CN204874823U - Polycrystalline silicon ingot furnace - Google Patents
Polycrystalline silicon ingot furnace Download PDFInfo
- Publication number
- CN204874823U CN204874823U CN201520654372.6U CN201520654372U CN204874823U CN 204874823 U CN204874823 U CN 204874823U CN 201520654372 U CN201520654372 U CN 201520654372U CN 204874823 U CN204874823 U CN 204874823U
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- CN
- China
- Prior art keywords
- polycrystalline silicon
- silicon ingot
- crucible
- heater
- purifying furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a polycrystalline silicon ingot furnace, including furnace body, crucible, vacuum apparatus, heating device, heat preservation sleeve, elevating gear, in the furnace body elevating gear, elevating gear is last to be equipped with the heat insulating board, be equipped with on the heat insulating board the crucible, the crucible outer wall is heating device and heat preservation sleeve around in proper order from inside to outside, vacuum apparatus locates outside the furnace body, and with the furnace body passes through the vacuum line and connects. The utility model discloses well crucible outer wall from inside to outside in proper order around heating device and heat preservation sleeve make heating device be used for the crucible direct heating, the energy of having avoided heating by a large scale to lead to the fact is extravagant, the heat that the heat preservation sleeve is used for making heating device send only is used for the crucible heating to the homogeneity that adds heat availability and temperature field has been guaranteed.
Description
Technical field
The utility model relates to field of polysilicon production, particularly relates to a kind of polycrystalline silicon ingot or purifying furnace.
Background technology
The preparation process of polycrystalline silicon ingot casting comprises long crystalline substance, annealing and cooling three phases, at present, long crystalline substance and annealing stage need to heat whole body of heater, carry out long crystalline substance and annealing, but long crystalline substance and annealing process generally need very high temperature, and duration is about 29 ~ 30h, therefore need to consume energy very to whole body of heater heating.
Utility model content
In view of this, the utility model proposes a kind of polycrystalline silicon ingot or purifying furnace, this polycrystalline silicon ingot or purifying furnace solves the technical problem that in polycrystalline silicon ingot casting process of growth, energy consumption is high.
The technical solution of the utility model is achieved in that
A kind of polycrystalline silicon ingot or purifying furnace, comprises body of heater, crucible, vacuum unit, heating unit, insulation sleeve, lifting device;
Described lifting device in described body of heater, described lifting device is provided with described thermal baffle; Described thermal baffle is provided with described crucible;
Described crucible outer wall is from inside to outside successively around heating unit and insulation sleeve;
Described vacuum unit is located at outside described body of heater, and is connected by vacuum-lines with described body of heater.
Preferably, thermal insulation layer is provided with in described body of heater.
Preferably, described thermal insulation layer comprises the first thermal insulation layer and the second thermal insulation layer.
Preferably, described first thermal insulation layer is fire resistant heat preserving layer of fibers, and described second thermal insulation layer is graphite carbon brick layer.
Preferably, described insulation lower cartridge circumferentially goes up and equidistantly has side air vents.
Preferably, described insulation lower cartridge is evenly provided with 3 ~ 10 groups and circumferentially goes up equidistant side air vents.
Preferably, described body of heater is provided with top cover, described top cover is provided with the import of protection gas.
Preferably, also comprise refrigerating unit, described refrigerating unit is arranged in described body of heater.The beneficial effects of the utility model are:
In the utility model, crucible outer wall is from inside to outside successively around heating unit and insulation sleeve, make heating unit for crucible direct heating, avoid big area and heat the energy dissipation caused, the heat that the use being incubated sleeve makes heating unit send only for crucible heating, thus ensure that the homogeneity adding heat availability and temperature field.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only embodiments more of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of the utility model polycrystalline silicon ingot or purifying furnace.
In figure:
1, body of heater; 2, the first thermal insulation layer; 3, the second thermal insulation layer; 4, lifting device; 5, thermal baffle; 6, heating unit; 7, sleeve is incubated; 8, top cover; 801, inlet mouth; 9, vacuum unit; 901, vacuum-lines.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, be clearly and completely described the technical scheme in the utility model embodiment, obviously, described embodiment is only the utility model part embodiment, instead of whole embodiments.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the utility model protection.
As shown in Figure 1, the polycrystalline silicon ingot or purifying furnace that the utility model provides, comprises body of heater 1, crucible, heating unit 6, insulation sleeve 7, lifting device 4 and vacuum unit 9.
