CN205290582U - Silicon wafer stick chamfering apparatus convenient to adjust - Google Patents
Silicon wafer stick chamfering apparatus convenient to adjust Download PDFInfo
- Publication number
- CN205290582U CN205290582U CN201620064338.8U CN201620064338U CN205290582U CN 205290582 U CN205290582 U CN 205290582U CN 201620064338 U CN201620064338 U CN 201620064338U CN 205290582 U CN205290582 U CN 205290582U
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- CN
- China
- Prior art keywords
- cylinder
- crystal bar
- silicon crystal
- portable plate
- dovetail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model provides a silicon wafer stick chamfering apparatus, it is rational in infrastructure, can effectively avoid it to go up tilting mechanism in the upset working process, the bending deformation takes place and includes the organism for the cylinder pole of second cylinder, is equipped with the V -arrangement groove that is used for placing the crystal bar on the organism, and the below in V -arrangement groove is equipped with the griding assembly who installs in the organism, and the top in V -arrangement groove is equipped with and is used for the tilting mechanism that overturns the silicon wafer stick, tilting mechanism is including fixing the support on the organism, first fly leaf, first cylinder, second fly leaf, second cylinder, and the inboard relative position of two second fly leafs installs the clamp splice that is suitable for centre gripping silicon wafer stick, and each clamp splice can rotate around self axis, and one of them clamp splice is rotatory by the driving motor drive, be equipped with on the first fly leaf along the forked tail boss or / and the dovetail of the setting of second cylinder axial, the upper end of second fly leaf be equipped with be suitable for with forked tail boss or dovetail sliding fit's dovetail or forked tail boss.
Description
Technical field
The utility model relates to silicon wafer fabrication techniques field, is specifically a kind of silicon crystal bar chamfering equipment being convenient to regulate.
Background technology
In the process that silicon wafer production manufactures, first need to cut into slices silicon crystal bar, but in order to the quality of silicon wafer after ensureing to cut into slices needs silicon crystal bar chamfering before section, the silicon crystal bar of non-chamfering cut into slices after silicon wafer edge surface can have corner angle burr and collapse limit and even have the defects such as crack, edge surface is more coarse, in order to increase silicon wafer edge surface physical strength, reduce particle contamination, it is thus desirable to be circular arc shape or trapezoidal by the edge grind of silicon crystal bar. Chamfering process mostly carries out on silicon crystal bar chamfering equipment, a kind of silicon crystal bar chamfering equipment is had to comprise body at present, sanding component it is provided with in body, body is provided with two pieces of limited blocks, the V shape groove be suitable for placing silicon crystal bar it is formed with between described two limited blocks, V shape trench bottom is provided with polishing mouth, the polishing parts of described sanding component are positioned at polishing mouth, described limited block is divided into movable limited block and fixing limited block, described movable limited block by drive Component driver its in the horizontal direction near or away from described fixing limited block. In practice, by the adjustment to spacing between movable limited block and fixing limited block, realize when actual production silicon crystal bar according to different size to the adjustment of the polishing mouth width of V shape trench bottom, but the fixing mode of movable limited block is mostly the mode adopting bolt fixing at present, when adjusting polishing mouth width, first manual loose bolts, securing bolt again when activity limited block is moved to correct position in the horizontal direction, the mode often not accurate enough position needing repeatedly adjustment activity limited block of this kind of adjustment, operates very loaded down with trivial details.
Practical novel content
Technical problem to be solved in the utility model is, overcomes the defect of prior art, it is provided that a kind of silicon crystal bar chamfering equipment being convenient to regulate, and the width of V shape trench bottom polishing mouth can be regulated by this equipment efficiently, it is to increase working efficiency.
