CN205229668U - UV energy adjusting device of exposure machine - Google Patents
UV energy adjusting device of exposure machine Download PDFInfo
- Publication number
- CN205229668U CN205229668U CN201521099414.0U CN201521099414U CN205229668U CN 205229668 U CN205229668 U CN 205229668U CN 201521099414 U CN201521099414 U CN 201521099414U CN 205229668 U CN205229668 U CN 205229668U
- Authority
- CN
- China
- Prior art keywords
- energy
- travel mechanism
- led
- light source
- exposure machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The utility model provides a UV energy adjusting device of exposure machine, it can level sensor and moving mechanism to contain UV, and the moving mechanism drive UV can remove by level sensor, and the UV -LED's of the plane light source that UV can level sensor sensing exposure machine shines the energy, and UV -LED is used for shining the exposure object, UV energy adjustment portion connects UV -LED, UV ability level sensor and moving mechanism and uses the energy that shines of adjusting UV -LED to be the same. Therefore, the utility model discloses the UV -LED's of the exposure machine of adjustable various model the energy that shines is the evenly qualification rate in order to promote the processing procedure.
Description
Technical field
The utility model relates to a kind of UV energy-regulator of exposure machine, and the irradiation energy particularly relating to the UV-LED of the exposure machine of the various type of a kind of adjustable is evenly to promote the device of the qualification rate of processing procedure.
Background technology
Printed circuit board (PCB) now utilizes exposure machine to make more; but the light source of general exposure machine is after often using, the energy that often each light source can be caused to irradiate each other is inconsistent, so that the irradiation energy of all light sources is uneven; and then cause ill-exposed, reduce the qualification rate that printed circuit board (PCB) is made.
For this reason, TaiWan, China M346791 new patent discloses a kind of briliancy pick-up unit, and it mainly lays multiple luminance sensor above planar illuminant, with the briliancy of position multiple on sense plane luminophor.But because M346791 new patent need lay multiple luminance sensor above planar illuminant, therefore the sensing structure of M346791 new patent is complicated and cost is high; In addition, because M346791 new patent need use multiple luminance sensor, and the quality of each luminance sensor might not be homogeneous, and the basis of briliancy that therefore each luminance sensor senses might not be consistent; Moreover, the limited space of luminance sensor is laid in top due to planar illuminant, therefore M346791 new patent also cannot lay the luminance sensor of corresponding flat luminophor quantity of light source above planar illuminant, with the briliancy of each light source of certain sense plane luminophor; Moreover, if will how to make the briliancy of each light source identical when M346791 new patent does not disclose the briliancy difference of each light source of planar illuminant.
In addition, TaiWan, China M409455 new patent discloses a kind of exposure energy adjustment System, and it mainly lays multiple luminous energy sensor on the direction of illumination of planar illuminant, with the exposure energy of light source multiple on sense plane luminophor.But because M409455 new patent need lay multiple luminous energy sensor on the direction of illumination of planar illuminant, therefore the sensing structure of M409455 new patent is complicated and cost is high; In addition, because M409455 new patent need use multiple luminous energy sensor, and the quality of each luminous energy sensor might not be homogeneous, and the basis of exposure energy that therefore each luminous energy sensor senses might not be consistent; Moreover, owing to the direction of illumination of planar illuminant being laid the limited space of luminous energy sensor, therefore M409455 new patent also cannot lay the luminous energy sensor of corresponding flat luminophor quantity of light source on the direction of illumination of planar illuminant, with the exposure energy of each light source of certain sense plane luminophor; Moreover when the exposure energy of each light source of planar illuminant is different, M409455 new patent is the homogeneity that exposure energy is improved in the position that adjusts each light source, and mode of its adjustment is real is loaded down with trivial details.
Moreover, TaiWan, China M506995 new patent discloses a kind of calibration equipment of exposure machine, it is mainly respectively arranged with light sensor and lower optical sensor in the built-in upper exposure stage of exposure machine and lower exposure stage, recycles the built-in upper transfer mechanism of exposure machine and lower transfer mechanism make each light source in irradiation portion and lower irradiation portion in each photosensor senses irradiation energy relative to upper exposure stage and lower moving of exposure stage afterwards.But the optical sensor due to M506995 new patent is arranged in the built-in exposure stage of exposure machine, and therefore the calibration equipment of M506995 new patent only can be applicable to the exposure machine of specific model, and can not the general exposure machine for various type.
