CN205175641U - Detection apparatus for air hydrostatic guideway air supporting vibration experiment platform - Google Patents
Detection apparatus for air hydrostatic guideway air supporting vibration experiment platform Download PDFInfo
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- CN205175641U CN205175641U CN201520855893.8U CN201520855893U CN205175641U CN 205175641 U CN205175641 U CN 205175641U CN 201520855893 U CN201520855893 U CN 201520855893U CN 205175641 U CN205175641 U CN 205175641U
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- 238000002474 experimental method Methods 0.000 title claims abstract description 18
- 238000001514 detection method Methods 0.000 title abstract description 4
- 238000006073 displacement reaction Methods 0.000 claims abstract description 15
- 238000007667 floating Methods 0.000 claims abstract description 9
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 7
- 239000004579 marble Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 238000012360 testing method Methods 0.000 description 6
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- 238000005516 engineering process Methods 0.000 description 2
- 230000000977 initiatory effect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
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Abstract
The utility model relates to a detection apparatus for air hydrostatic guideway air supporting vibration experiment platform belongs to the detection area of precision equipment performance. The utility model discloses the press mold sensor is fixed in the supporting platform center, pressure regulating valve and manometer are installed in air supporting piece intake pipe, air supporting piece intake pipe is installed in air supporting piece one side, the balancing weight is placed on the air supporting piece, it passes through the preforming and installs on the balancing weight to cross the cab apron, vibration sensor I and vibration sensor II install in the vertical and horizontal direction of crossing the cab apron through threaded connection, displacement sensor is fixed in on the supporting platform gentleness floating block, air film clearance adjustment gasket is placed in the position that supporting platform had depicted, 180 the speculum is placed on the balancing weight through the preforming, 90 the speculum is installed on the support and is located directly over 180 speculums, laser interferometer installs in 90 speculums one side. The utility model discloses be convenient for realize the regulation of different air film thickness, air film thickness to little vibration to influence the experimental result more true and reliable.
Description
Technical field
The utility model relates to a kind of pick-up unit of air hydrostatic guideway air float vibration experiment platform, belongs to the detection field of precision equipment performance.
Background technology
Gas-static air-float guide rail has that friction power loss is low, kinematic accuracy high, low speed time do not occur creeping and wriggle, the series of advantages such as stable movement, life-span are long, pollution-free, be widely used in three coordinate measuring machine, ultra-precision machine tool, electronics processing, medical instruments field.In recent years, appear at the static-pressure air bearing be applied in litho machine ultraprecise air floating table plane, require that there is nano level motion positions precision.In actual use, in from the entrance of hyperbar gas to the very short time of outlet, gas flow pattern occurs repeatedly to change, thus causes the vibration of air supporting block.Because the vibration of the air supporting block of fluidised form initiation is divided into following two kinds of forms, one is micro-vibration, it is mainly because the up and down regular or beat that air film is inner and the air film gap of the uneven generation of each point distribution of forces between supporting bable tops occurs necessarily to be worth a little near equilibrium position vibrates, vibration amplitude is between a few nanometer to tens nanometers, frequency is from tens hertz to a few KHz, stream field retroaction is little, is a kind of steady-state vibration.But what require kinematic accuracy along with ultraprecise motion platform improves constantly, micro-vibration has become the significant problem of restriction air supporting support technology development.Its two, when internal system or outside are subject to certain interference, during the natural frequency of its frequency and bearing arrangement, bearing there will be high-frequency vibration and utters long and high-pitched sounds, and academia is called pneumatic hammer oscillation phenomenon, and pneumatic hammer vibration amplitude is large, destroy gas flow pattern in air film, have a strong impact on the service precision of hydrostatic slideway.This distinctive oscillation phenomenon of air-float guide rail is the significant problem of its raising positioning precision, feed accuracy, machining precision and measuring accuracy of restriction, measure demarcate vibration amplitude, frequency, acceleration for improve hydrostatic slideway service precision and fundamentally research and solve air supporting vibration method be significant, this patent proposes a kind of air hydrostatic guideway air float vibration experiment platform building and pick-up unit, the air supporting block of dissimilar flow controller can be detected, the vibration characteristics under various inlet pressure and different air-film thickness.
Publication number is the pick-up unit that the Chinese invention patent of CN102261984A describes that a kind of static pressure vapour floating axle holds vibration characteristics, load and utilize rack-mount pressure air cavity and leading screw, the method causes because the vibration passing of the hydrostatic bearing of high pressure admission gas initiation is to system vibration, and measuring vibrations error is larger.
