CN205066685U - Take vertical interferometer of single width interference pattern processing capacity - Google Patents
Take vertical interferometer of single width interference pattern processing capacity Download PDFInfo
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- CN205066685U CN205066685U CN201520779633.7U CN201520779633U CN205066685U CN 205066685 U CN205066685 U CN 205066685U CN 201520779633 U CN201520779633 U CN 201520779633U CN 205066685 U CN205066685 U CN 205066685U
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Abstract
The utility model discloses a vertical interferometer that has single width interference pattern processing capacity, including the interferometer host computer, digital camera, FPGA data processing board and display, FPGA data processing board from the interference pattern data of the quilt survey part phase place of digital camera receipt, output interference pattern data and phase information to display. The utility model discloses utilize FPGA to implement two -dimentional FFT method and draw the phase information that the single width interference pattern contains fast, a face type of the measured piece is provided, wavefront aberration etc, and further utilize the radius to measure the radius of grating module precision measurement sphere component, realize useeing of function through brake valve lever, small size, and convenient for operation, can make the on -the -spot workman of processing obtain the processing circumstances of part fast, improve on -the -spot measurement accuracy, the measuring time is shortened, thereby improve the precision and the efficiency of photoprocess.
Description
Technical field
The utility model belongs to optical instrument checkout equipment technical field, is specifically related to a kind of vertical dry interferometer, is particularly with the vertical dry interferometer of single width fringe-pattern analysis function.
Background technology
Along with the development of science and technology, people are more and more higher for the accuracy requirement of optical element in-process measurement, such as aperture, face type, radius etc.The measuring accuracy of these DATA REASONING directly affects the level of optical manufacturing, to measuring speed and the efficiency of this tittle, affects again the efficiency of processing conversely, so the in-site measurement of these processing capacities becomes current problem in the urgent need to address.
Traditional method is all use horizontal moving to measure separately as interferometer, but needs to take special measuring chamber from processing site, just extends process time after coming and going several times; Another kind of mode uses air supporting support to be vertically placed on processing site in order to measure optical element horizontal interferometer, but cost height enterprise, be unfavorable for applying.
The phase extraction principle of single width interferogram is the corrugated PHASE DISTRIBUTION that application Two-dimensional FFT method tries to achieve in interferogram, and Fig. 1 is the treatment scheme of single width interferogram phase extraction.Use Two-dimensional FFT method to extract measured value, only need can obtain measured to a width spatial carrier fringe pattern process, be applicable to analyzing the extraneous situation that there is disturbance, the mechanically stable keeping test macro need not be considered, and avoid the environmental factor such as disturbance of air.
Summary of the invention
Goal of the invention: the purpose of this utility model is to provide a kind of new vertical dry interferometer, instrument can make the workman of processing site obtain the processing situation of part fast, improves in-site measurement precision, shortens Measuring Time, improves precision and the efficiency of optical manufacturing with this.
Technical scheme: the technical solution adopted in the utility model is: a kind of vertical dry interferometer with single width fringe-pattern analysis function, comprise vertical dry interferometer main frame, digital camera and display, the measuring mechanism that described interferometer main frame comprises a upright guide rail and can move up and down along guide rail, also comprise FPGA data processing plate, described FPGA data processing plate is connected with digital camera and display respectively, the interferogram data of the tested part phase place that described FPGA data processing plate receives from digital camera, output interferogram data and phase information are to display.
As preferably, described digital camera is the digital camera based on FPGA, and described camera is integrated on FPGA data processing plate.
Further, vertical dry interferometer also comprises radius measurement grating module, and described radius measurement grating module comprises the grating scale be arranged on described guide rail and the grating scale digital display meter be connected with grating scale.
As preferably, the worktable of described interferometer main frame is provided with the support column of a vertical direction, and support column is provided with a platform, and described image display and grating scale digital display meter are positioned on described platform.
As preferably, the worktable of described interferometer main frame is provided with joystick, and described joystick is connected with FPGA data processing plate and grating scale respectively.
Principle of work: vertical dry interferometer main frame of the present utility model is the Feisuo interferometer main frame of a standard, comprises laser instrument, light path deflecting prism, aperture, beam expander part, energy adjustment part, aligning and optical path and handover module thereof.During measurement, tested part is positioned on the measuring mechanism of vertical dry interferometer main frame, collected by camera image, operator is by observation display epigraph, carry out aiming at, accurate adjustment makes FPGA data processing plate obtain the interferogram comprising tested part phase place, use joystick to start phase extraction process, and output to display for operator.
Beneficial effect: the algorithm that Two-dimensional FFT method is extracted single width interferogram phase information by the utility model is transplanted to FPGA, uses FPGA to realize calculating fast, the function of measuring chamber is moved on to field conduct.Realizing outside precise measuring circle and face type amount, also introduce the radius value that grating measuring length system measures tested part, and by most function i ntegration in FPGA module, triggered by handle button and perform, ensure execution and the stopping of each function, simplifying machine conditions and use difficulty, for in-site measurement provides powerful measure, providing more selection for improving machining precision.Make the workman of processing site obtain the processing situation of part fast, improve in-site measurement precision, shorten Measuring Time, thus improve precision and the efficiency of optical manufacturing.
Accompanying drawing explanation
Fig. 1 is the processing flow chart of existing single width interferogram phase extraction.
Fig. 2 is structural representation of the present utility model.
Fig. 3 is the electric connecting relation figure of the utility model parts.
