CN204885111U - Even anchor clamps of gluing of nonstandard piece - Google Patents
Even anchor clamps of gluing of nonstandard piece Download PDFInfo
- Publication number
- CN204885111U CN204885111U CN201520606971.0U CN201520606971U CN204885111U CN 204885111 U CN204885111 U CN 204885111U CN 201520606971 U CN201520606971 U CN 201520606971U CN 204885111 U CN204885111 U CN 204885111U
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- slide glass
- gluing
- recess
- vacuum
- groove
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Abstract
The utility model discloses an even anchor clamps of gluing of nonstandard piece, including the even platform of gluing of a circular shape, even upper surface of gluing the platform is equipped with the slide glass recess, and the slide glass recess has the vacuum recess, and the vacuum recess is equipped with the vacuum hole. The degree of depth of slide glass recess is less than or equal to the thickness of wafer. One side of slide glass recess is equipped with gets the piece recess. Can fix nonstandard piece through anchor clamps on ordinary even gluey machine, avoid nonstandard piece because of hardly finding geometric centre, got rid of the condition about flying in high -speed rotation. Because of its better fixed action, can make the even speed of gluing faster to make the gluey coating of nonstandard piece more even.
Description
Technical field
The utility model relates to a kind of wafer chuck, particularly relates to the even plastic clip tool of a kind of non-tap.
Background technology
In wafer process technique, many places technique is had to need at wafer surface glue coating, as photoresist, protecting glue etc., in coating process, to need High Rotation Speed glue could be uniformly coated on wafer surface.Disk, because its geometric center is just in its center of circle, can, than being easier to get Shi Qi center on even plastic clip tool, be not easy to be got rid of to fly in rotary course.But not tap is difficult to find its geometric center, general even gluing method is easily got rid of by wafer and flies and make wafer breakage.
In prior art, the way such as usually use brush to smear, the glue uniformity of surface coating is poor, thus affects device performance and consistency.
Summary of the invention
The purpose of this utility model is to provide a kind of even plastic clip tool of non-tap that can be fixed non-tap on common sol evenning machine device by fixture.
The purpose of this utility model is achieved through the following technical solutions:
The even plastic clip tool of non-tap of the present utility model, comprise a circular even glue platform, the upper surface of described even glue platform is provided with slide glass groove, and described slide glass groove has vacuum groove, and described vacuum groove is provided with vacuum hole.
The technical scheme provided as can be seen from above-mentioned the utility model, the even plastic clip tool of the non-tap that the utility model embodiment provides, owing to comprising a circular even glue platform, the upper surface of even glue platform is provided with slide glass groove, slide glass groove has vacuum groove, and vacuum groove is provided with vacuum hole, can fix non-tap on common sol evenning machine device by fixture, avoiding non-tap because being difficult to find geometric center, in High Rotation Speed, being got rid of situation about flying.Because of its good fixation, even glue speed can be made faster, thus it is more even that the glue of non-tap is coated with.
Accompanying drawing explanation
The structural representation of the even plastic clip tool of non-tap that Fig. 1 provides for the utility model embodiment.
Embodiment
To be described in further detail the utility model embodiment below.
The even plastic clip tool of non-tap of the present utility model, its preferably embodiment be:
Comprise a circular even glue platform, the upper surface of described even glue platform is provided with slide glass groove, and described slide glass groove has vacuum groove, and described vacuum groove is provided with vacuum hole.
The degree of depth of described slide glass groove is less than or equal to the thickness of wafer.
The side of described slide glass groove is provided with gets sheet groove.
The even plastic clip tool of non-tap of the present utility model, makes non-tap can be stuck on fixture fixing, strengthens adsorbing of wafer, make it does not got rid of in even glue process and fly, can use on common sol evenning machine by vacuum.