By contrast, this patent adopts balancing weight to load, after loading is stable, carry out vibration-testing, can effectively reduce because the undesired signal of generation when load changes is on the impact of test result, reduce measuring error, improve measuring accuracy, ensure measurement result accuracy.
Summary of the invention
Wait deficiency for prior art measuring vibrations error is larger, the utility model provides a kind of pick-up unit of air hydrostatic guideway air float vibration experiment platform.
The technical solution of the utility model is: a kind of pick-up unit of air hydrostatic guideway air float vibration experiment platform, comprises vibration-isolating platform 1, support platform 2, air supporting block 3, air supporting block draft tube 4, pressure-regulating valve 5, tensimeter 6, balancing weight 7, displacement transducer 8, press mold sensor 9, vibration transducer I 10, vibration transducer II 11, air film gap adjustment pad 12, compressing tablet 13, rebound 14, support 15, laser interferometer 16,180 ° of catoptrons 17,90 ° of catoptrons 18, pedestals 19;
Described vibration-isolating platform 1 is placed on pedestal 19, support platform 2 is positioned on the vibration-isolating platform 1 of level, press mold sensor 9 is fixed on support platform 2 center, pressure-regulating valve 5 and tensimeter 6 are installed in air supporting block draft tube 4, air supporting block draft tube 4 is installed on air supporting block 3 side, balancing weight 7 is positioned on air supporting block 3, rebound 14 is installed on balancing weight 7 by compressing tablet 13, vibration transducer I 10 and vibration transducer II 11 are installed on the vertical of rebound 14 and horizontal direction respectively by being threaded, displacement transducer 8 is fixed on the gentle floating block 3 of support platform 2, air film gap adjustment pad 12 is positioned over the position that support platform 2 has been portrayed, 180 ° of catoptrons 17 are positioned on balancing weight 7 by compressing tablet 13, 90 ° of catoptrons 18 to be installed on support 15 and to be positioned at directly over 180 ° of catoptrons 17, laser interferometer 16 is arranged on 90 ° of catoptron 18 sides and the position of laser interferometer 16 receiver and 90 ° of same height of catoptrons 18, the accuracy that vibration performance is measured can be ensured.
Described support platform 2 is marble support platform.
Described balancing weight 7 is identical with the diameter of air supporting block 3, thus the barycenter realizing proving installation in vertical direction overlaps with its geometry center of circle, ensures the measuring accuracy of this device.
Described air film gap adjustment pad 12 is micron metal film (1 micron-19 microns).
Principle of work of the present utility model is:
Detect air film gap different for the affecting of micro-vibration time, utilize pressure-regulating valve 5 to control flow controller air admission hole pressure, when ensureing each experiment, there is identical admission pressure, add the balancing weight 7 of different quality.When detecting various inlet pressure to the affecting of micro-vibration, increase different air film gap adjustment pads 12 and control air film gap, pressure-regulating valve 5 is utilized to control flow controller air admission hole pressure, have different admission pressures when ensureing each experiment, now each test should be furnished with the balancing weight 7 of equal in quality.Detect air film gap different for the affecting of pneumatic hammer vibration time, pressure-regulating valve 5 is utilized to control flow controller air admission hole pressure, until hydrostatic slideway sends the buzz of low ring, when ensureing each experiment, there is identical admission pressure, add the balancing weight 7 of different quality.Detect various inlet pressure on pneumatic hammer vibrate affect time, increase different air film gap adjustment pads 12 and control air film gap, pressure-regulating valve 5 is utilized to control flow controller air admission hole pressure, until hydrostatic slideway sends the buzz of low ring, after this controlling test pressure-regulating valve, pressure is constantly increased, and now each test should be furnished with the balancing weight 7 of equal in quality.Displacement transducer 8 is utilized to measure the upper surface of marble support platform 2 and the lower surface vertical range of air supporting block 3 and air film gap thickness, utilize pressure distribution situation in press mold sensor measurement air film, the acceleration signal of air supporting block level and vertical direction measured respectively by vibration transducer I 10 and vibration transducer II 11, utilizes the amplitude characteristic of laser interferometer 16 measuring vibrations.
The beneficial effects of the utility model are: pressure is easy to adjust, are convenient to by the impact of data observation admission pressure on vibration characteristics; Be convenient to the adjustment realizing different air-film thicknesses, air-film thickness on micro-vibration to affect experimental result more true and reliable; Device technique is succinct, simple operation; Testing table holistic conformation is convenient, economically feasible.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model;
Fig. 2 is the vertical view of air supporting block and air film clearance fine adjustment pad scheme of installation in the utility model;
Each label in figure: 1-vibration-isolating platform; 2-support platform; 3-air supporting block; 4-air supporting block draft tube; 5-pressure-regulating valve; 6-tensimeter; 7-balancing weight; 8-displacement transducer; 9-press mold sensor; 10-vibration transducer I; 11-vibration transducer II; 12-air film gap adjustment pad; 13-compressing tablet; 14-rebound; 15-support; 16-laser interferometer; 17-180
ocatoptron; 18-90
ocatoptron; 19-pedestal.