In figure, 1: interferometer main frame, 2: the FPGA data processing plate comprising digital camera, 3: upright guide rail, 4: tested part, 5: grating scale, 6: display, 7: grating scale digital display meter, 8: support column, 9: platform, 10: joystick.
Embodiment
Below in conjunction with drawings and Examples, the utility model is further described.
A kind of vertical dry interferometer with single width fringe-pattern analysis function disclosed in the utility model embodiment, by integrated one block of FPGA data processing plate 2, make it possess to carry out interferogram continuation and Two-dimensional FFT conversion and try to achieve the ability of corrugated PHASE DISTRIBUTION, do not need to configure other PC main frame, there is volume little, integrated level high, can meet and detect optical element at processing site.As shown in Figures 2 and 3, the vertical dry interferometer of the present embodiment, mainly comprise interferometer main frame 1, comprise FPGA data processing plate 2 and the display 6 of digital camera, interferometer main frame 1 is provided with a upright guide rail 3 moved up and down for measuring mechanism, and tested part 4 is placed on measuring mechanism, and grating scale 5 is posted in the side of guide rail, be used for measure tested part 4 move up and down distance, reading is read by grating scale digital display meter 7.When conveniently adjusting, observe image and grating scale 5 reading, the support column 8 of a vertical direction is set at the worktable of interferometer main frame 1, support column 8 is established a platform 9, display 6 and grating scale digital display meter 7 are positioned on this platform 9, height is similar with the measuring mechanism of interferometer main frame 1, and handled easily person uses.
The camera of the present embodiment is the digital camera based on FPGA, is integrated on FPGA data processing plate 2, also can be provided separately, with FPGA plate data cube computation.Digital camera receives the interferogram of tested part 4, transfer data to FPGA data processing plate 2, FPGA data processing plate 2 is connected with display 6, view data is outputted to display 6 to show, use when receiving and extracting the signal of phase information Two-dimensional FFT method to extract single width interferogram phase information, and object information is also outputted to display 6 and show.
The vertical dry interferometer of the present embodiment, except the phase information utilizing the FPGA enforcement Two-dimensional FFT method rapid extraction single width interferogram be integrated in camera board to comprise, the face type of measured piece is provided, wave aberration etc., also be provided with radius measurement grating module to measure the radius value of measured lens, mainly comprise grating scale 5, grating scale digital display meter 7, combining image shows, position adjustment is carried out to measured lens, position (only having these two positions can form good interference fringe in interferometry) is accurately determined by the searching opal picture of measured lens and the way of image of spherical center, the distance of this two positions is read by grating scale, thus calculate the radius-of-curvature of lens.Measuring accuracy is 0.0001mm, can meet the measurement of below 500mm spherical mirror, and error precision is 0.001mm.
The data processing that measurement needs carry out and computing all realize based on FPGA program module, joystick 10 can be set on the worktable of interferometer main frame 1, joystick 10 can be connected with signals such as the control assemblies (as laser instrument) in FPGA data processing plate 2, grating scale 5, interferometer main frame 1, in FPGA or in interferometer main frame 1 difference in functionality is triggered by the different key on handle, for user provides it to want the different values measured, as functions such as Control Radius measurement, brightness adjustment, phase extraction analysis, switching aligning and Measure Channels.Through comparison test, the measuring error of vertical dry interferometer of the present utility model and existing horizontal phase-shifting interferometer is less than 1/100 λ, measures radius error and is less than 0.001mm.
The above is only preferred implementation of the present utility model; should be understood that; for those skilled in the art, under the prerequisite not departing from the utility model principle, the amendment done, replacement or improvement also should be considered as protection domain of the present utility model.
Claims (5)
1. the vertical dry interferometer with single width fringe-pattern analysis function, comprise vertical dry interferometer main frame, digital camera and display, the measuring mechanism that described interferometer main frame comprises a upright guide rail and can move up and down along guide rail, it is characterized in that, also comprise FPGA data processing plate, described FPGA data processing plate is connected with digital camera and display respectively, the interferogram data of the tested part phase place that described FPGA data processing plate receives from digital camera, output interferogram data and phase information are to display.
2. vertical dry interferometer according to claim 1, is characterized in that, described digital camera is the digital camera based on FPGA, and described camera is integrated on FPGA data processing plate.
3. vertical dry interferometer according to claim 1, is characterized in that, also comprises radius measurement grating module, and described radius measurement grating module comprises the grating scale be arranged on described guide rail and the grating scale digital display meter be connected with grating scale.
4. vertical dry interferometer according to claim 3, is characterized in that, the worktable of described interferometer main frame is provided with the support column of a vertical direction, and support column is provided with a platform, and described display and grating scale digital display meter are positioned on described platform.
5. vertical dry interferometer according to claim 3, is characterized in that, the worktable of described interferometer main frame is provided with joystick, and described joystick is connected with FPGA data processing plate and grating scale respectively.
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| CN201520779633.7U CN205066685U (en) | 2015-10-09 | 2015-10-09 | Take vertical interferometer of single width interference pattern processing capacity |
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| CN201520779633.7U CN205066685U (en) | 2015-10-09 | 2015-10-09 | Take vertical interferometer of single width interference pattern processing capacity |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110781604A (en) * | 2019-11-05 | 2020-02-11 | 桂林电子科技大学 | Interference pattern phase extraction PSM-IP core design method and system for improving CORDIC algorithm |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110781604A (en) * | 2019-11-05 | 2020-02-11 | 桂林电子科技大学 | Interference pattern phase extraction PSM-IP core design method and system for improving CORDIC algorithm |
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