Therefore, how creating a kind of UV energy-regulator of exposure machine, to make the irradiation energy of the UV-LED of the exposure machine of the various type of its adjustable be evenly to promote the qualification rate of processing procedure, will be that the utility model institute is for actively disclosing part.
Utility model content
Because the shortcoming of above-mentioned prior art, inventor's thoughts its do not reach perfection, so exhaust its intelligence to concentrate one's attention on research and overcome, and then develop a kind of UV energy-regulator of exposure machine, be evenly to promote the object of the qualification rate of processing procedure to reaching the irradiation energy of the UV-LED of the exposure machine of the various type of adjustable.
For reaching above-mentioned purpose and other objects, the utility model provides a kind of UV energy-regulator of exposure machine, it comprises: UV energy detecting part, it has UV energy sensor and at least one travel mechanism, this travel mechanism drives this UV energy sensor to move, this UV energy sensor is in order to sense the irradiation energy of multiple UV-LED of a planar light source of this exposure machine, and above-mentioned UV-LED is in order to irradiate exposure object; And UV energy adjusting portion, it connects above-mentioned UV-LED, this UV energy sensor and this travel mechanism, is identical to adjust the irradiation energy of above-mentioned UV-LED.
In the UV energy-regulator of above-mentioned exposure machine, this UV energy sensor moves relative to this planar light source the irradiation energy sensing above-mentioned UV-LED by this travel mechanism, the irradiation energy of above-mentioned UV-LED is sent to this UV energy adjusting portion, the irradiation energy that this UV energy adjusting portion adjusts above-mentioned UV-LED is the lowest in the irradiation energy of above-mentioned UV-LED, or the irradiation energy that this UV energy adjusting portion adjusts above-mentioned UV-LED is the irradiation energy of specifying.
In the UV energy-regulator of above-mentioned exposure machine, this planar light source is fixed and in order to irradiate the whole of this exposure object, the quantity of this travel mechanism is two, one of them travel mechanism drives this UV energy sensor to move, another travel mechanism drives this travel mechanism to move, and the moving direction of this UV energy sensor is mutually vertical with the moving direction of this travel mechanism.
In the UV energy-regulator of above-mentioned exposure machine, this planar light source is portable and in order to irradiate this exposure object part, the quantity of this travel mechanism is one, this UV energy adjusting portion connects this planar light source and moves to control this planar light source, and the moving direction of this planar light source is mutually vertical with the moving direction of this UV energy sensor.
In the UV energy-regulator of above-mentioned exposure machine, this UV energy adjusting portion is computation processor.
In the UV energy-regulator of above-mentioned exposure machine, above-mentioned UV-LED planar alignment squarely or rectangle.
In the UV energy-regulator of above-mentioned exposure machine, above-mentioned UV-LED becomes matrix arrangement or Heterogeneous Permutation.
Therefore, the irradiation energy of the UV-LED of the exposure machine of the various type of UV energy-regulator adjustable of exposure machine of the present utility model is evenly to promote the qualification rate of processing procedure.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the utility model preferred embodiment;
Fig. 2 is the schematic diagram that the utility model preferred embodiment UV-LED becomes matrix arrangement;
Fig. 3 is the schematic diagram that the utility model preferred embodiment UV-LED becomes Heterogeneous Permutation;
Fig. 4 is the schematic diagram one of another preferred embodiment of the utility model;
Fig. 5 is the schematic diagram that another preferred embodiment UV-LED of the utility model becomes matrix arrangement;
Fig. 6 is the schematic diagram that another preferred embodiment UV-LED of the utility model becomes Heterogeneous Permutation;
Fig. 7 is the schematic diagram two of another preferred embodiment of the utility model.