For solving the problems of the technologies described above, the utility model proposes a kind of silicon crystal bar chamfering equipment being convenient to regulate, comprise body, sanding component it is provided with in body, body is provided with two pieces of limited blocks, the V shape groove be suitable for placing silicon crystal bar it is formed with between described two limited blocks, V shape trench bottom is provided with polishing mouth, in described body, the position corresponding with described polishing mouth is provided with sanding component, in two limited blocks one is fixing limited block, another is movable limited block, described body be provided with drive described movable limited block in the horizontal direction near or away from the driving assembly of described fixing limited block, assembly is driven to comprise screw mandrel and a transmission shaft of at least two levels and the parallel setting being located on body, one end of described each screw mandrel coordinates with the screw on described movable limited block, the other end of described each screw mandrel is provided with the first cone gear, described transmission shaft is perpendicular to screw mandrel and arranges, and it is provided with the 2nd cone gear being meshed with described first cone gear thereon, the end of described transmission shaft be provided be beneficial to rotate its screw portion.
After adopting said structure, compared with prior art, the utility model has the following advantages: compared with original manual setting, transmission shaft is driven to rotate by screwing the portion of screwing of end part of driving shaft, owing to the two ends of transmission shaft are provided with the 2nd cone gear being meshed with the first cone gear on screw mandrel, therefore each screw mandrel synchronous axial system can be driven when transmission shaft rotates, again because the screw on screw mandrel and movable limited block coordinates, thus movable limited block can be driven correct position is moved in the horizontal direction when screw mandrel rotates, thus realize the adjustment of the polishing mouth width to the V lower end of shape groove, to tackle the silicon crystal bar of different size, fast easy to adjust, effectively save regulation time, increase work efficiency.
As improvement, the top of V shape groove is provided with the switching mechanism for being overturn by silicon crystal bar, described switching mechanism comprises the support being fixed on body, horizontally disposed first portable plate, drive the first cylinder that the first portable plate moves up and down, two the 2nd portable plates being oppositely arranged, be fixed on described first portable plate for drive two the 2nd portable plates in opposite directions or from motion the 2nd cylinder, described 2nd cylinder is the twin shaft cylinder that two ends are equipped with cylinder rod, inside two the 2nd portable plates, relative position is equiped with the fixture block being suitable for clamping silicon crystal bar, each fixture block can around own axis, wherein a fixture block is driven by drive-motor and rotates, like this, turn over to turn 90 degrees by silicon crystal bar by switching mechanism after having polished and again next corner angle is polished, save manpower and the time of the artificial required consumption of upset silicon crystal bar, effectively increase work efficiency.
As improvement, first portable plate is provided with along the 2nd cylinder axis to the dovetail boss arranged or/and dovetail-indent, the upper end of described 2nd portable plate is provided with and is suitable for described dovetail boss or/and the dovetail-indent that is slidably matched of dovetail-indent is or/and dovetail boss, like this, by the cooperation of dovetail boss and dovetail-indent thus the first portable plate is flexibly connected with the 2nd portable plate, described 2nd portable plate is in the process ordering about movement by the 2nd cylinder, there is relative movement in dovetail boss with corresponding dovetail-indent position thereupon, when overturning silicon crystal bar, the weight of silicon crystal bar is by the cylinder rod shared of the first portable plate and the 2nd cylinder, it is thus possible to avoid the problem easily occured bending and deformation when only bearing silicon crystal bar weight by the cylinder rod of the 2nd cylinder, extend work-ing life.
As improvement, described 2nd cylinder is fixed on the first portable plate by bolt assembly, on described first portable plate, the corresponding position installing the 2nd cylinder is provided with positioning boss, described 2nd locating slot that cylinder is provided with described positioning boss coordinates, like this, after positioning boss being coordinated with locating slot, it is possible to by the 2nd cylinder quick position, thus the screw being convenient on the 2nd cylinder aligns with the screw on the first portable plate, facilitates bolt assembly to fix.
As improvement, bolt assembly comprises holding bolt and the elastomeric pad coordinated with it and torque nut, so just can be fixed on the first portable plate by firm for the 2nd cylinder.
As improvement, component external is driven to be provided with case, like this, it is possible to avoid impurity and greasy dirt to enter and screw mandrel and transmission shaft are caused damage, it is to increase the reliability of equipment.
As improvement, the portion of screwing is outer-hexagonal, interior hexagonal or revolves handle, like this, drives transmission shaft to rotate by multiple mode, is convenient to realize, simultaneously convenient actual use.
Accompanying drawing explanation
Fig. 1 is the structural representation of silicon crystal bar chamfering equipment in the utility model.
Fig. 2 is the skeleton view driving assembly in the utility model.
Fig. 3 is in the utility model, left view when the 2nd portable plate is connected with the first portable plate.
Shown in figure, 1, body, 3, support, the 5, first portable plate, 6, the first cylinder, the 7, the 2nd portable plate, the 8, the 2nd cylinder, 9, fixture block, 10, tail rod, 11, dovetail-indent, 12, dovetail boss, 13, bolt assembly, 14, motor, 15, polishing mouth, 16, movable limited block, 17, fixing limited block, 18, screw mandrel, 19, transmission shaft, the 20, first cone gear, 21, the 2nd cone gear, 22, screw portion, 23, case.
Embodiment
Below the utility model is described in further detail:
The utility model proposes a kind of silicon crystal bar chamfering equipment being convenient to regulate, comprise body 1, it is provided with sanding component in body 1, body 1 is provided with two pieces of limited blocks, the V shape groove be suitable for placing silicon crystal bar it is formed with between described two limited blocks, V shape trench bottom is provided with polishing mouth 15, in described body 1, the position corresponding with described polishing mouth 15 is provided with sanding component, in two limited blocks one is fixing limited block 17, another is movable limited block 16, described body 1 be provided with drive described movable limited block 16 in the horizontal direction near or away from the driving assembly of described fixing limited block 17, assembly is driven to comprise screw mandrel 18 and a transmission shaft 19 of at least two levels being located on body 1 and parallel setting, one end of described each screw mandrel 18 coordinates with the screw on described movable limited block 16, the other end of described each screw mandrel 18 is provided with the first cone gear 20, described transmission shaft 19 is perpendicular to screw mandrel 18 and arranges, and be provided with thereon and the 2nd cone gear 21 that described first cone gear 20 is meshed, the end of described transmission shaft 19 is provided with the portion that screws 22 being beneficial to and rotating it. the utility model is compared with original manual setting, transmission shaft 19 is driven to rotate by screwing the portion that screws 22 of transmission shaft 19 end, owing to the two ends of transmission shaft 19 are provided with the 2nd cone gear 21 being meshed with the first cone gear 20 on screw mandrel 18, therefore each screw mandrel 18 synchronous axial system can be driven when transmission shaft 19 rotates, again because the screw on screw mandrel 18 and movable limited block 16 coordinates, thus movable limited block 16 can be driven correct position is moved in the horizontal direction when screw mandrel 18 rotates, thus realize the adjustment of polishing mouth 15 width to the V lower end of shape groove, to tackle the silicon crystal bar of different size, fast easy to adjust, effectively save regulation time, increase work efficiency, in order to ensure movable limited block 16 reliability in use, can increase locking bolt carries out auxiliary fixing.
In the present embodiment, the top of V shape groove is provided with the switching mechanism for being overturn by silicon crystal bar, described switching mechanism comprises the support 3 being fixed on body 1, horizontally disposed first portable plate 5, drive the first cylinder 6 that the first portable plate 5 moves up and down, two the 2nd portable plates 7 being oppositely arranged, be fixed on described first portable plate 5 for drive two the 2nd portable plates 7 in opposite directions or from motion the 2nd cylinder 8, described 2nd cylinder 8 is equipped with the twin shaft cylinder of cylinder rod for two ends, inside two the 2nd portable plates 7, relative position is equiped with the fixture block 9 being suitable for clamping silicon crystal bar, each fixture block 9 can around own axis, wherein a fixture block 9 drives rotation by drive-motor 14, turn over to turn 90 degrees by silicon crystal bar by switching mechanism after having polished like this and again next corner angle is polished, save manpower and the time of the artificial required consumption of upset silicon crystal bar, effectively increase work efficiency, for ensureing accuracy when the first portable plate 5 moves up and down, during actual use, tail rod 10 can be set.
In the present embodiment, first portable plate 5 is provided with the dovetail boss 12 axially arranged along the 2nd cylinder 8 or/and dovetail-indent 11, the upper end of described 2nd portable plate 7 is provided with and is suitable for described dovetail boss 12 or/and the dovetail-indent 11 that is slidably matched of dovetail-indent 11 is or/and dovetail boss 12, by the cooperation of dovetail boss 12 and dovetail-indent 11 thus the first portable plate 5 is flexibly connected with the 2nd portable plate 7, described 2nd portable plate 7 is in the process ordering about movement by the 2nd cylinder 8, there is relative movement in dovetail boss 12 with corresponding dovetail-indent 11 position thereupon, when overturning silicon crystal bar, the weight of silicon crystal bar is by the cylinder rod shared of the first portable plate 5 and the 2nd cylinder 8, it is thus possible to avoid the problem easily occured bending and deformation when only bearing silicon crystal bar weight by the cylinder rod of the 2nd cylinder 8, extend work-ing life.
In the present embodiment, described 2nd cylinder 8 is fixed on the first portable plate 5 by bolt assembly 13, on described first portable plate 5, the corresponding position installing the 2nd cylinder 8 is provided with positioning boss, described 2nd locating slot that cylinder 8 is provided with described positioning boss coordinates, after like this positioning boss being coordinated with locating slot, can by the 2nd cylinder 8 quick position, thus the screw being convenient on the 2nd cylinder 8 aligns with the screw on the first portable plate 5, facilitates bolt assembly 13 to fix.
In the present embodiment, bolt assembly 13 comprises holding bolt and the elastomeric pad coordinated with it and torque nut, so just can be fixed on the first portable plate 5 by firm for the 2nd cylinder 8.
In the present embodiment, component external is driven to be provided with case 23, it is possible to avoid impurity and greasy dirt to enter and screw mandrel 18 and transmission shaft 19 are caused damage, it is to increase the reliability of equipment.
In the present embodiment, screw portion 22 and for outer-hexagonal, interior hexagonal or revolve handle, drive transmission shaft 19 to rotate by multiple mode, be convenient to realize, simultaneously convenient actual use.
In the utility model, the first cone gear 20 and the 2nd cone gear 21 are just by same specification size, and screw mandrel 18 is also specification of the same race.
The above is only better embodiment of the present utility model, therefore all equivalences done according to the structure described in present patent application scope, feature and principle change or modify, and are included within the scope of the utility model patent application.
Claims (7)
1. it is convenient to the silicon crystal bar chamfering equipment of adjustment for one kind, comprise body (1), body is provided with sanding component in (1), body (1) is provided with two pieces of limited blocks, the V shape groove be suitable for placing silicon crystal bar it is formed with between described two limited blocks, V shape trench bottom is provided with polishing mouth (15), in described body (1), the position corresponding with described polishing mouth (15) is provided with sanding component, in two limited blocks one is fixing limited block (17), another is movable limited block (16), described body (1) be provided with drive described movable limited block (16) in the horizontal direction near or away from the driving assembly of described fixing limited block (17), it is characterized in that, described driving assembly comprises screw mandrel (18) and a transmission shaft (19) of at least two levels being located on body (1) and parallel setting, one end of described each screw mandrel (18) coordinates with the screw on described movable limited block (16), the other end of described each screw mandrel (18) is provided with the first cone gear (20), described transmission shaft (19) is perpendicular to screw mandrel (18) and arranges, and it is provided with the 2nd cone gear (21) being meshed with described first cone gear (20) thereon, the end of described transmission shaft (19) is provided with the portion that screws (22) being beneficial to and rotating it.
2. the silicon crystal bar chamfering equipment being convenient to regulate according to claim 1, it is characterized in that, the top of described V shape groove is provided with the switching mechanism for being overturn by silicon crystal bar, described switching mechanism comprises the support (3) being fixed on body (1), horizontally disposed first portable plate (5), drive the first cylinder (6) that the first portable plate (5) moves up and down, two the 2nd portable plates (7) being oppositely arranged, be fixed on described first portable plate (5) for drive two the 2nd portable plates (7) in opposite directions or from motion the 2nd cylinder (8), described 2nd cylinder (8) is equipped with the twin shaft cylinder of cylinder rod for two ends, two the 2nd portable plate (7) inner side relative positions are equiped with the fixture block (9) being suitable for clamping silicon crystal bar, each fixture block (9) can around own axis, wherein a fixture block (9) is driven by drive-motor (14) and rotates.
3. the silicon crystal bar chamfering equipment being convenient to regulate according to claim 2, it is characterized in that, described first portable plate (5) is provided with the dovetail boss (12) axially arranged along the 2nd cylinder (8) or/and dovetail-indent (11), and the upper end of described 2nd portable plate (7) is provided with and is suitable for described dovetail boss (12) or/and the dovetail-indent (11) that is slidably matched of dovetail-indent (11) is or/and dovetail boss (12).
4. the silicon crystal bar chamfering equipment being convenient to regulate according to claim 3, it is characterized in that, described 2nd cylinder (8) is fixed on the first portable plate (5) by bolt assembly (13), the upper corresponding position installing the 2nd cylinder (8) of described first portable plate (5) is provided with positioning boss, and described 2nd cylinder (8) is provided with and the locating slot that described positioning boss coordinates.
5. the silicon crystal bar chamfering equipment being convenient to regulate according to claim 4, it is characterised in that, described bolt assembly (13) comprises holding bolt and the elastomeric pad coordinated with it and torque nut.
6. the silicon crystal bar chamfering equipment being convenient to regulate according to any one of claim 1 to 5, it is characterised in that, described driving component external is provided with case (23).
7. the silicon crystal bar chamfering equipment being convenient to regulate according to any one of claim 1 to 5, it is characterised in that, described in screw that portion (22) is outer-hexagonal, interior hexagonal or revolve handle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620064338.8U CN205290582U (en) | 2016-01-22 | 2016-01-22 | Silicon wafer stick chamfering apparatus convenient to adjust |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620064338.8U CN205290582U (en) | 2016-01-22 | 2016-01-22 | Silicon wafer stick chamfering apparatus convenient to adjust |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205290582U true CN205290582U (en) | 2016-06-08 |
Family
ID=56426965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620064338.8U Expired - Fee Related CN205290582U (en) | 2016-01-22 | 2016-01-22 | Silicon wafer stick chamfering apparatus convenient to adjust |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205290582U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108527050A (en) * | 2018-04-16 | 2018-09-14 | 吴烁 | A kind of Rod end grinding device |
| CN109333290A (en) * | 2018-12-03 | 2019-02-15 | 乐山新天源太阳能科技有限公司 | Square crystal rod grinds all-in-one machine |
-
2016
- 2016-01-22 CN CN201620064338.8U patent/CN205290582U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108527050A (en) * | 2018-04-16 | 2018-09-14 | 吴烁 | A kind of Rod end grinding device |
| CN109333290A (en) * | 2018-12-03 | 2019-02-15 | 乐山新天源太阳能科技有限公司 | Square crystal rod grinds all-in-one machine |
| CN109333290B (en) * | 2018-12-03 | 2023-09-01 | 乐山新天源太阳能科技有限公司 | Square crystal rod grinding and pouring integrated machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160608 Termination date: 20170122 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |