CN204859129U - Piezoelectric quartz wafer with single umbo constructs - Google Patents
Piezoelectric quartz wafer with single umbo constructs Download PDFInfo
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- CN204859129U CN204859129U CN201520534368.6U CN201520534368U CN204859129U CN 204859129 U CN204859129 U CN 204859129U CN 201520534368 U CN201520534368 U CN 201520534368U CN 204859129 U CN204859129 U CN 204859129U
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- bearer bar
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- central member
- connecting portion
- piezoelectric quartz
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Abstract
The utility model discloses a piezoelectric quartz wafer with single umbo constructs, it includes central component (1), bearer bar (2) and connecting portion (3), be provided with the die cavity in bearer bar (2), it sets up in the die cavity to be provided with central component (1) in the die cavity, the top surface of central authorities component (1) is provided with boss (4), be formed with between the two length of branch limits of bearer bar (2) and the two length of branch limits of central component (1) logical groove A (5), be formed with between two minor faces of bearer bar (2) and two minor faces of central component (1) logical groove B (6), lead to groove A (5) and lead to groove B (6) intercommunication, connecting portion (3) set up in arbitrary one logical groove B (6). The beneficial effects of the utility model are that: can be used to the type production in batches of miniaturized quartzy wafer, weaken the parasitic vibration that the edge produced to falling into effect, improvement machining precision, promoting the uniformity of product by a wide margin of quartzy wafer center can strengthen.
Description
Technical field
The utility model relates to the technical field, particularly a kind of piezoelectric quartz crystal plate with single male structure of piezoelectric quartz crystal plate structure.
Background technology
At present, quartz-crystal resonator is made up of piezoelectric quartz crystal plate and package casing usually, and wherein piezoelectric quartz crystal plate is rectangle or circle, and package casing material is pottery, glass etc.Piezoelectric quartz crystal plate upper and lower surface needs electrode evaporation, and electrode, by hermetically sealed lead-in wire, is connected with the pedestal pin in package casing.Alternating voltage is communicated with the upper/lower electrode of quartz wafer by pin, makes quartz wafer produce inverse piezoelectric effect, thus produces vibration.Quartz-crystal resonator is widely used in the electron trades such as mobile electronic device, mobile phone, mobile communications device because of the characteristic such as Stability and veracity of its frequency.
Along with developing rapidly of mobile communication electronics, device miniaturization demand is more and more higher, and the miniaturization of quartz-crystal resonator is also imperative.In the process of quartz-crystal resonator miniaturization, traditional design structure has been difficult to produce, and cost is higher.The technology modes such as traditional slitting, corrosion are difficult to processing microminiature quartz wafer, can not meet miniaturized requirement.
When the resonance frequency of quartz-crystal resonator is lower, can effect be fallen into improve, weakening quartz wafer edge effect, the profile of quartz wafer need be changed.Under normal circumstances, employing be barreling grinding method, change quartz wafer profile, i.e. biconvex curved-surface structure.But because of barreling technique poor stability, repeatability low, so cost remains high always, therefore, quartz wafer technology urgently promotes.
Utility model content
The purpose of this utility model is the shortcoming overcoming prior art, the parasitism vibration that a kind of cost is low, can be used for the production of miniaturized quartz wafer batch-type, weaken edge generation is provided, and the conforming piezoelectric quartz crystal plate with single male structure that can fall into effect, significantly improving product at quartz wafer center can be strengthened.
The purpose of this utility model is achieved through the following technical solutions: a kind of piezoelectric quartz crystal plate with single male structure, it comprises central member, bearer bar and connecting portion, the all rectangular shape of described central member and bearer bar, die cavity is provided with in bearer bar, being provided with central member in die cavity is arranged in die cavity, the top surface of central member is provided with the parasitism vibration that can weaken edge and produce, and the boss that can fall into effect at quartz wafer center can be strengthened, groove A is formed between two long limits of bearer bar and two long limits of central member, groove B is formed between two minor faces of bearer bar and two minor faces of central member, groove A is communicated with groove B, any one of described bearer bar is connected by connecting portion between minor face with central member, connecting portion is arranged in any one groove B.
Described boss is round boss, rectangular boss or trapezoid boss.
The shape of described connecting portion is rectangle or trapezoidal.
The length of described piezoelectric quartz crystal plate is 0.8 ~ 3.2mm.
The width of described piezoelectric quartz crystal plate is 0.6 ~ 2.5mm.
The material of described central member, bearer bar and connecting portion is quartz.
The utility model has the following advantages: the top surface of (1) central member of the present utility model is provided with boss, and boss can weaken the parasitism vibration that edge produces, and can strengthen quartz wafer center can fall into effect.(2) the utility model can be used for the manufacture efficiency that wafer and crystal were produced, significantly improved to miniaturized quartz wafer batch-type, and consistency also gets a promotion simultaneously.(3) when bearer bar is subject to the effect of external force, power can not be delivered in central member, thus protects central member well.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model embodiment one;
Fig. 2 is the vertical view of Fig. 1;
Fig. 3 is the A-A cutaway view of Fig. 2;
Fig. 4 is the upward view of Fig. 1;
Fig. 5 is that the utility model embodiment one is based on quartz base plate product vertical view after manufacturing process processing;
Fig. 6 is the upward view of Fig. 5;
Fig. 7 is the structural representation of the utility model embodiment two;
Fig. 8 is the vertical view of Fig. 7;
Fig. 9 is the upward view of Fig. 7;
Figure 10 is that the utility model embodiment two is based on quartz base plate product vertical view after manufacturing process processing;
Figure 11 is Figure 10 upward view;
In figure, 1-central member, 2-bearer bar, 3-connecting portion, 4-boss, 5-groove A, 6-groove B, 7-quartz base plate, 8-cuts location hole.
Embodiment
Be further described the utility model below in conjunction with accompanying drawing, protection range of the present utility model is not limited to the following stated:
embodiment one:
As shown in Fig. 1 ~ 4, a kind of piezoelectric quartz crystal plate with single male structure, this quartz wafer adopts AT cut type, this cut type is widely used in quartz-crystal resonator, and wherein the long limit of wafer is parallel to X-axis, and X-axis is the electric axis of quartz crystal, minor face is parallel to Z' axle, and thickness direction is parallel to Y' axle.Do not get rid of, the long limit of quartz wafer is parallel to Z' axle, and width parallel is in X-axis, and thickness direction is parallel to Y' axle.This piezoelectric quartz crystal plate comprises central member 1, bearer bar 2 and connecting portion 3, central member 1, the material of bearer bar 2 and connecting portion 3 is quartz, described central member 1 and all rectangular shape of bearer bar 2, described bearer bar 2 plays and supports and encapsulation connection function, die cavity is provided with in bearer bar 2, being provided with central member 1 in die cavity is arranged in die cavity, the top surface of central member 1 is provided with the parasitism vibration that can weaken edge and produce, and the boss 4 that can fall into effect at quartz wafer center can be strengthened, groove A5 is formed between two long limits of bearer bar 2 and two long limits of central member 1, groove B6 is formed between two minor faces of bearer bar 2 and two minor faces of central member 1, groove A5 is communicated with groove B6, groove A5 and groove B6 is formed by chemical corrosion or physical segmentation quartz crystal materials.As shown in Fig. 1 ~ 4, any minor face of described bearer bar 2 is connected by connecting portion 3 with between central member 1, and connecting portion 3 is arranged in any one groove B6.
Described boss 4 is round boss, rectangular boss or trapezoid boss, and the boss in the present embodiment is rectangular boss.The shape of described connecting portion 3 is rectangle or trapezoidal, and the connecting portion 3 in the present embodiment is rectangular-shaped.
The length of described piezoelectric quartz crystal plate is 0.8 ~ 3.2mm, and the length in the present embodiment is 1.6mm, and the width of piezoelectric quartz crystal plate is 0.6 ~ 2.5mm, width in this example is 1.2mm, the resonance frequency of this quartz wafer is the thickness that t=1664/F, t represent quartz wafer, and unit is μm; F represents resonance frequency, and unit is MHz, and the resonance frequency of the quartz wafer in this example is between 8MHz ~ 70MHz.
As shown in Figure 5 and Figure 6, a kind of piezoelectric quartz crystal plate with single male structure, its procedure of processing is as follows:
S1, take out the quartz base plate 7 of certain specification, and the upper and lower surface of quartz base plate 7 is ground, polishing;
S2, form the uniform photoetching of thickness anti-etching protective layer ER by spin coating or spray mode on quartz base plate 7 surface, then use photolithographic exposure on the anti-etching protective layer ER of photoetching, form figure to be etched on surface;
S3, by wet etching or dry etching mode in quartz base plate 7 upper surface etching, thus form boss 4 on quartz base plate 7 surface, the etching depth of boss 4 is by controlling wet etching or the dry etching reaction time determines;
Photoetching in S4, removal step S3 anti-etching protective layer ER by clean for quartz base plate 7 surface clean;
After S5, cleaning terminate, first form the anti-etching protective layer ER of the uniform photoetching of thickness by spin coating or spray mode on quartz base plate 7 surface, re-use photolithographic exposure and form figure to be etched at photoetching anti-etching protective layer ER upper surface;
S6, by the modes such as wet etching, dry etching, laser ablation, physics sandblasting quartz base plate 7 upper surface etching, thus formed groove A5 and groove B6;
S7, the removal anti-etching protective layer ER of photoetching are also clean by quartz base plate 7 surface clean, thus the obtained piezoelectric quartz crystal plate with single male structure.
S8, process on quartz base plate 7 cutting location hole 8;
S9, use laser cutting or blade cuts carry out cutting and separating along cutting location hole 8 pairs of quartz base plates 7, thus achieve the processing of quartz wafer.
embodiment two:
As shown in Fig. 7 ~ 9, the difference of this enforcement two and embodiment one is: be connected with two connecting portions, 3, two connecting portions 3 between any minor face of described bearer bar 2 and central member 1 and add central member 1 and and the mechanical strength of protecting between frame 2.
The above is only preferred implementation of the present utility model, be to be understood that the utility model is not limited to the form disclosed by this paper, should not regard the eliminating to other embodiments as, and can be used for other combinations various, amendment and environment, and can in contemplated scope described herein, changed by the technology of above-mentioned instruction or association area or knowledge.And the change that those skilled in the art carry out and change do not depart from spirit and scope of the present utility model, then all should in the protection range of the utility model claims.
Claims (6)
1. one kind has the piezoelectric quartz crystal plate of single male structure, it is characterized in that: it comprises central member (1), bearer bar (2) and connecting portion (3), described central member (1) and all rectangular shape of bearer bar (2), bearer bar is provided with die cavity in (2), being provided with central member (1) in die cavity is arranged in die cavity, the top surface of central member (1) is provided with the parasitism vibration that can weaken edge and produce, and the boss (4) that can fall into effect at quartz wafer center can be strengthened, groove A(5 is formed with) between two long limits of bearer bar (2) and two long limits of central member (1), groove B(6 is formed with) between two minor faces of bearer bar (2) and two minor faces of central member (1), groove A(5) with groove B(6) be communicated with, any minor face of described bearer bar (2) is connected by connecting portion (3) with between central member (1), connecting portion (3) is arranged on any one groove B(6) in.
2. a kind of piezoelectric quartz crystal plate with single male structure according to claim 1, is characterized in that: described boss (4) is round boss, rectangular boss or trapezoid boss.
3. a kind of piezoelectric quartz crystal plate with single male structure according to claim 1, is characterized in that: the shape of described connecting portion (3) is rectangle or trapezoidal.
4. a kind of piezoelectric quartz crystal plate with single male structure according to claim 1, is characterized in that: the length of described piezoelectric quartz crystal plate is 0.8 ~ 3.2mm.
5. a kind of piezoelectric quartz crystal plate with single male structure according to claim 1 or 4, is characterized in that: the width of described piezoelectric quartz crystal plate is 0.6 ~ 2.5mm.
6. a kind of piezoelectric quartz crystal plate with single male structure according to claim 1, is characterized in that: the material of described central member (1), bearer bar (2) and connecting portion (3) is quartz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520534368.6U CN204859129U (en) | 2015-07-22 | 2015-07-22 | Piezoelectric quartz wafer with single umbo constructs |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520534368.6U CN204859129U (en) | 2015-07-22 | 2015-07-22 | Piezoelectric quartz wafer with single umbo constructs |
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| CN204859129U true CN204859129U (en) | 2015-12-09 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105007056A (en) * | 2015-07-22 | 2015-10-28 | 成都泰美克晶体技术有限公司 | Piezoelectric quartz crystal wafer with single convex structure |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105007056A (en) * | 2015-07-22 | 2015-10-28 | 成都泰美克晶体技术有限公司 | Piezoelectric quartz crystal wafer with single convex structure |
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Address after: No. 136, Tianying Road, high tech Zone, Chengdu, Sichuan 610000 Patentee after: CHENGDU TIMEMAKER CRYSTAL TECHNOLOGY Co.,Ltd. Address before: 610017 No. 103 Tianying Road, West Park of Chengdu High-tech Zone, Sichuan Province Patentee before: CHENGDU TIMEMAKER CRYSTAL TECHNOLOGY Co.,Ltd. |