[symbol description]
1 planar light source
11UV-LED
2UV energy detecting part
21UV energy sensor
22 travel mechanisms
23 first directions
24 second directions
3UV energy adjusting portion
4 planar light sources
41UV-LED
42 travel mechanisms
6 egative films
The substrate for printed circuit board of 7 wish exposures
Embodiment
For fully understanding the purpose of this utility model, feature and effect, existing by following specific embodiment, and coordinate accompanying drawing, the utility model is described in further details, is described as follows:
Please refer to Fig. 1 to Fig. 6, as shown in the figure, the utility model provides a kind of UV (ultraviolet light) energy-regulator of exposure machine, and it comprises UV energy detecting part 2 and UV energy adjusting portion 3.Wherein, this UV energy detecting part 2 has UV energy sensor 21 and at least one travel mechanism 22, this travel mechanism 22 can be conveyor track, driving belt or driving chain ... Deng, this travel mechanism 22 drives this UV energy sensor 21 to drive this UV energy sensor 21 to move in first direction (as y-axis direction) and second direction (as x-axis direction) in first direction (as y-axis direction) mobile or above-mentioned travel mechanism 22, this UV energy sensor 21 is in order to sense the irradiation energy of multiple UV-LED11 (ultraviolet light-light emitting diode) of a planar light source 1 of this exposure machine, above-mentioned UV-LED11 is planar alignment, above-mentioned UV-LED11 is in order to irradiate an exposure object, this exposure object to be arranged in this exposure machine and to can be the substrate for printed circuit board 7 for exposure, this planar light source 1 irradiates the substrate for printed circuit board 7 of this wish exposure by the egative film 6 be arranged in this exposure machine, and then the substrate for printed circuit board 7 making this wish expose exposes, this egative film 6 has the circuit image (not shown) for exposure, this UV energy adjusting portion 3 connects above-mentioned UV-LED11, this UV energy sensor 21 and this travel mechanism 22 (or above-mentioned travel mechanism 22), is identical to adjust the irradiation energy of above-mentioned UV-LED11, and this UV energy adjusting portion 3 can be computation processor.
As mentioned above, when this exposure machine does not carry out processing procedure, this UV energy sensor 21 moves the irradiation energy of the UV-LED11 sensing each position by this travel mechanism 22 or above-mentioned travel mechanism 22 relative to this planar light source 1, and the irradiation energy of the UV-LED11 of each position is sent to this UV energy adjusting portion 3, the irradiation energy of this UV energy adjusting portion 3 just all UV-LED11 of adjustable is identical afterwards, and then make the irradiation energy of this planar light source 1 even, promote the qualification rate of printed circuit board (PCB) processing procedure.In addition, because UV energy detecting part 2 of the present utility model and UV energy adjusting portion 3 can applied to this exposure machines, therefore the UV energy-regulator of exposure machine of the present utility model is applicable to the exposure machine of various type.
Refer again to Fig. 1 to Fig. 6, as shown in the figure, in the UV energy-regulator of above-mentioned exposure machine, this UV energy sensor 21 moves relative to this planar light source 1 irradiation energy sensing above-mentioned UV-LED11 by this travel mechanism 22 or above-mentioned travel mechanism 22, the irradiation energy of above-mentioned UV-LED11 can be sent to this UV energy adjusting portion 3 afterwards, such as, the irradiation energy signal of above-mentioned UV-LED11 or irradiation energy intensity are by wired mode or bluetooth, infrared ray, the wireless mode such as WiFi or high in the clouds is sent to this UV energy adjusting portion 3, then the irradiation energy of this UV energy adjusting portion 3 just above-mentioned UV-LED11 of adjustable is the lowest in the irradiation energy of above-mentioned UV-LED11, or the irradiation energy of the above-mentioned UV-LED11 of adjustable is the irradiation energy of specifying, and then make the irradiation energy of above-mentioned UV-LED11 be identical.Therefore, the UV energy-regulator of exposure machine of the present utility model can make the irradiation energy of this planar light source 1 even, to promote the qualification rate of printed circuit board (PCB) processing procedure.