Described crucible is used for holding Pure Silicon Metal, and crucible outer wall is from inside to outside successively around heating unit 6 and insulation sleeve 7, and described heating unit 6, for crucible direct heating, avoids big area and heats the energy dissipation caused; Described insulation sleeve 7 is for reducing heat losses, thus the heat that guarantee heating unit 6 sends is only for crucible heating, also ensure that the homogeneity adding heat availability and temperature field simultaneously.During concrete enforcement, described insulation sleeve 7 bottom is circumferentially gone up and is equidistantly had side air vents, is convenient to entering of rare gas element, in addition, the setting of side air vents, can choose reasonable cooling point, have for control rate of temperature fall, the preferably side air vents of 3 ~ 10 groups; Specifically preparing in polycrystalline silicon ingot casting process, long brilliant and annealing stage, ensures that side air vents is all closed, reduces the loss of heat to greatest extent.
Described lifting device 4 is located in body of heater 1, and lifting device 4 is provided with thermal baffle 5, and thermal baffle 5 is provided with crucible; Described thermal baffle 5 is located at crucible lower surface, the thermosteresis caused for avoiding convection current; Described lifting device 4 is convenient to crucible and is risen, declines, and conveniently puts into or takes out crucible.
Described vacuum unit 9 is for ensureing the vacuum state of body of heater 1, and body of heater 1 side is located at by this vacuum unit 9, is connected with body of heater 1 by vacuum-lines 901.
During concrete enforcement, described thermal insulation layer is arranged in described body of heater 1, carries out heat exchange, be beneficial to the preparation of polycrystalline silicon ingot casting for the heat and the external world avoiding body of heater 1.During concrete enforcement, thermal insulation layer comprises the first thermal insulation layer 2 and the second thermal insulation layer 3, first thermal insulation layer 2 is fire resistant heat preserving layer of fibers, second thermal insulation layer 3 is graphite carbon brick layer, successively be incubated by adopting refractory masses and graphite carbon brick layer, its thermal conduction is reduced gradually, and then ensure that the heat-insulating property of polycrystalline silicon ingot or purifying furnace.
During concrete enforcement, described body of heater 1 top cover 8 is provided with protection gas import 801, is beneficial to entering of shielding gas; specifically preparing in polycrystalline silicon ingot casting process; long crystalline substance, annealing and cooling stages, ensure that protection gas import 801 is closed, reduce the loss protecting gas and heat to greatest extent.
During concrete enforcement, also comprise refrigerating unit, described refrigerating unit is arranged in described body of heater 1, cools polycrystalline silicon ingot casting for cooling stages.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all within spirit of the present utility model and principle, any amendment done, equivalent replacement, improvement etc., all should be included within protection domain of the present utility model.
Claims (8)
1. a polycrystalline silicon ingot or purifying furnace, is characterized in that: comprise body of heater, crucible, vacuum unit, heating unit, insulation sleeve, lifting device;
Be provided with described lifting device in described body of heater, described lifting device is provided with described thermal baffle; Described thermal baffle is provided with described crucible;
Described crucible outer wall is from inside to outside successively around heating unit and insulation sleeve;
Described vacuum unit is located at outside described body of heater, and is connected by vacuum-lines with described body of heater.
2. polycrystalline silicon ingot or purifying furnace as claimed in claim 1, is characterized in that: be provided with thermal insulation layer in described body of heater.
3. polycrystalline silicon ingot or purifying furnace as claimed in claim 2, is characterized in that: described thermal insulation layer comprises the first thermal insulation layer and the second thermal insulation layer.
4. polycrystalline silicon ingot or purifying furnace as claimed in claim 3, it is characterized in that: described first thermal insulation layer is fire resistant heat preserving layer of fibers, described second thermal insulation layer is graphite carbon brick layer.
5. polycrystalline silicon ingot or purifying furnace as claimed in claim 1, is characterized in that: described insulation lower cartridge circumferentially goes up and equidistantly has side air vents.
6. polycrystalline silicon ingot or purifying furnace as claimed in claim 5, is characterized in that: described ventage is 3 ~ 10 groups.
7. polycrystalline silicon ingot or purifying furnace as claimed in claim 1, is characterized in that: described body of heater is provided with top cover, described top cover is provided with the import of protection gas.
8. polycrystalline silicon ingot or purifying furnace as claimed in claim 1, it is characterized in that: also comprise refrigerating unit, described refrigerating unit is arranged in described body of heater.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520654372.6U CN204874823U (en) | 2015-08-27 | 2015-08-27 | Polycrystalline silicon ingot furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520654372.6U CN204874823U (en) | 2015-08-27 | 2015-08-27 | Polycrystalline silicon ingot furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204874823U true CN204874823U (en) | 2015-12-16 |
Family
ID=54819219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520654372.6U Expired - Fee Related CN204874823U (en) | 2015-08-27 | 2015-08-27 | Polycrystalline silicon ingot furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204874823U (en) |
-
2015
- 2015-08-27 CN CN201520654372.6U patent/CN204874823U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151216 Termination date: 20180827 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |