CN109882506A - A kind of aerostatic bearing structure reducing air film micro-vibration - Google Patents
A kind of aerostatic bearing structure reducing air film micro-vibration Download PDFInfo
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- CN109882506A CN109882506A CN201910242153.XA CN201910242153A CN109882506A CN 109882506 A CN109882506 A CN 109882506A CN 201910242153 A CN201910242153 A CN 201910242153A CN 109882506 A CN109882506 A CN 109882506A
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Abstract
The invention discloses a kind of aerostatic bearing structure for reducing air film micro-vibration, which is that a kind of increase supplies area, and it is more uniform to make the pressure inside air film be distributed to weaken gas flow rate, and then achievees the purpose that weaken air film micro-vibration.The dry gas of the cleaning of certain pressure is by flowing into double-layer porous material after air inlet, it is flowed between main shaft and thrust plate through double-layer porous material surface, the gas gone out by porous material surface millions of holes clearance flow, forms stable air film, air film is wrapped in main shaft between main shaft and thrust plate.After applying load, due to thrust plate upper surface air film and lower surface air-film thickness is inconsistent causes to produce pressure difference between upper and lower air film, carries thrust plate to balance external applied load.Double layer material of the invention can give full play to the physical property of two kinds of porous materials (base material, compacted zone), to weaken air film fluctuation, further improve the machining accuracy using precision and air-flotation workbench of aerostatic bearing.
Description
Technical field
The present invention relates to a kind of aerostatic bearing structures for reducing air film micro-vibration, the gas suitable for aerostatic bearing
Film fluction analysis realizes the steady operating of pressurized air main shaft.
Background technique
The highest development level that represent sophisticated manufacturing is equipped in super hot investment casting, with the increasing of national precision manufactureing strength
By force, aerostatic bearing gradually replaces tradition machinery contact or hydrodynamic lubrication formula bearing, becomes manufacturing equipment and realizes high-precision, height
The effective means of reliability.In the operating condition, the moving component of aerostatic bearing is supported by external pressurized air film.Due to gas
The presence of film, may be implemented that frictional force is small, do not wear, to move steady, precision high and the advantages of almost without thermal deformation.Due to sky
The air viscosity of gas static pressure bearing is low, is easy to happen air film micro-vibration, will have a direct impact on the kinematic accuracy of bearing, causes to process
There is percent ripple or larger surface roughness in workpiece surface.Research previously for aerostatic bearing is only limitted in macro-scale
On studied.In fact, the air-film thickness of aerostatic bearing is micron order, belong to Micro-flows field.The study found that
Bearing performance is influenced by microscopic heat conduction, such as air film micro-vibration, velocity-slip and rarified flow etc., but these effects will not go out
Now on a macroscopic scale.
Air film micro-vibration is not traditional gas hammer phenomenon, but workbench is still located when air film micro-vibration occurs
In normal working condition.One distinguishing feature of this vibration is that only just occur in bearing ventilation, it is clear that is a kind of stream
The vibration that body causes, but the concrete reason that this micro-vibration generates does not provide reasonable explanation, it has now been found that influencing
It is entirely capable of inhibiting air film because being known as the reasons such as pressure source pressure, throttle orifice aperture, gas flow rate, air-film thickness, but not finding
The method and measure of micro-vibration.Porous restriction device makes to supply area increase since numerous small holes are distributed in porous material surface,
And the increasing of area is supplied so that the pressure inside air film is distributed more uniform, no pressure spike near throttle orifice.But air
Static pressure porous bearing does not completely inhibit air film micro-vibration, thus the present invention using double-layer porous material as porous restriction device,
It weakens air film micro-vibration and achievees the purpose that inhibit air-flotation type workbench micro breadth oscillation.
Summary of the invention
In order to inhibit cyclone turbulent flow vortex structure, increase gas supply area weakens air velocity and weakens air film fluctuation, Jin Erda
To the purpose for reducing gas suspension micro-vibration.According to the flow behavior of gas under minute yardstick, in conjunction with aerostatic bearing system
Structure proposes a kind of aerostatic bearing knot for reducing air film micro-vibration as porous restriction device using double-layer porous material
Structure.
The object of the present invention is to provide a kind of static air pressure axis using double-layer porous material as porous restriction device
Bearing structure, which uses graphite porous material as Porous matrix (14), on the surface of porous graphite
Upper smearing epoxy adhesive, and it is formed with less than the infiltrative Porous compacted zone (13) of Porous matrix (14), it forms more
Hole flow controller is to achieve the purpose that weaken air film micro-vibration.Pass through the Aerostatic Spindle Radial mixing testing experiment, hair
Existing such structure can make gas flowing steady, reduce gas flow rate, can greatly weaken the cyclone phenomenon of gas, make to lead
Axis (11) smooth running.
To achieve the above object, the technical solution adopted by the present invention is a kind of aerostatic bearing for reducing air film micro-vibration
Structure, the structure mainly include upper thrust plate (1), air film (2), axle sleeve (3), transverse bearing (4), lower thrust plate (5), diamond
Cutter (6), workpiece (7), workbench (8), air inlet (9), thrust bearing (10), main shaft (11), air cavity (12), Porous are fine and close
Layer (13) and Porous matrix (14).Main shaft (11) rotates under radial direction and the support of thrust direction aerostatic bearing, big to fly
Cutterhead is fixed on the lower thrust plate (5) of the bottom of main shaft, and diamond cutter (6) is fixed on cutterhead, with main shaft (11)
Workpiece (7) is cut in rotation.Wherein aerostatic bearing structure is in transverse bearing (4) and thrust bearing (10) using double
For layer porous material as porous restriction device, Porous matrix (14) uses graphite porous material, and tool is made on a support surface
Have and is less than Porous matrix (14) infiltrative Porous compacted zone (13).The gas that the cleaning of certain pressure is dry passes through air inlet
Hole flows into double-layer porous material after (9), flows into upper thrust plate (1), lower thrust plate (5) and main shaft through double-layer porous material surface
(11) between.Gas flows through double-layer porous material, since porous material itself has irregular capillary porosity three-dimensional structure, nothing
The gas of number hole outflow makes gas flowing more steady, destroys the formation condition of large-scale vortex structure, reaches inhibition gas
Film fluctuation, reduces air film micro-vibration.
Turn error experiment is carried out to the aerostatic bearing structure of the reduction air film micro-vibration, test bearing is press-fitted into
In axle sleeve.Vibration measurement experiment needs to carry out the installation and zeroing of displacement sensor (24) and canonical measure stick (25) before carrying out
Operation, to guarantee that measurement result is accurate.When air compressor (15) provide stablize gas supply after, operation the Aerostatic Spindle (11) into
Row vibration-testing.At this point, the high precision measurement stick (25) being mounted on main shaft rotates together with main shaft (11), around prod
Two non-contact displacement transducers (24) can accurately measure the various change in displacement of prod (25), the every operating one of main shaft
Circle, sensor capture multiple points and measure.Meanwhile taking main shaft under each working speed using the metering of non-contact displacement (24)
Movement, these measurement results are transported to signal acquisition and processing apparatus (23) and are handled, remove prod form error and
Installation error obtains the turn error signal of main shaft, and motion profile is recorded in the form of polar.The aerostatic bearing
Structure has the function of reducing air film micro-vibration.
Compared with prior art, the invention has the following advantages that
Present invention is mainly applied to accurate ultra air-flotation workbench, are made the present invention relates to a kind of using double-layer porous material
For the aerostatic bearing structure of porous restriction device, the structure is using graphite porous material as Porous matrix, porous material
Its own is expected with irregular capillary porosity three-dimensional structure, and spatially the capillary porosity structure of countless complexity is on certain node
It is interconnected and is separated, so that air-flow is more steady by porous material flowing, destroys large scale eddy knot
The formation condition of structure can greatly weaken the cyclone phenomenon of air film generation, reduce air film micro-vibration.
However, static air pressure porous bearing is easy to be easily deformed by the areola in porous material, cause main shaft micro-
Vibration, forming surface limiting layer on a support surface effectively can inhibit material to deform, to improve the movement essence of workbench
Degree.In addition, bearing arrangement of the invention is versatile, foundation is provided to improve machining accuracy in practical machine tooling.
Detailed description of the invention
Fig. 1 is double-layer porous matter the Aerostatic Spindle system structure.
Fig. 2 is the porous radial bearing working schematic diagram of static air pressure.
Fig. 3 is the porous transverse bearing top view of static air pressure.
Fig. 4 is spindle rotation error measuring device.
Fig. 5 is turn error measurement result, wherein (a) is turn error measurement result before improving, and (b) is to return after improving
Turn error measurement.
Specific embodiment
To make the purpose of the present invention and technical solution definitely, below in conjunction with attached drawing to the working principle of the invention, knot
Structure and specific embodiment are further described.
Fig. 1 is double-layer porous matter the Aerostatic Spindle system structure.The gas that the cleaning of certain pressure is dry passes through air inlet
Hole flows into double-layer porous material after (9), flows into upper thrust plate (1), lower thrust plate (5) and main shaft through double-layer porous material surface
(11) air film (2) are formed between, make main shaft (11) that the rotation of less friction may be implemented.Big flying disc is fixed on the bottom of main shaft
Lower thrust plate (5) on, diamond cutter (6) is fixed on cutterhead, as the rotation of main shaft (11) is to the work on workbench (8)
Part (7) is cut.
Fig. 2 is the porous radial bearing working schematic diagram of static air pressure.Environmental gas enters air compressor (15) and is formed afterwards
Compressed gas with initial pressure then enters drier (17), air accumulator (18), coarse filter by intake valve (16)
(19), the gas supply gas that flow control valve (20), fine filter (21) are dried, clean and humidity is suitable, passes through air inlet (9)
Into transverse bearing (4) and thrust bearing (10), enters bearing clearance via double-layer porous material, finally flowed by bearing end
In external environment.
Fig. 1 is double-layer porous matter the Aerostatic Spindle system structure, and the aerostatic bearing in the structure is using double-deck more
Porous materials are as porous restriction device, which uses graphite porous material as Porous matrix (14), in the table of porous graphite
Epoxy adhesive is smeared on face, and is formed with less than the infiltrative Porous compacted zone (13) of Porous matrix (14).By more
The gas that Porous materials surface millions of holes clearance flow goes out forms between upper thrust plate (1), lower thrust plate (5) and main shaft (11) and stablizes
Air film (2), main shaft (11) system is lubricated.Fig. 3 is the porous transverse bearing top view of static air pressure.
Turn error experiment is carried out to the aerostatic bearing structure of the reduction air film micro-vibration, Fig. 4 is main shaft gyration mistake
Test bearing is press-fitted into axle sleeve by difference measuring device.Vibration measurement experiment needs to carry out displacement sensor (24) before carrying out
Installation and zeroing operation with canonical measure stick (25), specific operation process are as follows: be first mounted on high precision measurement stick (25)
On main shaft (11), when installation, is fixed by the scroll chuck on main shaft (11) rotary table, to guarantee prod
(25) with the concentricity of main shaft (11) central axis；Then two displacement sensors (24) are fixed on by prod by mounting rack
(25) in the same cross section of top measurement spherical surface, make 90 ° of the two difference and apart from spherical surface about 1cm；By in observation display screen
The display distance of displacement sensor (24), slow movable sensor is in ± 2 μ ms.
After air compressor (15), which provide, stablizes gas supply, operation the Aerostatic Spindle (11) carries out vibration-testing.At this point,
The high precision measurement stick (25) being mounted on main shaft rotates together with main shaft (11), two around prod contactless displacement
Sensor (24) can accurately measure the various change in displacement of prod (25), and the every fortune of main shaft turns around, and sensor captures multiple
Point measures.Meanwhile movement of the main shaft under each working speed, these measurement results are taken using the metering of non-contact displacement (24)
It is transported to signal acquisition and processing apparatus (23) to be handled, removes the form error and installation error of prod, obtain main shaft
Turn error signal, and in the form of polar record motion profile.
Fig. 5 is turn error measurement result, wherein (a) is turn error measurement result before improving, and (b) is to return after improving
Turn error measurement.As can be seen that double-layer porous material is used the turn error of main shaft can be made to have as porous restriction device
It is reduced.Double-layer porous matter flow controller makes to supply area increase since numerous small holes are distributed in porous material surface, and supplies face
Long-pending increasing is so that the pressure distribution inside air film is more uniform, the neighbouring no pressure spike and to be less prone to air film micro- of throttle orifice
Oscillation phenomenon, and double-layer porous matter flow controller has the advantages that stability is high, further improves the application precision of hydrostatic bearing
With the machining accuracy of air-flotation workbench.
Claims (9)
1. a kind of aerostatic bearing structure for reducing air film micro-vibration, it is characterised in that: the aerostatic bearing structure uses
Graphite porous material smears epoxy adhesive as Porous matrix (14) on the surface of porous graphite, and is formed with small
In the infiltrative Porous compacted zone (13) of Porous matrix (14), porous restriction device is formed to reach and weakens air film micro-vibration
Purpose；By the Aerostatic Spindle Radial mixing testing experiment, this structure keeps gas flowing steady, reduces gas stream
Speed weakens the cyclone phenomenon of gas, makes main shaft (11) smooth running.
2. a kind of aerostatic bearing structure for reducing air film micro-vibration according to claim 1, it is characterised in that: the sky
Gas static pressure bearing structure includes upper thrust plate (1), air film (2), axle sleeve (3), transverse bearing (4), lower thrust plate (5), diamond
Cutter (6), workpiece (7), workbench (8), air inlet (9), thrust bearing (10), main shaft (11), air cavity (12), Porous are fine and close
Layer (13) and Porous matrix (14)；Main shaft (11) rotates under radial direction and the support of thrust direction aerostatic bearing, big to fly
Cutterhead is fixed on the lower thrust plate (5) of the bottom of main shaft, and diamond cutter (6) is fixed on cutterhead, with main shaft (11)
Workpiece (7) is cut in rotation；Aerostatic bearing structure is in transverse bearing (4) and thrust bearing (10) using double-deck more
For Porous materials as porous restriction device, Porous matrix (14) uses graphite porous material, and is made on a support surface with small
In the infiltrative Porous compacted zone (13) of Porous matrix (14)；The gas that the cleaning of certain pressure is dry passes through air inlet
(9) double-layer porous material is flowed into after, flows into upper thrust plate (1), lower thrust plate (5) and main shaft (11) through double-layer porous material surface
Between；Gas flows through double-layer porous material, since porous material itself has irregular capillary porosity three-dimensional structure, millions of holes
The gas that clearance flow goes out makes gas flowing more steady, destroys the formation condition of large-scale vortex structure, reaches and inhibits air film wave
It is dynamic, reduce air film micro-vibration.
3. a kind of aerostatic bearing structure for reducing air film micro-vibration according to claim 1, it is characterised in that: to this
Aerostatic bearing structure carries out turn error experiment, and test bearing is press-fitted into axle sleeve；Before vibration measurement experiment carries out
Need to carry out the installation and zeroing operation of displacement sensor (24) and canonical measure stick (25), to guarantee that measurement result is accurate；When
After air compressor (15) provides stable gas supply, operation the Aerostatic Spindle (11) carries out vibration-testing；At this point, being mounted on main shaft
On high precision measurement stick (25) rotated together with main shaft (11), two around prod non-contact displacement transducer (24)
The various change in displacement of prod (25) can be accurately measured, the every fortune of main shaft turns around, and sensor captures multiple points and measures；
Meanwhile movement of the main shaft under each working speed is taken using the metering of non-contact displacement (24), these measurement results are transported to letter
Number acquisition processing device (23) is handled, and is removed the form error and installation error of prod, is obtained the turn error of main shaft
Signal, and motion profile is recorded in the form of polar.
4. a kind of aerostatic bearing structure for reducing air film micro-vibration according to claim 1, it is characterised in that: certain
The dry gas of the cleaning of pressure is flowed by flowing into double-layer porous material after air inlet (9) through double-layer porous material surface
Air film (2) are formed between thrust plate (1), lower thrust plate (5) and main shaft (11), main shaft (11) is made to realize the rotation of less friction；
On the lower thrust plate (5) for the bottom that big flying disc is fixed on main shaft, diamond cutter (6) is fixed on cutterhead, with main shaft
(11) workpiece (7) on workbench (8) is cut in rotation.
5. a kind of aerostatic bearing structure for reducing air film micro-vibration according to claim 1, it is characterised in that: environment
Gas enters air compressor (15) and forms the compressed gas with initial pressure afterwards, then enters drying by intake valve (16)
Device (17), air accumulator (18), coarse filter (19), flow control valve (20), fine filter (21) are dried, clean and humidity is suitable for
Gas supply gas, by air inlet (9) enter transverse bearing (4) and thrust bearing (10), enter axis via double-layer porous material
Gap is held, is finally flowed into external environment by bearing end.
6. a kind of aerostatic bearing structure for reducing air film micro-vibration according to claim 1, it is characterised in that: more
Epoxy adhesive is smeared on the surface of hole graphite, and is formed with less than the infiltrative Porous compacted zone of Porous matrix (14)
(13)。
7. a kind of aerostatic bearing structure for reducing air film micro-vibration according to claim 2, it is characterised in that: by more
The gas that Porous materials surface millions of holes clearance flow goes out forms between upper thrust plate (1), lower thrust plate (5) and main shaft (11) and stablizes
Air film (2), main shaft (11) system is lubricated.
8. a kind of aerostatic bearing structure for reducing air film micro-vibration according to claim 1, it is characterised in that: vibration
Measurement experiment needs to carry out the installation and zeroing operation of displacement sensor (24) and canonical measure stick (25) before carrying out, specific to grasp
Make process are as follows: high precision measurement stick (25) is mounted on main shaft (11) first, passes through main shaft (11) rotary table when installation
On scroll chuck be fixed, to guarantee the concentricity of prod (25) Yu main shaft (11) central axis；Then pass through installation
Two displacement sensors (24) are fixed at the top of prod (25) in the same cross section of measurement spherical surface by frame, differ the two
90 ° and apart from spherical surface about 1cm；By the display distance of displacement sensor (24) in observation display screen, slow movable sensor is extremely
In ± 2 μ ms.
9. a kind of aerostatic bearing structure for reducing air film micro-vibration according to claim 5, it is characterised in that: work as sky
After air compressor (15) provides stable gas supply, operation the Aerostatic Spindle (11) carries out vibration-testing；At this point, being mounted on main shaft
High precision measurement stick (25) rotated together with main shaft (11), two around prod non-contact displacement transducer (24) can
The various change in displacement of prod (25) are accurately measured, the every fortune of main shaft turns around, and sensor captures multiple points and measures；Together
When, movement of the main shaft under each working speed is taken using the metering of non-contact displacement (24), these measurement results are transported to signal
Acquisition processing device (23) is handled, and the form error and installation error of prod are removed, and obtains the turn error letter of main shaft
Number, and motion profile is recorded in the form of polar.
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| CN201910242153.XA CN109882506A (en) | 2019-03-28 | 2019-03-28 | A kind of aerostatic bearing structure reducing air film micro-vibration |
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| CN201910242153.XA CN109882506A (en) | 2019-03-28 | 2019-03-28 | A kind of aerostatic bearing structure reducing air film micro-vibration |
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| CN201910242153.XA Pending CN109882506A (en) | 2019-03-28 | 2019-03-28 | A kind of aerostatic bearing structure reducing air film micro-vibration |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110276136A (en) * | 2019-06-25 | 2019-09-24 | 江苏集萃精凯高端装备技术有限公司 | A kind of thrust plate, thrust plate design method and aerostatic bearing |
| CN110695380A (en) * | 2019-11-16 | 2020-01-17 | 洛阳传顺机械设备有限公司 | Ultrasonic wave air static pressure electricity main shaft |
| CN111076932A (en) * | 2020-01-07 | 2020-04-28 | 江苏集萃精凯高端装备技术有限公司 | Test system and test method for aerostatic bearing |
| CN113124055A (en) * | 2021-04-27 | 2021-07-16 | 北京工业大学 | Air-float thrust bearing based on radial dense-bead adsorption |
| CN113124056A (en) * | 2021-04-27 | 2021-07-16 | 北京工业大学 | Air-float thrust bearing based on axial dense-bead adsorption |
| CN113251075A (en) * | 2021-06-24 | 2021-08-13 | 西北农林科技大学 | Static pressure gas radial bearing with elastic wave foil support |
| CN113635084A (en) * | 2021-08-25 | 2021-11-12 | 中国工程物理研究院机械制造工艺研究所 | Air-float rotary table |
| CN114746659A (en) * | 2019-12-07 | 2022-07-12 | 雅科贝思私人有限公司 | Ultralow-profile aerostatic bearing and manufacturing method thereof |
| CN115111266A (en) * | 2022-06-24 | 2022-09-27 | 哈尔滨工业大学（威海） | Multi-embedded point type porous aerostatic bearing |
| CN117086655A (en) * | 2023-10-19 | 2023-11-21 | 无锡星微科技有限公司杭州分公司 | High-precision microminiature air static pressure air floatation turntable |
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| CN110276136A (en) * | 2019-06-25 | 2019-09-24 | 江苏集萃精凯高端装备技术有限公司 | A kind of thrust plate, thrust plate design method and aerostatic bearing |
| CN110695380A (en) * | 2019-11-16 | 2020-01-17 | 洛阳传顺机械设备有限公司 | Ultrasonic wave air static pressure electricity main shaft |
| CN110695380B (en) * | 2019-11-16 | 2024-04-19 | 洛阳传顺机械设备有限公司 | Ultrasonic air static pressure motorized spindle |
| CN114746659A (en) * | 2019-12-07 | 2022-07-12 | 雅科贝思私人有限公司 | Ultralow-profile aerostatic bearing and manufacturing method thereof |
| CN114746659B (en) * | 2019-12-07 | 2024-05-24 | 雅科贝思私人有限公司 | Ultra-low profile aerostatic bearing and manufacturing method thereof |
| CN111076932A (en) * | 2020-01-07 | 2020-04-28 | 江苏集萃精凯高端装备技术有限公司 | Test system and test method for aerostatic bearing |
| CN113124055B (en) * | 2021-04-27 | 2023-03-14 | 北京工业大学 | Air-float thrust bearing based on radial dense-bead adsorption |
| CN113124056A (en) * | 2021-04-27 | 2021-07-16 | 北京工业大学 | Air-float thrust bearing based on axial dense-bead adsorption |
| CN113124055A (en) * | 2021-04-27 | 2021-07-16 | 北京工业大学 | Air-float thrust bearing based on radial dense-bead adsorption |
| CN113251075A (en) * | 2021-06-24 | 2021-08-13 | 西北农林科技大学 | Static pressure gas radial bearing with elastic wave foil support |
| CN113635084A (en) * | 2021-08-25 | 2021-11-12 | 中国工程物理研究院机械制造工艺研究所 | Air-float rotary table |
| CN115111266A (en) * | 2022-06-24 | 2022-09-27 | 哈尔滨工业大学（威海） | Multi-embedded point type porous aerostatic bearing |
| CN115111266B (en) * | 2022-06-24 | 2024-02-23 | 哈尔滨工业大学（威海） | Multi-embedded point type porous gas hydrostatic bearing |
| CN117086655A (en) * | 2023-10-19 | 2023-11-21 | 无锡星微科技有限公司杭州分公司 | High-precision microminiature air static pressure air floatation turntable |
| CN117086655B (en) * | 2023-10-19 | 2024-01-19 | 无锡星微科技有限公司杭州分公司 | High-precision microminiature air static pressure air floatation turntable |
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Application publication date: 20190614 |