Specific embodiment:
As shown in Figure 1,1 even glue platform is depicted as in figure; 2 is slide glass groove, for placing wafer; 3, for getting sheet groove, are convenient to the taking-up of wafer; 4 is fixture Connection Block, is positioned on sol evenning machine; 5 is vacuum hole, with sol evenning machine bonding in vacuum; 6 is vacuum groove, for adsorbing wafer.
Even glue platform 1 adopts the circle of degree of balance the best, and a slide glass groove 2 processed by even glue platform 1, and non-tap can put into slide glass groove, and the degree of depth of slide glass groove is less than the thickness of wafer, and throwing away the glue come like this can be directly handsome outside even glue platform.Slide glass groove 2 expands one and gets sheet groove 3, after object is even glue, wafer can be taken out smoothly.
Fixture is connected with sol evenning machine device by fixture Connection Block 4, and sol evenning machine device opens vacuum by vacuum hole 5 sorption wafer, and vacuum groove 6 can make wafer sorption more stable, fixes wafer by the edge of slide glass groove 2 simultaneously.When even plastic clip tool High Rotation Speed, non-tap is not got rid of not go out like this, by telling rotation, can be coated with gluing equably in non-tap.
Advantage of the present utility model is, can fix non-tap on common sol evenning machine device by fixture, avoiding non-tap because being difficult to find geometric center, in High Rotation Speed, being got rid of situation about flying.Because of its good fixation, even glue speed can be made faster, thus it is more even that the glue of non-tap is coated with.
The above; be only the utility model preferably embodiment; but protection range of the present utility model is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; the change that can expect easily or replacement, all should be encompassed within protection range of the present utility model.Therefore, protection range of the present utility model should be as the criterion with the protection range of claims.
Claims (3)
1. the even plastic clip tool of non-tap, is characterized in that, comprise a circular even glue platform, the upper surface of described even glue platform is provided with slide glass groove, and described slide glass groove has vacuum groove, and described vacuum groove is provided with vacuum hole.
2. the even plastic clip tool of non-tap according to claim 1, is characterized in that, the degree of depth of described slide glass groove is less than or equal to the thickness of wafer.
3. the even plastic clip tool of non-tap according to claim 1 and 2, is characterized in that, the side of described slide glass groove is provided with gets sheet groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520606971.0U CN204885111U (en) | 2015-08-12 | 2015-08-12 | Even anchor clamps of gluing of nonstandard piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520606971.0U CN204885111U (en) | 2015-08-12 | 2015-08-12 | Even anchor clamps of gluing of nonstandard piece |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204885111U true CN204885111U (en) | 2015-12-16 |
Family
ID=54829459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520606971.0U Active CN204885111U (en) | 2015-08-12 | 2015-08-12 | Even anchor clamps of gluing of nonstandard piece |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204885111U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105974747A (en) * | 2016-06-17 | 2016-09-28 | 中国电子科技集团公司第十研究所 | Gluing and developing synchronous clamp for thin film circuit ceramic sheet |
| CN112394202A (en) * | 2020-10-29 | 2021-02-23 | 西安微电子技术研究所 | Interconnection test fixture and interconnection test method for silicon adapter plate |
-
2015
- 2015-08-12 CN CN201520606971.0U patent/CN204885111U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105974747A (en) * | 2016-06-17 | 2016-09-28 | 中国电子科技集团公司第十研究所 | Gluing and developing synchronous clamp for thin film circuit ceramic sheet |
| CN105974747B (en) * | 2016-06-17 | 2019-01-22 | 中国电子科技集团公司第十研究所 | Thin film circuit tile puddle development synchronous fixture |
| CN112394202A (en) * | 2020-10-29 | 2021-02-23 | 西安微电子技术研究所 | Interconnection test fixture and interconnection test method for silicon adapter plate |
| CN112394202B (en) * | 2020-10-29 | 2023-06-27 | 珠海天成先进半导体科技有限公司 | Interconnection test fixture and interconnection test method for silicon adapter plate |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |