CN206208436U - Aerostatic bearing applanation distribution tester - Google Patents
Aerostatic bearing applanation distribution tester Download PDFInfo
- Publication number
- CN206208436U CN206208436U CN201621075799.1U CN201621075799U CN206208436U CN 206208436 U CN206208436 U CN 206208436U CN 201621075799 U CN201621075799 U CN 201621075799U CN 206208436 U CN206208436 U CN 206208436U
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- Prior art keywords
- bearing
- air
- pressure
- oil pocket
- measurement plate
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- 238000009530 blood pressure measurement Methods 0.000 claims abstract description 36
- 239000003921 oil Substances 0.000 claims abstract description 33
- 239000010687 lubricating oil Substances 0.000 claims abstract description 10
- 239000004579 marble Substances 0.000 claims abstract description 5
- 238000004441 surface measurement Methods 0.000 claims abstract 2
- 238000006073 displacement reaction Methods 0.000 claims description 11
- 230000000903 blocking effect Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 12
- 238000005461 lubrication Methods 0.000 description 7
- 238000013461 design Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The utility model is related to aerostatic bearing applanation distribution tester, belongs to precision equipment technical field.The utility model includes air-bearing, vent plug, pressure measurement plate, pressure sensor, flow controller, marble platform；Air-bearing is removable to be positioned on pressure measurement plate, pressure measurement intralamellar part is provided with the oil pocket of one end open, lubricating oil is equiped with oil pocket, vent plug is installed on the upper surface of pressure measurement plate and is connected with oil pocket, pressure sensor is arranged on pressure measurement plate side and blocks one end of oil pocket opening, flow controller is arranged in pressure sensor and is connected with oil pocket, i.e. pressure sensor passes through oil pocket, flow controller is connected with vent plug, air-bearing is for floating over pressure measurement plate top after lubricating oil, simultaneously air film is formed between air-bearing lower surface and pressure measurement plate upper surface, the pressure of pressure measured point passes through vent plug through oil pocket feed pressure sensor in air film.The utility model can directly measure the pressure of each position of air film.
Description
Technical field
The utility model is related to a kind of aerostatic bearing applanation distribution tester, belongs to precision equipment technology neck
Domain.
Background technology
Gas-static air-float guide rail is applied to precision, underloading, the occasion of high speed.It is in pattern generator, litho machine, preliminary survey
The precision optical machineries such as platform, dividing machine, automatic drafting machine, three coordinate measuring machine, precision instrument aspect are more and more applied.With
Hydrostatic slideway is compared, and has following advantages：The viscosity of gas is minimum, about the one thousandth of fluid, therefore, frictional force is very
It is small, it is suitable for lower work at a high speed；During work, air resistance is negligible, and supporting force produces heat seldom, and by fluid band
Walk, when adding gas expansion, there is cooling effect, thus, the characteristics of aerostatic guide way has cold operation, it is nearly free from heat
Deformation, this is significant to precision optical machinery；The leveling effect of pressure air film, can offset a part of guide rail surface error to fortune
The influence of dynamic precision, therefore, kinematic accuracy is higher, and its repetitive positioning accuracy can reach 0.1 μm；Air physical stable performance,
People's air can be directly arranged, it is free from environmental pollution, optics and electrical equipment are not corroded, it is not necessary to reclaim.In recent years, appear in and be applied to
Static-pressure air bearing in litho machine ultraprecise air floating table plane, it is desirable to nano level motion positions precision.Actually make
During, gases at high pressure are varied multiple times from entrance to gas flow pattern in the very short time of outlet, so as to trigger air supporting block
Vibration.In order to improve bearing capacity, precision and stability, domestic and foreign scholars carry out various optimization designs to the structure of air supporting block, lead to
Cross different throttle styles and obtain the air-float guide rail with certain rigidity and bearing capacity, in order to improve bearing capacity, precision and steady
Qualitative, domestic and foreign scholars carry out various optimization designs to the structure of air supporting block, are obtained with one by different throttle styles
Determine the air-float guide rail of rigidity and bearing capacity.Lubricating oil is passed through in oil pocket and provides the mode of thrust compared to the side for being passed through air
Formula, biggest advantage can be that journey loss is prolonged in reduction, increase bearing capacity and the absorbing of device, it is ensured that stable movement.At present,
From the point of view of the overall development of lubrication technology and supporting form, air-bearing is in ultraprecise supporting, at a high speed supporting, low friction, longevity
Life and environmental protection aspect have overwhelming superiority.In use, gas lubrication is compared to the advantage that solid-liquid lubricates：
Coefficient of friction and moment of friction very little, the characteristics of with cold operation, kinematic accuracy is high, long lifespan, can be in temperature very wide
Worked in scope and adverse circumstances, and narrow and small gap can be kept.Gas lubrication gap-ratio oil lubrication gap is much smaller, i.e.,
Contactless relative motion is made with very small gap.But, gas lubrication bearing capacity is low, rigidity is small, its it is very high can
Compressibility easily causes unstability, tries to suppress unstability, is all the time the problem that gas lubrication design must be paid attention to.Wherein
Gas film pressure distribution turns into the key factor of influence air-bearing stability.Therefore measure narrow and small air film pressure distribution turn into grind
Key issue in studying carefully.
In conventional air supporting block static parameter test, due to the too small pressure distribution that cannot measure air film of air-film thickness.
The content of the invention
The technical problems to be solved in the utility model is to provide a kind of aerostatic bearing applanation distribution tester,
Accurately can directly measure gas film pressure distribution.
The utility model patent use technical scheme be：A kind of aerostatic bearing applanation distribution tester,
Including air-bearing 3, vent plug 4, pressure measurement plate 5, pressure sensor 6, flow controller 7, marble platform 8；
Air-bearing 3 is removable to be positioned on pressure measurement plate 5, and the oil pocket of one end open is provided with inside pressure measurement plate 5, and oil pocket is built-in
Lubricating oil is provided with, vent plug 4 is installed on the upper surface of pressure measurement plate 5 and is connected with oil pocket, pressure sensor 6 is arranged on the side of pressure measurement plate 5
Face and one end of blocking oil pocket opening, flow controller 7 are arranged in pressure sensor 6 and are connected with oil pocket, i.e., pressure sensor 6 leads to
Oil pocket, flow controller 7 is crossed to be connected with vent plug 4, air-bearing 3 for floated over after lubricating oil 5 pressure measurement plates top, while under air-bearing 3
Air film is formed between surface and the upper surface of pressure measurement plate 5, the pressure of pressure measured point passes through vent plug 4 through oil pocket feed pressure in air film
Sensor 6.
In order to improve the efficiency of measurement apparatus, lubricating oil is passed through in oil pocket, it is possible to reduce prolong journey loss, increase device
Bearing capacity and absorbing, it is ensured that stable movement.
Further, also including support 1, bolt 2, the one end of bolt 2 is arranged on support 1, and the other end is arranged on air-bearing shafts
Hold on 3, support 1 is fixed, by the displacement for realizing air-bearing 3 of regulating bolt 2, simple structure, Yi An
Dress.
Further, the side of described air-bearing 3 is provided with displacement transducer, can be read by displacement transducer
The displacement of air-bearing 3.
Further, described pressure measurement plate 5 with diameter greater than or equal to air-bearing 3 twice, in order to measure air supporting
The pressure distribution of the whole air film of bearing 3, it is ensured that the measuring accuracy of the device.
Further, described vent plug 4 is overflow valve, Stability Analysis of Structures.
Operation principle of the present utility model is：
Air-bearing 3 floats over the top of pressure measurement plate 5 after supplying, while between the lower surface of air-bearing 3 and the upper surface of pressure measurement plate 5
Air film is formed, the pressure of pressure measured point passes through vent plug 4 through oil pocket, the feed pressure sensor 6 of flow controller 7 in air film, by adjusting
Section bolt 2 makes the displacement of air-bearing 3, and its displacement is read by displacement transducer, therefore, it can directly to measure air film each
The pressure of individual position.The diameter of tested air-bearing 3 is much larger than due to the diameter of pressure measurement plate 5, it is possible to measure whole air film
Pressure distribution.Additionally, aerostatic bearing enters working face using the gas of certain pressure, workbench is floated, shape
Into one layer of air film, the metal surface between guide rail is set not contact, while can reduce prolong journey loss again, it is ensured that motion is more steady,
It is in hgher efficiency.
The beneficial effects of the utility model are：
1st, gas film pressure can directly be measured using the pressure measurement plate for being inlaid with oil pocket, flow controller 7 and pressure sensor 6.
2nd, the precision of experiment is improve come command displacement amount by the motion of bolt 2 and the display of displacement transducer.
3rd, the pressure measurement plate 5 that diameter is much larger than tested air-bearing 3 is employed, each position of air film can be easily and directly measured
The pressure put, it is ensured that experimental result accurately and completely.
4th, the mode that lubricating oil is passed through in oil pocket is employed, it is possible to reduce prolong journey loss, increase the bearing capacity of device
With absorbing, it is ensured that stable movement.
5th, device large carrying capacity described in the utility model, absorbing is good, stable movement, simple operation, practical value
Height, long lifespan.
Brief description of the drawings
Fig. 1 is overall structure diagram of the present utility model；
Each label in figure：1- supports, 2- bolts, 3- air-bearings, 4- vent plugs, 5- pressure measurement plates, 6- pressure sensors, 7-
Flow controller, 8- marble platforms.
Specific embodiment
With reference to the accompanying drawings and detailed description, the utility model is described in further detail.
Implementation method one：As shown in figure 1, a kind of aerostatic bearing applanation distribution tester, including air-bearing shafts
Hold 3, vent plug 4, pressure measurement plate 5, pressure sensor 6, flow controller 7, marble platform 8；
Air-bearing 3 is removable to be positioned on pressure measurement plate 5, and the oil pocket of one end open is provided with inside pressure measurement plate 5, and oil pocket is built-in
Lubricating oil is provided with, vent plug 4 is installed on the upper surface of pressure measurement plate 5 and is connected with oil pocket, pressure sensor 6 is arranged on the side of pressure measurement plate 5
Face and one end of blocking oil pocket opening, flow controller 7 are arranged in pressure sensor 6 and are connected with oil pocket, and air-bearing 3 is for lubrication
5 pressure measurement plates top is floated over after oil, while air film is formed between the lower surface of air-bearing 3 and the upper surface of pressure measurement plate 5, pressure in air film
The pressure of measured point is by vent plug 4 through oil pocket feed pressure sensor 6.
Also include support 1, bolt 2, the one end of bolt 2 is arranged on support 1, and the other end is arranged on air-bearing 3.
The side of described air-bearing 3 is provided with displacement transducer.
Described pressure measurement plate 5 with diameter greater than or equal to air-bearing 3 twice.
Described vent plug 4 is overflow valve.
Specific embodiment of the present utility model is explained in detail above in association with accompanying drawing, but the utility model is not
It is limited to above-mentioned implementation method, in the ken that those of ordinary skill in the art possess, this practicality can also be not being departed from
Various changes can be made on the premise of new objective.
Claims (5)
1. a kind of aerostatic bearing applanation distribution tester, it is characterised in that:Including air-bearing（3）, vent plug
（4）, pressure measurement plate（5）, pressure sensor（6）, flow controller (7), marble platform（8）；
Air-bearing（3）It is removable to be positioned over pressure measurement plate（5）On, pressure measurement plate（5）Inside is provided with the oil pocket of one end open, in oil pocket
It is equiped with lubricating oil, vent plug（4）It is installed on pressure measurement plate（5）Upper surface and connected with oil pocket, pressure sensor（6）Installed in survey
Pressing plate（5）Side and one end of blocking oil pocket opening, flow controller (7) is installed in pressure sensor（6）It is interior and connected with oil pocket, gas
Floating axle holds（3）For floating over pressure measurement plate after lubricating oil（5）Top, while air-bearing（3）Lower surface and pressure measurement plate（5）Upper surface it
Between form air film, in air film the pressure of pressure measured point pass through vent plug（4）Through oil pocket feed pressure sensor（6）.
2. aerostatic bearing applanation distribution tester according to claim 1, it is characterised in that：Also include branch
Frame（1）, bolt（2）, bolt（2）One end is arranged on support（1）On, the other end is arranged on air-bearing（3）On.
3. aerostatic bearing applanation distribution tester according to claim 1 and 2, it is characterised in that：It is described
Air-bearing（3）Side displacement transducer is installed.
4. aerostatic bearing applanation distribution tester according to claim 1 and 2, it is characterised in that：It is described
Pressure measurement plate（5）With diameter greater than or equal to air-bearing（3）Twice.
5. aerostatic bearing applanation distribution tester according to claim 1 and 2, it is characterised in that：It is described
Vent plug（4）It is overflow valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621075799.1U CN206208436U (en) | 2016-09-23 | 2016-09-23 | Aerostatic bearing applanation distribution tester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621075799.1U CN206208436U (en) | 2016-09-23 | 2016-09-23 | Aerostatic bearing applanation distribution tester |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206208436U true CN206208436U (en) | 2017-05-31 |
Family
ID=58761372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621075799.1U Expired - Fee Related CN206208436U (en) | 2016-09-23 | 2016-09-23 | Aerostatic bearing applanation distribution tester |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206208436U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108120547A (en) * | 2017-12-21 | 2018-06-05 | 合肥工业大学 | A kind of vortex surface pressure apparatus for measuring distribution |
| CN110296839A (en) * | 2019-08-13 | 2019-10-01 | 中国工程物理研究院机械制造工艺研究所 | Gas film pressure test device and test method for gas bearing |
-
2016
- 2016-09-23 CN CN201621075799.1U patent/CN206208436U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108120547A (en) * | 2017-12-21 | 2018-06-05 | 合肥工业大学 | A kind of vortex surface pressure apparatus for measuring distribution |
| CN110296839A (en) * | 2019-08-13 | 2019-10-01 | 中国工程物理研究院机械制造工艺研究所 | Gas film pressure test device and test method for gas bearing |
| CN110296839B (en) * | 2019-08-13 | 2024-02-06 | 中国工程物理研究院机械制造工艺研究所 | Air film pressure testing device and testing method for gas bearing |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170531 Termination date: 20180923 |