CN204959079U - Pulling furnace - Google Patents
Pulling furnace Download PDFInfo
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- CN204959079U CN204959079U CN201520679139.3U CN201520679139U CN204959079U CN 204959079 U CN204959079 U CN 204959079U CN 201520679139 U CN201520679139 U CN 201520679139U CN 204959079 U CN204959079 U CN 204959079U
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- heating plate
- guide rod
- grate
- cooling fluid
- pulling furnace
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Abstract
The utility model relates to a semiconductor refrigeration production technical field's equipment is a pulling furnace, including the furnace frame, the guide rod that sets up about having on the furnace frame, the heating plate alternates on guide rod in addition, and elevating gear is being connected to the heating plate, heating plate the inside have the heating pipe, have to add on the furnace frame and hold adding of crystal bar and hold the part, heating plate, elevating gear be a plurality of, guide rod be the group's number that corresponds with the heating plate, every heating plate alternates respectively in a set of guide rod, an elevating gear is connected to every heating plate, the heating plate set up or planar array to the right side from a left side the furnace frame in the middle of, the heating plate below connect the cooler pan, have insulation material between heating plate and the cooler pan, the inside circulating pipe that has the coolant liquid of cooler pan, the conveyor of coolant liquid is connected to the circulating pipe of coolant liquid, advantage that such pulling furnace has the output height, can produce multiunit specification crystal bar.
Description
Technical field
The utility model relates to the equipment of semiconductor refrigeration member production technical field, particularly relates to crystal pulling furnace.
Background technology
Crystal grain is the parts manufacturing semiconductor refrigeration member, and the main component of crystal grain is three telluride two bismuths, and require that its molecular arrangement is neat as the crystal grain manufacturing cooling component, the molecular arrangement inside crystal grain is more neat, and the efficiency of cooling component is higher.
Crystal grain is formed by crystal bar cutting, and this just requires that the molecular arrangement inside crystal bar is neat.
When manufacturing crystal bar, the process arranged the molecule inside it is exactly crystal pulling, and crystal pulling is carried out in crystal pulling furnace.
There are the difference of fine temperature, velocity contrast, speed of cooling difference can produce the crystal bar of different size in crystal pulling, meet the needs of production different model semiconductor refrigeration member.
Crystal pulling furnace has grate, grate has guide rod setting up and down, heating plate is also had to intert on guide rod, heating plate is connected to lifting device, and lifting device runs the lifting that can realize heating plate, has bottoming hole in the middle of heating plate, grate has the blessing parts accommodating crystal bar, accommodate parts to arrange at the above and below grate of bottoming hole, such crystal bar, just through bottoming hole, moves up and down heating plate and just can carry out crystal pulling to the crystal bar vertically arranged; In prior art, a crystal pulling furnace only has one group of guide rod and a heating plate, an interspersed heating plate on this group guide rod, it has the shortcoming yielded poorly, and in addition, it can not produce the crystal bar of plurality of specifications, can not meet the requirement that some are produced.
Summary of the invention
The purpose of this utility model is exactly for above-mentioned shortcoming, provides the crystal pulling furnace that a kind of output is high, can produce many group specifications.
The technical solution of the utility model is achieved in that a kind of crystal pulling furnace, comprise grate, grate has guide rod setting up and down, heating plate is also had to intert on guide rod, heating plate is connected to lifting device, heating tube is had inside described heating plate, lifting device runs the lifting that can realize heating plate, the bottoming hole of one or more interspersed crystal bar is had in the middle of heating plate, grate has the blessing parts accommodating crystal bar, accommodate parts to arrange on the above and below grate of bottoming hole, it is characterized in that: described heating plate, lifting device is multiple, described guide rod is the group number corresponding with heating plate, each heating plate interts respectively in one group of guide rod, each heating plate connects a lifting device, described heating plate is arranged from left to right or planar array in the middle of grate.
Say further, connect coolship, have lagging material between heating plate and coolship below described heating plate, there is the circulation tube of cooling fluid described coolship inside, and the circulation tube of cooling fluid connects the e Foerderanlage of cooling fluid.
Say further, described heating plate, rise valency device, the e Foerderanlage connection control device respectively of cooling fluid.
Say further, described control device have each heating plate, rise valency device, the switching unit of the e Foerderanlage of cooling fluid.
Say further, each heating plate, rise valency device, the switching unit of e Foerderanlage of cooling fluid also has setup unit.
Say further, the grate around described heating plate is also provided with baffle plate.
The beneficial effects of the utility model are:
1, such crystal pulling furnace has the advantage that output is high, can produce many group specification crystal bars;
2, coolship is connected below described heating plate, lagging material is had between heating plate and coolship, there is the circulation tube of cooling fluid described coolship inside, and the circulation tube of cooling fluid connects the e Foerderanlage of cooling fluid, can cool in time, the advantage of crystal pulling better effects if after having crystal pulling;
3, described heating plate, rise valency device, the e Foerderanlage connection control device respectively of cooling fluid, has and can realize central controlled advantage;
4, described control device has each heating plate, rises valency device, the switching unit of the e Foerderanlage of cooling fluid, has and can realize controlling separately Heating temperature, rising or falling speed, the advantage of cooling temperature etc., can produce the crystal bar of different model.
5, the grate around described heating plate is also provided with baffle plate, also there is the advantage of better heat preservation.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the structural representation in A----A direction of Fig. 1.
Wherein: 1, grate 2, guide rod 3, heating plate 4, lifting device 5, heating tube 6, bottoming hole 7, crystal bar 8, blessing parts 9, coolship 10, lagging material 11, the circulation tube 12 of cooling fluid, control device 13, baffle plate.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in further detail.
As Fig. 1, shown in 2, a kind of crystal pulling furnace, comprise grate 1, grate has guide rod 2 setting up and down, heating plate 3 is also had to intert on guide rod, heating plate is connected to lifting device 4, heating tube 5 is had inside described heating plate, lifting device runs the lifting that can realize heating plate 3, the bottoming hole 6 of one or more interspersed crystal bar is had in the middle of heating plate, grate has the blessing parts 8 accommodating crystal bar 7, accommodate parts to arrange on the above and below grate of bottoming hole, it is characterized in that: described heating plate, lifting device is multiple, described guide rod is the group number corresponding with heating plate, each heating plate interts respectively in one group of guide rod, each heating plate connects a lifting device, described heating plate is arranged from left to right or planar array in the middle of grate, Fig. 2 shows the structural representation of planar array 4 heating plates.
Like this, once just can heat crystal bar with multiple heating plate, there is the advantage that output is high.
Say further, coolship 9 is connected below described heating plate, lagging material 10 is had between heating plate and coolship, there is the circulation tube 11 of cooling fluid described coolship inside, the circulation tube of cooling fluid connects the e Foerderanlage of cooling fluid, can chilling be realized so after the heating, be applicable to the requirement that some are produced.
Say further, described heating plate, rise valency device, the e Foerderanlage connection control device 12 respectively of cooling fluid, can control the temperature heated, the speed of lifting, the temperature etc. of cooling so respectively.
Say further, described control device have each heating plate, rise valency device, the switching unit of the e Foerderanlage of cooling fluid, can control separately each heating plate like this, produce the crystal bar of different model.
Say further, each heating plate, rise valency device, the switching unit of e Foerderanlage of cooling fluid also has setup unit, can set separately as required like this.
Say further, the grate around described heating plate is also provided with baffle plate 13, and have the advantage of high insulating effect like this, baffle plate is glass preferably.
The foregoing is only specific embodiment of the utility model, but constitutional features of the present utility model is not limited to this, any those skilled in the art is in field of the present utility model, and the change done or modification are all encompassed in the scope of the claims of the present utility model.
Claims (6)
1. a crystal pulling furnace, comprise grate, grate has guide rod setting up and down, heating plate is also had to intert on guide rod, heating plate is connected to lifting device, heating tube is had inside described heating plate, lifting device runs the lifting that can realize heating plate, the bottoming hole of one or more interspersed crystal bar is had in the middle of heating plate, grate has the blessing parts accommodating crystal bar, accommodate parts to arrange on the above and below grate of bottoming hole, it is characterized in that: described heating plate, lifting device is multiple, described guide rod is the group number corresponding with heating plate, each heating plate interts respectively in one group of guide rod, each heating plate connects a lifting device, described heating plate is arranged from left to right or planar array in the middle of grate.
2. crystal pulling furnace according to claim 1, it is characterized in that: below described heating plate, connect coolship, have lagging material between heating plate and coolship, there is the circulation tube of cooling fluid described coolship inside, and the circulation tube of cooling fluid connects the e Foerderanlage of cooling fluid.
3. crystal pulling furnace according to claim 2, is characterized in that: described heating plate, rise valency device, the e Foerderanlage connection control device respectively of cooling fluid.
4. crystal pulling furnace according to claim 3, is characterized in that: described control device has each heating plate, rises valency device, the switching unit of the e Foerderanlage of cooling fluid.
5. crystal pulling furnace according to claim 4, is characterized in that: each heating plate, rise valency device, the switching unit of e Foerderanlage of cooling fluid also has setup unit.
6. the crystal pulling furnace according to claim 1,2,3,4 or 5, is characterized in that: the grate around described heating plate is also provided with baffle plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520679139.3U CN204959079U (en) | 2015-09-06 | 2015-09-06 | Pulling furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520679139.3U CN204959079U (en) | 2015-09-06 | 2015-09-06 | Pulling furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204959079U true CN204959079U (en) | 2016-01-13 |
Family
ID=55054156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520679139.3U Active CN204959079U (en) | 2015-09-06 | 2015-09-06 | Pulling furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204959079U (en) |
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2015
- 2015-09-06 CN CN201520679139.3U patent/CN204959079U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |