CN205096971U - Numerical control polycrystalline silicon plane chamfer all -in -one - Google Patents
Numerical control polycrystalline silicon plane chamfer all -in -one Download PDFInfo
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Abstract
Description
技术领域 technical field
本实用新型涉及数控机床自动化领域,具体为一种数控多晶硅平面倒角一体机。 The utility model relates to the field of CNC machine tool automation, in particular to a CNC polysilicon plane chamfering integrated machine.
背景技术 Background technique
光伏行业历经短暂的低迷后,随着国家对该行业的宏观调控和国外对我国政策的放宽,太阳能发电对单、多晶硅的要求量增大,同时对设备供应商也提出更高要求,其中节能减材、提高生产效率及产品成品率成为重中之重的大事。在多晶硅的加工过程中为了消除工件表面裂纹,减少内应力,提高成品率,必须对硅块表面及倒角或R角进行磨削处理。现有国内外设备在磨削加工中,工艺繁琐,在完成硅块表面及倒角磨削加工时,需通过两种不同的设备及四次装夹工件来完成,费时费力,更会由于多次装夹产生定位误差,从而磨削的尺寸精度及形状误差得不到保障,严重影响(单晶、多晶)硅块切片的成品率。 After the short-term downturn in the photovoltaic industry, with the national macro-control of the industry and the relaxation of foreign policies on my country, the demand for mono- and polysilicon in solar power generation has increased, and higher requirements have been placed on equipment suppliers. Among them, energy-saving Reducing materials, improving production efficiency and product yield have become the most important issues. During the processing of polysilicon, in order to eliminate cracks on the surface of the workpiece, reduce internal stress, and increase yield, the surface of the silicon block and the chamfer or R angle must be ground. The grinding process of the existing domestic and foreign equipment is cumbersome. When completing the grinding process of the surface of the silicon block and the chamfering, it needs to be completed by two different equipment and four times of clamping the workpiece, which is time-consuming and labor-intensive. Secondary clamping produces positioning errors, so the dimensional accuracy and shape errors of grinding cannot be guaranteed, which seriously affects the yield of (single crystal, polycrystalline) silicon block slices.
发明内容 Contents of the invention
针对上述问题,本实用新型提供了一种数控多晶硅平面倒角一体机,其通过一次装夹依次完成硅块表面及其倒角(或R角)的磨削,提高硅块加工质量及加工效率。 In view of the above problems, the utility model provides a CNC polysilicon plane chamfering integrated machine, which completes the grinding of the surface of the silicon block and its chamfer (or R angle) through one clamping, and improves the processing quality and efficiency of the silicon block. .
其技术方案是这样的:一种数控多晶硅平面倒角一体机,其特征在于:其包括床身、所述床身上设置有立柱框架,所述床身一端对应所述立柱框架下设置有进料装置,工作台通过第一直线导轨和第一滚轴丝杆连接所述立柱框架,所述床身上对应所述工作台设置有拖板,所述拖板通过第二直线导轨和第二滚轴丝杆连接所述床身,所述拖板上设置有磨削装置,所述工作台上设置有工件夹紧装置,所述工件夹紧装置包括工件支撑座和工件夹紧座,所述工件支撑座上设置有工件支撑头,所述工件支撑头连接驱动装置,所述工件夹紧座通过第三导轨和第三滚轴丝杆连接所述工作台所述工件夹紧座上设置有工件夹紧头,所述工件夹紧头与所述工件夹紧座旋转连接。 Its technical solution is as follows: a CNC polysilicon plane chamfering integrated machine, characterized in that it includes a bed, a column frame is arranged on the bed, and a feeding material is arranged under the column frame corresponding to one end of the bed device, the workbench is connected to the column frame through the first linear guide rail and the first roller screw, and a carriage is provided on the bed corresponding to the workbench, and the carriage passes through the second linear guide rail and the second roller The shaft screw is connected to the bed, the carriage is provided with a grinding device, and the workbench is provided with a workpiece clamping device, and the workpiece clamping device includes a workpiece support seat and a workpiece clamping seat. A workpiece support head is provided on the workpiece support seat, the workpiece support head is connected to the driving device, and the workpiece clamping seat is connected to the workbench through the third guide rail and the third roller screw. The workpiece clamping seat is provided with The workpiece clamping head is rotatably connected with the workpiece clamping seat.