Embodiment
Embodiment 1: as shown in Figure 1-2, a pick-up unit for air hydrostatic guideway air float vibration experiment platform, comprises vibration-isolating platform 1, support platform 2, air supporting block 3, air supporting block draft tube 4, pressure-regulating valve 5, tensimeter 6, balancing weight 7, displacement transducer 8, press mold sensor 9, vibration transducer I 10, vibration transducer II 11, air film gap adjustment pad 12, compressing tablet 13, rebound 14, support 15, laser interferometer 16,180 ° of catoptrons 17,90 ° of catoptrons 18, pedestals 19;
Described vibration-isolating platform 1 is placed on pedestal 19, support platform 2 is positioned on the vibration-isolating platform 1 of level, press mold sensor 9 is fixed on support platform 2 center, pressure-regulating valve 5 and tensimeter 6 are installed in air supporting block draft tube 4, air supporting block draft tube 4 is installed on air supporting block 3 side, balancing weight 7 is positioned on air supporting block 3, rebound 14 is installed on balancing weight 7 by compressing tablet 13, vibration transducer I 10 and vibration transducer II 11 are installed on the vertical of rebound 14 and horizontal direction respectively by being threaded, displacement transducer 8 is fixed on the gentle floating block 3 of support platform 2, air film gap adjustment pad 12 is positioned over the position that support platform 2 has been portrayed, 180 ° of catoptrons 17 are positioned on balancing weight 7 by compressing tablet 13, 90 ° of catoptrons 18 to be installed on support 15 and to be positioned at directly over 180 ° of catoptrons 17, laser interferometer 16 is arranged on 90 ° of catoptron 18 sides and the position of laser interferometer 16 receiver and 90 ° of same height of catoptrons 18.
Described support platform 2 is marble support platform.
Described balancing weight 7 is identical with the diameter of air supporting block 3.
Described air film gap adjustment pad 12 is micron metal film.
Embodiment 2: as shown in Figure 1-2, a pick-up unit for air hydrostatic guideway air float vibration experiment platform, comprises vibration-isolating platform 1, support platform 2, air supporting block 3, air supporting block draft tube 4, pressure-regulating valve 5, tensimeter 6, balancing weight 7, displacement transducer 8, press mold sensor 9, vibration transducer I 10, vibration transducer II 11, air film gap adjustment pad 12, compressing tablet 13, rebound 14, support 15, laser interferometer 16,180 ° of catoptrons 17,90 ° of catoptrons 18, pedestals 19;
Described vibration-isolating platform 1 is placed on pedestal 19, support platform 2 is positioned on the vibration-isolating platform 1 of level, press mold sensor 9 is fixed on support platform 2 center, pressure-regulating valve 5 and tensimeter 6 are installed in air supporting block draft tube 4, air supporting block draft tube 4 is installed on air supporting block 3 side, balancing weight 7 is positioned on air supporting block 3, rebound 14 is installed on balancing weight 7 by compressing tablet 13, vibration transducer I 10 and vibration transducer II 11 are installed on the vertical of rebound 14 and horizontal direction respectively by being threaded, displacement transducer 8 is fixed on the gentle floating block 3 of support platform 2, air film gap adjustment pad 12 is positioned over the position that support platform 2 has been portrayed, 180 ° of catoptrons 17 are positioned on balancing weight 7 by compressing tablet 13, 90 ° of catoptrons 18 to be installed on support 15 and to be positioned at directly over 180 ° of catoptrons 17, laser interferometer 16 is arranged on 90 ° of catoptron 18 sides and the position of laser interferometer 16 receiver and 90 ° of same height of catoptrons 18.
Described balancing weight 7 is identical with the diameter of air supporting block 3.
Described air film gap adjustment pad 12 is micron metal film.