Refer again to Fig. 1 to Fig. 3, as shown in the figure, in the UV energy-regulator of above-mentioned exposure machine, when this planar light source 1 is fixed, this planar light source 1 is in order to irradiate the whole of this exposure object, now, the quantity of the travel mechanism 22 of this UV energy detecting part 2 is two, one of them travel mechanism 22 can drive this UV energy sensor 21 mobile in second direction (as x-axis direction), 22, another travel mechanism can drive this travel mechanism 22 mobile in first direction (as y-axis direction), the moving direction of this UV energy sensor 21 is mutually vertical with the moving direction of this travel mechanism 22.Therefore, when this exposure machine does not carry out processing procedure, by above-mentioned travel mechanism 22, relative to this planar light source 1 planar movement, (such as this UV energy sensor 21 row has moved and has changed row capable movement again this UV energy sensor 21, or this UV energy sensor 21 row have moved line feed and have arranged movement again) to sense the irradiation energy of the UV-LED11 of each position, and the irradiation energy of the UV-LED11 of each position is sent to this UV energy adjusting portion 3, such as, the irradiation energy signal of above-mentioned UV-LED41 or irradiation energy intensity are passed through wired mode or bluetooth, infrared ray, the wireless mode such as WiFi or high in the clouds is sent to this UV energy adjusting portion 3, the irradiation energy of this UV energy adjusting portion 3 just all UV-LED11 of adjustable is identically (such as the irradiation energy of all UV-LED11 is adjusted to the lowest in the irradiation energy of all UV-LED11 afterwards, maybe the irradiation energy of all UV-LED41 is adjusted to the irradiation energy of specifying), and then make the irradiation energy of this planar light source 1 even, promote the qualification rate of printed circuit board (PCB) processing procedure.In addition, because UV energy detecting part 2 of the present utility model and UV energy adjusting portion 3 can applied to this exposure machines, therefore the UV energy-regulator of exposure machine of the present utility model is applicable to the various exposure machine with fixed planar light source 1.
Refer again to Fig. 2 and Fig. 3, as shown in the figure, in the UV energy-regulator of above-mentioned exposure machine, above-mentioned UV-LED11 can planar alignment squarely (or rectangle) to meet the needs of different exposure machine.
Refer again to Fig. 2 and Fig. 3, as shown in the figure, in the UV energy-regulator of above-mentioned exposure machine, above-mentioned UV-LED11 can become matrix arrangement (as shown in Figure 2) or Heterogeneous Permutation (as shown in Figure 3) to meet the needs of different exposure machine.
Refer again to Fig. 4 to Fig. 6, as shown in the figure, in the UV energy-regulator of above-mentioned exposure machine, when this planar light source 4 is portable, this planar light source 4 is in order to irradiate the part of this exposure object, now, this planar light source 4 can have travel mechanism 42, and the quantity of the travel mechanism 22 of this UV energy detecting part 2 is one, this travel mechanism 42 can be conveyor track, driving belt or driving chain ... Deng, the travel mechanism 42 that this UV energy adjusting portion 3 connects this planar light source 4 is mobile in first direction (as y-axis direction) to control this planar light source 4, this travel mechanism 22 drives this UV energy sensor 21 mobile in second direction (as x-axis direction), the moving direction of this planar light source 4 is mutually vertical with the moving direction of this UV energy sensor 21.Therefore, when this exposure machine does not carry out processing procedure, this planar light source 4 and this UV energy sensor 21 can move respectively by this travel mechanism 42 and this travel mechanism 22 Relative vertical, and (such as this planar light source 4 row has moved and has changed this UV energy sensor 21 and change row and change this planar light source 4 row again and move, or this planar light source 4 row move change this UV energy sensor 21 enter a new line change again this planar light source 4 row movement) to sense the irradiation energy of the UV-LED41 of each position, and the irradiation energy of the UV-LED41 of each position is sent to this UV energy adjusting portion 3, such as, the irradiation energy signal of above-mentioned UV-LED41 or irradiation energy intensity are passed through wired mode or bluetooth, infrared ray, the wireless mode such as WiFi or high in the clouds is sent to this UV energy adjusting portion 3, the irradiation energy of this UV energy adjusting portion 3 just all UV-LED41 of adjustable is identically (such as the irradiation energy of all UV-LED41 is adjusted to the lowest in the irradiation energy of all UV-LED41 afterwards, maybe the irradiation energy of all UV-LED41 is adjusted to the irradiation energy of specifying), and then make the irradiation energy of this planar light source 4 even, promote the qualification rate of printed circuit board (PCB) processing procedure.In addition, because UV energy detecting part 2 of the present utility model and UV energy adjusting portion 3 can applied to this exposure machines, therefore the UV energy-regulator of exposure machine of the present utility model is applicable to the various exposure machine with portable planar light source 4.The UV energy-regulator of the exposure machine of comprehensive above-mentioned Fig. 1, the UV energy-regulator of exposure machine of the present utility model can the general exposure machine for various type.
