and it is configured to the fisrt feature parameter reading in described characteristic parameter, according to described fisrt feature parameter, described substrate is classified, and inhomogeneous described substrate is delivered to the feeding port place of the first different process handling module；
Different described first process handling module, is configured to sorted described substrate is carried out the first PROCESS FOR TREATMENT of different technology conditions；
Described second sort module is arranged between the feed opening of described first process handling module and the feeding port of described second process handling module, and it is configured to the second feature parameter reading in described characteristic parameter, according to described second feature parameter, the described substrate after described first PROCESS FOR TREATMENT is carried out subseries again, inhomogeneous described substrate is delivered to the feeding port place of different described second process handling module；
Different described second process handling module, is configured to sorted described substrate again is carried out the second PROCESS FOR TREATMENT of different technology conditions。
2. solaode preparation system according to claim 1, it is characterised in that described fisrt feature parameter includes stria depth parameter and resistance parameter；
Described first sort module includes the first sub-device of classification and the second sub-device of classification；
Described first process handling module includes etching device and diffusion facilities；
Wherein, the described first sub-device of classification is positioned at the front end of the feeding port of described etching device, and be configured to read described stria depth parameter, according to described stria depth parameter, described substrate carried out the first classification, and the feeding port place of different described etching devices will be delivered to through the first sorted described substrate；
Different described etching devices, the process for etching being configured to the first sorted described substrate is carried out different technology conditions processes；
The described second sub-device of classification is arranged between the feed opening of described etching device and the feeding port of described diffusion facilities, and be configured to read and described according to described resistance parameter, described substrate carried out the second classification, and the feeding port place of different described diffusion facilitieses will be delivered to through the second sorted described substrate；
Different described diffusion facilitieses, the diffusion technique being configured to the second sorted described substrate is carried out different technology conditions processes。
3. solaode preparation system according to claim 2, it is characterised in that the described second sub-device of classification includes data memory module and match stop module；
Described data memory module, is configured to the first electrical resistivity range, the second electrical resistivity range, the 3rd electrical resistivity range and the 4th electrical resistivity range that storage is preset；
Described match stop module, is configured to compare described resistance parameter respectively with described first electrical resistivity range, described second electrical resistivity range, described 3rd electrical resistivity range and described 4th electrical resistivity range；And when described resistance parameter is positioned at described first electrical resistivity range, corresponding described substrate is divided into the first estate；When described resistance parameter is positioned at described second electrical resistivity range, corresponding described substrate is divided into the second grade；When described resistance parameter is positioned at described three electrical resistivity range, corresponding described substrate is divided into the tertiary gradient；When described resistance parameter is positioned at described four electrical resistivity range, corresponding described substrate is divided into the fourth estate。
4. the solaode preparation system according to any one of claims 1 to 3, it is characterised in that described second feature parameter includes thickness parameter；Described second sort module includes the 3rd sub-device of classification；Described second process handling module includes filming equipment and agglomerating plant；
Different described filming equipments, the coating process being configured to sorted described substrate again is carried out different technology conditions processes；
The described 3rd sub-device of classification is arranged between the feed opening of described filming equipment and the feeding port of described agglomerating plant, and be configured to read described thickness parameter, according to described thickness parameter, the described substrate after described coating process processes is carried out the 3rd classification, and the feeding port place of different described agglomerating plants will be delivered to through the 3rd sorted described substrate；
Different described agglomerating plants, the sintering process being configured to the 3rd sorted described substrate is carried out different technology conditions processes。
5. solaode preparation system according to claim 4, it is characterised in that also include sheet resistance on-line measuring device；Described second sort module also includes the 4th sub-device of classification；Described second feature parameter also includes sheet resistance parameter；
Described sheet resistance on-line measuring device is connected with described characteristic storage module communication, and is arranged on the side of transmitting device for carrying described substrate, is positioned at the feed opening place of described first process handling module；
Described sheet resistance on-line measuring device, is configured to detect the sheet resistance of described substrate, obtains corresponding sheet resistance parameter, and described sheet resistance parameter is stored to characteristic storage module；
The described 4th sub-device of classification is arranged between described sheet resistance on-line measuring device and the feeding port of described filming equipment, and be configured to, according to described sheet resistance parameter, described substrate carries out the 3rd subclassification, and the described substrate after the 3rd subclassification is delivered to the feeding port place of different described filming equipments。
6. solaode preparation system according to claim 1, it is characterised in that also include colour system detecting device, the 3rd sort module and multiple component devices；
Described colour system detecting device is arranged on the side of the transmitting device for transmitting described substrate, it is positioned at the feed opening place of described second process handling module, and it is configured to detect the color of the described substrate after described second PROCESS FOR TREATMENT, obtain corresponding color parameter；
Described 3rd sort module is arranged between described colour system detecting device and the feeding port of described component devices, and be configured to according to described colour system parameter, described substrate be classified, and sorted described substrate is delivered to the feeding port place of different component devices；
Different described component devices, the component process being configured to sorted described substrate is carried out different technology conditions processes。
7. solaode preparation system according to claim 1, it is characterised in that also include laser grooving coding module；
Described laser grooving coding module, it is adaptable to communication connection detects the feature detection module of described substrate, and is configured to before described feature detection module detects the feature of described substrate, and the either side at described substrate carries out cutting, forms coded faces；
Wherein, described coded faces is as described characteristic storage module, for loading and store the described characteristic parameter detected by described feature detection module。
8. solaode preparation system according to claim 7, it is characterised in that described first sort module includes the first evaluator and the first mechanical hand；
Described first evaluator is arranged on described first mechanical hand, and is configured to the described characteristic parameter identifying in described coded faces；
Described first mechanical hand, is configured to the described characteristic parameter identified according to described first evaluator, described substrate is positioned over the feeding port place of the first different process handling module。
9. solaode preparation system according to claim 7, it is characterised in that described second sort module includes the second evaluator and the second mechanical hand；
Described second evaluator is arranged on described second mechanical hand, and is configured to the described second feature parameter identifying in described coded faces；
Described second mechanical hand, is configured to the described second feature parameter identified according to described second evaluator, described substrate is positioned over the feeding port place of the second different process handling module。
10. solaode preparation system according to claim 6, it is characterised in that described first evaluator is laser barcode scanning evaluator。
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| CN201521135687.6U CN205335279U (en) | 2015-12-30 | 2015-12-30 | Solar cell prepares system |
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| CN201521135687.6U CN205335279U (en) | 2015-12-30 | 2015-12-30 | Solar cell prepares system |
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| CN205335279U true CN205335279U (en) | 2016-06-22 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108198907A (en) * | 2017-12-30 | 2018-06-22 | 苏州阿特斯阳光电力科技有限公司 | A kind of determining method and device of silicon chip |
| CN110833996A (en) * | 2019-09-27 | 2020-02-25 | 福建星云电子股份有限公司 | One-stop full-automatic BMS intelligent test system |
| CN112216623A (en) * | 2019-07-10 | 2021-01-12 | 长鑫存储技术有限公司 | Etching machine and control method thereof |
-
2015
- 2015-12-30 CN CN201521135687.6U patent/CN205335279U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108198907A (en) * | 2017-12-30 | 2018-06-22 | 苏州阿特斯阳光电力科技有限公司 | A kind of determining method and device of silicon chip |
| CN112216623A (en) * | 2019-07-10 | 2021-01-12 | 长鑫存储技术有限公司 | Etching machine and control method thereof |
| CN112216623B (en) * | 2019-07-10 | 2022-12-23 | 长鑫存储技术有限公司 | Etching machine and control method thereof |
| CN110833996A (en) * | 2019-09-27 | 2020-02-25 | 福建星云电子股份有限公司 | One-stop full-automatic BMS intelligent test system |
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