CN204849125U - Improve furnace crown of heat preservation effect - Google Patents
Improve furnace crown of heat preservation effect Download PDFInfo
- Publication number
- CN204849125U CN204849125U CN201520617356.XU CN201520617356U CN204849125U CN 204849125 U CN204849125 U CN 204849125U CN 201520617356 U CN201520617356 U CN 201520617356U CN 204849125 U CN204849125 U CN 204849125U
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- heat preservation
- wall
- silica wool
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Abstract
The utility model discloses an improve furnace crown of heat preservation effect, including exhaust emissions passageway (1), heat preservation silica wool (4), the cotton exhaust hole (3) of heat preservation and quartzy wall (5), heat preservation silica wool (4) are located quartzy wall (5), are equipped with the cotton exhaust hole (3) that keeps warm on quartzy wall (5), and heat preservation silica wool (4) and quartzy wall (5) are run through in exhaust emissions passageway (1), quartzy wall (5) outside still be equipped with can with the draw -in groove of boiler tube wall (7) block. The utility model discloses the use possesses the silica wool of heat preservation effect to be loaded, can effectively stop the interior heat of boiler tube to scatter and disappear, reduces the current output in the outer district of furnace body, the reduction compensation temperature to reduce power consumption consumption, play energy saving and consumption reduction's purpose. Set up the dedicated passageway of ventilating, can smoothly discharge at the heat retaining simultaneous reaction tail gas of realization, avoid the backward flow, keep the cleanliness factor in boiler tube chamber.
Description
Technical field
The utility model relates to a kind of furnace crown improving heat insulation effect.
Background technology
Diffusion furnace is for spreading silicon chip, being oxidized and the hot oil (gas) filling device of one of the technique such as sintering in fabrication of semiconductor device.Principal reaction device is generally spiral type heated silk and adds 3 compensation temperature controls, semiconductor material carries out pyroreaction in the reaction chamber of high-purity, this process generally needs the furnace temperature of each position in stove must be consistent, and within the specific limits, and fluctuation can not be very large for homo(io)thermism.Current most diffusion facilities is because of outskirt rapid heat dissipation, the electric current that Control for Kiln Temperature way for body of heater outskirt mostly is increases body of heater outskirt exports, improve outskirt equalising temp, furnace temperature is compensated by high power consumption, this kind of method adds electric cost undoubtedly, and it is obvious not to improve effect for 4 cun of diffusion furnaces that bore is large.
Utility model content
Bad for solving semi-conductor silicon chip furnace temperature outskirt heat insulation effect in diffusion process, the problem that current consumption is bigger than normal, the utility model provides a kind of furnace crown improving heat insulation effect, by the furnace crown of outskirt fire door position tool for mounting for heat insulation effect, the thermal energy reducing body of heater outskirt scatters and disappears, thus reducing the temperature compensation of outskirt, reduction electric consumption, plays energy-saving and cost-reducing object.
To achieve these goals, the utility model adopts following technical scheme.
Improve a furnace crown for heat insulation effect, comprise exhaust emissions passage, insulation silica wool, insulating cotton venting hole and quartz wall; Described insulation silica wool is positioned at quartz wall, and quartz wall is provided with insulating cotton venting hole, and exhaust emissions passage runs through insulation silica wool and quartz wall, is also provided with the draw-in groove that can engage with furnace wall outside described quartz wall.The outside of quartz wall installs 2 insulating cotton venting holes additional, prevents the silica wool storehouse in quartz wall from breaking because of hypertonia.
As further improvement of the utility model, outside described quartz wall, be also provided with operating handle, be convenient to operator and pick and place furnace crown.
The beneficial effects of the utility model are, use the silica wool possessing heat insulation effect to load, can effectively stop heat loss in boiler tube, the electric current reducing body of heater outskirt exports, and reduces equalising temp, thus minimizing electric consumption, play energy-saving and cost-reducing object.Special venting channels is set, can smooth and easyly discharges at the simultaneous reactions tail gas realizing insulation, avoid backflow, keep the cleanliness factor in boiler tube chamber.
Certainly, implement arbitrary product of the present utility model might not need to reach above-described all advantages simultaneously.
Accompanying drawing explanation
Fig. 1 is the utility model structural representation.
Fig. 2 is the right view of Fig. 1.
Fig. 3 is the utility model structural representation after boiler tube assembling.
Wherein, 1, exhaust emissions passage; 2, operating handle; 3, insulating cotton venting hole; 4, silica wool is incubated; 5, quartz wall; 6, wait to spread wafer; 7, furnace wall.
Embodiment
Be clearly and completely described the technical solution of the utility model below in conjunction with accompanying drawing, obviously, described embodiment is the utility model part embodiment, instead of whole embodiments.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the utility model protection.
In description of the present utility model, it should be noted that, orientation or the position relationship of the instruction such as term " " center ", " on ", D score, "left", "right", " vertically ", " level ", " interior ", " outward " they be based on orientation shown in the drawings or position relationship; be only the utility model and simplified characterization for convenience of description; instead of instruction or imply the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as restriction of the present utility model.In addition, term " first ", " second ", " the 3rd " only for describing object, and can not be interpreted as instruction or hint relative importance.
In description of the present utility model, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or connect integratedly; Can be mechanical connection, also can be electrical connection; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, particular case the concrete meaning of above-mentioned term in the utility model can be understood.
As shown in Figure 1-Figure 3, a kind of furnace crown improving heat insulation effect, comprises exhaust emissions passage 1, insulation silica wool 4, insulating cotton venting hole 3 and quartz wall 5; Described insulation silica wool 4 is positioned at quartz wall 5, quartz wall 5 is provided with insulating cotton venting hole 3, exhaust emissions passage 1 runs through insulation silica wool 4 and quartz wall 5, the draw-in groove that can engage with furnace wall 7 is also provided with outside described quartz wall 5, also be provided with operating handle 2 outside described quartz wall 5, be convenient to operator and pick and place furnace crown.
The implementation method of the present embodiment is: push after in boiler tube until diffusion wafer 6, holding furnace cap sleeve is entered in furnace tube port, furnace wall 7 is coincide with furnace crown quartz wall 5, in insulating process, the furnace crown part of insulation silica wool 4 is housed by shield heat away, avoid heat loss to the outside of boiler tube, the tail gas produced in diffusion process then discharges boiler tube chamber by exhaust emissions passage 1, guarantees the cleanliness factor in boiler tube chamber.
By reference to the accompanying drawings embodiment of the present utility model is described although above-mentioned; but the restriction not to the utility model protection domain; one of ordinary skill in the art should be understood that; on the basis of the technical solution of the utility model, those skilled in the art do not need to pay various amendment or distortion that creative work can make still within protection domain of the present utility model.
Claims (2)
1. improve a furnace crown for heat insulation effect, it is characterized in that, comprise exhaust emissions passage (1), insulation silica wool (4), insulating cotton venting hole (3) and quartz wall (5); Described insulation silica wool (4) is positioned at quartz wall (5), quartz wall (5) is provided with insulating cotton venting hole (3), exhaust emissions passage (1) runs through insulation silica wool (4) and quartz wall (5), and described quartz wall (5) outside is also provided with the draw-in groove that can engage with furnace wall (7).
2. the furnace crown improving heat insulation effect as claimed in claim 1, is characterized in that, described quartz wall (5) outside is also provided with operating handle (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520617356.XU CN204849125U (en) | 2015-08-17 | 2015-08-17 | Improve furnace crown of heat preservation effect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520617356.XU CN204849125U (en) | 2015-08-17 | 2015-08-17 | Improve furnace crown of heat preservation effect |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204849125U true CN204849125U (en) | 2015-12-09 |
Family
ID=54739693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520617356.XU Expired - Fee Related CN204849125U (en) | 2015-08-17 | 2015-08-17 | Improve furnace crown of heat preservation effect |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204849125U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105570978A (en) * | 2016-01-07 | 2016-05-11 | 湖州奥博石英科技有限公司 | Furnace crown used for quartz furnace tube |
| CN112492853A (en) * | 2020-12-03 | 2021-03-12 | 西安交通大学 | Liquid cavity heat dissipation device based on pool boiling heat dissipation |
-
2015
- 2015-08-17 CN CN201520617356.XU patent/CN204849125U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105570978A (en) * | 2016-01-07 | 2016-05-11 | 湖州奥博石英科技有限公司 | Furnace crown used for quartz furnace tube |
| CN112492853A (en) * | 2020-12-03 | 2021-03-12 | 西安交通大学 | Liquid cavity heat dissipation device based on pool boiling heat dissipation |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Improve furnace crown of heat preservation effect Effective date of registration: 20180702 Granted publication date: 20151209 Pledgee: Qilu bank Limited by Share Ltd Ji'nan Zhangqiu branch Pledgor: SHANDONG KEXIN ELECTRONICS CO., LTD. Registration number: 2018370000121 |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151209 Termination date: 20180817 |