Refer again to Fig. 5 and Fig. 6, as shown in the figure, in the UV energy-regulator of above-mentioned exposure machine, above-mentioned UV-LED41 can planar alignment orthogonal (or square) to meet the needs of different exposure machine.
Refer again to Fig. 5 and Fig. 6, as shown in the figure, in the UV energy-regulator of above-mentioned exposure machine, above-mentioned UV-LED41 can become matrix arrangement (as shown in Figure 5) or Heterogeneous Permutation (as shown in Figure 6) to meet the needs of different exposure machine.
Please refer to Fig. 7, as shown in the figure, the UV energy-regulator of the exposure machine of Fig. 7 is identical with the operation principles of the UV energy-regulator of the exposure machine of Fig. 4, difference is only that this travel mechanism 42 of Fig. 7 drives this planar light source 4 mobile in this second direction 24 (as x-axis direction), and this travel mechanism 22 drives this UV energy sensor 21 mobile in this first direction 23 (as y-axis direction).
The utility model is disclosed by preferred embodiment hereinbefore, but has the knack of and it will be understood by those skilled in the art that this embodiment only for describing the utility model, and should not be read as restriction scope of the present utility model.It should be noted, every change with this embodiment equivalence and displacement, all should be set to and be covered by category of the present utility model.Therefore, the scope that protection domain of the present utility model should define with claims is as the criterion.
Claims (11)
1. a UV energy-regulator for exposure machine, is characterized in that, comprise:
UV energy detecting part, it has UV energy sensor and at least one travel mechanism, this travel mechanism drives this UV energy sensor to move, and this UV energy sensor is in order to sense the irradiation energy of multiple UV-LED of the planar light source of this exposure machine, and above-mentioned UV-LED is in order to irradiate exposure object; And
UV energy adjusting portion, it connects above-mentioned UV-LED, this UV energy sensor and this travel mechanism, is identical to adjust the irradiation energy of above-mentioned UV-LED.
2. the UV energy-regulator of exposure machine as claimed in claim 1, it is characterized in that, this UV energy sensor moves relative to this planar light source the irradiation energy sensing above-mentioned UV-LED by this travel mechanism, the irradiation energy of above-mentioned UV-LED is sent to this UV energy adjusting portion, the irradiation energy that this UV energy adjusting portion adjusts above-mentioned UV-LED is the lowest in the irradiation energy of above-mentioned UV-LED, or the irradiation energy that this UV energy adjusting portion adjusts above-mentioned UV-LED is the irradiation energy of specifying.
3. the UV energy-regulator of exposure machine as claimed in claim 1, it is characterized in that, this planar light source is fixed and in order to irradiate the whole of this exposure object, the quantity of this travel mechanism is two, one of them travel mechanism drives this UV energy sensor to move, another travel mechanism drives this travel mechanism to move, and the moving direction of this UV energy sensor is mutually vertical with the moving direction of this travel mechanism.
4. the UV energy-regulator of exposure machine as claimed in claim 2, it is characterized in that, this planar light source is fixed and in order to irradiate the whole of this exposure object, the quantity of this travel mechanism is two, one of them travel mechanism drives this UV energy sensor to move, another travel mechanism drives this travel mechanism to move, and the moving direction of this UV energy sensor is mutually vertical with the moving direction of this travel mechanism.
5. the UV energy-regulator of exposure machine as claimed in claim 1, it is characterized in that, this planar light source is portable and in order to irradiate this exposure object part, the quantity of this travel mechanism is one, this UV energy adjusting portion connects this planar light source and moves to control this planar light source, and the moving direction of this planar light source is mutually vertical with the moving direction of this UV energy sensor.
6. the UV energy-regulator of exposure machine as claimed in claim 2, it is characterized in that, this planar light source is portable and in order to irradiate this exposure object part, the quantity of this travel mechanism is one, this UV energy adjusting portion connects this planar light source and moves to control this planar light source, and the moving direction of this planar light source is mutually vertical with the moving direction of this UV energy sensor.
7. the UV energy-regulator of the exposure machine according to any one of claim 1 to 6, is characterized in that, this UV energy adjusting portion is computation processor.
8. the UV energy-regulator of the exposure machine according to any one of claim 1 to 6, is characterized in that, above-mentioned UV-LED planar alignment squarely or rectangle.
9. the UV energy-regulator of exposure machine as claimed in claim 7, is characterized in that, above-mentioned UV-LED planar alignment squarely or rectangle.
10. the UV energy-regulator of exposure machine as claimed in claim 8, is characterized in that, above-mentioned UV-LED becomes matrix arrangement or Heterogeneous Permutation.
The UV energy-regulator of 11. exposure machines as claimed in claim 9, is characterized in that, above-mentioned UV-LED becomes matrix arrangement or Heterogeneous Permutation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521099414.0U CN205229668U (en) | 2015-12-22 | 2015-12-22 | UV energy adjusting device of exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521099414.0U CN205229668U (en) | 2015-12-22 | 2015-12-22 | UV energy adjusting device of exposure machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205229668U true CN205229668U (en) | 2016-05-11 |
Family
ID=55904723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201521099414.0U Active CN205229668U (en) | 2015-12-22 | 2015-12-22 | UV energy adjusting device of exposure machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205229668U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107589636A (en) * | 2017-10-31 | 2018-01-16 | 中国科学院重庆绿色智能技术研究院 | The LED exposure device and its ultraviolet exposure machine of a kind of ultraviolet exposure machine |
| CN112985595A (en) * | 2021-03-25 | 2021-06-18 | 青岛天仁微纳科技有限责任公司 | UV lamp monitoring device for nanoimprint equipment and monitoring method thereof |
| JP2022184872A (en) * | 2020-05-21 | 2022-12-13 | フェニックス電機株式会社 | Light irradiation device and exposure apparatus including the same |
-
2015
- 2015-12-22 CN CN201521099414.0U patent/CN205229668U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107589636A (en) * | 2017-10-31 | 2018-01-16 | 中国科学院重庆绿色智能技术研究院 | The LED exposure device and its ultraviolet exposure machine of a kind of ultraviolet exposure machine |
| JP2022184872A (en) * | 2020-05-21 | 2022-12-13 | フェニックス電機株式会社 | Light irradiation device and exposure apparatus including the same |
| JP7257719B2 (en) | 2020-05-21 | 2023-04-14 | フェニックス電機株式会社 | Light irradiation device and exposure device provided with same |
| CN112985595A (en) * | 2021-03-25 | 2021-06-18 | 青岛天仁微纳科技有限责任公司 | UV lamp monitoring device for nanoimprint equipment and monitoring method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN205229668U (en) | UV energy adjusting device of exposure machine | |
| CN203426596U (en) | Automatic laser cutting machine capable of continuously feeding materials | |
| CN108074535A (en) | For the current compensation method and element of electroluminescent display | |
| JP2012519265A5 (en) | ||
| CN204011373U (en) | Chip detects Load System automatically | |
| CN204328521U (en) | The radiographic measurement equipment of rim(ming) light lighting module and rim(ming) light illumination | |
| WO2003088730A1 (en) | Working system for substrate | |
| CN101975557A (en) | Ceramic plate detection equipment and detection method | |
| WO2011010441A1 (en) | Optical position detecting device | |
| CN204359286U (en) | A kind of Mobile phone shielding case flatness continuous detection apparatus based on image recognition | |
| TWI658339B (en) | Silicon wafer processing device and method | |
| CN103135855A (en) | Optical touch device and touch image processing method | |
| CN201965632U (en) | Bad plate mark detecting device | |
| CN201811716U (en) | Detection equipment of ceramic plate | |
| CN203118914U (en) | Chip jointing device | |
| CN106033050A (en) | Vacuum absorbing and flattening device capable of adjusting absorption area, material sheet detection equipment and material sheet transfer equipment | |
| US20150317857A1 (en) | Device for recognizing image and device for reading image | |
| CN204143154U (en) | Exposure machine light source irradiation strength adjustment mechanism | |
| CN107330350A (en) | A kind of fertilizer packaging bag barcode scanning in-stockroom operation platform | |
| CN202904224U (en) | Double-sided light-sensitive circuit board alignment device for exposure machine | |
| CN106211746A (en) | A kind of vision localization grasping mechanism | |
| TWI814036B (en) | Backlight visual orientation system | |
| CN103376197B (en) | Solar battery sheet, silicon wafer backside optical detection system | |
| CN205809534U (en) | Luminescence Uniformity calibration equipment | |
| CN202330259U (en) | Film detection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |