CN204912164U - 一种吸附器清洗装置 - Google Patents
一种吸附器清洗装置 Download PDFInfo
- Publication number
- CN204912164U CN204912164U CN201520627098.3U CN201520627098U CN204912164U CN 204912164 U CN204912164 U CN 204912164U CN 201520627098 U CN201520627098 U CN 201520627098U CN 204912164 U CN204912164 U CN 204912164U
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- CN
- China
- Prior art keywords
- absorber
- adsorber
- pipeline
- cleaning
- clean cycle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004140 cleaning Methods 0.000 title claims abstract description 49
- 239000007788 liquid Substances 0.000 claims abstract description 17
- 239000006096 absorbing agent Substances 0.000 claims description 50
- 239000003463 adsorbent Substances 0.000 claims description 19
- 238000005406 washing Methods 0.000 abstract 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 9
- 229920005591 polysilicon Polymers 0.000 description 9
- 238000000034 method Methods 0.000 description 6
- 239000000047 product Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000002250 absorbent Substances 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 239000000412 dendrimer Substances 0.000 description 1
- 229920000736 dendritic polymer Polymers 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 239000006193 liquid solution Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000010349 pulsation Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201520627098.3U CN204912164U (zh) | 2015-08-19 | 2015-08-19 | 一种吸附器清洗装置 |
Applications Claiming Priority (1)
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CN201520627098.3U CN204912164U (zh) | 2015-08-19 | 2015-08-19 | 一种吸附器清洗装置 |
Publications (1)
Publication Number | Publication Date |
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CN204912164U true CN204912164U (zh) | 2015-12-30 |
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Family Applications (1)
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CN201520627098.3U Active CN204912164U (zh) | 2015-08-19 | 2015-08-19 | 一种吸附器清洗装置 |
Country Status (1)
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CN (1) | CN204912164U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106512644A (zh) * | 2016-12-28 | 2017-03-22 | 江苏鑫华半导体材料科技有限公司 | 用于电子级多晶硅尾气纯化的多层吸附塔 |
-
2015
- 2015-08-19 CN CN201520627098.3U patent/CN204912164U/zh active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106512644A (zh) * | 2016-12-28 | 2017-03-22 | 江苏鑫华半导体材料科技有限公司 | 用于电子级多晶硅尾气纯化的多层吸附塔 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Adsorber belt cleaning device Effective date of registration: 20190523 Granted publication date: 20151230 Pledgee: Chang'an Bank Co.,Ltd. Xianyang People's East Road Branch Pledgor: SHAANXI ZHUANGCHEN ENVIRONMENTAL PROTECTION TECHNOLOGY Co.,Ltd. Registration number: 2019610000101 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20200611 Granted publication date: 20151230 Pledgee: Chang'an Bank Co.,Ltd. Xianyang People's East Road Branch Pledgor: SHAANXI ZHUANGCHEN ENVIRONMENTAL PROTECTION TECHNOLOGY Co.,Ltd. Registration number: 2019610000101 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Adsorber belt cleaning device Effective date of registration: 20200612 Granted publication date: 20151230 Pledgee: Chang'an Bank Co.,Ltd. Xianyang People's East Road Branch Pledgor: SHAANXI ZHUANGCHEN ENVIRONMENTAL PROTECTION TECHNOLOGY Co.,Ltd. Registration number: Y2020980003025 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20210615 Granted publication date: 20151230 Pledgee: Chang'an Bank Co.,Ltd. Xianyang People's East Road Branch Pledgor: SHAANXI ZHUANGCHEN ENVIRONMENTAL PROTECTION TECHNOLOGY Co.,Ltd. Registration number: Y2020980003025 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A cleaning device for adsorber Effective date of registration: 20210616 Granted publication date: 20151230 Pledgee: Chang'an Bank Co.,Ltd. Xianyang People's East Road Branch Pledgor: SHAANXI ZHUANGCHEN ENVIRONMENTAL PROTECTION TECHNOLOGY Co.,Ltd. Registration number: Y2021980004840 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20230517 Granted publication date: 20151230 Pledgee: Chang'an Bank Co.,Ltd. Xianyang People's East Road Branch Pledgor: SHAANXI ZHUANGCHEN ENVIRONMENTAL PROTECTION TECHNOLOGY Co.,Ltd. Registration number: Y2021980004840 |