其进一步特征在于:所述床身上对应所述工作台两侧分别设置有两个所述拖板;至少一侧的一个所述拖板上设置有测量装置; It is further characterized in that: two carriages are arranged on the bed corresponding to both sides of the workbench; at least one carriage on one side is provided with a measuring device;
所述第一滚轴丝杆通过两端的支撑座支撑,伺服电机连接所述工作台,所述工作台通过轴套连接所述第一滚轴丝杆,所述伺服电机通过同步带连接所述轴套; The first roller screw is supported by support seats at both ends, the servo motor is connected to the workbench, the worktable is connected to the first roller screw through a bushing, and the servo motor is connected to the workbench through a synchronous belt. bushing;
所述磨削装置包括砂轮架,所述砂轮架设置在所述拖板上,所述砂轮架内设置有砂轮主轴,所述砂轮主轴一端连接金刚石砂轮,所述砂轮主轴一端连接砂轮电机; The grinding device includes a grinding wheel frame, the grinding wheel frame is arranged on the carriage, a grinding wheel spindle is arranged in the grinding wheel frame, one end of the grinding wheel spindle is connected to a diamond grinding wheel, and one end of the grinding wheel spindle is connected to a grinding wheel motor;
所述进料装置包括滑板,所述滑板通过第四直线导轨和第四滚轴丝杆连接所述床身,所述滑板上设置有横向夹紧定位装置; The feeding device includes a slide plate, the slide plate is connected to the bed through the fourth linear guide rail and the fourth roller screw, and the slide plate is provided with a lateral clamping and positioning device;
所述床身上对应所述进料装置一端设置有对中装置。 A centering device is provided on the bed corresponding to one end of the feeding device.
本实用新型的上述结构中,工件夹紧装置包括工件支撑座和工件夹紧座,工件支撑座上设置有工件支撑头,由于工件支撑头连接驱动装置,工件夹紧头与工件夹紧座旋转连接,工件在夹紧装置中夹紧后,通过驱动装置带动工件支撑头连同工件旋转,通过旋转的角度,一次装夹依次完成硅块表面及其倒角或R角的磨削,从而为硅块加工的操作带来便捷,降低了劳动强度,缩短了辅助时间,提高硅块加工质量及加工效率。 In the above structure of the utility model, the workpiece clamping device includes a workpiece support seat and a workpiece clamping seat, and a workpiece support head is arranged on the workpiece support seat. Since the workpiece support head is connected to the driving device, the workpiece clamping head and the workpiece clamping seat rotate Connection, after the workpiece is clamped in the clamping device, the driving device drives the workpiece support head to rotate together with the workpiece. Through the angle of rotation, the surface of the silicon block and its chamfer or R angle are ground in sequence in one clamping, so that the silicon block The operation of block processing brings convenience, reduces labor intensity, shortens auxiliary time, and improves the quality and efficiency of silicon block processing.
附图说明 Description of drawings
图1为本实用新型主视图示意图; Fig. 1 is a schematic diagram of the front view of the utility model;
图2为本图1的侧视图。 FIG. 2 is a side view of FIG. 1 .
具体实施方式: detailed description:
见图1、图2,一种数控多晶硅平面倒角一体机,其包括床身1、床身1上设置有立柱框架2,床身1一端对应立柱框架2下设置有进料装置9,工作台3通过第一直线导轨26和第一滚轴丝杆27连接立柱框架2,第一滚轴丝杆27通过两端的支撑座28支撑,伺服电机30连接工作台3,工作台3通过轴套29连接第一滚轴丝杆27,伺服电机30通过同步带32连接轴套29,床身1上对应工作台3两侧分别设置有两个拖板10,拖板10通过第二直线导轨21和第二滚轴丝杆22连接床身1,拖板10上设置有磨削装置13,磨削装置13包括砂轮架11,砂轮架11设置在拖板10上,砂轮架11内设置有砂轮主轴4,砂轮主轴4一端连接金刚石砂轮12,砂轮主轴4另一端连接砂轮电机36,工作台3上设置有工件夹紧装置5,工件夹紧装置5包括工件支撑座37和工件夹紧座38,工件支撑座37上设置有工件支撑头39,工件支撑头39连接驱动装置,工件夹紧座38通过第三导轨33和第三滚轴丝杆34连接工作台3,第三滚轴丝杆34连接伺服电机35,工件夹紧座38上设置有工件夹紧头41,工件夹紧头41与工件夹紧座38旋转连接。 See Fig. 1 and Fig. 2, a CNC polysilicon plane chamfering integrated machine, which includes a bed 1, a column frame 2 is arranged on the bed 1, and a feeding device 9 is arranged under the column frame 2 at one end of the bed 1, and the working The table 3 is connected to the column frame 2 through the first linear guide rail 26 and the first roller screw 27, the first roller screw 27 is supported by the support seats 28 at both ends, the servo motor 30 is connected to the workbench 3, and the workbench 3 passes through the axis The sleeve 29 is connected to the first roller screw 27, the servo motor 30 is connected to the shaft sleeve 29 through the synchronous belt 32, two carriages 10 are respectively arranged on the two sides of the corresponding workbench 3 on the bed 1, and the carriage 10 passes through the second linear guide rail 21 and the second roller screw rod 22 are connected to the bed 1, and the carriage 10 is provided with a grinding device 13, the grinding device 13 includes a grinding wheel frame 11, and the grinding wheel frame 11 is arranged on the carriage 10, and the grinding wheel frame 11 is provided with Grinding wheel spindle 4, one end of the grinding wheel spindle 4 is connected to the diamond grinding wheel 12, the other end of the grinding wheel spindle 4 is connected to the grinding wheel motor 36, the workbench 3 is provided with a workpiece clamping device 5, and the workpiece clamping device 5 includes a workpiece support seat 37 and a workpiece clamping seat 38, the workpiece support seat 37 is provided with a workpiece support head 39, the workpiece support head 39 is connected to the driving device, the workpiece clamping seat 38 is connected to the workbench 3 through the third guide rail 33 and the third roller screw rod 34, and the third roller screw The rod 34 is connected to the servo motor 35 , the workpiece clamping head 41 is arranged on the workpiece clamping seat 38 , and the workpiece clamping head 41 is connected to the workpiece clamping seat 38 in rotation.
至少一侧的一个拖板10上设置有测量装置8,测量装置8通过支架24安装在拖板10的侧面,通过测量工件25和四个金刚石砂轮12分配各面的磨削量,包括粗磨余量,精磨余量。 At least one carriage 10 on one side is provided with a measuring device 8, the measuring device 8 is installed on the side of the carriage 10 through a bracket 24, and distributes the grinding amount of each surface by measuring the workpiece 25 and four diamond grinding wheels 12, including rough grinding Surplus, fine grinding surplus.
进料装置9包括滑板16,滑板16通过直线导轨连接底板42,底板42连接床身1,滑板16通过第四直线导轨14和第四滚轴丝杆15连接底板42,滑板16上设置有横向夹紧定位装置7,通过安装在电机板17上的伺服电机18驱动,由同步带轮19及同步带20传动带动滚轴丝杆19运动,滑板16带动横向夹紧定位装置7纵向运动,实现了纵向送料。 The feeding device 9 includes a slide plate 16, the slide plate 16 is connected to the base plate 42 through a linear guide rail, the base plate 42 is connected to the bed 1, the slide plate 16 is connected to the base plate 42 through the fourth linear guide rail 14 and the fourth roller screw 15, and the slide plate 16 is provided with a transverse The clamping and positioning device 7 is driven by the servo motor 18 installed on the motor plate 17, driven by the synchronous pulley 19 and the synchronous belt 20 to drive the roller screw 19 to move, and the slide plate 16 drives the transverse clamping and positioning device 7 to move longitudinally, realizing Vertical feed.
床身1上对应进料机构9一端设置有对中装置6,实现了送料时的对中,保证了送料位置的精准。 A centering device 6 is provided on the bed 1 corresponding to the end of the feeding mechanism 9, which realizes the centering during feeding and ensures the accuracy of the feeding position.
拖板10安装于床身1左右各两个,拖板10通过直线导轨21、滚珠丝杠22安装于床身1上,且通过伺服电机23直接驱动。拖板10上安装有砂轮架11、金刚石砂轮12、测量机构8,金刚石砂轮12分别套装于砂轮主轴的输出端上。测量机构8通过支架24安装在拖板10的侧面,通过测量工件25,分配各面的磨削量,包括粗磨余量,精磨余量。 Two carriages 10 are installed on the bed 1 on the left and right, and the carriages 10 are installed on the bed 1 through linear guide rails 21 and ball screws 22 , and are directly driven by a servo motor 23 . A grinding wheel frame 11, a diamond grinding wheel 12, and a measuring mechanism 8 are installed on the carriage 10, and the diamond grinding wheel 12 is respectively set on the output end of the grinding wheel spindle. The measuring mechanism 8 is installed on the side of the carriage 10 through the bracket 24, and by measuring the workpiece 25, it distributes the grinding amount of each surface, including rough grinding allowance and fine grinding allowance.
下面结合附图来说明本实用新型的工作原理: The working principle of the present utility model is described below in conjunction with accompanying drawing:
见图1、图2,工作台3通过第一直线导轨26和第一滚轴丝杆27横向运动至立柱框架2内对应横向夹紧定位装置7一端,工件25放置在横向夹紧定位装置7上,通过滑板16送入立柱框架2内工作台3下端,同时通过对中装置6实现工件的定位对中,工作台3工件夹紧装置5对工件25进行夹紧固定,工作台3通过第一直线导轨26和第一滚轴丝杆27横向运动至立柱框架2内对应磨削装置13位置,床身两侧的四个磨削装置13通过拖板10运动到对应工件25的位置对工件进行磨削,同时通过驱动装置带动工件支撑头39旋转带动工件25回转,实现了工件不同角度的磨削,通过伺服电机缓慢转动工件转动45°磨削倒角(R角)转动90°磨削平面,实现一次装夹依次完成硅块表面及其倒角或R角的磨削,从而为硅块加工的操作带来便捷,降低了劳动强度,缩短了辅助时间,提高硅块加工质量及加工效率。 See Figure 1 and Figure 2, the workbench 3 moves laterally through the first linear guide rail 26 and the first roller screw 27 to one end of the corresponding lateral clamping and positioning device 7 in the column frame 2, and the workpiece 25 is placed on the lateral clamping and positioning device 7, the slide plate 16 is sent to the lower end of the workbench 3 in the column frame 2, and at the same time, the positioning and centering of the workpiece is realized through the centering device 6. The first linear guide rail 26 and the first roller screw 27 move laterally to the position corresponding to the grinding device 13 in the column frame 2, and the four grinding devices 13 on both sides of the bed move to the position corresponding to the workpiece 25 through the carriage 10 The workpiece is ground, and the workpiece support head 39 is driven by the driving device to rotate and the workpiece 25 is rotated to realize the grinding of the workpiece at different angles. The servo motor slowly rotates the workpiece to rotate 45° and the grinding chamfer (R angle) rotates 90° Grinding the plane, realizing the grinding of the surface of the silicon block and its chamfer or R angle in one clamping, which brings convenience to the operation of silicon block processing, reduces labor intensity, shortens auxiliary time, and improves the processing quality of silicon block and processing efficiency.
本实用新型通过八轴数控技术的应用,使机床在整个磨削过程中,由西门子PLC可编程逻辑控制器控制八根数控轴(其中四根数控轴分别控制四个磨头(金刚石砂轮)的进给,一根数控轴控制工作台的移动,一根数控轴控制工件的对中伺服轴40,一根数控轴控制工件的回转,一根数控轴控制进料机构),保证机床运行精准,平稳,同时工件对中的精确度也得到了保障,合理有效的提高了工作效率。 Through the application of eight-axis numerical control technology, the utility model enables the machine tool to control eight numerical control axes (four numerical control axes respectively control four grinding heads (diamond grinding wheels)) by Siemens PLC programmable logic controller in the whole grinding process. Feed, one CNC axis controls the movement of the worktable, one CNC axis controls the centering servo axis 40 of the workpiece, one CNC axis controls the rotation of the workpiece, and one CNC axis controls the feeding mechanism), to ensure the machine tool runs accurately, It is stable, and at the same time, the accuracy of workpiece alignment is also guaranteed, which improves work efficiency reasonably and effectively.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520634854.5U CN205096971U (en) | 2015-08-21 | 2015-08-21 | Numerical control polycrystalline silicon plane chamfer all -in -one |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108000323A (en) * | 2017-12-13 | 2018-05-08 | 无锡上机数控股份有限公司 | A kind of round as a ball all-in-one machine of numerical control grinding surface chamfer |
| CN109877670A (en) * | 2019-04-16 | 2019-06-14 | 江苏协鑫硅材料科技发展有限公司 | A fully automatic silicon ingot chamfering equipment |
| CN115742046A (en) * | 2022-12-22 | 2023-03-07 | 浙江晶盛机电股份有限公司 | Crystal bar cutting and grinding system |
-
2015
- 2015-08-21 CN CN201520634854.5U patent/CN205096971U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108000323A (en) * | 2017-12-13 | 2018-05-08 | 无锡上机数控股份有限公司 | A kind of round as a ball all-in-one machine of numerical control grinding surface chamfer |
| CN108000323B (en) * | 2017-12-13 | 2024-04-26 | 无锡上机数控股份有限公司 | Numerical control face grinding chamfering and rounding integrated machine |
| CN109877670A (en) * | 2019-04-16 | 2019-06-14 | 江苏协鑫硅材料科技发展有限公司 | A fully automatic silicon ingot chamfering equipment |
| CN115742046A (en) * | 2022-12-22 | 2023-03-07 | 浙江晶盛机电股份有限公司 | Crystal bar cutting and grinding system |
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Address after: No. 158, Nanhu Middle Road, Xuelang street, Binhu District, Wuxi City, Jiangsu Province Patentee after: Hoyuan Green Energy Co.,Ltd. Address before: No. 158, Nanhu Middle Road, Xuelang street, Binhu District, Wuxi City, Jiangsu Province Patentee before: WUXI SHANGJI AUTOMATION Co.,Ltd. |
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Granted publication date: 20160323 |