CN205809534U - Luminescence Uniformity calibration equipment - Google Patents
Luminescence Uniformity calibration equipment Download PDFInfo
- Publication number
- CN205809534U CN205809534U CN201620364489.5U CN201620364489U CN205809534U CN 205809534 U CN205809534 U CN 205809534U CN 201620364489 U CN201620364489 U CN 201620364489U CN 205809534 U CN205809534 U CN 205809534U
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- module
- light
- luminescence
- light emitting
- intensity
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Abstract
The open a kind of Luminescence Uniformity calibration equipment of this utility model, it is adaptable to the light emitting module of exposure machine is carried out Luminescence Uniformity correction.Light intensity signal is produced in each sample position sensing that corresponding light emitting module is distributed by sensing module, processing module analyzes the Luminescence Uniformity of this light emitting module according to these light intensity signals, and when the Luminescence Uniformity of this light emitting module is not inconsistent unification uniformity standard, produce a corresponding correction signal, and adjusting module adjusts the luminous intensity of at least one in the luminescence unit that this light emitting module is had accordingly according to correction signal.Thus, by automation equipment, this light emitting module is carried out Luminescence Uniformity correction, quickly and easily abnormal region can be had distinctly to could be adjusted to guarantee Luminescence Uniformity for luminous intensity, and then promote the fine ratio of product of circuit board.
Description
Technical field
This utility model is about a kind of calibration equipment, more particularly about for carrying out the Luminescence Uniformity of exposure machine
The Luminescence Uniformity calibration equipment of correction.
Background technology
Industrial circle generally needs to use exposure machine when manufacturing circuit board at present, and has the luminous mould being made up of multiple light sources
The multiple light courcess exposure machine of block the most increasingly comes into one's own, and in general, the light source of this light emitting module is by multiple light emitting diode institutes
Composition, but these light emitting diodes can be made due to the difference (when such as processing procedure difference, use, number is the most equal) of himself characteristic
The luminous intensity becoming respectively this light emitting diode is different, makes this light emitting module non-uniform light, and it can directly make photosensitive circuit plate
The luminous energy absorbed is uneven, in turn results in the photosensitive circuit plate instantly exposed and scraps, thereby, it is ensured that the luminous mould of multiple light courcess exposure machine
The Luminescence Uniformity of block is considered an important subject under discussion.
But, current existing multiple light courcess exposure machine, not there is an automation equipment and automatically detect to guarantee to expose
The Luminescence Uniformity of the light emitting module of ray machine, but allow operating personnel be come on this light emitting module by a hand-held detection equipment
Each light source carry out manual measurement, use and inconvenient；More or to directly utilize this exposure machine homogeneous to one
Photosensitive circuit board to explosure operation after, analyze the depth of exposure of this each position of circuit board to verify the luminescence of light emitting module
The uniformity, this kind of detection mode be very time-consuming and high cost.
Therefore, how to develop a kind of Luminescence Uniformity calibration equipment, to guarantee the luminous equal of the light emitting module of exposure machine
Evenness and then the fine ratio of product of lifting circuit board, will be in place of this utility model is intended to positive disclosure.
Utility model content
A purpose of the present utility model is to provide the Luminescence Uniformity of a kind of light emitting module that can automatically correct exposure machine
Calibration equipment.
For reaching above-mentioned purpose and other purposes, the utility model proposes a kind of Luminescence Uniformity calibration equipment, it is adaptable to right
One light emitting module of exposure machine carries out Luminescence Uniformity correction, and this light emitting module has multiple luminescence unit to produce one side light
Source, this Luminescence Uniformity calibration equipment comprises a sensing module, a mobile module, a processing module and an adjusting module.This sense
The light-emitting area surveying module and this light emitting module is oppositely arranged, and in should be to this light-emitting area on multiple sample position of light-emitting area
Carry out light intensity sensing, and produce a light intensity of correspondence according to the intensity in the respectively light that this sample position is sensed respectively
Signal；This mobile module, according to a sample position information signal, makes to produce between this sensing module with this light emitting module phase para-position
Move to move between respectively this sample position；This processing module couples mutually with this sensing module and this mobile module, and exports
This sample position information signal and receive this sensing module in light intensity signal produced by respectively this sample position, and in this luminescence
The Luminescence Uniformity in face produces a corresponding correction signal when not being inconsistent unification uniformity standard；And this adjusting module and this process mould
Block and this light emitting module couple mutually, adjust the luminous strong of at least one in these luminescence units accordingly according to this correction signal
Degree.
In an embodiment of the present utility model, this adjusting module adjusts these luminous single according to this correction signal respectively
The delivery of at least one in unit, to change the luminous intensity of controlled respectively this luminescence unit respectively.
In an embodiment of the present utility model, this processing module obtains the block on this area source with abnormal light intensity
An abnormal co-ordinate position information and an abnormal intensity information, and by this exception co-ordinate position information and this exception light intensity letter
Breath is equipped on this correction signal and exports.
In an embodiment of the present utility model, this adjusting module orients luminescence according to this exception co-ordinate position information
Abnormal luminescence unit, and the luminous intensity of the luminescence unit being positioned is adjusted according to this exception intensity information.
In an embodiment of the present utility model, this sensing module is optical-electrical converter.
In an embodiment of the present utility model, this optical-electrical converter has photodiode.
Thus, Luminescence Uniformity calibration equipment of the present utility model, carrys out the luminous mould to this exposure machine with automation equipment
Block carries out Luminescence Uniformity correction, and the luminous intensity that can promptly and easily be directed to this light emitting module has abnormal region
It is not adjusted, to guarantee the Luminescence Uniformity of this light emitting module, and then promotes the fine ratio of product of circuit board.
Accompanying drawing explanation
Fig. 1 a and Fig. 1 b is that the exposure machine being provided with Luminescence Uniformity calibration equipment of the present utility model is in different visual angles
Axonometric chart.
Fig. 2 is the functional block diagram of an embodiment of this utility model Luminescence Uniformity calibration equipment.
Fig. 3 a and Fig. 3 b be sensing module of the present utility model respectively with high-resolution and low resolution to this light emitting module
Carry out the schematic diagram sensed.
Fig. 4 is the flow chart of Luminescence Uniformity bearing calibration of the present utility model.
Reference is:
1 exposure machine
10 Luminescence Uniformity calibration equipments
110 sensing modules
120 mobile modules
120a X axis mobile unit
120b Y-axis mobile unit
130 processing modules
140 adjusting modules
20 light emitting modules
210 luminescence units
210a luminescence unit
210b luminescence unit
Detailed description of the invention
For being fully understood by the purpose of this utility model, feature and effect, existing by following specific embodiment, and coordinate attached
Figure, is described in detail this utility model, illustrates as rear:
Refer to Fig. 1 a and Fig. 1 b, for being provided with the exposure machine of Luminescence Uniformity calibration equipment of the present utility model in not
Axonometric chart with visual angle.The side of this exposure machine 1 is provided with this Luminescence Uniformity calibration equipment 10, and the correction of this Luminescence Uniformity sets
Standby 10 by a sensing module 110, and the multiple luminescence units 210 being had for the light emitting module 20 of this exposure machine 1 are carried out
Detection, and adjust the carrying out of operation for the light intensity of luminescence unit 210, to guarantee respectively light intensity produced by this luminescence unit 210
Degree is consistent, and then makes this exposure machine 1 a thing (not shown) to be exposed can be carried out uniform exposure operation.Wherein, each is sent out
Light unit 210 can be made up of single light emitting diode or multiple light emitting diode.
See also Fig. 2, for the functional block diagram of an embodiment of this utility model Luminescence Uniformity calibration equipment 10.
This Luminescence Uniformity calibration equipment 10 has this sensing module 110, one mobile module 120, processing module 130 and one and adjusts mould
Block 140.
This sensing module 110 is used on different sample position (i.e. these luminescences of the light-emitting area to this light emitting module 20
The light projector face of unit 210) carry out light intensity sensing, in the present embodiment, this sensing module 110 is optical-electrical converter, wherein should
Optical-electrical converter can have a photodiode, when produced by each this luminescence unit 210, light arrives the photosensitive of photodiode
Behind sensillary area territory, this sensing module 110 i.e. can produce a light intensity signal of correspondence, this reality according to the intensity of received light
Will appreciate that with novel person of ordinary skill in the field, this light intensity signal can be produces corresponding according to light intensity
One current signal or a voltage signal.
This mobile module 120 according to a sample position information signal so that this sensing module 110 and this light emitting module 20 it
Between produce relative displacement, in the present embodiment, this mobile module 120 includes that X axis mobile unit 120a and a Y-axis move
Unit 120b, this sensing module 110 is arranged in this X axis mobile unit 120a that this light emitting module 20 is arranged at this Y-axis
In mobile unit 120b, make that this sensing module 110 can move in the bearing of trend of X-axis and this light emitting module 20 can prolonging in Y-axis
Stretch direction to move, collaborate operation by this X axis mobile unit 120a and this Y-axis mobile unit 120b, this mobile module
120 can make this sensing module 110 can move between respectively this sample position, and make this sensing module 110 on respectively this sample position
Respectively this light emitting module 20 is sensed.
This processing module 130 couples with this sensing module 110 and this mobile module 120 phase, when a user (not shown)
After setting device (not shown) input multiple sample position coordinate to this processing module 130, this processing module 130 produces
Corresponding sample position information signal also exports to this mobile module 120, it is notable that the number of these sample position coordinates
Amount and dense degree can adjust, if using low according to the exposure accuracy demand needed for user's request or photosensitive circuit plate
Resolution (i.e. the quantity of these sample position coordinates few or dense degree is loose), can reduce the correction operation time；If using height
Resolution (i.e. the quantity of these sample position coordinates many or dense degree is tight), then can improve the correction essence of Luminescence Uniformity
Degree.
Furthermore, when this processing module 130 receives this sensing module 110 in the light intensity of respectively the sensed generation in this sample position
After degree signal, this processing module 130 analyzes the luminous uniform of the light-emitting area of this light emitting module 20 according to these light intensity signals
Degree, and produce a corresponding correction signal, such as, at this when the Luminescence Uniformity of this light-emitting area is not inconsistent unification uniformity standard
Reason module 130 can will compare in the light intensity signal acquired by different sample position, to analyze this light emitting module 20
Which block of light-emitting area has the situation of abnormal light intensity to occur, and by the position of this block and the intensity of anomaly of light intensity
It is converted into an abnormal co-ordinate position information and an abnormal intensity information, and by this exception co-ordinate position information and this exception light intensity
Degree information embarkation exports in this correction signal.It should be noted that above-mentioned uniformity standard can be to be equipped in advance at this
Reason module 130 in uniformity criterion, also can for by these light intensity signals be analyzed calculate after obtained uniform
Degree criterion.
This adjusting module 140 couples with this processing module 130 and this light emitting module 20 phase, and this adjusting module 140 is according to this
The correction signal that processing module 130 is exported, adjusts at least in respectively this luminescence unit 210 of this light emitting module 20 accordingly
The luminous intensity of person.Such as, this adjusting module 140 positions according to the abnormal co-ordinate position information carried in this correction signal
Go out luminous abnormal luminescence unit 210, and adjust change quilt according to the abnormal intensity information carried in this correction signal
The luminous intensity of the luminescence unit 210 of location, as a example by these luminescence units 210 are made up of light emitting diode, due to luminescence
How many electricity that the luminous intensity of diode is received with it presents close to linear relationship, therefore by changing these respectively
The delivery of luminescence unit 210, can change the luminous intensity of respectively this luminescence unit 210 respectively, and then improve this light emitting module
The Luminescence Uniformity of 20.
Refer to Fig. 3 a and Fig. 3 b, for sensing module 110 of the present utility model in respectively this sample position to this light emitting module
20 carry out the schematic diagram sensed, and wherein Fig. 3 a carries out sensing the schematic diagram of operation with high-resolution, and Fig. 3 b is carried out with low resolution
The schematic diagram of sensing operation, and "●" in these are graphic and " ▲ " represent a sample position respectively, and arrow indication side
To the path for producing relative movement between this sensing module 110 and this light emitting module 20.
Collaborate operation by this X axis mobile unit 120a and this Y-axis mobile unit 120b, make this sensing module
110 can be relative respectively this sample position in the light-emitting area being dispersed in this light emitting module 20 between move, user can use such as
The high-resolution of Fig. 3 a (i.e. the quantity of sample position many or dense degree is tight) also senses in the way of S-shaped path is moved
Operation, also can use low resolution such as Fig. 3 b (i.e. the quantity of sample position few or dense degree is loose) and with around shape path
The mode of movement carries out sensing operation, and thus, this processing module 130 can be according to this sensing module 110 in each sample position institute
The light intensity signal produced analyzes the Luminescence Uniformity of light-emitting area of this light emitting module 20, if this processing module 110 judge in
" ▲ " the luminous intensity of sample position is abnormal (light intensity is too strong compared to other positions or the most weak), and this processing module 110 is i.e.
By this adjusting module 140 to " ▲ " luminescence unit 210a, 210b corresponding to sample position carry out the adjustment of luminous intensity,
And then improve the Luminescence Uniformity of this light emitting module 20.
It should be noted that the quantity of these sample position, dense degree or this sensing module are relative to this luminescence mould
The travel path of block, all can adjust according to the exposure accuracy demand needed for the use demand of user or photosensitive circuit plate
Collocation, should not be limited with this embodiment.
Thus, Luminescence Uniformity calibration equipment of the present utility model and bearing calibration thereof, come this exposure with automation equipment
The light emitting module of ray machine carries out Luminescence Uniformity correction, and the luminous intensity that can promptly and easily be directed to this light emitting module has
Abnormal region is adjusted individually, to guarantee the Luminescence Uniformity of this light emitting module, and then promotes the fine ratio of product of circuit board.
This utility model is the openest with preferred embodiment, so it will be understood by those skilled in the art that this reality
Execute example to be only used for describing this utility model, and be not construed as limiting scope of the present utility model.It should be noted that such as with this
The change of embodiment equivalence and displacement, all should fall in category of the present utility model.Therefore, protection domain of the present utility model is worked as
Limit with claims.
Claims (6)
1. a Luminescence Uniformity calibration equipment a, it is adaptable to light emitting module of exposure machine is carried out Luminescence Uniformity correction, and
This light emitting module has multiple luminescence unit to produce an area source, it is characterised in that this Luminescence Uniformity calibration equipment comprises:
One sensing module, is oppositely arranged with the light-emitting area of this light emitting module, and in should be on multiple sample position of light-emitting area
This light-emitting area is carried out light intensity sensing, and produces correspondence respectively according to the intensity in the respectively light that this sample position is sensed
A light intensity signal；
One mobile module, according to a sample position information signal, makes to produce between this sensing module with this light emitting module phase para-position
Move to move between respectively this sample position；
One processing module, couples mutually with this sensing module and this mobile module, and exports this sample position information signal and reception
This sensing module is in light intensity signal produced by respectively this sample position, and is not inconsistent unification all in the Luminescence Uniformity of this light-emitting area
A corresponding correction signal is produced during evenness standard；And
One adjusting module, couples mutually with this processing module and this light emitting module, adjusts these accordingly according to this correction signal
The luminous intensity of at least one in light unit.
2. Luminescence Uniformity calibration equipment as claimed in claim 1, it is characterised in that this adjusting module is according to this processing module
The correction signal exported, adjusts the delivery of at least one in respectively this luminescence unit of this light emitting module accordingly, with point
Do not change the luminous intensity of respectively this luminescence unit.
3. Luminescence Uniformity calibration equipment as claimed in claim 1, it is characterised in that this processing module will sample position in difference
Put acquired light intensity signal to compare, have abnormal light intensity analyzing which block of the light-emitting area of this light emitting module
Situation occur, and the position of this block and the intensity of anomaly of light intensity are converted into abnormal co-ordinate position information and exception
Intensity information, and this exception co-ordinate position information and this exception intensity information are equipped on this correction signal export.
4. Luminescence Uniformity calibration equipment as claimed in claim 3, it is characterised in that this adjusting module is according to this correction signal
Middle carried abnormal co-ordinate position information orients luminous abnormal luminescence unit, and is carried according in this correction signal
Abnormal intensity information adjust and change the luminous intensity of luminescence unit being positioned.
5. the Luminescence Uniformity calibration equipment as according to any one of Claims 1-4, it is characterised in that this sensing module is
Optical-electrical converter.
6. Luminescence Uniformity calibration equipment as claimed in claim 5, it is characterised in that this optical-electrical converter has photoelectricity two pole
Pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620364489.5U CN205809534U (en) | 2016-04-27 | 2016-04-27 | Luminescence Uniformity calibration equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620364489.5U CN205809534U (en) | 2016-04-27 | 2016-04-27 | Luminescence Uniformity calibration equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205809534U true CN205809534U (en) | 2016-12-14 |
Family
ID=58144259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620364489.5U Expired - Fee Related CN205809534U (en) | 2016-04-27 | 2016-04-27 | Luminescence Uniformity calibration equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205809534U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107315319A (en) * | 2016-04-27 | 2017-11-03 | 川宝科技股份有限公司 | Luminescence Uniformity calibration equipment and its bearing calibration |
| CN115237183A (en) * | 2022-09-19 | 2022-10-25 | 苏州天准科技股份有限公司 | Illumination adjusting device and detection system |
-
2016
- 2016-04-27 CN CN201620364489.5U patent/CN205809534U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107315319A (en) * | 2016-04-27 | 2017-11-03 | 川宝科技股份有限公司 | Luminescence Uniformity calibration equipment and its bearing calibration |
| CN115237183A (en) * | 2022-09-19 | 2022-10-25 | 苏州天准科技股份有限公司 | Illumination adjusting device and detection system |
| CN115237183B (en) * | 2022-09-19 | 2022-12-02 | 苏州天准科技股份有限公司 | Illumination adjusting device and detection system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161214 Termination date: 20200427 |