Embodiment 3: as shown in Figure 1-2, a pick-up unit for air hydrostatic guideway air float vibration experiment platform, comprises vibration-isolating platform 1, support platform 2, air supporting block 3, air supporting block draft tube 4, pressure-regulating valve 5, tensimeter 6, balancing weight 7, displacement transducer 8, press mold sensor 9, vibration transducer I 10, vibration transducer II 11, air film gap adjustment pad 12, compressing tablet 13, rebound 14, support 15, laser interferometer 16,180 ° of catoptrons 17,90 ° of catoptrons 18, pedestals 19;
Described vibration-isolating platform 1 is placed on pedestal 19, support platform 2 is positioned on the vibration-isolating platform 1 of level, press mold sensor 9 is fixed on support platform 2 center, pressure-regulating valve 5 and tensimeter 6 are installed in air supporting block draft tube 4, air supporting block draft tube 4 is installed on air supporting block 3 side, balancing weight 7 is positioned on air supporting block 3, rebound 14 is installed on balancing weight 7 by compressing tablet 13, vibration transducer I 10 and vibration transducer II 11 are installed on the vertical of rebound 14 and horizontal direction respectively by being threaded, displacement transducer 8 is fixed on the gentle floating block 3 of support platform 2, air film gap adjustment pad 12 is positioned over the position that support platform 2 has been portrayed, 180 ° of catoptrons 17 are positioned on balancing weight 7 by compressing tablet 13, 90 ° of catoptrons 18 to be installed on support 15 and to be positioned at directly over 180 ° of catoptrons 17, laser interferometer 16 is arranged on 90 ° of catoptron 18 sides and the position of laser interferometer 16 receiver and 90 ° of same height of catoptrons 18.
Described support platform 2 is marble support platform.
Embodiment 4: as shown in Figure 1-2, a pick-up unit for air hydrostatic guideway air float vibration experiment platform, comprises vibration-isolating platform 1, support platform 2, air supporting block 3, air supporting block draft tube 4, pressure-regulating valve 5, tensimeter 6, balancing weight 7, displacement transducer 8, press mold sensor 9, vibration transducer I 10, vibration transducer II 11, air film gap adjustment pad 12, compressing tablet 13, rebound 14, support 15, laser interferometer 16,180 ° of catoptrons 17,90 ° of catoptrons 18, pedestals 19;
Described vibration-isolating platform 1 is placed on pedestal 19, support platform 2 is positioned on the vibration-isolating platform 1 of level, press mold sensor 9 is fixed on support platform 2 center, pressure-regulating valve 5 and tensimeter 6 are installed in air supporting block draft tube 4, air supporting block draft tube 4 is installed on air supporting block 3 side, balancing weight 7 is positioned on air supporting block 3, rebound 14 is installed on balancing weight 7 by compressing tablet 13, vibration transducer I 10 and vibration transducer II 11 are installed on the vertical of rebound 14 and horizontal direction respectively by being threaded, displacement transducer 8 is fixed on the gentle floating block 3 of support platform 2, air film gap adjustment pad 12 is positioned over the position that support platform 2 has been portrayed, 180 ° of catoptrons 17 are positioned on balancing weight 7 by compressing tablet 13, 90 ° of catoptrons 18 to be installed on support 15 and to be positioned at directly over 180 ° of catoptrons 17, laser interferometer 16 is arranged on 90 ° of catoptron 18 sides and the position of laser interferometer 16 receiver and 90 ° of same height of catoptrons 18.
By reference to the accompanying drawings embodiment of the present utility model is explained in detail above, but the utility model is not limited to above-mentioned embodiment, in the ken that those of ordinary skill in the art possess, various change can also be made under the prerequisite not departing from the utility model aim.
Claims (4)
1. the pick-up unit of an air hydrostatic guideway air float vibration experiment platform, it is characterized in that: comprise vibration-isolating platform (1), support platform (2), air supporting block (3), air supporting block draft tube (4), pressure-regulating valve (5), tensimeter (6), balancing weight (7), displacement transducer (8), press mold sensor (9), vibration transducer I (10), vibration transducer II (11), air film gap adjustment pad (12), compressing tablet (13), rebound (14), support (15), laser interferometer (16), 180 ° of catoptrons (17), 90 ° of catoptrons (18), pedestal (19),
Described vibration-isolating platform (1) is placed on pedestal (19), support platform (2) is positioned on the vibration-isolating platform (1) of level, press mold sensor (9) is fixed on support platform (2) center, pressure-regulating valve (5) and tensimeter (6) are installed in air supporting block draft tube (4), air supporting block draft tube (4) is installed on air supporting block (3) side, balancing weight (7) is positioned on air supporting block (3), rebound (14) is installed on balancing weight (7) by compressing tablet (13), vibration transducer I (10) and vibration transducer II (11) are installed on the vertical of rebound (14) and horizontal direction respectively by being threaded, displacement transducer (8) is fixed on support platform (2) gentle floating block (3), air film gap adjustment pad (12) is positioned over the position that support platform (2) has been portrayed, 180 ° of catoptrons (17) are positioned on balancing weight (7) by compressing tablet (13), 90 ° of catoptrons (18) are installed on support (15) and go up and be positioned at directly over 180 ° of catoptrons (17), laser interferometer (16) is arranged on 90 ° of catoptron (18) sides and the position of laser interferometer (16) receiver and 90 ° of same height of catoptrons (18).
2. the pick-up unit of air hydrostatic guideway air float vibration experiment platform according to claim 1, is characterized in that: described support platform (2) is marble support platform.
3. the pick-up unit of air hydrostatic guideway air float vibration experiment platform according to claim 1 and 2, is characterized in that: described balancing weight (7) is identical with the diameter of air supporting block (3).
4. the pick-up unit of air hydrostatic guideway air float vibration experiment platform according to claim 1 and 2, is characterized in that: described air film gap adjustment pad (12) is micron metal film.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520855893.8U CN205175641U (en) | 2015-10-29 | 2015-10-29 | Detection apparatus for air hydrostatic guideway air supporting vibration experiment platform |
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| CN201520855893.8U CN205175641U (en) | 2015-10-29 | 2015-10-29 | Detection apparatus for air hydrostatic guideway air supporting vibration experiment platform |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107061493A (en) * | 2017-05-04 | 2017-08-18 | 昆明理工大学 | Device and its control method based on Single electromagnet suspension with air supporting composite support |
| CN108279714A (en) * | 2018-01-11 | 2018-07-13 | 中国机械工业集团有限公司 | A kind of distribution line traffic control pressure feedback offset-type air supporting vibration control system |
| CN108376000A (en) * | 2018-01-11 | 2018-08-07 | 中国机械工业集团有限公司 | A kind of distributed wireless pressure feedback offset-type air supporting vibration control system |
| CN110274758A (en) * | 2019-07-19 | 2019-09-24 | 中国计量大学 | A kind of test device and method of flow controller vibratory response characteristic |
| CN110274677A (en) * | 2019-07-19 | 2019-09-24 | 中国计量大学 | A kind of measuring device and method of the random micro-vibration of flow controller normal direction |
| CN111059149A (en) * | 2019-12-23 | 2020-04-24 | 昆明理工大学 | Energy collecting device based on acoustic wave suspension and energy recovery method thereof |
| CN111982385A (en) * | 2020-09-04 | 2020-11-24 | 电子科技大学 | Device and method for detecting dynamic and static pressure of local air film of ultra-precise air-floatation thrust bearing |
| CN112834144A (en) * | 2020-12-31 | 2021-05-25 | 合肥工业大学 | Testing device for fluid-solid coupling vibration in air-flotation thin plate system |
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2015
- 2015-10-29 CN CN201520855893.8U patent/CN205175641U/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107061493A (en) * | 2017-05-04 | 2017-08-18 | 昆明理工大学 | Device and its control method based on Single electromagnet suspension with air supporting composite support |
| CN108279714A (en) * | 2018-01-11 | 2018-07-13 | 中国机械工业集团有限公司 | A kind of distribution line traffic control pressure feedback offset-type air supporting vibration control system |
| CN108376000A (en) * | 2018-01-11 | 2018-08-07 | 中国机械工业集团有限公司 | A kind of distributed wireless pressure feedback offset-type air supporting vibration control system |
| CN110274758A (en) * | 2019-07-19 | 2019-09-24 | 中国计量大学 | A kind of test device and method of flow controller vibratory response characteristic |
| CN110274677A (en) * | 2019-07-19 | 2019-09-24 | 中国计量大学 | A kind of measuring device and method of the random micro-vibration of flow controller normal direction |
| CN110274677B (en) * | 2019-07-19 | 2024-01-12 | 中国计量大学 | Device and method for measuring normal random micro-vibration of restrictor |
| CN111059149A (en) * | 2019-12-23 | 2020-04-24 | 昆明理工大学 | Energy collecting device based on acoustic wave suspension and energy recovery method thereof |
| CN111982385A (en) * | 2020-09-04 | 2020-11-24 | 电子科技大学 | Device and method for detecting dynamic and static pressure of local air film of ultra-precise air-floatation thrust bearing |
| CN112834144A (en) * | 2020-12-31 | 2021-05-25 | 合肥工业大学 | Testing device for fluid-solid coupling vibration in air-flotation thin plate system |
| CN112834144B (en) * | 2020-12-31 | 2022-12-06 | 合肥工业大学 | Testing device for fluid-solid coupling vibration in air-flotation thin plate system |
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Granted publication date: 20160420 Termination date: 20171029 |
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| CF01 | Termination of patent right due to non-payment of annual fee |